{"id":63004,"date":"2024-12-09T10:58:50","date_gmt":"2024-12-09T11:07:05","guid":{"rendered":"https:\/\/www.ab-sm.com\/?p=63004"},"modified":"2024-12-09T19:09:57","modified_gmt":"2024-12-09T11:09:57","slug":"05fea88ffa","status":"publish","type":"post","link":"https:\/\/www.ab-sm.com\/a\/63004","title":{"rendered":"TGV\u6df1\u5b54\u9540\u819c\u5de5\u827a\u53ca14\u5bb6\u9540\u819c\u8bbe\u5907\u4f01\u4e1a\u4ecb\u7ecd"},"content":{"rendered":"
\n

\"TGV\u6df1\u5b54\u9540\u819c\u5de5\u827a\u53ca14\u5bb6\u9540\u819c\u8bbe\u5907\u4f01\u4e1a\u4ecb\u7ecd\"<\/span><\/span><\/a><\/p>\n

\u73bb\u7483\u57fa\u677f\u5236\u7a0b\u4e2d\uff0c\u6db5\u76d6\u73bb\u7483\u91d1\u5c5e\u5316(Glass Metallization)\u3001ABF\u538b\u5408\u5236\u7a0b\uff0c\u53ca\u6700\u7ec8\u7684\u73bb\u7483\u57fa\u677f\u5207\u5272\uff0c\u5176\u4e2d\u73bb\u7483\u91d1\u5c5e\u5316\u5b8c\u6210\u540e\u7684\u73bb\u7483\u79f0\u4e3aGlass Core\uff0c\u5236\u7a0b\u6d89\u53caTGV(Through-Glass Via)\u3001\u6e7f\u8680\u523b(Wet Etching)\u3001AOI\u5149\u5b66\u68c0\u6d4b\u3001\u9540\u819c(Sputtering)\u53ca\u7535\u9540(Plating)\u3002<\/p>\n

\u9996\u5148\uff0c\u6765\u6599\u68c0\u6d4b\uff0c\u5236\u4f5c\u73bb\u7483\u901a\u5b54(TGV)\u3002TGV \u7684\u6210\u5b54\u5de5\u827a\u4e3b\u8981\u5305\u62ec\u55b7\u7802\u3001\u8d85\u58f0\u6ce2\u94bb\u5b54\u3001\u6e7f\u6cd5\u523b\u8680\u3001\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u3001\u5149\u654f\u523b\u8680\u3001\u6fc0\u5149\u523b\u8680\u3001\u6fc0\u5149\u8bf1\u5bfc\u6df1\u5ea6\u523b\u8680\u4ee5\u53ca\u805a\u7126\u653e\u7535\u6210\u5b54\u7b49\u3002<\/p>\n

\u5176\u6b21\uff0c\u901a\u8fc7\u7535\u9540\u6280\u672f\u5c06\u91d1\u5c5e\u6c89\u79ef\u5165TGV\u7ed3\u6784\u7684\u5177\u4f53\u8fc7\u7a0b\u5305\u62ec\uff1a<\/section>\n
\uff081\uff09<\/strong>\u901a\u8fc7\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08PVD\uff09\u7b49\u65b9\u6cd5\u5728TGV\u5b54\u5185\u6c89\u79ef\u6269\u6563\u963b\u6321\u5c42\u548c\u79cd\u5b50\u5c42\uff1b<\/span><\/section>\n
\uff082\uff09<\/strong>\u901a\u8fc7\u7535\u5316\u5b66\u53cd\u5e94\u4ece\u5e95\u90e8\u5411\u4e0a\u586b\u5145\u6240\u9700\u91d1\u5c5e\uff0c\u901a\u5e38\u91c7\u7528\u7535\u9540\u94dc\uff1b<\/span><\/section>\n

\uff083\uff09<\/strong>\u901a\u8fc7\u6e7f\u6cd5\u8150\u8680\u548cCMP\u7b49\u65b9\u6cd5\u53bb\u9664\u8868\u9762\u591a\u4f59\u7684\u94dc\u3002<\/span><\/p>\n

\"\"<\/section>\n
\"TGV\u6df1\u5b54\u9540\u819c\u5de5\u827a\u53ca14\u5bb6\u9540\u819c\u8bbe\u5907\u4f01\u4e1a\u4ecb\u7ecd\"<\/section>\n

( a ) \u7535\u9540\u586b\u5145\u76f2\u73bb\u7483\u5b54\u548c ( b\u3001c ) \u7535\u9540\u586b\u5145 TGV\u7684\u6a2a\u622a\u9762 SEM \u7167\u7247\u3002<\/span><\/p>\n

\u8584\u819c\u6e85\u9540\u5236\u7a0b\u662f\u4e00\u79cd\u4e8e\u771f\u7a7a\u73af\u5883\u4e0b\u5229\u7528\u7535\u6d46\u6e90\u5c06\u91d1\u5c5e\uff08\u5305\u542b\u7eaf\u91d1\u5c5e\u4e0e\u5408\u91d1\uff09\u6216\u975e\u91d1\u5c5e\u6750\u6599\uff08\u4f8b\u5982\uff1a\u7845\u5316\u7269\u3001\u78b3\u5316\u7269\u3001\u6c2e\u5316\u7269\u3001\u6c27\u5316\u7269\uff09\u8986\u76d6\u5728\u5f85\u9540\u7269\u4e0a\uff0c\u8fdb\u800c\u5f62\u6210\u5747\u5300\u8584\u819c\u7684\u6280\u672f\u3002\u901a\u5e38\u662f\u4e8e\u7535\u6781\u677f\u4e24\u7aef\u901a\u65bd\u4ee5\u7535\u538b\u5dee\u800c\u4ea7\u751f\u7535\u573a\uff0c\u8fdb\u800c\u4f7f\u5236\u7a0b\u6c14\u4f53\uff08\u4f8b\u5982\u6c29\u6c14\uff09\u89e3\u79bb\u5f62\u6210\u7535\u6d46\u6001\u5e76\u8f70\u51fb\u9776\u6750\uff0c\u518d\u4ee5\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08Physical Vapor Deposition\uff0cPVD\uff09\u7684\u673a\u5236\u4f7f\u9776\u6750\u4e0a\u7684\u6750\u6599\u5747\u5300\u9644\u7740\u4e8e\u5f85\u9540\u7269\u800c\u7684\u8868\u9762\u800c\u5f62\u6210\u8584\u819c\u7684\u5de5\u827a\u3002<\/p>\n

\u5728\u73bb\u7483\u57fa\u677fTVG\u6280\u672f\u5de5\u827a\u4e2d\uff0c\u4e3a\u4e86\u63d0\u9ad8\u73bb\u7483\u57fa\u677f\u4e0e\u91d1\u5c5e\u5e03\u7ebf\u6750\u6599\u7684\u7ed3\u5408\u529b\uff0c\u5728\u73bb\u7483\u57fa\u677f\u7684\u8868\u9762\u6e85\u5c04\u4e00\u5c42\u949b\u94dc\u79cd\u5b50\u5c42\uff0c\u9996\u5148\u5728\u73bb\u7483\u57fa\u677f\u4e0a\u6e85\u5c04\u4e00\u5c42\u949b\u5c42\uff0c\u7531\u4e8e\u949b\u7684\u5bfc\u7535\u6027\u6bd4\u94dc\u5dee\u592a\u591a\uff0c\u4e3a\u4e86\u540c\u65f6\u4fdd\u8bc1\u7ed3\u5408\u529b\u53ca\u9ad8\u5bfc\u7535\u6027\uff0c\u901a\u5e38\u7684\u949b\u5c42\u53ea\u6709\u51e0\u5341\u4e2a\u7eb3\u7c73\u7684\u539a\u5ea6\uff0c\u4e3a\u4e86\u51cf\u5c11\u949b\u5c42\u949d\u5316\u53ca\u589e\u5f3a\u949b\u94dc\u79cd\u5b50\u5c42\u7684\u5bfc\u7535\u6027\uff0c\u518d\u5728\u949b\u5c42\u4e0a\u6e85\u5c04\u4e00\u5c42\u94dc\u5c42\u3002\u5728\u8fd9\u4e00\u5de5\u5e8f\u4e2d\u5c31\u8981\u4f7f\u7528\u5230\u8584\u819c\u6e85\u9540\u8bbe\u5907\uff0c\u5982PVD\u9540\u819c\u8bbe\u5907\u7b49\u3002<\/p>\n

\"TGV\u6df1\u5b54\u9540\u819c\u5de5\u827a\u53ca14\u5bb6\u9540\u819c\u8bbe\u5907\u4f01\u4e1a\u4ecb\u7ecd\"<\/section>\n

\u8d44\u6599\u6765\u6e90\uff1a\u5fae\u5bfc\u7eb3\u7c73\u62db\u80a1\u4e66<\/span><\/p>\n

\u4eca\u5929\u5c31\u73bb\u7483\u57fa\u677fTVG\u6280\u672f\u6df1\u5b54\u9540\u819c\u8fd9\u4e00\u5de5\u5e8f\u7ed9\u5927\u5bb6\u7b80\u5355\u4ecb\u7ecd\u4e00\u4e0b\u5404\u4f01\u4e1a\u7684\u52a8\u6001\uff0c\u66f4\u591a\u6b22\u8fce\u5927\u5bb6\u8865\u5145\u4ea4\u6d41\u3002<\/p>\n

\n
\n
1. Applied Materials<\/strong><\/span><\/p>\n<\/section>\n
<\/section>\n<\/section>\n<\/section>\n
\"TGV\u6df1\u5b54\u9540\u819c\u5de5\u827a\u53ca14\u5bb6\u9540\u819c\u8bbe\u5907\u4f01\u4e1a\u4ecb\u7ecd\"<\/section>\n

\u5b98\u7f51\uff1ahttps:\/\/www.appliedmaterials.com\/<\/p>\n

\u5e94\u7528\u6750\u6599\u516c\u53f8\uff08Applied Materials, Inc.\uff09\u662f\u5168\u7403\u6700\u5927\u7684\u534a\u5bfc\u4f53\u8bbe\u5907\u548c\u670d\u52a1\u4f9b\u5e94\u5546\u3002\u5e94\u7528\u6750\u6599\u5728 PVD \u6280\u672f\u5f00\u53d1\u65b9\u9762\u62e5\u6709 25 \u5e74\u4ee5\u4e0a\u7684\u4e30\u5bcc\u7ecf\u9a8c\uff0c\u5176Endura \u5e73\u53f0\u662f\u5f53\u524d PVD \u91d1\u5c5e\u5316\u7684\u4e1a\u754c\u9ec4\u91d1\u6807\u51c6\u3002<\/span><\/p>\n

\"TGV\u6df1\u5b54\u9540\u819c\u5de5\u827a\u53ca14\u5bb6\u9540\u819c\u8bbe\u5907\u4f01\u4e1a\u4ecb\u7ecd\"<\/section>\n

\u56fe\u6e90\uff1a\u5b98\u7f51<\/span><\/p>\n

\n
\n
2. Evatec AG<\/strong><\/span><\/p>\n<\/section>\n
<\/section>\n<\/section>\n<\/section>\n

CLUSTERLINE\u00ae 200 \u53ca\u5176 HIPIMS \u52a0\u5de5\u6a21\u5757\u4f7f\u5f97 TGV \u53ca\u5176\u4ed6\u9ad8\u7eb5\u6a2a\u6bd4\u7279\u5f81\u7684\u91d1\u5c5e\u5316\u6210\u4e3a\u53ef\u80fd\u3002\u516c\u53f8\u80fd\u591f\u52a0\u5de5\u5e26\u6709\u901a\u5b54\u6216\u76f2\u5b54\uff08\u6765\u81ea TSV \u63d2\u5c42\u7684\u5df2\u77e5\u6280\u672f\uff09\u7684\u73bb\u7483\u6676\u5706\uff0c\u5e76\u6839\u636e\u4e0d\u540c\u7684\u8981\u6c42\u4f7f\u7528\u4e0d\u540c\u7684\u901a\u5b54\u5f62\u72b6\uff08\u7531\u4e8e\u901a\u5b54\u5f62\u6210\u6240\u7528\u7684\u4e0d\u540c\u5236\u9020\u65b9\u6cd5\uff09\u3002<\/p>\n

\"TGV\u6df1\u5b54\u9540\u819c\u5de5\u827a\u53ca14\u5bb6\u9540\u819c\u8bbe\u5907\u4f01\u4e1a\u4ecb\u7ecd\"<\/p>\n

\u5728\u73bb\u7483\u63d2\u5c42\u7684\u901a\u5b54\u4e2d\u5fc5\u987b\u5f62\u6210\u8db3\u591f\u539a\u7684\u9644\u7740\u5c42\u548c\u79cd\u5b50\u5c42\uff0c\u4ee5\u4fbf\u8fdb\u884c\u7535\u9540\u3002\u4e24\u4e2a\u4e13\u7528\u4e8e HIPIMS \u6c89\u79ef\u7684 PVD \u6a21\u5757\u9488\u5bf9\u6b64\u8fc7\u7a0b\u8fdb\u884c\u4e86\u4f18\u5316\uff0c\u4e00\u4e2a\u7528\u4e8e\u949b\u7684\u9644\u7740\u5c42\uff0c\u4e00\u4e2a\u7528\u4e8e\u94dc\u7684\u79cd\u5b50\u5c42\u3002HIPIMS \u662f\u4e00\u79cd\u8109\u51b2\u76f4\u6d41\u8fc7\u7a0b\uff0c\u4f7f\u7528\u975e\u5e38\u77ed\u7684\u529f\u7387\u8109\u51b2\uff0c\u4f4e\u5360\u7a7a\u6bd4\u548c\u975e\u5e38\u9ad8\u7684\u5cf0\u503c\u3002<\/p>\n

2024\u5e749\u6708\uff0cEvatec \u4e0e Onto Innovation \u5408\u4f5c\u6253\u9020\u9762\u677f\u7ea7\u5c01\u88c5\u5e94\u7528\u5353\u8d8a\u4e2d\u5fc3\u3002<\/p>\n

\"TGV\u6df1\u5b54\u9540\u819c\u5de5\u827a\u53ca14\u5bb6\u9540\u819c\u8bbe\u5907\u4f01\u4e1a\u4ecb\u7ecd\"<\/p>\n

Evatec\u7684\u9762\u677f\u7ea7CLN600\u5c31\u662f\u9488\u5bf9FOPLP\u548cICS\u7684PVD\u8bbe\u5907\uff0c\u5177\u5907\u5728\u73bb\u7483\u57fa\u677f\u4e0a\u9664\u6c14\u3001\u8680\u523b\u548c\u6c89\u79ef\u529f\u80fd\u3002\u9644\u7740\u529b>10 N\/cm\uff0c\u6bcf\u5c0f\u65f6\u7684\u8fd0\u884c\u901f\u7387\u4e3a24\u4e2a\u9762\u677f\uff0c\u4ece515X510mm\u5230600mm x 600mm\u3002<\/p>\n

\"TGV\u6df1\u5b54\u9540\u819c\u5de5\u827a\u53ca14\u5bb6\u9540\u819c\u8bbe\u5907\u4f01\u4e1a\u4ecb\u7ecd\"<\/section>\n

\u00a0\u56fe\u6e90\uff1aEvatec<\/span><\/p>\n

\n
\n
3. Hi semico<\/strong><\/span><\/p>\n<\/section>\n
<\/section>\n<\/section>\n<\/section>\n
\"\"<\/section>\n

\u5b98\u7f51\uff1ahttp:\/\/www.hisemico.com\/<\/p>\n

Hi semico \u7528\u4e8e PLP TGV \u00a0ECD\u9762\u677f\u5f0f\u7535\u9540\u8bbe\u5907\u5747\u91c7\u7528\u65b0\u578b\u7684\u5782\u76f4\u7535\u9540\u6cd5\uff08Vertical Electroplating\uff09\u4e0e\u4f20\u7edf\u7684\u6c34\u5e73\u7535\u9540\u6280\u672f\u4e0d\u540c\uff0c\u5229\u7528\u7acb\u5f0f\u7535\u9540\u69fd\u7684\u7ed3\u6784\uff0c\u901a\u8fc7\u6c14\u6ce1\u4e0a\u5347\u548c\u6db2\u4f53\u5411\u4e0b\u6d41\u52a8\u4ea7\u751f\u7684\u6da1\u6d41\u4f7f\u5f97\u91d1\u5c5e\u79bb\u5b50\u5747\u5300\u5206\u5e03\u5230\u6574\u4e2a\u8868\u9762\uff0c\u4ece\u800c\u5b9e\u73b0\u4e86\u9ad8\u7cbe\u5ea6\u7684\u7535\u9540\u3002\u76f8\u6bd4\u6c34\u5e73\u7535\u9540\uff0c\u826f\u7387\u53ef\u4ee5\u4e0a\u53474%\u3002\u76ee\u524d\u6d77\u4e16\u9ad8\u4e0e\u836f\u54c1\u5382\u5546\u7684\u7814\u53d1\u6b63\u5728\u8fdb\u884c\u4e2d\uff0c\u529b\u5c06\u6ee1\u9540\u540e\u9762\u94dc\u539a\u5ea6\u63a7\u5236\u57285~10um\uff0c515X510mm \u73bb\u7483\u57fa\u677f\u7535\u9540\u7684\u6d4b\u8bd5\u8bbe\u5907\u53ef\u5f00\u59cb\u63d0\u4f9b\u591a\u65b9\u4f4d\u5ba2\u6237\u4ea7\u54c1\u6253\u6837\u670d\u52a1\u3002<\/p>\n

\n
\n
4. \u53cb\u5a01\u79d1\u6280<\/strong><\/span><\/p>\n<\/section>\n
<\/section>\n<\/section>\n<\/section>\n
\"TGV\u6df1\u5b54\u9540\u819c\u5de5\u827a\u53ca14\u5bb6\u9540\u819c\u8bbe\u5907\u4f01\u4e1a\u4ecb\u7ecd\"<\/section>\n

\u5b98\u7f51\uff1ahttps:\/\/www.uvat.com\/<\/p>\n

\u53cb\u5a01\u79d1\u6280\u6210\u7acb\u4e8e2002\u5e74\uff0c\u96c6\u5408\u4e00\u7fa4\u6709\u591a\u5e74\u771f\u7a7a\u7ecf\u9a8c\u7684\u56e2\u961f\uff0c\u79ef\u6781\u6295\u5165\u771f\u7a7a\u6e85\u9540\u5236\u7a0b\u6280\u672f\u53ca\u9540\u819c\u7cfb\u7edf\u8bbe\u8ba1\u53ca\u5f00\u53d1\uff0c\u4ee5PVD\uff08\u6e85\u9540\u3001\u84b8\u9540\u3001\u84b8\u6e85\u9540\uff09\u3001CVD\u3001\u5e72\u5f0f\u8680\u523b\u8bbe\u5907 Dry etching\u6280\u672f\u672c\u4f4d\u51fa\u53d1\uff0c\u4e0e\u5ba2\u6237\u5171\u540c\u8ba8\u8bba\u5f00\u53d1\u65b0\u5e94\u7528\uff0c\u5171\u540c\u7814\u7a76\u8584\u819c\u7279\u6027\u3001\u5236\u7a0b\u786c\u4ef6\u5f00\u53d1\u3001\u53ef\u63d0\u4f9b\u6d4b\u8bd5\u6837\u54c1\u3001\u91cf\u4ea7\u7cfb\u7edf\u89c4\u5212\u3001\u81ea\u52a8\u5316\u8bbe\u8ba1\u3001\u5e76\u53ef\u73b0\u6709\u8bbe\u5907\u6539\u9020\u3001\u529f\u80fd\u63d0\u5347\uff0c\u53e6\u63d0\u4f9b\u4e13\u4e1a\u5ba2\u6237\u670d\u52a1\u56e2\u961f\u53ef\u4ee5\u6ee1\u8db3\u5168\u65b9\u4f4d\u4e00\u6761\u9f99\u7684\u9700\u6c42\u3002<\/p>\n

\u53cb\u5a01\u79d1\u6280\u9488\u5bf9TGV\u5de5\u827a\u5236\u7a0b\u5e94\u7528\u5305\u542b\u7b49\u79bb\u5b50\u8680\u523b\u901a\u5b54\u3001\u7b49\u79bb\u5b50\u8868\u9762\u6539\u8d28\u3001\u949b\u94dc\u79cd\u5b50\u6df1\u5c42\u6e85\u9540\u3001RDL\uff08Descum\/Desmear\uff09\u3002<\/p>\n

\"TGV\u6df1\u5b54\u9540\u819c\u5de5\u827a\u53ca14\u5bb6\u9540\u819c\u8bbe\u5907\u4f01\u4e1a\u4ecb\u7ecd\"<\/section>\n

\u949b\u94dc\u79cd\u5b50\u5c42\u9540\u819c\u8bbe\u5907 \u56fe\u6e90\u5b98\u7f51<\/span><\/p>\n

\u8bbe\u5907\u7279\u8272<\/strong><\/section>\n