<\/span><\/span><\/a><\/p>\n \u73bb\u7483\u57fa\u677f\u5236\u7a0b\u4e2d\uff0c\u6db5\u76d6\u73bb\u7483\u91d1\u5c5e\u5316(Glass Metallization)\u3001ABF\u538b\u5408\u5236\u7a0b\uff0c\u53ca\u6700\u7ec8\u7684\u73bb\u7483\u57fa\u677f\u5207\u5272\uff0c\u5176\u4e2d\u73bb\u7483\u91d1\u5c5e\u5316\u5b8c\u6210\u540e\u7684\u73bb\u7483\u79f0\u4e3aGlass Core\uff0c\u5236\u7a0b\u6d89\u53caTGV(Through-Glass Via)\u3001\u6e7f\u8680\u523b(Wet Etching)\u3001AOI\u5149\u5b66\u68c0\u6d4b\u3001\u9540\u819c(Sputtering)\u53ca\u7535\u9540(Plating)\u3002<\/p>\n \u9996\u5148\uff0c\u6765\u6599\u68c0\u6d4b\uff0c\u5236\u4f5c\u73bb\u7483\u901a\u5b54(TGV)\u3002TGV \u7684\u6210\u5b54\u5de5\u827a\u4e3b\u8981\u5305\u62ec\u55b7\u7802\u3001\u8d85\u58f0\u6ce2\u94bb\u5b54\u3001\u6e7f\u6cd5\u523b\u8680\u3001\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u3001\u5149\u654f\u523b\u8680\u3001\u6fc0\u5149\u523b\u8680\u3001\u6fc0\u5149\u8bf1\u5bfc\u6df1\u5ea6\u523b\u8680\u4ee5\u53ca\u805a\u7126\u653e\u7535\u6210\u5b54\u7b49\u3002<\/p>\n \uff083\uff09<\/strong>\u901a\u8fc7\u6e7f\u6cd5\u8150\u8680\u548cCMP\u7b49\u65b9\u6cd5\u53bb\u9664\u8868\u9762\u591a\u4f59\u7684\u94dc\u3002<\/span><\/p>\n ( a ) \u7535\u9540\u586b\u5145\u76f2\u73bb\u7483\u5b54\u548c ( b\u3001c ) \u7535\u9540\u586b\u5145 TGV\u7684\u6a2a\u622a\u9762 SEM \u7167\u7247\u3002<\/span><\/p>\n \u8584\u819c\u6e85\u9540\u5236\u7a0b\u662f\u4e00\u79cd\u4e8e\u771f\u7a7a\u73af\u5883\u4e0b\u5229\u7528\u7535\u6d46\u6e90\u5c06\u91d1\u5c5e\uff08\u5305\u542b\u7eaf\u91d1\u5c5e\u4e0e\u5408\u91d1\uff09\u6216\u975e\u91d1\u5c5e\u6750\u6599\uff08\u4f8b\u5982\uff1a\u7845\u5316\u7269\u3001\u78b3\u5316\u7269\u3001\u6c2e\u5316\u7269\u3001\u6c27\u5316\u7269\uff09\u8986\u76d6\u5728\u5f85\u9540\u7269\u4e0a\uff0c\u8fdb\u800c\u5f62\u6210\u5747\u5300\u8584\u819c\u7684\u6280\u672f\u3002\u901a\u5e38\u662f\u4e8e\u7535\u6781\u677f\u4e24\u7aef\u901a\u65bd\u4ee5\u7535\u538b\u5dee\u800c\u4ea7\u751f\u7535\u573a\uff0c\u8fdb\u800c\u4f7f\u5236\u7a0b\u6c14\u4f53\uff08\u4f8b\u5982\u6c29\u6c14\uff09\u89e3\u79bb\u5f62\u6210\u7535\u6d46\u6001\u5e76\u8f70\u51fb\u9776\u6750\uff0c\u518d\u4ee5\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08Physical Vapor Deposition\uff0cPVD\uff09\u7684\u673a\u5236\u4f7f\u9776\u6750\u4e0a\u7684\u6750\u6599\u5747\u5300\u9644\u7740\u4e8e\u5f85\u9540\u7269\u800c\u7684\u8868\u9762\u800c\u5f62\u6210\u8584\u819c\u7684\u5de5\u827a\u3002<\/p>\n \u5728\u73bb\u7483\u57fa\u677fTVG\u6280\u672f\u5de5\u827a\u4e2d\uff0c\u4e3a\u4e86\u63d0\u9ad8\u73bb\u7483\u57fa\u677f\u4e0e\u91d1\u5c5e\u5e03\u7ebf\u6750\u6599\u7684\u7ed3\u5408\u529b\uff0c\u5728\u73bb\u7483\u57fa\u677f\u7684\u8868\u9762\u6e85\u5c04\u4e00\u5c42\u949b\u94dc\u79cd\u5b50\u5c42\uff0c\u9996\u5148\u5728\u73bb\u7483\u57fa\u677f\u4e0a\u6e85\u5c04\u4e00\u5c42\u949b\u5c42\uff0c\u7531\u4e8e\u949b\u7684\u5bfc\u7535\u6027\u6bd4\u94dc\u5dee\u592a\u591a\uff0c\u4e3a\u4e86\u540c\u65f6\u4fdd\u8bc1\u7ed3\u5408\u529b\u53ca\u9ad8\u5bfc\u7535\u6027\uff0c\u901a\u5e38\u7684\u949b\u5c42\u53ea\u6709\u51e0\u5341\u4e2a\u7eb3\u7c73\u7684\u539a\u5ea6\uff0c\u4e3a\u4e86\u51cf\u5c11\u949b\u5c42\u949d\u5316\u53ca\u589e\u5f3a\u949b\u94dc\u79cd\u5b50\u5c42\u7684\u5bfc\u7535\u6027\uff0c\u518d\u5728\u949b\u5c42\u4e0a\u6e85\u5c04\u4e00\u5c42\u94dc\u5c42\u3002\u5728\u8fd9\u4e00\u5de5\u5e8f\u4e2d\u5c31\u8981\u4f7f\u7528\u5230\u8584\u819c\u6e85\u9540\u8bbe\u5907\uff0c\u5982PVD\u9540\u819c\u8bbe\u5907\u7b49\u3002<\/p>\n \u8d44\u6599\u6765\u6e90\uff1a\u5fae\u5bfc\u7eb3\u7c73\u62db\u80a1\u4e66<\/span><\/p>\n \u4eca\u5929\u5c31\u73bb\u7483\u57fa\u677fTVG\u6280\u672f\u6df1\u5b54\u9540\u819c\u8fd9\u4e00\u5de5\u5e8f\u7ed9\u5927\u5bb6\u7b80\u5355\u4ecb\u7ecd\u4e00\u4e0b\u5404\u4f01\u4e1a\u7684\u52a8\u6001\uff0c\u66f4\u591a\u6b22\u8fce\u5927\u5bb6\u8865\u5145\u4ea4\u6d41\u3002<\/p>\n \u5b98\u7f51\uff1ahttps:\/\/www.appliedmaterials.com\/<\/p>\n \u5e94\u7528\u6750\u6599\u516c\u53f8\uff08Applied Materials, Inc.\uff09\u662f\u5168\u7403\u6700\u5927\u7684\u534a\u5bfc\u4f53\u8bbe\u5907\u548c\u670d\u52a1\u4f9b\u5e94\u5546\u3002\u5e94\u7528\u6750\u6599\u5728 PVD \u6280\u672f\u5f00\u53d1\u65b9\u9762\u62e5\u6709 25 \u5e74\u4ee5\u4e0a\u7684\u4e30\u5bcc\u7ecf\u9a8c\uff0c\u5176Endura \u5e73\u53f0\u662f\u5f53\u524d PVD \u91d1\u5c5e\u5316\u7684\u4e1a\u754c\u9ec4\u91d1\u6807\u51c6\u3002<\/span><\/p>\n \u56fe\u6e90\uff1a\u5b98\u7f51<\/span><\/p>\n CLUSTERLINE\u00ae 200 \u53ca\u5176 HIPIMS \u52a0\u5de5\u6a21\u5757\u4f7f\u5f97 TGV \u53ca\u5176\u4ed6\u9ad8\u7eb5\u6a2a\u6bd4\u7279\u5f81\u7684\u91d1\u5c5e\u5316\u6210\u4e3a\u53ef\u80fd\u3002\u516c\u53f8\u80fd\u591f\u52a0\u5de5\u5e26\u6709\u901a\u5b54\u6216\u76f2\u5b54\uff08\u6765\u81ea TSV \u63d2\u5c42\u7684\u5df2\u77e5\u6280\u672f\uff09\u7684\u73bb\u7483\u6676\u5706\uff0c\u5e76\u6839\u636e\u4e0d\u540c\u7684\u8981\u6c42\u4f7f\u7528\u4e0d\u540c\u7684\u901a\u5b54\u5f62\u72b6\uff08\u7531\u4e8e\u901a\u5b54\u5f62\u6210\u6240\u7528\u7684\u4e0d\u540c\u5236\u9020\u65b9\u6cd5\uff09\u3002<\/p>\n <\/p>\n \u5728\u73bb\u7483\u63d2\u5c42\u7684\u901a\u5b54\u4e2d\u5fc5\u987b\u5f62\u6210\u8db3\u591f\u539a\u7684\u9644\u7740\u5c42\u548c\u79cd\u5b50\u5c42\uff0c\u4ee5\u4fbf\u8fdb\u884c\u7535\u9540\u3002\u4e24\u4e2a\u4e13\u7528\u4e8e HIPIMS \u6c89\u79ef\u7684 PVD \u6a21\u5757\u9488\u5bf9\u6b64\u8fc7\u7a0b\u8fdb\u884c\u4e86\u4f18\u5316\uff0c\u4e00\u4e2a\u7528\u4e8e\u949b\u7684\u9644\u7740\u5c42\uff0c\u4e00\u4e2a\u7528\u4e8e\u94dc\u7684\u79cd\u5b50\u5c42\u3002HIPIMS \u662f\u4e00\u79cd\u8109\u51b2\u76f4\u6d41\u8fc7\u7a0b\uff0c\u4f7f\u7528\u975e\u5e38\u77ed\u7684\u529f\u7387\u8109\u51b2\uff0c\u4f4e\u5360\u7a7a\u6bd4\u548c\u975e\u5e38\u9ad8\u7684\u5cf0\u503c\u3002<\/p>\n 2024\u5e749\u6708\uff0cEvatec \u4e0e Onto Innovation \u5408\u4f5c\u6253\u9020\u9762\u677f\u7ea7\u5c01\u88c5\u5e94\u7528\u5353\u8d8a\u4e2d\u5fc3\u3002<\/p>\n <\/p>\n Evatec\u7684\u9762\u677f\u7ea7CLN600\u5c31\u662f\u9488\u5bf9FOPLP\u548cICS\u7684PVD\u8bbe\u5907\uff0c\u5177\u5907\u5728\u73bb\u7483\u57fa\u677f\u4e0a\u9664\u6c14\u3001\u8680\u523b\u548c\u6c89\u79ef\u529f\u80fd\u3002\u9644\u7740\u529b>10 N\/cm\uff0c\u6bcf\u5c0f\u65f6\u7684\u8fd0\u884c\u901f\u7387\u4e3a24\u4e2a\u9762\u677f\uff0c\u4ece515X510mm\u5230600mm x 600mm\u3002<\/p>\n \u00a0\u56fe\u6e90\uff1aEvatec<\/span><\/p>\n \u5b98\u7f51\uff1ahttp:\/\/www.hisemico.com\/<\/p>\n Hi semico \u7528\u4e8e PLP TGV \u00a0ECD\u9762\u677f\u5f0f\u7535\u9540\u8bbe\u5907\u5747\u91c7\u7528\u65b0\u578b\u7684\u5782\u76f4\u7535\u9540\u6cd5\uff08Vertical Electroplating\uff09\u4e0e\u4f20\u7edf\u7684\u6c34\u5e73\u7535\u9540\u6280\u672f\u4e0d\u540c\uff0c\u5229\u7528\u7acb\u5f0f\u7535\u9540\u69fd\u7684\u7ed3\u6784\uff0c\u901a\u8fc7\u6c14\u6ce1\u4e0a\u5347\u548c\u6db2\u4f53\u5411\u4e0b\u6d41\u52a8\u4ea7\u751f\u7684\u6da1\u6d41\u4f7f\u5f97\u91d1\u5c5e\u79bb\u5b50\u5747\u5300\u5206\u5e03\u5230\u6574\u4e2a\u8868\u9762\uff0c\u4ece\u800c\u5b9e\u73b0\u4e86\u9ad8\u7cbe\u5ea6\u7684\u7535\u9540\u3002\u76f8\u6bd4\u6c34\u5e73\u7535\u9540\uff0c\u826f\u7387\u53ef\u4ee5\u4e0a\u53474%\u3002\u76ee\u524d\u6d77\u4e16\u9ad8\u4e0e\u836f\u54c1\u5382\u5546\u7684\u7814\u53d1\u6b63\u5728\u8fdb\u884c\u4e2d\uff0c\u529b\u5c06\u6ee1\u9540\u540e\u9762\u94dc\u539a\u5ea6\u63a7\u5236\u57285~10um\uff0c515X510mm \u73bb\u7483\u57fa\u677f\u7535\u9540\u7684\u6d4b\u8bd5\u8bbe\u5907\u53ef\u5f00\u59cb\u63d0\u4f9b\u591a\u65b9\u4f4d\u5ba2\u6237\u4ea7\u54c1\u6253\u6837\u670d\u52a1\u3002<\/p>\n \u5b98\u7f51\uff1ahttps:\/\/www.uvat.com\/<\/p>\n \u53cb\u5a01\u79d1\u6280\u6210\u7acb\u4e8e2002\u5e74\uff0c\u96c6\u5408\u4e00\u7fa4\u6709\u591a\u5e74\u771f\u7a7a\u7ecf\u9a8c\u7684\u56e2\u961f\uff0c\u79ef\u6781\u6295\u5165\u771f\u7a7a\u6e85\u9540\u5236\u7a0b\u6280\u672f\u53ca\u9540\u819c\u7cfb\u7edf\u8bbe\u8ba1\u53ca\u5f00\u53d1\uff0c\u4ee5PVD\uff08\u6e85\u9540\u3001\u84b8\u9540\u3001\u84b8\u6e85\u9540\uff09\u3001CVD\u3001\u5e72\u5f0f\u8680\u523b\u8bbe\u5907 Dry etching\u6280\u672f\u672c\u4f4d\u51fa\u53d1\uff0c\u4e0e\u5ba2\u6237\u5171\u540c\u8ba8\u8bba\u5f00\u53d1\u65b0\u5e94\u7528\uff0c\u5171\u540c\u7814\u7a76\u8584\u819c\u7279\u6027\u3001\u5236\u7a0b\u786c\u4ef6\u5f00\u53d1\u3001\u53ef\u63d0\u4f9b\u6d4b\u8bd5\u6837\u54c1\u3001\u91cf\u4ea7\u7cfb\u7edf\u89c4\u5212\u3001\u81ea\u52a8\u5316\u8bbe\u8ba1\u3001\u5e76\u53ef\u73b0\u6709\u8bbe\u5907\u6539\u9020\u3001\u529f\u80fd\u63d0\u5347\uff0c\u53e6\u63d0\u4f9b\u4e13\u4e1a\u5ba2\u6237\u670d\u52a1\u56e2\u961f\u53ef\u4ee5\u6ee1\u8db3\u5168\u65b9\u4f4d\u4e00\u6761\u9f99\u7684\u9700\u6c42\u3002<\/p>\n \u53cb\u5a01\u79d1\u6280\u9488\u5bf9TGV\u5de5\u827a\u5236\u7a0b\u5e94\u7528\u5305\u542b\u7b49\u79bb\u5b50\u8680\u523b\u901a\u5b54\u3001\u7b49\u79bb\u5b50\u8868\u9762\u6539\u8d28\u3001\u949b\u94dc\u79cd\u5b50\u6df1\u5c42\u6e85\u9540\u3001RDL\uff08Descum\/Desmear\uff09\u3002<\/p>\n \u949b\u94dc\u79cd\u5b50\u5c42\u9540\u819c\u8bbe\u5907 \u56fe\u6e90\u5b98\u7f51<\/span><\/p>\n \u8f7d\u5177\u81ea\u52a8\u56de\u6d41\u7cfb\u7edf<\/p>\n<\/li>\n<\/ul>\n <\/p>\n \u5b98\u7f51\uff1ahttps:\/\/www.arrayedmaterials.com\/<\/p>\n 2024\u5e749\u6708\u77e9\u9635\u79d1\u6280\u5b8c\u6210\u4ebf\u5143B2\u8f6e\u878d\u8d44\uff0c\u878d\u5f97\u8d44\u91d1\u4e3b\u8981\u7528\u4e8e\u65b0\u4e00\u4ee3\u5148\u8fdb\u5c01\u88c5PVD\u91cf\u4ea7\u8bbe\u5907\u7684\u7814\u53d1\u3001\u4ea7\u80fd\u6269\u5145\u4ee5\u53ca\u8865\u5145\u6d41\u52a8\u8d44\u91d1\u7b49\u3002<\/p>\n \u77e9\u9635\u79d1\u6280\u76ee\u524d\u805a\u7126\u4e8e\u534a\u5bfc\u4f53\u5148\u8fdb\u5c01\u88c5\u7684\u8584\u9053\u6c89\u79ef\u5de5\u827a\uff0c\u5df2\u638c\u63e1\u56fd\u9645\u5c16\u7aef\u7684\u78c1\u63a7\u6d4bPVD\u8bbe\u5907\u5173\u952e\u6280\u672f\uff0c\u5177\u6709\u6574\u673a\u673a\u53f0\u7684\u8bbe\u8ba1\u3001\u751f\u4ea7\u548c\u4ea4\u4ed8\u80fd\u529b\uff0c\u5e76\u81ea\u4e3b\u7814\u53d1\u51fa\u89c2\u660e\u6781\u7cfb\u7edf\u3001\u9762\u677f\u7ea7\u5c01\u88c5\u57fa\u7247\u88c5\u8f7d\u7cfb\u7edf\u7b49\u591a\u9879\u5173\u952e\u5b50\u7cfb\u7edf\u3002<\/p>\n \u56fe\u6e90\u5b98\u5fae<\/p>\n \u77e9\u9635\u79d1\u6280\u7684\u5de5\u4e1a\u7ea7\u91cf\u4ea7\u8bbe\u5907DEP600(\u53cc\u679a\u53f6\u5f0f\u5148\u8fdb\u5c01\u88c5\u6e85\u5c04PVD\u8bbe\u5907)\u5e94\u7528\u4e8e\u6247\u51fa\u578b\u9762\u677f\u7ea7\u5c01\u88c5\u4e2d\u7684\u79cd\u5b50\u5c42\u91d1\u5c5e\u5316\uff0c\u5df2\u7ecf\u83b7\u5f97\u6570\u4e2a\u56fd\u5185\u5934\u90e8\u534a\u5bfc\u4f53\u5c01\u88c5\u5382\u5546\u8ba2\u5355\uff0c\u6253\u7834\u4e86\u6838\u5fc3\u5173\u952e\u8bbe\u5907\u7684\u56fd\u9645\u5784\u65ad\u3002<\/p>\n \u540c\u65f6\uff0c\u57fa\u4e8eDEP600\u5e73\u53f0\uff0c\u77e9\u9635\u79d1\u6280\u5df2\u7ecf\u5b8c\u6210\u7528\u4e8e\u9ad8\u6df1\u5bbd\u6bd4\u73bb\u7483\u901a\u5b54(TGV)\u79cd\u5b50\u5c42\u91d1\u5c5e\u5316\u7684PVD\u8bbe\u5907\u6837\u673a\u642d\u5efa\uff0c\u6b63\u5728\u4e3a\u591a\u5bb6\u610f\u5411\u5ba2\u6237\u8fdb\u884c\u6253\u6837\u6d4b\u8bd5\u3002<\/p>\n \u5b98\u7f51\uff1ahttps:\/\/www.fsefulin.com\/z<\/p>\n \u57282024 TPCA\u5c55\u4f1a\u4e0a\uff0c\u4e1c\u6377\u79d1\u6280\u91cd\u70b9\u5c55\u793a\u300c\u5148\u8fdb\u73bb\u7483\u8f7d\u677f\u5236\u7a0b\u89e3\u51b3\u65b9\u6848\u300d\u7279\u522b\u662f\u9ad8\u7cbe\u5ea6\u73bb\u7483\u8f7d\u677f\u7a7f\u5b54(TGV)\u3001\u73bb\u7483\u96f7\u5c04\u5207\u5272\u53ca3D\u81ea\u52a8\u5149\u5b66\u68c0\u6d4b\u6280\u672f\uff0c\u4e1c\u6377\u79d1\u6280\u66f4\u7ed3\u5408\u5b50\u516c\u53f8\u5bcc\u4e34\u79d1\u6280\u5728TGV \u79cd\u5b50\u5c42(Seed Layer)\u9540\u819c\u53ca\u7535\u6d46\u8680\u523b\u8bbe\u5907\u65b9\u9762\u7684\u9886\u5148\u4f18\u52bf\uff0c\u8fdb\u4e00\u6b65\u63d0\u5347\u5148\u8fdb\u8f7d\u677f\u7ebf\u8def\u5236\u7a0b\u7684\u751f\u4ea7\u6548\u76ca\u4e0e\u8d28\u91cf\uff0c\u4e3a\u4e0b\u4e00\u4ee3\u5148\u8fdb\u5c01\u88c5\u7684\u73bb\u7483\u57fa\u677f(Glass Core Substrate, GCS)\u63d0\u4f9b\u652f\u6301\u3002\u00a0<\/span><\/p>\n \u5b98\u7f51\uff1ahttps:\/\/www.hcvac.com\/<\/p>\n \u5e7f\u4e1c\u6c47\u6210\u771f\u7a7a\u79d1\u6280\u80a1\u4efd\u6709\u9650\u516c\u53f8\u662f\u4e00\u5bb6\u9762\u5411\u5168\u7403\u7684\u771f\u7a7a\u5e94\u7528\u89e3\u51b3\u65b9\u6848\u63d0\u4f9b\u5546\uff0c\u7814\u53d1\u3001\u751f\u4ea7\u548c\u9500\u552e\u5149\u5b66\u9540\u819c\u8bbe\u5907\u3001\u529f\u80fd\u6027\u8584\u819c\u6d82\u5c42\u8bbe\u5907\u3001\u88c5\u9970\u6d82\u5c42\u8bbe\u5907\u3001\u5377\u7ed5\u9540\u819c\u8bbe\u5907\u3001\u6c7d\u8f66\u96f6\u90e8\u4ef6\u9540\u819c\u8bbe\u5907\u3001\u8fde\u7eed\u5f0f\u78c1\u63a7\u6e85\u5c04\u9540\u819c\u751f\u4ea7\u7ebf\u3001\u8d85\u9ad8\u771f\u7a7a\u7cfb\u7edf\u7b49\u771f\u7a7a\u8bbe\u5907\u3001ALD\u539f\u5b50\u5c42\u6c89\u79ef\u8bbe\u5907\u3001\u534a\u5bfc\u4f53\u8bbe\u5907\u3001\u7535\u5b50\u751f\u4ea7\u8bbe\u5907\u3001\u5149\u7535\u8bbe\u5907\u3001\u5149\u4f0f\u8bbe\u5907\u3001\u52a8\u529b\u7535\u6c60\u8bbe\u5907\u53ca\u4ea7\u54c1\u76f8\u5173\u914d\u4ef6\u7684\u56fd\u5bb6\u9ad8\u65b0\u6280\u672f\u4f01\u4e1a\u3002<\/p>\n HCVAC\u514b\u670d\u56e0\u6df1\u5f84\u6bd4\u8fc7\u5927\u5bfc\u81f4\u819c\u5c42\u8fde\u7eed\u6027\u5dee\u96be\u9898\uff0c\u81ea\u4e3b\u7814\u53d1PVD\u6df1\u5b54\u89e3\u51b3\u65b9\u6848\uff0c\u5728\u5b54\u5f84\u4e2d50um,\u6df1\u5f84\u6bd410:1\u7684\u5b54\u5185\u5b9e\u73b0\u5168\u8986\u76d6\u9540\u819c\uff0c\u819c\u5c42\u7ed3\u5408\u529b\u597d\u3002<\/p>\n <\/p>\n \u5b98\u7f51\uff1ahttps:\/\/www.naura.com\/<\/p>\n \u5317\u65b9\u534e\u521b\u7d27\u8ddf\u4ea7\u4e1a\u53d1\u5c55\u6b65\u4f10\uff0c\u4f9d\u6258\u6df1\u539a\u7684\u7acb\u5f0f\u7089\u88c5\u5907\u6280\u672f\u79ef\u7d2f\uff0c\u7814\u53d1\u63a8\u51fa3\u6b3e12\u82f1\u5bf8\u7acb\u5f0f\u7089\u539f\u5b50\u5c42\u6c89\u79ef\u8bbe\u5907\uff0c\u8fdb\u5165\u5ba2\u6237\u7aef\u9a8c\u8bc1\uff0c\u4e14\u5b9e\u73b0\u5927\u89c4\u6a21\u91cf\u4ea7\u3002\u5317\u65b9\u534e\u521b\u7ecf\u8fc7\u591a\u5e74\u7684\u6280\u672f\u521b\u65b0\u53ca\u4ea7\u4e1a\u5316\u9a8c\u8bc1\uff0c\u5df2\u5b9e\u73b0\u7acb\u5f0f\u6c27\u5316\/\u9000\u706b\u7089\uff0c\u7acb\u5f0fLPCVD\u548c\u7acb\u5f0fALD\u7cfb\u5217\u8bbe\u5907\u5168\u9762\u5e03\u5c40\uff0c\u5e76\u9884\u8ba1\u5728\u4eca\u5e74\u4e0b\u534a\u5e74\u63a8\u51fa\u7acb\u5f0f\u7089\u539f\u5b50\u5c42\u6c89\u79ef\u8bbe\u5907\u7684\u5176\u4ed6DEMAX\u7cfb\u5217\u4ea7\u54c1\u3002<\/p>\n <\/p>\n \u5b98\u7f51\uff1ahttps:\/\/www.amec-inc.com\/<\/p>\n \u4e2d\u5fae\u5f00\u53d1\u7684\u7b49\u79bb\u5b50\u4f53\u523b\u8680\u8bbe\u5907\u548c\u5316\u5b66\u8584\u819c\u8bbe\u5907\u662f\u5236\u9020\u5404\u79cd\u5fae\u89c2\u5668\u4ef6\u7684\u5173\u952e\u8bbe\u5907\uff0c\u53ef\u52a0\u5de5\u5fae\u7c73\u7ea7\u548c\u7eb3\u7c73\u7ea7\u7684\u5404\u79cd\u5668\u4ef6\u3002<\/p>\n <\/p>\n \u4e2d\u5fae\u516c\u53f8\u5728MOCVD\u9886\u57df\u6709\u975e\u5e38\u6df1\u539a\u7684\u6280\u672f\u79ef\u7d2f\u3002\u516c\u53f8\u4e8e2013\u5e74\u53d1\u5e03\u4e86\u7b2c\u4e00\u4ee3MOCVD\u8bbe\u5907 PRISMO D-BLUE\u00ae\uff0c\u7531\u4e8e\u5176\u8f83\u9ad8\u7684\u7075\u6d3b\u6027\u548c\u751f\u4ea7\u6548\u7387\u3001\u4f18\u5f02\u7684\u6027\u80fd\u4ee5\u53ca\u7b80\u4fbf\u6613\u884c\u7684\u8bbe\u5907\u7ef4\u62a4\uff0c\u4e2d\u5fae\u7684MOCVD\u8bbe\u5907\u5feb\u901f\u83b7\u5f97\u4e86\u5ba2\u6237\u7684\u8ba4\u53ef\u548c\u4fe1\u4efb\u3002<\/p>\n 2016\u5e74\uff0c\u4e2d\u5fae\u53d1\u5e03\u4e86\u5176\u7b2c\u4e8c\u4ee3MOCVD\u8bbe\u5907 PRISMO A7\u00ae\u3002\u5728 PRISMO D-BLUE\u7684\u57fa\u7840\u4e0a\uff0cPRISMO A7\u589e\u52a0\u4e86\u4e00\u4e9b\u65b0\u7684\u7279\u5f81\uff0c\u4ee5\u8fdb\u4e00\u6b65\u63d0\u5347\u751f\u4ea7\u6548\u7387\u548c\u52a0\u5de5\u6027\u80fd\u3002\u8be5\u8bbe\u5907\u5df2\u5e94\u7528\u4e8e\u56fd\u5185\u4f17\u591a\u9886\u5148\u7684LED\u751f\u4ea7\u7ebf\u3002<\/p>\n \u4e2d\u5fae\u5177\u6709\u81ea\u4e3b\u77e5\u8bc6\u4ea7\u6743\u7684MOCVD\u8bbe\u5907PRISMO HiT3\u00ae\uff0c\u662f\u9002\u7528\u4e8e\u9ad8\u8d28\u91cf\u6c2e\u5316\u94dd\u548c\u9ad8\u94dd\u7ec4\u5206\u6750\u6599\u751f\u957f\u7684\u5173\u952e\u8bbe\u5907\u3002<\/p>\n \u5b98\u7f51\uff1ahttps:\/\/www.leadmicro.com\/<\/p>\n \u6c5f\u82cf\u5fae\u5bfc\u7eb3\u7c73\u79d1\u6280\u80a1\u4efd\u6709\u9650\u516c\u53f8\u6210\u7acb\u4e8e2015\u5e7412\u6708\uff0c\u662f\u4e00\u5bb6\u9762\u5411\u5168\u7403\u7684\u534a\u5bfc\u4f53\u3001\u6cdb\u534a\u5bfc\u4f53\u9ad8\u7aef\u5fae\u7eb3\u88c5\u5907\u5236\u9020\u5546\u3002\u516c\u53f8\u5f62\u6210\u4e86\u4ee5\u539f\u5b50\u5c42\u6c89\u79ef\uff08ALD\uff09\u6280\u672f\u4e3a\u6838\u5fc3\uff0cCVD\u7b49\u591a\u79cd\u771f\u7a7a\u8584\u819c\u6280\u672f\u68af\u6b21\u53d1\u5c55\u7684\u4ea7\u54c1\u4f53\u7cfb\uff0c\u4e13\u6ce8\u4e8e\u5148\u8fdb\u5fae\u7c73\u7ea7\u3001\u7eb3\u7c73\u7ea7\u8584\u819c\u8bbe\u5907\u7684\u7814\u53d1\u3001\u751f\u4ea7\u4e0e\u5e94\u7528\u3002\u516c\u53f8\u4e1a\u52a1\u6db5\u76d6\u96c6\u6210\u7535\u8def\u3001\u5149\u4f0f\u3001LED\uff0c\u53caMEMS \u7b49\u6cdb\u534a\u5bfc\u4f53\u76f8\u5173\u9886\u57df\uff0c\u4ee5\u53ca\u65b0\u80fd\u6e90\u548c\u67d4\u6027\u7535\u5b50\u9886\u57df\uff1b\u4e3b\u8981\u4ea7\u54c1\u4e3a\u5e94\u7528\u4e8e\u903b\u8f91\u82af\u7247\u3001\u5b58\u50a8\u82af\u7247\u3001\u5149\u4f0f\u7535\u6c60\u3001\u7845\u57fa\u5fae\u663e\u793a\u3001\u5316\u5408\u7269\u534a\u5bfc\u4f53\u548c3D\u5c01\u88c5\u7b49\u534a\u5bfc\u4f53\u53ca\u6cdb\u534a\u5bfc\u4f53\u7684\u4e13\u7528\u8bbe\u5907\u548c\u6210\u5957\u6280\u672f\uff0c\u4ee5\u53ca\u5e94\u7528\u4e8e\u67d4\u6027\u7535\u5b50\u3001\u65b0\u4e00\u4ee3\u9ad8\u6548\u592a\u9633\u80fd\u7535\u6c60\u6574\u7ebf\u7684\u91cf\u4ea7\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n \u5b98\u7f51\uff1ahttps:\/\/www.lincotec.com\/<\/p>\n \u51cc\u5609\u79d1\u6280\u7684\u8584\u819c\u6e85\u9540\u53ca\u7535\u6d46\u8680\u523b\u5e73\u53f0\u4ee5\u5e72\u5f0f\u73af\u4fdd\u5236\u7a0b\u4e3a\u6280\u672f\u6838\u5fc3\uff0c\u9664\u4e86\u8bbe\u5907\u80fd\u529b\u80fd\u591f\u6ee1\u8db3\u5ba2\u6237\u7684\u8981\u6c42\uff0c\u4ea6\u80fd\u63d0\u4f9b\u5ba2\u5236\u5316\u7684\u81ea\u52a8\u5316\u5e73\u53f0\uff0c\u8fbe\u5230\u9ad8\u826f\u7387\u3001\u9ad8\u4ea7\u80fd\u7684\u6700\u4f4e\u751f\u4ea7\u6210\u672c\uff08COO\uff09\u4e4b\u4f18\u52bf\u3002\u5728\u534a\u5bfc\u4f53\u5148\u8fdb\u5c01\u88c5\u9886\u57df\u4e2d\uff0c\u53ef\u4ee5\u63d0\u4f9b\u6297\u7535\u78c1\u5e72\u6270\u5c4f\u853d\u6e85\u9540\u3001\u6247\u51fa\u578b\u5c01\u88c5\u3001\u5148\u8fdb\u5c01\u88c5\u91cd\u5e03\u7ebf\u8def\u5236\u7a0b\u3001\u5148\u8fdb\u8f7d\u677f\u53ca\u9ad8\u9636PCB\u7ebf\u8def\u5236\u7a0b\u3001\u65e0\u5bfc\u7ebf\u7535\u9540\u91d1\u6280\u672f\u3001\u6676\u80cc\u91d1\u5c5e\u5316\u7b49\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n \u51cc\u5609\u79d1\u6280\u4e13\u7cbe\u4e8e\u8584\u819c\u6e85\u9540\u6280\u672f\uff0c\u5e76\u80fd\u4ee5\u591a\u5143\u4e14\u5f39\u6027\u7684\u8bbe\u5907\u914d\u7f6e\u65b9\u5f0f\u4ee5\u9002\u5e94\u591a\u5143\u5316\u7684\u52a0\u5de5\u8981\u6c42\u3002<\/p>\n \u5b98\u7f51\uff1ahttps:\/\/optorun.sh.cn\/<\/p>\n \u5149\u9a70\u79d1\u6280\uff08\u4e0a\u6d77\uff09\u6709\u9650\u516c\u53f8\u7531\u65e5\u672c\u682a\u5f0f\u4f1a\u793e\u5149\u9a70\u6295\u8d44\u6210\u7acb\uff0c\u662f\u4e00\u5bb6\u4ee5\u9ad8\u7cbe\u5ea6\u9540\u819c\u673a\u7684\u8bbe\u8ba1\u4e0e\u5236\u9020\u4e3a\u57fa\u7840\u7684\u5916\u5546\u72ec\u8d44\u4f01\u4e1a\u3002\u81ea2011\u5e74\u8d77\uff0c\u8fde\u7eed\u88ab\u8ba4\u5b9a\u4e3a\u9ad8\u65b0\u6280\u672f\u4f01\u4e1a\u3002<\/p>\n \u5149\u9a70\u79d1\u6280\u627f\u62c5\u9540\u819c\u673a\u7814\u53d1\u3001\u8bbe\u8ba1\u3001\u7ec4\u88c5\u8c03\u8bd5\u3001\u552e\u540e\u670d\u52a1\u3002\u751f\u4ea7\u7528\u4e8e\u5149\u901a\u4fe1\u8bbe\u5907\u3001\u5bfc\u5149\u7cfb\u7edf\u4e2d\u5236\u5907\u5404\u79cd\u5149\u5b66\u90e8\u4ef6\u7684\u589e\u900f\u819c\uff1b\u5404\u7c7b\u578b\u6ee4\u5149\u7247\u7684\u9ad8\u7cbe\u5ea6\u9540\u819c\u8bbe\u5907\uff1b\u5de5\u827a\u7684\u7814\u7a76\u548c\u5f00\u53d1\u3002<\/p>\n <\/p>\n \u5b98\u7f51\uff1ahttps:\/\/www.lamresearch.com\/<\/p>\n 2012\u5e74\u6536\u8d2d\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u5546Novellus Systems\u3002<\/p>\n \u516c\u53f8\u4ea7\u54c1\u56f4\u7ed5\u523b\u8680\u3001\u8584\u819c\u6c89\u79ef\u3001\u6e05\u6d17\u4e09\u5927\u8bbe\u5907\u9886\u57df\u5e03\u5c40\uff0c\u5728\u523b\u8680\u8bbe\u5907\u548cCVD\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u5e02\u573a\u5360\u636e\u9886\u5148\u5730\u4f4d\u3002<\/p>\n \u5728\u8584\u819c\u6c89\u79ef\u5e02\u573a\uff0c\u516c\u53f8\u6c89\u79ef\u5de5\u827a\u53ef\u5f62\u6210\u7528\u4e8e\u5236\u9020\u534a\u5bfc\u4f53\u5668\u4ef6\u7684\u91d1\u5c5e\u819c\u548c\u7535\u89e3\u8d28\u819c\u6750\u6599\u5c42\u3002 ECD \u53ef\u751f\u6210\u8fde\u63a5\u96c6\u6210\u7535\u8def\u4e2d\u5668\u4ef6\u7684\u94dc\u4e92\u8fde\uff1bALD\u6280\u672f\u4ee5\u5355\u539f\u5b50\u819c\u5f62\u5f0f\u901a\u8fc7\u5faa\u73af\u53cd\u5e94\u9010\u5c42\u6c89\u79ef\u5728\u57fa\u7247\u8868\u9762\u5236\u9020\u8584\u58c1\u5c42\uff1b CVD\u6280\u672f\u5219\u901a\u8fc7\u6c14\u4f53\u5206\u5b50\u5728\u5916\u90e8\u80fd\u91cf\u4f5c\u7528\u4e0b\u53d1\u751f\u5316\u5b66\u53cd\u5e94\u5e76\u5728\u886c\u5e95\u8868\u9762\u6c89\u79ef\u6210\u819c\u3002<\/p>\n \u5b98\u7f51\uff1ahttps:\/\/info.picosun.com\/c<\/p>\n Picosun Group \u662f\u534a\u5bfc\u4f53\u548c\u5176\u4ed6\u884c\u4e1a AGILE ALD\u00ae\uff08\u539f\u5b50\u5c42\u6c89\u79ef\uff09\u8584\u819c\u9540\u819c\u6280\u672f\u7684\u9886\u5148\u4f9b\u5e94\u5546\u3002<\/p>\n PICOSUN\u00ae \u4ea7\u54c1\u7ec4\u5408\u8303\u56f4\u4ece\u7528\u4e8e\u6700\u5927 300 mm \u6676\u5706\u5c3a\u5bf8\u7684\u5168\u81ea\u52a8\u3001\u5927\u89c4\u6a21\u5de5\u4e1a\u6279\u91cf ALD \u7cfb\u7edf\u5230\u66f4\u5c0f\u89c4\u6a21\u7684\u7814\u7a76\u548c\u8bd5\u751f\u4ea7\u5de5\u5177\uff0c\u7279\u522b\u81f4\u529b\u4e8e\u4e3a\u9ad8\u8fbe 200 mm \u6676\u5706\u5e02\u573a\u63d0\u4f9b\u7ecf\u6d4e\u9ad8\u6548\u7684\u4ea4\u94a5\u5319\u5236\u9020\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n -----END-----<\/strong><\/em><\/p>\n \u6d3b\u52a8\u63a8\u8350<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n \u8bae\u9898<\/span><\/strong><\/p>\n<\/td>\n \u62df\u9080\u8bf7\u4f01\u4e1a<\/span><\/strong><\/p>\n<\/td>\n<\/tr>\n TGV\u73bb\u7483\u6838\u5fc3\u6280\u672f\u7684\u6311\u6218\u4e0e\u89e3\u51b3\u65b9\u6848<\/span><\/p>\n<\/td>\n \u5e7f\u4e1c\u4f5b\u667a\u82af\u5fae\u7535\u5b50\u6280\u672f\u7814\u7a76\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n \u8096\u7279\u73bb\u7483\u8d4b\u80fd\u5148\u8fdb\u5c01\u88c5<\/span><\/p>\n<\/td>\n \u8096\u7279\u96c6\u56e2<\/span><\/p>\n<\/td>\n<\/tr>\n \u73bb\u7483\u57fa\u677f\u901a\u5b54\u586b\u5b54\u6280\u672f\u63a2\u8ba8<\/span><\/p>\n<\/td>\n \u4e0a\u6d77\u5929\u627f\/\u5e7f\u4e1c\u5929\u627f\u79d1\u6280\u80a1\u4efd\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n \u663e\u5fae\u955c\u5728\u534a\u5bfc\u4f53\u5148\u8fdb\u5c01\u88c5\u7f3a\u9677\u68c0\u6d4b\u4e2d\u7684\u5e94\u7528<\/span><\/p>\n<\/td>\n \u5e7f\u4e1c\u6167\u666e\u5149\u5b66\u79d1\u6280\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n PVD \u6280\u672f\u5728\u73bb\u7483\u57fa\u677f\u5148\u8fdb\u5c01\u88c5\u5236\u7a0b\u5e94\u7528<\/span><\/p>\n<\/td>\n \u5dfd\u9716\u79d1\u6280\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n TGV\u91d1\u5c5e\u7ebf\u8def\u5236\u4f5c\u7684\u5de5\u827a\u96be\u70b9\u53ca\u6280\u672f\u89e3\u51b3\u8def\u5f84<\/span><\/p>\n<\/td>\n \u6e56\u5317\u901a\u683c\u5fae\u7535\u8def\u79d1\u6280\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n \u5229\u7528\u6fc0\u5149\u8bf1\u5bfc\u6df1\u5ea6\u523b\u8680\u6280\u672f\u5b9e\u73b0\u96c6\u6210\u591a\u79cd\u529f\u80fd\u7ed3\u6784\u73bb\u7483\u57fa\u677f\u52a0\u5de5<\/span><\/p>\n<\/td>\n \u4e50\u666e\u79d1\u00a0\u4e2d\u56fd\u533a<\/span><\/p>\n<\/td>\n<\/tr>\n \u57fa\u4e8eTGV\u7684\u9ad8\u6027\u80fdIPD\u8bbe\u8ba1\u5f00\u53d1\u53ca\u5e94\u7528<\/span><\/p>\n<\/td>\n \u82af\u548c\u534a\u5bfc\u4f53\u79d1\u6280\uff08\u4e0a\u6d77\uff09\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n \u591a\u7269\u7406\u573a\u4eff\u771f\u6280\u672f\u5728\u73bb\u7483\u57fa\u5148\u8fdb\u5c01\u88c5\u4e2d\u7684\u5e94\u7528<\/span><\/p>\n<\/td>\n \u6e56\u5357\u8d8a\u6469\u5148\u8fdb\u534a\u5bfc\u4f53\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n \u9ad8\u5bc6\u73bb\u7483\u677f\u7ea7\u5c01\u88c5\u53ca\u5f02\u6784\u96c6\u6210\u5de5\u827a\u5f00\u53d1\u6311\u6218\u53ca\u89e3\u51b3\u65b9\u6848<\/span><\/p>\n<\/td>\n \u6210\u90fd\u5955\u6210\u79d1\u6280\u80a1\u4efd\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n PVD\u8bbe\u5907\u5728TGV\u6280\u672f\u4e2d\u7684\u6df1\u5b54\u9540\u819c\u5e94\u7528<\/span><\/p>\n<\/td>\n \u5e7f\u4e1c\u6c47\u6210\u771f\u7a7a\u79d1\u6280\u80a1\u4efd\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n \u4ece\u5706\u5230\u65b9:Evatec\u5148\u8fdb\u5c01\u88c5\u57fa\u677fFOPLP\u523b\u8680\u548c\u6e85\u5c04\u65b9\u6848<\/span><\/p>\n<\/td>\n Evatec China<\/span><\/p>\n<\/td>\n<\/tr>\n \u73bb\u7483\u57fa\u677f\u5c01\u88c5\u6280\u672f\u7684\u6700\u65b0\u8fdb\u5c55\u4e0e\u672a\u6765\u5c55\u671b<\/span><\/p>\n<\/td>\n \u6df1\u5733\u6247\u82af\u96c6\u6210\u534a\u5bfc\u4f53\u6709\u9650\u516c\u53f8<\/span><\/p>\n<\/td>\n<\/tr>\n \u73bb\u7483\u57fa\u677f\u5275\u65b0\u6280\u8853\u8207\u61c9\u7528\uff1a\u5f9e\u7b49\u96e2\u5b50\u901a\u5b54\u5230\u8868\u9762\u6539\u8cea\u8207\u91d1\u5c6c\u7a2e\u5b50\u5c64\u6280\u8853<\/span><\/p>\n<\/td>\n \u53f0\u6e7e\u53cb\u5a01\u79d1\u6280<\/span><\/p>\n<\/td>\n<\/tr>\n\n
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