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SOI\u6676\u5706\u548c\u5f00\u53d1\u65b0\u7684\u6676\u5706\u6750\u6599\u3002\u00a0\u82cf\u5dde\u8fc8\u59c6\u601d\u53d1\u660e\u7684GCIF(Grinding chuck impact free) \u6280\u672f\uff0c\u901a\u8fc7CMP\u80fd\u505a\u5230\u5668\u4ef6\u5c420.5um\uff0c\u4e14\u5747\u5300\u6027\u53ef\u8fbe\u5230\u00b10.05um\uff0cGCIF \u6280\u672f\u5728\u5236\u5907\u5176\u4ed6\u8d85\u5747\u5300\u7684\u6676\u5706\u6750\u6599\uff08\u7845\u5355\u6676\u7247\uff0c\u77f3\u82f1\u7247\uff0c\u7bee\u5b9d\u77f3\uff0c\u538b\u7535\u6750\u6599\uff09\u4e0a\u90fd\u5df2\u83b7\u5f97\u6210\u529f\u3002<\/span><\/p>\n <\/p>\n<\/section>\n 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