{"id":64709,"date":"2025-01-14T10:04:17","date_gmt":"2025-01-14T10:09:45","guid":{"rendered":"https:\/\/www.ab-sm.com\/?p=64709"},"modified":"2025-01-14T18:12:48","modified_gmt":"2025-01-14T10:12:48","slug":"2bdc99ca31","status":"publish","type":"post","link":"https:\/\/www.ab-sm.com\/a\/64709","title":{"rendered":"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5"},"content":{"rendered":"
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\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/a><\/span><\/p>\n<\/div>\n

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\u6458\u8981<\/strong><\/p>\n

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\u4f8b\u5982\uff0c\u73bb\u7483\u4e2d\u95f4\u5c42\u7684CTE\u53ef\u4ee5\u4e0e\u7845\uff08Si\uff09\u7684CTE\u76f8\u5339\u914d\uff083 ppm\/\u00b0C\uff09\uff0c\u6216\u8005\u4ecb\u4e8e\u7845\u548c\u5c42\u538b\u57fa\u677f\uff08\u5982FR-4\uff09\u4e4b\u95f4\uff0813 ppm\/\u00b0C\uff09\u3002\u9664\u4e86\u73bb\u7483\u6750\u6599\u672c\u8eab\u7684\u6280\u672f\u4f18\u52bf\u5916\uff0c\u901a\u8fc7\u91c7\u7528\u9ad8\u8d28\u91cf\u7684\u73bb\u7483\u6210\u578b\u6280\u672f\u5b9e\u73b0\u89c4\u6a21\u7ecf\u6d4e\uff08\u5982\u9762\u677f\u6210\u578b\uff09\u4ee5\u53ca\u751f\u4ea7\u539a\u5ea6\u4f4e\u81f3100\u5fae\u7c73\u7684\u73bb\u7483\uff0c\u4ece\u800c\u51cf\u5c11\u6216\u6d88\u9664\u52a0\u5de5\u6210\u672c\uff0c\u4e5f\u4e3a\u5236\u9020\u73bb\u7483\u4e2d\u95f4\u4f53\u7684\u6210\u672c\u6548\u76ca\u63d0\u4f9b\u4e86\u91cd\u8981\u673a\u4f1a\u3002\u8fd9\u4e00\u70b9\uff0c\u4ee5\u53ca\u8fc7\u53bb\u51e0\u5e74\u5728\u73bb\u7483\u76f2\u5b54\u548c\u901a\u5b54\u5236\u9020\u65b9\u9762\u53d6\u5f97\u7684\u663e\u8457\u8fdb\u5c55\uff0c\u5df2\u7ecf\u88ab\u76f8\u5173\u6587\u732e\u6240\u62a5\u9053\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

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\u8c03\u6574\u73bb\u7483\u57fa\u677f\u7684CTE\u662f\u901a\u8fc7\u6539\u53d8\u5176\u5316\u5b66\u6210\u5206\u6765\u5b9e\u73b0\u7684\uff0c\u56e0\u6b64\uff0c\u4e86\u89e3\u4e0d\u540c\u6761\u4ef6\u4e0b\u73bb\u7483\u6210\u5206\u5982\u4f55\u5f71\u54cd\u7535\u6c14\u548c\u53ef\u9760\u6027\u6027\u80fd\u662f\u975e\u5e38\u6709\u610f\u4e49\u7684\u3002\u4e00\u4e9b\u7814\u7a76\u56e2\u961f\u5df2\u7ecf\u62a5\u9053\u4e86\u94dc\u91cd\u5206\u5e03\u7ebf\uff08RDL\uff09\u5728\u4e0d\u540c\u7c7b\u578b\u73bb\u7483\u4e0a\u7684\u7535\u8fc1\u79fb\u73b0\u8c61\uff0c\u4ee5\u53ca\u4f7f\u7528\u963b\u6321\u5c42\u9632\u6b62\u79fb\u52a8\u6027\u78b1\u79bb\u5b50\u6269\u6563\u5230\u94a0\u9499\u73bb\u7483\u4e0a\u5236\u4f5c\u7684\u8584\u819c\u6676\u4f53\u7ba1\u4e2d\u3002Demir\u7b49\u4eba\u7814\u7a76\u4e86\u4e24\u79cdCTE\u5206\u522b\u4e3a3 ppm\/\u00b0C\u548c8 ppm\/\u00b0C\u7684\u805a\u5408\u7269\u5939\u5c42\u73bb\u7483\u4e2d\u672a\u586b\u5145\u94dc\u901a\u8fc7\u73bb\u7483\u5b54\uff08TGV\uff09\u7684\u70ed\u5faa\u73af\u53ef\u9760\u6027\uff0c\u4ee5\u53ca\u5728\u4f4eCTE\u73bb\u7483\u4e2d\u672a\u586b\u5145TGV\u7684\u504f\u7f6e\u9ad8\u52a0\u901f\u5e94\u529b\u6d4b\u8bd5\uff08HAST\uff09\u548c\u88f8\u73bb\u7483\u4e2dTGV\u7684\u70ed\u5faa\u73af\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

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\u5728\u672c\u7814\u7a76\u4e2d\uff0c\u6211\u4eec\u62a5\u544a\u4e86\u5de5\u7a0b\u73bb\u7483\u53ef\u9760\u6027\u7684\u4e24\u4e2a\u91cd\u8981\u65b9\u9762\uff0c\u4ee5\u53ca\u73bb\u7483\u6210\u5206\u53d8\u5316\u5982\u4f55\u5f71\u54cd\u73bb\u7483\u4e2d\u95f4\u7ed3\u6784\u7684\u53ef\u9760\u6027\u3002\u9996\u5148\uff0c\u6211\u4eec\u7814\u7a76\u4e86\u5728\u70ed\u5faa\u73af\u6d4b\u8bd5\u4e2d\uff0c\u94dc\u4e0e\u4e0d\u540c\u73bb\u7483\u886c\u5e95\u4e4b\u95f4CTE\u5931\u914d\u7684\u53d8\u5316\u5bf9\u5168\u586b\u5145\u94dcTGVs\u53ef\u9760\u6027\u7684\u5f71\u54cd\u3002\u6d4b\u8bd5\u7ed3\u6784\u57fa\u4e8e\u4e00\u4e2a\u8f7b\u8584\u7684\u88f8\u73bb\u7483\u4e2d\u95f4\u5c42\uff0c\u5177\u670935 \u03bcm x 120 \u03bcm\u7684\u5168\u94dc\u586b\u5145TGV\u3002\u5176\u6b21\uff0c\u6211\u4eec\u7814\u7a76\u4e86\u5728HAST\u6d4b\u8bd5\u4e2d\uff0c\u73bb\u7483\u4e0a\u7684\u7535\u538b\u504f\u7f6e\u5e94\u529b\u5bf9\u94dc\u7ebf\u7684\u53ef\u9760\u6027\u7684\u5f71\u54cd\uff0c\u8fd9\u6d89\u53ca\u5230\u73bb\u7483\u5316\u5b66\u6210\u5206\u7684\u6539\u6027\u53ca\u5176\u4e0e\u94dc\u91d1\u5c5e\u5316\u7684\u517c\u5bb9\u6027\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

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#1<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n
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\u70ed\u5faa\u73af\u6d4b\u8bd5<\/strong><\/p>\n<\/section>\n<\/section>\n
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Thermal Cycle Testing<\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n
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\u70ed\u5faa\u73af\u6d4b\u8bd5\u662f\u7528\u6765\u8bc4\u4f30\u901a\u8fc7\u73bb\u7483\u5b54\uff08TGV\uff09\u586b\u5145\u94dc\uff08Cu\uff09\u7684\u8584\u73bb\u7483\u4e2d\u95f4\u5c42\u7684\u957f\u671f\u53ef\u9760\u6027\u3002\u8fd9\u4e9b\u73bb\u7483\u4e2d\u95f4\u5c42\u7684\u5236\u9020\u91c7\u7528\u4e86\u6807\u51c6\u7684\u540e\u7aef\u7ebf\uff08BEOL\uff09\u5236\u9020\u5de5\u5177\uff0c\u4e14\u65e0\u9700\u5bf9\u8bbe\u5907\u6676\u5706\u5904\u7406\u8fdb\u884c\u91cd\u5927\u4fee\u6539\u4ee5\u9002\u5e94\u73bb\u7483\u6676\u5706\u3002\u4e3a\u4e86\u6d4b\u8bd5\u73bb\u7483\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\uff08CTE\uff09\u5bf9\u73bb\u7483\u4e2d\u95f4\u5c42\u957f\u671f\u53ef\u9760\u6027\u7684\u5f71\u54cd\uff0c\u6211\u4eec\u5728\u5236\u9020\u8fc7\u7a0b\u4e2d\u4f7f\u7528\u4e86\u4e24\u79cd\u4e0d\u540cCTE\uff083 ppm\/\u00b0C\u548c8 ppm\/\u00b0C\uff09\u7684150\u6beb\u7c73\u73bb\u7483\u6676\u5706\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

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\n
\n
\u5236\u4f5c\u5b8c\u6210\u540e\uff0c\u6211\u4eec\u5bf9\u6bcf\u79cd\u73bb\u7483\u7c7b\u578b\u7684\u6676\u5706\u8fdb\u884c\u4e86\u7535\u6c14\u6d4b\u8bd5\uff0c\u4ee5\u786e\u5b9a\u83ca\u82b1\u94fe\u6d4b\u8bd5\u7ed3\u6784\u7684\u8fde\u7eed\u6027\u3002\u5728\u56db\u4e2a\u6676\u5706\u76f4\u5f84\u4e0a\u968f\u673a\u9009\u62e9\u4e86\u516b\u4e2a\u6d4b\u8bd5\u9635\u5217\u8fdb\u884c\u7535\u6c14\u8fde\u7eed\u6027\u6d4b\u8bd5\u3002\u6bcf\u4e2a\u6d4b\u8bd5\u9635\u5217\u753120 x 20\u4e2a\u3001\u95f4\u8ddd\u4e3a100\u5fae\u7c73\u7684TGV\u7ec4\u6210\uff0c\u6bcf\u4e2aTGV\u4e32\u8054\u8fde\u63a5\u3002TGV\u6d4b\u8bd5\u94fe\u9635\u5217\u5982\u56fe1\u6240\u793a\uff0c\u5728\u6bcf\u4e2aTGV\u7684\u524d\u540e\u90fd\u6709\u6d4b\u8bd5\u70b9\uff0c\u56e0\u6b64\u4efb\u4f55\u7535\u6c14\u4e0d\u8fde\u7eed\u6027\u90fd\u53ef\u4ee5\u8ffd\u6eaf\u5230\u5355\u4e2aTGV\u7684\u91d1\u5c5e\u94fe\u8def\u3002\u7b2c\u4e00\u8f6e\u7535\u6c14\u8fde\u7eed\u6027\u6d4b\u8bd5\u7684\u7ed3\u679c\u5982\u88681\u6240\u793a\u3002\u5bf9\u4e8e\u4e24\u79cd\u7c7b\u578b\u7684\u73bb\u7483\uff0cTGVs\u548c\u8def\u7531\u91d1\u5c5e\u94fe\u63a5\u7684\u603b\u826f\u7387\u5747\u8d85\u8fc7\u4e8699.85%\u3002<\/span><\/section>\n<\/section>\n<\/section>\n
\n
\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n<\/section>\n
\n
\n

\u56fe1 \u753120\u00d720\u4e2aTGV\u7ec4\u6210\u7684\u9635\u5217\uff0c\u8fd9\u4e9bTGV\u4ee5100\u5fae\u7c73\u7684\u95f4\u8ddd\u6392\u5217\uff0c\u5f62\u6210\u4e86TGV\u83ca\u82b1\u94fe\u6d4b\u8bd5\u7ed3\u6784\u7684\u5149\u5b66\u663e\u5fae\u955c\u56fe\u50cf<\/span><\/p>\n

\u56fe\u50cf\u4e2d\u7684\u4e0a\u5c42\u91d1\u5c5e\u73af\u5448\u73b0\u94dc\u8272\uff0c\u800c\u80cc\u9762\u7684\u73af\u5219\u5448\u73b0\u767d\u8272<\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\n

\u88681 \u5728100\u5fae\u7c73\u95f4\u8ddd\u4e0a\uff0c20\u00d720\u4e2aTGV\u9635\u5217\u7684\u4e24\u7ebf\u7535\u8fde\u7eed\u6027\u6d4b\u8bd5\u7ed3\u679c<\/span><\/p>\n<\/section>\n<\/section>\n

\n
\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n<\/section>\n
\n
\n

\u5728\u521d\u59cb\u6d4b\u8bd5\u5b8c\u6210\u540e\uff0c\u4ece\u6bcf\u79cd\u73bb\u7483\u57fa\u677f\u4e2d\u9009\u53d6\u4e868\u4e2a\u989d\u5916\u7684\u6d4b\u8bd5\u9635\u5217\uff0c\u8fd9\u4e9b\u9635\u5217\u7684\u521d\u59cbTGV\u9635\u5217\u6536\u7387\u4e3a100%\u3002\u968f\u540e\uff0c\u8fd9\u4e9b\u9635\u5217\u7ecf\u5386\u4e86\u70ed\u5faa\u73af\u6d4b\u8bd5\uff0c\u6d4b\u8bd5\u5305\u62ec\u4ece-40\u00b0C\u81f3125\u00b0C\u76841000\u4e2a\u5faa\u73af\uff0c\u9075\u5faaJEDEC JESD22-A104\u6807\u51c6\u4e2d\u7684\u6761\u4ef6G\uff0c\u6bcf\u4e2a\u6781\u7aef\u6e29\u5ea6\u7684\u5faa\u73af\u65f6\u95f4\u4e3a1\u5c0f\u65f6\uff0c\u7a33\u5b9a\u65f6\u95f4\u4e3a15\u5206\u949f\u3002\u5728500\u4e2a\u5faa\u73af\u548c1000\u4e2a\u5faa\u73af\u7684\u4e2d\u95f4\u6d4b\u8bd5\u70b9\u4e5f\u8fdb\u884c\u4e86\u7535\u6c14\u6d4b\u8bd5\u3002<\/span>\u57280\u6b21\u3001500\u6b21\u548c1000\u6b21\u5faa\u73af\u540e\u7684\u7535\u6c14\u6d4b\u8bd5\u7ed3\u679c\u8bb0\u5f55\u5728\u88682\u4e2d\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\n

\u88682 \u5728100\u5fae\u7c73\u95f4\u8ddd\u4e0a\uff0c8\u4e2a\u5df2\u77e5\u826f\u597d\u768420\u00d720\u4e2aTGV\u9635\u5217\u5728\u70ed\u5faa\u73af\u6d4b\u8bd5\u524d\u540e\u7684\u4e24\u7ebf\u7535\u8fde\u7eed\u6027\u6d4b\u8bd5\u7ed3\u679c<\/span><\/p>\n<\/section>\n<\/section>\n

\n
\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n<\/section>\n

 <\/p>\n

\n
\n
\u70ed\u5faa\u73af\u6d4b\u8bd5\u540e\uff0c\u4e2d\u4f4d\u6570\u94fe\u8def\u7684\u7535\u963b\u6709\u6240\u589e\u52a0\uff0c\u8fd9\u53ef\u80fd\u662f\u7531\u4e8e\u672a\u7ecf\u949d\u5316\u7684\u94dc\u5728\u70ed\u5faa\u73af\u5ba4\u7684\u73af\u5883\u7a7a\u6c14\u4e2d\u6c27\u5316\u6240\u81f4\u3002\u8bd5\u9a8c\u94fe\u9635\u5217\u7684\u8ba1\u7b97\u7535\u963b\u503c\u4e3a6.3\u6b27\u59c6\uff0c\u6bcf\u4e2aTGV\u8d21\u732e\u4e864.5\u6beb\u6b27\u59c6\u7684\u7535\u963b\u3002\u5728SGW3\u548cSGW8\u57fa\u677f\u4e0a\u5236\u5907\u7684TGV\u6d4b\u8bd5\u94fe\uff0c\u5728\u7ecf\u8fc71000\u6b21\u70ed\u5faa\u73af\u540e\uff0c\u5236\u5907\u4e86\u622a\u9762\u6837\u54c1\u3002\u8fd9\u4e9b\u6837\u54c1\u7684\u56fe\u50cf\u5982\u56fe2\u3001\u56fe3\u548c\u56fe4\u6240\u793a\u3002\u5148\u524d\u901a\u8fc7X\u5c04\u7ebf\u6210\u50cf\u786e\u8ba4\u4e86TGV\u4e2d\u94dc\u586b\u5145\u7269\u7684\u65e0\u7a7a\u6d1e\u6027\uff0c\u5728\u5b8c\u6210\u70ed\u5faa\u73af\u53ef\u9760\u6027\u6d4b\u8bd5\u540e\uff0c\u5728SGW3\u548cSGW8\u6837\u54c1\u4e2d\u5747\u672a\u53d1\u73b0TGV\u4e2d\u6709\u7a7a\u9699\u6216TGV\u5468\u56f4\u73bb\u7483\u6709\u88c2\u7eb9\u3002TGV\u7684\u9876\u90e8\u548c\u5e95\u90e8\u4f3c\u4e4e\u4e0e\u94dc\u91d1\u5c5e\u4fdd\u6301\u4e86\u7a33\u5b9a\u7684\u63a5\u89e6\uff0c\u5c3d\u7ba1\u5728\u4efb\u4f55\u8868\u9762\u90fd\u7f3a\u4e4f\u5e94\u529b\u7f13\u51b2\u5c42\u3002\u867d\u7136\u9700\u8981\u66f4\u8be6\u7ec6\u7684\u5143\u7d20\u5206\u6790\u6280\u672f\u6765\u786e\u5b9a\u94dc\u662f\u5426\u5728\u70ed\u5faa\u73af\u8fc7\u7a0b\u4e2d\u8fc1\u79fb\u5230\u73bb\u7483\u4e2d\uff0c\u4f46\u901a\u8fc7\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c(SEM)\u5728Cu\/Ti\/\u73bb\u7483\u754c\u9762\u5468\u56f4\u6ca1\u6709\u89c2\u5bdf\u5230\u73bb\u7483\u6216\u94dc\u7684\u5916\u89c2\u53d8\u5316\u3002<\/span><\/section>\n<\/section>\n<\/section>\n
\n
\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n<\/section>\n
\n
\n

\u56fe2 \u7ecf\u8fc71000\u6b21\u70ed\u5faa\u73af\u540e\u7684SGW3\u73bb\u7483\u4e2d\u95f4\u5c42\u8bd5\u9a8c\u8f66\u7684\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\uff08SEM\uff09\u6a2a\u622a\u9762\u56fe\u50cf<\/span><\/p>\n

\u6d4b\u91cf\u7ed3\u679c\u8868\u660e\uff0cTGV\u5728\u6676\u5706\u80cc\u9762\u7684\u76f4\u5f84\u4ecb\u4e8e17\u523019\u5fae\u7c73\uff0c\u800c\u6b63\u9762\u76f4\u5f84\u4e3a35\u5fae\u7c73<\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n<\/section>\n
\n
\n

\u56fe3 1000\u6b21\u70ed\u5faa\u73af\u540eSGW8\u73bb\u7483\u4e2d\u95f4\u5c42\u8bd5\u9a8c\u8f66\u7684\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\uff08SEM\uff09\u6a2a\u622a\u9762\u56fe\u50cf<\/span><\/p>\n

\u56fe\u50cf\u663e\u793a\uff0cTGV\u7684\u9876\u90e8\u76f4\u5f84\u4e3a35\u5fae\u7c73\uff0c\u5e95\u90e8\u76f4\u5f84\u572816\u523018\u5fae\u7c73\u4e4b\u95f4<\/section>\n<\/section>\n<\/section>\n
\n
\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n<\/section>\n
\n
\n

\u56fe4 SGW8\u57fa\u677f\u4e0aTGV\u4e0e\u9876\u90e8\u91d1\u5c5e\u5e03\u7ebf\u5c42\u754c\u9762\u7684\u6a2a\u622a\u9762\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\uff08SEM\uff09\u56fe\u50cf<\/span><\/p>\n

\u7ecf\u8fc71000\u6b21\u70ed\u5faa\u73af\u540e\uff0c\u5728SGW3\u6216SGW8\u57fa\u677f\u4e0a\u8be5\u754c\u9762\u6ca1\u6709\u89c2\u5bdf\u5230\u5206\u79bb\u6216\u73bb\u7483\u89d2\u843d\u5f00\u88c2\u7684\u73b0\u8c61<\/p>\n<\/section>\n<\/section>\n

\n
\n
#2<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n
\n
\n
HAST\u6d4b\u8bd5<\/strong><\/p>\n<\/section>\n<\/section>\n
\n
HAST testing<\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n
\n
\n

\u4e3a\u4e86\u7814\u7a76\u94dc\uff08Cu\uff09\u4e92\u8fde\u4e0e\u4e0d\u540c\u5316\u5b66\u6027\u8d28\u73bb\u7483\u57fa\u677f\u7684\u517c\u5bb9\u6027\u548c\u53ef\u9760\u6027\uff0c\u6211\u4eec\u5728\u4e0d\u540c\u73bb\u7483\u57fa\u677f\u4e0a\u5236\u5907\u4e86\u94dc\u6d4b\u8bd5\u7ed3\u6784\uff0c\u5e76\u8fdb\u884c\u4e86\u6709\u504f\u7f6e\u7684\u9ad8\u52a0\u901f\u5e94\u529b\u6d4b\u8bd5\uff08HAST\uff09\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\n

\u5728\u4e0d\u540c\u6210\u5206\u7684100\u6beb\u7c73\u73bb\u7483\u6676\u7247\u548c\u7845\u5bf9\u7167\u6676\u7247\u4e0a\uff0c\u5236\u4f5c\u4e86\u7531\u4ea4\u53c9\u94dc\u7ebf\u6784\u6210\u7684\u6d4b\u8bd5\u7ed3\u6784\u3002\u8fd9\u4e9b\u7ed3\u6784\u7528\u4e8e\u8fdb\u884c\u6709\u504f\u7f6e\u7684HAST\u5b9e\u9a8c\u3002\u6bcf\u4e2a\u6676\u5706\u8bbe\u6709\u516d\u4e2a\u6d4b\u8bd5\u70b9\uff0c\u6bcf\u4e2a\u6d4b\u8bd5\u70b9\u5305\u542b400\u4e2a\u94dc\u6307\uff0c\u7ebf\u5bbd\/\u95f4\u8ddd\u4e3a10\u5fae\u7c73\uff0c\u6bcf\u4e2a\u7535\u6781\u7684\u94dc\u6307\u4e4b\u95f4\u67099\u6beb\u7c73\u7684\u91cd\u53e0\u533a\u57df\u3002\u88683\u8be6\u7ec6\u5217\u51fa\u4e86\u7528\u4e8eHAST\u5b9e\u9a8c\u7684\u4e0d\u540c\u57fa\u5e95\u6750\u6599\u3002\u7845\u6676\u7247\u4e0a\u5f62\u6210\u4e863\u5343\u57c3\uff08k\u00c5\uff09\u7684\u4e8c\u6c27\u5316\u7845\u70ed\u6c27\u5316\u5c42\u3002\u90e8\u5206SGW8\u73bb\u7483\u6676\u5706\u4e0a\u6d82\u8986\u4e861\u5fae\u7c73\u7684\u6c2e\u5316\u7845\u5c42\uff0c\u4f5c\u4e3a\u963b\u6321\u8fd9\u79cd\u73bb\u7483\u4e2d\u78b1\u79bb\u5b50\u7684\u5c4f\u969c\u5c42[2]\u3002\u6c2e\u5316\u7845\u91c7\u7528\u7845\u70f7\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PECVD\uff09\u6280\u672f\uff0c\u5728200\u00b0C\u4e0b\u6c89\u79ef\u3002SGW3\u73bb\u7483\u548c\u7194\u878d\u7845\u7247\u6ca1\u6709\u88ab\u6c2e\u5316\u7845\u949d\u5316\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\n
\u4e3a\u4e86\u5236\u9020\u4ea4\u53c9\u6307\u72b6\u7ed3\u6784\uff0c\u9996\u5148\u901a\u8fc7\u6e85\u5c04\u6cd5\u6c89\u79ef\u4e861000\u57c3\uff08\u00c5\uff09\u7684\u949b\uff08Ti\uff09\u548c1500\u57c3\uff08\u00c5\uff09\u7684\u94dc\uff08Cu\uff09\u4f5c\u4e3a\u79cd\u5b50\u91d1\u5c5e\u5c42\u3002\u4f7f\u7528\u5149\u523b\u6280\u672f\u5236\u4f5c\u6297\u8680\u5242\u56fe\u6848\uff0c\u94dc\u5219\u901a\u8fc7\u6069\u677e\u516c\u53f8\u7684\u7532\u57fa\u78fa\u9178\uff08MSA\uff09\u9540\u6db2\u8fdb\u884c\u7535\u9540\u3002\u7535\u9540\u548c\u5149\u523b\u80f6\u53bb\u9664\u540e\uff0c\u4f7f\u7528\u6e7f\u6cd5\u5316\u5b66\u8680\u523b\u53bb\u9664\u79cd\u5b50\u91d1\u5c5e\u3002\u4e3a\u4e86\u949d\u5316\u94dc\u5e76\u4fdd\u62a4\u5176\u514d\u53d7\u5916\u754c\u6c61\u67d3\uff0c\u94dc\u6307\u4e0a\u8986\u76d6\u4e86\u4e00\u5c425\u5fae\u7c73\u539a\u7684\u82ef\u5e76\u73af\u4e01\u70ef\uff08BCB\uff094024-40\uff0c\u5e76\u4e3a\u63a5\u89e6\u57ab\u7559\u6709\u5f00\u53e3\u3002\u5c3d\u7ba1\u5df2\u77e5BCB\u5177\u6709\u4f4e\u5438\u6e7f\u6027\uff0c\u4f46\u5b83\u5c06\u5141\u8bb8\u6c34\u5206\u901a\u8fc7\u57fa\u6750\u8868\u9762\u3002\u5728BCB\u7684\u5f00\u53e3\u4e0a\u7535\u9540\u4e86\u4e00\u5c42\u53ef\u710a\u7684\u954d\u91d1\uff08NiAu\uff09\uff0c\u7528\u4e8e\u4e0e\u7535\u6781\u7684\u7535\u6c14\u8fde\u63a5\u3002<\/span><\/section>\n<\/section>\n<\/section>\n
\n
\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n<\/section>\n
\n
\n

\u56fe5\u4ea4\u53c9\u6d4b\u8bd5\u7ed3\u6784\uff0c\u5982\u56fea\uff09\u4ee5\u56fe\u8868\u5f62\u5f0f\u548c\u56feb\uff09\u5728100\u6beb\u7c73\u73bb\u7483\u6676\u5706\u4e0a\u7684\u5b9e\u9645\u5916\u89c2<\/span><\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\n

\u88683\u7528\u4e8e\u9009\u62e9\u6027\u504f\u7f6eHAST\u6d4b\u8bd5\u7684\u4e0d\u540c\u73bb\u7483\u548c\u7845\u886c\u5e95\u4e0e\u94dc\u4ea4\u53c9\u6307\u72b6\u6d4b\u8bd5\u7ed3\u6784\uff08Cu IDTs\uff09<\/span><\/p>\n<\/section>\n<\/section>\n

\n
\n

\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/span><\/p>\n

\u5236\u4f5c\u5b8c\u6210\u540e\uff0c\u6211\u4eec\u4f7f\u7528\u4e86\u5b89\u6377\u4f26\uff08Agilent\uff094155C\u53c2\u6570\u5206\u6790\u4eea\uff0c\u5728-5V\u81f3+5V\u7684\u7535\u538b\u8303\u56f4\u5185\u8fdb\u884cIV\uff08\u7535\u6d41-\u7535\u538b\uff09\u626b\u63cf\uff0c\u5e76\u5bf9\u6bcf\u4e2a\u6d4b\u8bd5\u70b9\u7684\u6cc4\u6f0f\u7535\u6d41\u8fdb\u884c\u4e86\u6d4b\u91cf\u3002\u6d4b\u8bd5\u7cfb\u7edf\u7684\u7535\u6d41\u6d4b\u91cf\u5206\u8fa8\u7387\u5927\u7ea6\u4e3a15\u76ae\u5b89\uff08pA\uff09\u3002\u672a\u6d82\u8986\u6c2e\u5316\u7845\u949d\u5316\u5c42\u7684SGW8\u73bb\u7483\u6676\u7247\u4e0a\u7684\u6cc4\u6f0f\u7535\u6d41\u6d4b\u91cf\u503c\u901a\u5e38\u9ad8\u4e8e\u5176\u4ed6\u56db\u79cd\u886c\u5e95\u7c7b\u578b\u3002<\/span><\/section>\n<\/section>\n<\/section>\n
\n
\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n<\/section>\n
\n
\n

\u56fe6 \u5728\u4e0d\u540c\u6210\u5206\u7684\u7845\u548c\u73bb\u7483\u886c\u5e95\u4e0a\u5236\u4f5c\u7684\u94dc\u4ea4\u53c9\u6307\u72b6\u6d4b\u8bd5\u7ed3\u6784(Cu IDTs)\uff0c\u5728\u7ecf\u8fc796\u5c0f\u65f6\u504f\u7f6e\u9ad8\u52a0\u901f\u5e94\u529b\u6d4b\u8bd5(HAST)\u524d\u540e\u7684\u7535\u963b\u53d8\u5316\u66f2\u7ebf\u56fe<\/span><\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\n

\u6839\u636eJESD22-A110-B\u6807\u51c6\u8fdb\u884c\u6d4b\u8bd5\uff0cHAST\u6d4b\u8bd5\u7bb1\u7684\u6761\u4ef6\u8bbe\u5b9a\u4e3a130\u2103\u300185%\u76f8\u5bf9\u6e7f\u5ea6\uff08RH\uff09\uff0c\u6d4b\u8bd5\u6301\u7eed\u65f6\u95f4\u4e3a96\u5c0f\u65f6\u3002\u5728\u6d4b\u8bd5\u8fc7\u7a0b\u4e2d\uff0c\u5bf9\u6d4b\u8bd5\u70b9\u7535\u6781\u65bd\u52a0\u4e865V\u7684\u76f4\u6d41\u504f\u538b\u3002\u6bcf\u4e2a\u6676\u5706\u4e0a\u81f3\u5c11\u6709\u4e00\u4e2a\u4ea4\u53c9\u6307\u72b6\u6d4b\u8bd5\u7ed3\u6784\uff08IDT\uff09\u70b9\u672a\u65bd\u52a0\u504f\u538b\uff0c\u4ee5\u4fbf\u5c06\u9ad8\u6e29\u9ad8\u6e7f\u73af\u5883\u7684\u5f71\u54cd\u4e0e\u7535\u538b\u504f\u7f6e\u5e94\u529b\u52a0\u4e0a\u9ad8\u6e29\u9ad8\u6e7f\u73af\u5883\u7684\u7efc\u5408\u5f71\u54cd\u8fdb\u884c\u533a\u5206\u3002\u8fd9\u4e9b\u672a\u52a0\u504f\u538b\u7684\u6d4b\u8bd5\u70b9\u5728HAST\u6d4b\u8bd5\u524d\u540e\u7684\u6cc4\u6f0f\u7535\u6d41\u5e73\u5747\u503c\u4e2d\u5e76\u672a\u88ab\u8ba1\u5165\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\n

\u5b8c\u6210HAST\u6d4b\u8bd5\u540e\uff0c\u4f7f\u7528\u76f8\u540c\u7684\u6d4b\u8bd5\u6761\u4ef6\u5bf9\u6676\u5706\u8fdb\u884c\u4e86\u518d\u6b21\u7535\u6c14\u6d4b\u8bd5\uff0c\u4ee5\u68c0\u6d4b\u901a\u8fc7\u4ea4\u53c9\u6307\u72b6\u7ed3\u6784\u7684\u6cc4\u6f0f\u7535\u6d41\u3002\u56fe6\u5c55\u793a\u4e86\u6bcf\u79cd\u57fa\u677f\u7c7b\u578b\u5728\u7ecf\u8fc796\u5c0f\u65f6\u504f\u7f6eHAST\u6d4b\u8bd5\u524d\u540e\u7684\u5e73\u5747\u7535\u963b\u53d8\u5316\u6c47\u603b\u56fe\u8868\u3002\u5bf9\u4e8e\u7845\u5bf9\u7167\u6676\u7247\u3001\u7194\u878d\u4e8c\u6c27\u5316\u7845\u3001SGW3\u73bb\u7483\u4ee5\u53ca\u6d82\u6709Si3N4\u963b\u6321\u5c42\u7684SGW8\u73bb\u7483\uff0c\u6d4b\u8bd5\u524d\u540e\u7684\u7ed3\u679c\u51e0\u4e4e\u6ca1\u6709\u53d8\u5316\u3002\u7136\u800c\uff0c\u5728\u672a\u6d82\u8986\u963b\u6321\u5c42\u7684SGW8\u6676\u5706\u4e0a\uff0c\u6240\u6709IDT\u7684\u7535\u963b\u90fd\u663e\u8457\u4e0b\u964d\u3002\u57285V\u504f\u538b\u4e0b\u672a\u949d\u5316\u7684SGW8\u73bb\u7483\u6676\u5706\u7684\u6d4b\u8bd5\u90e8\u4f4d\uff0c\u901a\u8fc7\u5149\u5b66\u663e\u5fae\u955c\u89c2\u5bdf\u5230\u6709\u767d\u8272\u7269\u8d28\u751f\u6210\u3002\u540c\u4e00\u57fa\u677f\u7c7b\u578b\u7684\u672a\u53d7\u504f\u538b\u7684\u6d4b\u8bd5\u70b9\u6ca1\u6709\u51fa\u73b0\u8fd9\u79cd\u73b0\u8c61\u3002\u5176\u4ed6\u57fa\u677f\u5728\u7ecf\u8fc7HAST\u540e\u4e5f\u672a\u8868\u73b0\u51fa\u8fd9\u79cd\u5916\u89c2\u53d8\u5316\u3002\u4ece\u56db\u79cd\u4e0d\u540c\u73bb\u7483\u57fa\u677f\u4e0a\u83b7\u53d6\u7684\u6837\u672c\u56fe\u50cf\u5982\u56fe7\u6240\u793a\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\n

\u4e3a\u4e86\u786e\u5b9a\u5728\u672a\u6d82\u8986\u963b\u6321\u5c42\u7684SGW8\u73bb\u7483\u4e0a\u89c2\u5bdf\u5230\u7684\u767d\u8272\u7269\u8d28\u7684\u5316\u5b66\u6210\u5206\uff0c\u4ece\u6bcf\u79cd\u6676\u5706\u7c7b\u578b\u7684\u6837\u54c1\u4e0a\u5782\u76f4\u4e8eCu\u7ebf\u5207\u5272\uff0c\u4f7f\u7528\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\uff08SEM\uff09\u8fdb\u884c\u6210\u50cf\uff0c\u5e76\u91c7\u7528\u80fd\u91cf\u8272\u6563X\u5c04\u7ebf\u5149\u8c31\uff08EDS\uff09\u8fdb\u884c\u5316\u5b66\u5206\u6790\u3002\u7531\u4e8e\u6837\u54c1\u662f\u901a\u8fc7\u5207\u5272\u5236\u5907\u7684\uff0cCu\u7ebf\u7531\u4e8e\u5176\u5ef6\u5c55\u6027\u4f3c\u4e4e\u4e0e\u5468\u56f4\u7684BCB\u7535\u4ecb\u8d28\u5206\u79bb\u3002SGW3\u7684SEM\u56fe\u50cf\u5982\u56fe8\u6240\u793a\u3002\u5728\u8fd9\u79cd\u57fa\u677f\u7c7b\u578b\u4e0a\uff0c\u5927\u5757\u57fa\u677f\u6750\u6599\u4e0eCu\u7ebf\u9644\u8fd1\u6216\u624b\u6307\u4e4b\u95f4BCB\/\u73bb\u7483\u754c\u9762\u7684\u533a\u57df\u4e4b\u95f4\u6ca1\u6709\u68c0\u6d4b\u5230\u73bb\u7483\u6210\u5206\u7684\u5dee\u5f02\u3002\u5177\u4f53\u6765\u8bf4\uff0c\u5728\u76f8\u90bb\u7684Cu\u7ebf\u4e4b\u95f4\u6ca1\u6709\u89c2\u5bdf\u5230Cu\u7684\u5b58\u5728\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

\n
\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n<\/section>\n
\n
\n

\u56fe7 \u5728\u7ecf\u8fc7\u504f\u7f6eHAST\u6d4b\u8bd5\u540e\uff0c\u4e0d\u540c\u57fa\u677f\u4e0a10\u5fae\u7c73\u7ebf\u5bbd\/\u95f4\u8ddd\u94dc\u4ea4\u53c9\u6307\u72b6\u6d4b\u8bd5\u7ed3\u6784(Cu IDTs)\u7684\u5149\u5b66\u663e\u5fae\u955c\u7167\u7247<\/span><\/p>\n

\u5177\u4f53\u5305\u62ec\uff1aa)\u672a\u6d82\u8986Si3N4\u963b\u6321\u5c42\u7684SGW8\u73bb\u7483\uff0cb)\u6d82\u8986\u6709Si3N4\u963b\u6321\u5c42\u7684SGW8\u73bb\u7483\uff0cc)SGW3\u73bb\u7483\uff0c\u4ee5\u53cad)\u7194\u878d\u4e8c\u6c27\u5316\u7845<\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\n

\u7136\u800c\uff0c\u5728SGW8\u57fa\u677f\u4e0a\uff0c\u80fd\u91cf\u8272\u6563X\u5c04\u7ebf\u5149\u8c31\uff08EDS\uff09\u68c0\u6d4b\u53d1\u73b0\u767d\u8272\u7269\u8d28\u4e2d\u5b58\u5728\u94dc\uff08Cu\uff09\uff0c\u8fd9\u53ef\u4ee5\u901a\u8fc7\u5149\u5b66\u663e\u5fae\u955c\u68c0\u67e5\u94dc\u5e03\u7ebf\u4e4b\u95f4\u7684\u7a7a\u95f4\u6765\u89c2\u5bdf\u3002\u56fe9\u5c55\u793a\u4e86\u4ece\u6ca1\u6709\u6c2e\u5316\u7845\uff08Si3N4\uff09\u963b\u6321\u5c42\u7684SGW8\u6837\u54c1\u4e2d\u83b7\u53d6\u7684\u4e24\u4e2a\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\uff08SEM\uff09\u56fe\u50cf\u3002\u4ece\u9760\u8fd1\u94dc\u6c61\u67d3\u533a\u57df\u7684\u73bb\u7483\u4e0a\u91c7\u96c6\u7684EDS\u5149\u8c31\u663e\u793a\uff0c\u94dc\u4e0d\u4ec5\u6cbf\u7740\u754c\u9762\u8fc1\u79fb\uff0c\u800c\u4e14\u6df1\u5165\u5230\u73bb\u7483\u6750\u6599\u4e2d\u3002\u8fd9\u4e00\u70b9\u4e5f\u53ef\u4ee5\u4ece\u9760\u8fd1\u94dc\u9897\u7c92\u7684\u73bb\u7483\u7684\u989c\u8272\u548c\u5916\u89c2\u7684\u7ec6\u5fae\u53d8\u5316\u4e2d\u63a8\u65ad\u51fa\u6765\u3002\u5bf9\u4e8e\u6d82\u8986\u6709Si3N4\u963b\u6321\u5c42\u7684SGW8\u57fa\u677f\uff0c\u5bf9\u5176\u8fdb\u884c\u4e86\u7c7b\u4f3c\u7684\u5206\u6790\uff0c\u5982\u56fe10\u6240\u793a\u7684SEM\u56fe\u50cf\u4e2d\uff0c\u6ca1\u6709\u53d1\u73b0Cu\u6307\u4e4b\u95f4\u6709\u94dc\u8fc1\u79fb\u7684\u8ff9\u8c61\u3002\u8fd9\u4e9bSEM\u548cEDS\u89c2\u5bdf\u7ed3\u679c\u4e0e\u6cc4\u6f0f\u7535\u6d41\u7684\u6d4b\u91cf\u7ed3\u679c\u4e00\u81f4\uff0c\u8868\u660e\u94dc\u7684\u8fc1\u79fb\u53ef\u80fd\u662f\u5bfc\u81f4\u672a\u6d82\u8986Si3N4\u963b\u6321\u5c42\u7684SGW8\u57fa\u677f\u4e0aIDT\u624b\u6307\u4e4b\u95f4\u51fa\u73b0\u6cc4\u6f0f\u8def\u5f84\u7684\u539f\u56e0\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

\n
\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n<\/section>\n
\n
\n

\u56fe8\u7ecf\u8fc7\u504f\u7f6eHAST\u5904\u7406\u7684SGW3\u57fa\u677f\u4e0a\u7684\u94dc\u4ea4\u53c9\u6307\u72b6\u6d4b\u8bd5\u7ed3\u6784(Cu IDT)\u7684\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c(SEM)\u56fe\u50cf<\/span><\/p>\n

\u5728\u624b\u6307\u4e4b\u95f4\u7684BCB\uff08\u82ef\u73af\u4e01\u70ef\uff09\/\u73bb\u7483\u754c\u9762\u4e0a\u6ca1\u6709\u89c2\u5bdf\u5230\u6c61\u67d3<\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n<\/section>\n
\n
\n

\u56fe9 \u7ecf\u8fc7\u504f\u7f6eHAST\u5904\u7406\u540e\uff0c\u5728\u672a\u6d82\u8986SiN\uff08\u6c2e\u5316\u7845\uff09\u963b\u6321\u5c42\u7684SGW8\u57fa\u677f\u4e0a\u7684\u94dc\u4ea4\u53c9\u6307\u72b6\u6d4b\u8bd5\u7ed3\u6784(Cu IDT)\u7684\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c(SEM)\u56fe\u50cf<\/span><\/p>\n

\u5728\u624b\u6307\u95f4\u7684BCB(\u82ef\u5e76\u73af\u4e01\u70ef(\/\u73bb\u7483\u754c\u9762\u5904\u68c0\u6d4b\u5230\u4e86\u94dc(Cu)\u6c61\u67d3<\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n<\/section>\n
\n
\n

\u56fe10\u5728\u6d82\u8986\u67091\u5fae\u7c73SiN(\u6c2e\u5316\u7845)\u963b\u6321\u5c42\u7684SGW8\u57fa\u677f\u4e0a\uff0c\u7ecf\u8fc7\u504f\u7f6eHAST\u5904\u7406\u540e\u7684\u94dc\u4ea4\u53c9\u6307\u72b6\u6d4b\u8bd5\u7ed3\u6784(Cu IDT)\u7684\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c(SEM)\u56fe\u50cf<\/p>\n

\u80fd\u8c31\u5206\u6790\u663e\u793a\uff0c\u5728\u624b\u6307\u95f4\u7684BCB(\u82ef\u5e76\u73af\u4e01\u70ef)\/\u73bb\u7483\u754c\u9762\u672a\u68c0\u6d4b\u5230\u94dc(Cu)\u7684\u5b58\u5728<\/p>\n<\/section>\n<\/section>\n

\n
\n
#3<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n
\n
\n
\u7ed3\u8bba<\/strong><\/p>\n<\/section>\n<\/section>\n
\n
Conclusion<\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n
\n
\n

\u504f\u7f6eHAST\u548c\u70ed\u5faa\u73af\u6d4b\u8bd5\u88ab\u7528\u6765\u8bc4\u4f30\u5de5\u7a0b\u73bb\u7483\u5728\u4e2d\u95f4\u5c42\u5e94\u7528\u4e2d\u7684\u53ef\u9760\u6027\u4e24\u4e2a\u5173\u952e\u65b9\u9762\u3002\u9996\u5148\uff0c\u901a\u8fc7\u5728-40\u00b0C\u81f3125\u00b0C\u76841000\u6b21\u70ed\u5faa\u73af\uff0c\u9a8c\u8bc1\u4e86SGW3\u548cSGW8\u57fa\u677f\u4e0a\u94dc\u586b\u5145\u7684TGVs\u7684\u53ef\u9760\u6027\u3002\u4f7f\u752820\u00d720\u6392\u5217\u768435 \u03bcm\u00d7120 \u03bcm TGV\u9635\u5217\uff0c\u4ee5\u83ca\u82b1\u94fe\u7684\u5f62\u5f0f\uff0c\u6d4b\u8bd5\u4e86\u70ed\u5faa\u73af\u524d\u540e\u7684\u7535\u8fde\u7eed\u6027\u548c\u7535\u963b\u3002\u70ed\u5faa\u73af\u540e\uff0c\u5728\u4e24\u79cd\u57fa\u677f\u4e0a\u6d4b\u8bd5\u7684\u6240\u6709TGV\u9635\u5217\u5747\u663e\u793a\u8fde\u7eed\u6027\uff0c\u6ca1\u6709\u89c2\u5bdf\u5230TGV\u6216\u5e03\u7ebf\u91d1\u5c5e\u7684\u5931\u6548\u3002\u5bf9\u4e24\u79cd\u7c7b\u578b\u57fa\u677f\u4e0a\u5236\u5907\u7684TGV\u9635\u5217\u8fdb\u884c\u4e86\u622a\u9762\u6837\u54c1\u5236\u5907\uff0c\u5e76\u8fdb\u884c\u4e86\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\u6210\u50cf\u3002\u5c3d\u7ba1\u94dc\u548c\u73bb\u7483\u57fa\u677f\u4e4b\u95f4\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\uff08CTE\uff09\u4e0d\u5339\u914d\uff0c\u4f46\u5728TGV\u9644\u8fd1\u6ca1\u6709\u89c2\u5bdf\u5230\u73bb\u7483\u5f00\u88c2\u6216\u5e03\u7ebf\u91d1\u5c5e\u62ac\u8d77\u7684\u73b0\u8c61\u3002<\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\n

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 <\/p>\n

\n
\n

References\u00a0<\/span><\/p>\n

1. V. Sukumaran et al., \u201cThrough-Package-Via Formation\u00a0and Metallization of Glass Interposers\u201d, Electronic\u00a0Components and Technology Conference (ECTC), IEEE\u00a060th (2010).\u00a0<\/span><\/p>\n

2. I. Ndip et al., \u201cCharacterization of Interconnects and RF\u00a0Components on Glass Interposers\u201d, IMAPs 45th\u00a0International Symposium on Microelectronics, (2012).\u00a0<\/span><\/p>\n

3. C. H. Chien et al., \u201cPerformance and Process Comparison\u00a0between Glass and Si Interposer for 3D-IC Integration\u201d,\u00a0IMAPs 46th International Symposium on Microelectronics,\u00a0(2013).\u00a0<\/span><\/p>\n

4. X. Qin, N. Kumbhat, V. Sundaram, R. Tummala, \u201cHighly-\u00a0Reliable Silicon and Glass Interposers-to-Printed Wiring\u00a0Board SMT Interonnections: Modeling, Design,\u00a0Fabrication and Reliability\u201d, Electronic Components and\u00a0Technology Conference (ECTC), IEEE 62nd (2012).\u00a0<\/span><\/p>\n

5. Shorey, A., Cochet, P., Huffman, A., Keech, J., Lueck, M.,\u00a0Pollard, S., & Ruhmer, K. \u201cAdvancements in fabrication\u00a0of glass interposers,\u201d in Proc. IEEE Electronic\u00a0Components and Technology Conf. (ECTC), 2014, pp. 20-\u00a025\u00a0<\/span><\/p>\n

6. A. Shorey, S. Pollard, A. Streltsov, G. Piech, & R.\u00a0Wagner, \u201cDevelopment of substrates for through glass vias\u00a0(TGV) for 3DS-IC integration,\u201d in Proc. IEEE Electronic\u00a0Components and Technology Conf. (ECTC), 2012, IEEE\u00a0(pp. 289-291).\u00a0<\/span><\/p>\n

7. Chien, Chun-Hsien, et al. \"Process, assembly and\u00a0electromigration characteristics of glass interposer for 3D\u00a0integration,\" in Proc. IEEE Electronic Components and\u00a0Technology Conf. (ECTC), 2014, IEEE 64th. IEEE, 2014.\u00a0<\/span><\/p>\n

8. Yang, Ya-Tang, et al. \"Amorphous-silicon thin-film\u00a0transistor on soda-lime glass.\" Journal of the Society for\u00a0Information Display 17.4 (2009): 317-321.\u00a0<\/span><\/p>\n

9. K. Demir, K. Ramachandran, Y. Sato, Q. Chen, V.\u00a0Sukumaran, R. Pucha, R. Tummala, \u201cThermomechanical\u00a0and electrochemical reliability of fine-pitch throughpackage-\u00a0copper vias (TPV) in thin glass interposers and\u00a0packages,\u201d in Proc. IEEE Electronic Components and\u00a0Technology Conf. (ECTC), 2013, IEEE (pp. 353-359).\u00a0<\/span><\/p>\n

10.K. Demir, A. Armutlulu, J. Tong, R. Pucha, V. Sundaram,\u00a0R. Tummala, \u201cFirst demonstration of reliable copperplated\u00a030\udbc0\ude1dm diameter through-package-vias in ultra-thin\u00a0bare glass interposers,\u201d in Proc. IEEE Electronic\u00a0Components and Technology Conf. (ECTC), 2014, IEEE\u00a064th (pp. 1098-1102).\u00a0<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n

\u6ce8\uff1a\u6587\u7ae0\u6765\u6e90\u4e8eCEIA\u7535\u5b50\u667a\u9020<\/em>\uff0c\u6587\u7ae0\u4ec5\u4f9b\u53c2\u8003\uff0c\u5982\u6d89\u53ca\u5230\u4fb5\u6743\u7b49\u95ee\u9898\uff0c\u8bf7\u8054\u7cfb\u5c0f\u7f16\u5220\u9664<\/em><\/em><\/p>\n

\n
\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n<\/section>\n

\u827e\u90a6\u5efa\u6709\u73bb\u7483\u57fa\u677f\u4e0eTGV\u6280\u672f\u4ea4\u6d41\u7fa4\uff0c<\/strong>\u53ef\u4ee5\u52a0\u5f3a\u4ea7\u4e1a\u94fe\u7684\u5408\u4f5c\uff0c\u4fc3\u6210\u5404\u4f01\u4e1a\u7684\u9700\u6c42\u5bf9\u63a5\uff0c\u540c\u65f6<\/span>\u60a8\u4e5f\u53ef\u4ee5\u4e0e\u884c\u4e1a\u7cbe\u82f1\u5171\u540c\u63a2\u8ba8\u73bb\u7483\u57fa\u677f\u53caTGV\u6280\u672f\u7684\u524d\u6cbf\u52a8\u6001\uff0c\u5171\u4eab\u8d44\u6e90\uff0c\u4ea4\u6d41\u7ecf\u9a8c\uff0c\u6b22\u8fce\u60a8\u7684\u52a0\u5165\u3002<\/p>\n

\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/section>\n

\u6d3b\u52a8\u63a8\u8350\uff1a<\/strong><\/span><\/p>\n

\n
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<\/section>\n
\n
2025\u5e74\u73bb\u7483\u57fa\u677fTGV\u4ea7\u4e1a\u94fe\u9ad8\u5cf0\u8bba\u575b<\/span><\/a><\/section>\n

2025\u5e743\u670819-20\u65e5\uff0c\u82cf\u5dde<\/span><\/a><\/p>\n<\/section>\n

<\/section>\n<\/section>\n<\/section>\n<\/section>\n
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\u8bae\u9898<\/span><\/strong><\/p>\n<\/td>\n

\n

\u62df\u9080\u8bf7\u5355\u4f4d<\/span><\/strong><\/p>\n<\/td>\n<\/tr>\n

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TGV\u73bb\u7483\u6838\u5fc3\u6280\u672f\u7684\u6311\u6218\u4e0e\u89e3\u51b3\u65b9\u6848<\/span><\/p>\n<\/td>\n

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TGV\u91d1\u5c5e\u7ebf\u8def\u5236\u4f5c\u7684\u5de5\u827a\u96be\u70b9\u53ca\u6280\u672f\u89e3\u51b3\u8def\u5f84<\/span><\/p>\n<\/td>\n

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\u6e56\u5317\u901a\u683c\u5fae\u7535\u8def\u79d1\u6280\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n

\n

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\n

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\n

\u6700\u65b0\u4e00\u4ee3TGV\u6280\u672f\u53ca\u5e94\u7528<\/span><\/p>\n<\/td>\n

\n

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\n

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\u5e7f\u4e1c\u6167\u666e\u5149\u5b66\u79d1\u6280\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n

\n

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\n

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\n

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\n

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\n

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\n

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\n

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\n

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\n

\u6e56\u5357\u8d8a\u6469\u5148\u8fdb\u534a\u5bfc\u4f53\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n

\n

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\n

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\n

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\n

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\n

Evatec China<\/span><\/p>\n<\/td>\n<\/tr>\n

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\n

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Panel level\u6fc0\u5149\u8bf1\u5bfc\u8680\u523b & AOI<\/span><\/p>\n<\/td>\n

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\n

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\n

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\n

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\n

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\n

\u5317\u4eac\u7535\u5b50\u91cf\u68c0\u6d4b\u80a1\u4efd\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u62a5\u540d\u65b9\u5f0f\u4e00\uff1a\u52a0\u5fae\u4fe1<\/strong><\/section>\n

\u674e\u5c0f\u59d0\uff1a18823755657\uff08\u540c\u5fae\u4fe1\uff09<\/p>\n

\u90ae\u7bb1\uff1alirongrong@aibang.com<\/p>\n

\u626b\u7801\u6dfb\u52a0\u5fae\u4fe1\uff0c\u54a8\u8be2\u5c55\u4f1a\u8be6\u60c5<\/section>\n
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\n

\"\u73bb\u7483\u901a\u5b54(TGV)\u53ca\u5176\u53ef\u9760\u6027\u6d4b\u8bd5\"<\/p>\n

<\/section>\n

 <\/p>\n

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https:\/\/www.aibang360.com\/m\/100235?ref=100042<\/p>\n

\u70b9\u51fb\u9605\u8bfb\u539f\u6587\uff0c\u5373\u53ef\u5728\u7ebf\u62a5\u540d\uff01<\/section>\n

\n

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