{"id":52377,"date":"2024-04-20T10:10:46","date_gmt":"2024-04-24T02:59:42","guid":{"rendered":"https:\/\/www.ab-sm.com\/?p=52377"},"modified":"2024-04-24T10:59:58","modified_gmt":"2024-04-24T02:59:58","slug":"b92b72a86e","status":"publish","type":"post","link":"https:\/\/www.ab-sm.com\/a\/52377","title":{"rendered":"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf"},"content":{"rendered":"
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1\u00a0<\/span>\u673a\u68b0\u78e8\u629b\u6280\u672f<\/span><\/strong><\/section>\n
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1.1 <\/span>\u4f20\u7edf\u673a\u68b0\u78e8\u629b\u6280\u672f\u00a0<\/span><\/span><\/strong><\/span><\/p>\n

\u4ece\u78e8\u6599\u8fd0\u52a8\u65b9\u5f0f\u6765\u770b\uff0c\u4f20\u7edf\u673a\u68b0\u78e8\u629b\u6280\u672f\u7ecf\u5386\u4e86\u4ece\u6e38\u79bb\u78e8\u6599\u7814\u78e8\u5230\u56fa\u7ed3\u78e8\u6599\u78e8\u524a\u7684\u53d1\u5c55\u8fc7\u7a0b\uff0c\u78b3\u5316\u7845\u886c\u5e95\u7684\u78e8\u629b\u6280\u672f\u4e5f\u968f\u4e4b\u4e0d\u65ad\u53d1\u5c55\u548c\u8fdb\u6b65<\/span>.\u00a0<\/span><\/p>\n

\u4f20\u7edf\u7684\u6e38\u79bb\u78e8\u6599\u7814\u78e8\u4e3b\u8981\u901a\u8fc7\u7814\u78e8\u76d8\u3001\u5de5\u4ef6\u548c\u78e8\u7c92\u4e09\u8005\u4e4b\u95f4\u7684\u76f8\u4e92\u4f5c\u7528\uff0c\u8fbe\u5230\u6750\u6599\u53bb\u9664\u7684\u76ee\u7684\uff0c\u4f46\u56e0\u78e8\u7c92\u5206\u5e03\u4e0d\u5747\u5300\u3001\u8fd0\u52a8\u8f68\u8ff9\u4e0d\u53ef\u63a7\uff0c\u96be\u4ee5\u4fdd\u8bc1\u78b3\u5316\u7845\u886c\u5e95\u7684\u5f62\u72b6\u7cbe\u5ea6\u548c\u8868\u9762\u8d28\u91cf <\/span>. \u7814\u7a76\u4eba\u5458<\/span>\u4f7f\u7528 \u4e0d\u540c\u7684\u78e8\u6599\u5bf9\u78b3\u5316\u7845\u8fdb\u884c\u52a0\u5de5\uff0c\u53d1\u73b0\u91d1\u521a\u77f3\u78e8\u6599\u62e5\u6709\u8f83\u597d\u7684\u6750\u6599\u53bb\u9664\u7387\uff0c\u4e14<\/span>Yu\u7b49<\/span>\u53d1\u73b0\u7814\u78e8\u540e\u7684\u78b3\u5316 \u7845\u7684\u8868\u9762\u5f62\u72b6\u7cbe\u5ea6\u6709\u4e86\u660e\u663e\u7684\u6539\u5584 <\/span>.Yuan \u7b49<\/span>\u7814\u7a76\u4e0d\u540c\u7c92\u5f84\u91d1\u521a\u77f3\u7684\u52a0\u5de5\u6548\u679c\uff0c\u4ed6\u4eec\u53d1\u73b0\u5f53\u91d1\u521a\u77f3\u7c92\u5f84\u4e3a<\/span>0.5 \u00b5m\u65f6\uff0c\u53ef\u4ee5\u83b7\u5f97\u6700\u4f73\u8868\u9762\u7c97\u7cd9\u5ea6<\/span>R<\/span>a=48.7 nm\u7684 \u78b3\u5316\u7845\u8868\u9762\uff0c\u4e14\u6750\u6599\u53bb\u9664\u7387\u4e3a<\/span>3.18 \u00b5m\/h. Pan\u7b49<\/span>\u4f7f\u7528\u91d1\u521a\u77f3\u7802\u8f6e\u78e8\u524a\u78b3\u5316\u7845\u886c\u5e95\uff0c\u53ef\u4ee5\u5f97\u5230\u8868\u9762\u7c97\u7cd9 \u5ea6 <\/span>R<\/span>a=12 nm\uff0c\u4e14\u6676\u5706\u6574\u4f53\u539a\u5ea6\u53d8\u5316\uff08<\/span>Total Thickness \u00a0Variation\uff09<\/span><3 \u00b5m \u7684\u78b3\u5316\u7845\u886c\u5e95 <\/span>. \u56fa\u7ed3\u78e8\u6599\u78e8\u524a<\/span>\u901a \u8fc7\u4f7f\u7528\u56fa\u7ed3\u78e8\u6599\u78e8\u76d8\u6216\u7802\u8f6e\u7684\u65b9\u5f0f\uff0c\u53ef\u4ee5\u6709\u6548\u63d0\u9ad8 \u78e8\u7c92\u5229\u7528\u7387<\/span>. \u4f46\u662f\u7531\u4e8e\u78e8\u7c92\u51fa\u5203\u9ad8\u5ea6\u4e0d\u4e00\u81f4\uff0c\u78b3\u5316\u7845 \u8868\u9762\u4f1a\u4ea7\u751f\u4e25\u91cd\u7684\u5212\u75d5\u548c\u8868\u9762\u3001\u4e9a\u8868\u9762\u88c2\u7eb9\uff0c\u52a0\u5de5\u540e \u8868\u9762\u8d28\u91cf\u96be\u4ee5\u6ee1\u8db3\u629b\u5149\u524d\u7684\u8981\u6c42 <\/span>. \u7814\u7a76\u4eba\u5458<\/span>\u901a \u8fc7\u4f7f\u7528\u8d85\u7ec6\u78e8\u6599\u7802\u8f6e\uff0c\u4ee5\u7eb3\u7c73\u78e8\u524a\u65b9\u5f0f\u5bf9\u78b3\u5316\u7845\u8fdb \u884c\u52a0\u5de5\uff0c\u53ef\u4ee5\u83b7\u5f97 <\/span>R<\/span>a=2 nm \u5de6\u53f3\u7684\u8868\u9762\u7c97\u7cd9\u5ea6 <\/span>.Huo \u7b49<\/span>\u4f7f\u7528\u7eb3\u7c73\u78e8\u524a\u52a0\u5de5\u78b3\u5316\u7845\uff0c\u53ef\u4ee5\u83b7\u5f97\u5c0f\u4e8e <\/span>1 \u00b5m \u7684\u5e73\u9762\u5ea6 <\/span>. \u867d\u7136\u7eb3\u7c73\u78e8\u524a\u53ef\u4ee5\u83b7\u5f97\u8f83\u4f4e\u7684\u8868\u9762\u7c97\u7cd9 \u5ea6\uff0c\u4f46\u662f\u5b58\u5728\u8d85\u7ec6\u78e8\u6599\u7802\u8f6e\u5236\u4f5c\u6210\u672c\u9ad8\u53ca\u5236\u4f5c\u96be\u5ea6\u5927\uff0c\u4e14\u52a0\u5de5\u540e\u4ecd\u7136\u4f1a\u5b58\u5728\u4e9a\u5fae\u7c73\u6df1\u7684\u88c2\u7eb9\u3001\u635f\u4f24\u5c42\u7b49\u95ee\u9898\uff0c\u8fd9\u4e9b\u90fd\u662f\u5176\u4e9f\u5f85\u89e3\u51b3\u7684\u96be\u9898<\/span>. \u4f5c\u4e3a\u9ad8\u6027\u80fd\u5668\u4ef6\u7684\u8f7d\u4f53\uff0c\u78b3\u5316\u7845\u886c\u5e95\u8981\u6c42\u539f\u5b50\u7ea7\u7684\u8868\u9762\u4e14\u65e0\u635f\u4f24\u5c42\uff0c \u7814\u78e8\u53ca\u78e8\u524a\u52a0\u5de5\u540e\u7684\u8868\u9762\u9700\u8981\u8fdb\u4e00\u6b65\u901a\u8fc7\u629b\u5149\u8fdb\u884c\u52a0\u5de5<\/span>.\u7531\u4e8e\u629b\u5149\u4f7f\u7528\u7684\u662f\u67d4\u6027\u52a0\u5de5\u5de5\u5177\uff0c\u5728\u4e00\u5b9a\u7a0b\u5ea6 \u4e0a\u4f1a\u7834\u574f\u886c\u5e95\u5e73\u6574\u5ea6\uff0c\u6240\u4ee5\u5bf9\u78e8\u524a\u52a0\u5de5\u540e\u7684\u7fd8\u66f2\u5ea6\u4e5f\u6709\u7740\u8f83\u9ad8\u7684\u8981\u6c42 <\/span>.\u00a0<\/span>\u7814\u7a76\u4eba\u5458<\/span>\u4f7f\u7528\u7eb3\u7c73\u7ea7\u7684\u91d1 \u521a\u77f3\u78e8\u7c92\u5bf9\u78b3\u5316\u7845\u886c\u5e95\u8fdb\u884c\u673a\u68b0\u629b\u5149\uff0c\u53ef\u4ee5\u83b7\u5f97\u4e9a \u7eb3\u7c73\u7ea7\u7684\u8868\u9762\u7c97\u7cd9\u5ea6\uff0c\u4f46\u662f\u9700\u8981\u82b1\u8d39\u8f83\u957f\u7684\u65f6\u95f4\u53ca\u8f83\u9ad8\u7684\u6210\u672c <\/span>. <\/span>\u629b\u5149\u540e\u7684\u8868\u9762\u635f\u4f24\u53ca\u7c97\u7cd9\u5ea6\u867d\u6709\u6240\u6539\u5584\uff0c\u4f46\u52a0\u5de5\u540e\u8868\u9762\u4ecd\u7136\u4f1a\u5b58\u5728\u5212\u75d5\uff0c\u96be\u4ee5\u6ee1\u8db3\u886c\u5e95\u539f \u5b50\u7ea7\u8868\u9762\u7684\u8981\u6c42<\/span>.\u00a0<\/span><\/p>\n

\"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf\"<\/span><\/p>\n

\u5178\u578b\u673a\u68b0\u78e8\u629b\u6280\u672f\u7684\u6750\u6599\u53bb\u9664\u673a\u7406\u5982\u56fe <\/span>1 <\/span>\u6240 \u793a\uff0c<\/span>Hx<\/span>\u4e3a\u76f8\u540c\u65f6\u95f4\u5185\u4e0d\u540c\u52a0\u5de5\u65b9\u5f0f\u7684\u6750\u6599\u53bb\u9664\u6df1\u5ea6<\/span>. \u00a0<\/span>\u7eb3\u7c73\u78e8\u524a\u4f7f\u7528\u7684\u78e8\u6599\u4e00\u822c\u4e3a <\/span>W1-10<\/span>\u7684\u91d1\u521a\u77f3\uff0c\u5176\u6750\u6599\u53bb\u9664\u7387\u9ad8\uff0c\u4e14\u8868\u9762\u8d28\u91cf\u8f83\u597d\uff0c\u4f46\u662f\u8d85\u7ec6\u7802\u8f6e\u9020\u4ef7\u9ad8 \u5bfc\u81f4\u52a0\u5de5\u6210\u672c\u8f83\u9ad8\uff0c\u5e76\u4e14\u4f1a\u6b8b\u7559\u4e9a\u5fae\u7c73\u6df1\u7684\u635f\u4f24\u5c42 <\/span>. <\/span>\u4f20\u7edf\u78e8\u524a\u4f7f\u7528\u7684\u78e8\u6599\u4e00\u822c\u4e3a <\/span>W50-100 <\/span>\u7684\u91d1\u521a\u77f3\uff0c\u867d\u7136\u78e8\u6599\u7c92\u5ea6\u8981\u8fdc\u9ad8\u4e8e\u7eb3\u7c73\u78e8\u524a\u65f6\u4f7f\u7528\u7684\u78e8\u6599\uff0c\u4f46\u662f\u7531\u4e8e\u4f20\u7edf\u78e8\u524a\u52a0\u5de5\u65f6\uff0c\u5de5\u5177\u7684\u8f6c\u901f\u8fc7\u4f4e\uff0c\u52a0\u5de5\u533a\u57df\u78e8\u6599\u7ebf\u901f\u5ea6\u8fdc\u4f4e\u4e8e\u7eb3\u7c73\u78e8\u524a\u4e2d\u7684\u7ebf\u901f\u5ea6\uff0c\u6240\u4ee5\u5176\u6750\u6599 \u53bb\u9664\u7387\u5c0f\u4e8e\u7eb3\u7c73\u78e8\u524a\uff0c\u4e14\u52a0\u5de5\u540e\u8868\u9762\u8d28\u91cf\u8f83\u5dee\uff0c\u635f\u4f24\u5c42\u539a\u8fbe\u5fae\u7c73\u7ea7 <\/span>.<\/span>\u673a\u68b0\u629b\u5149\u4f7f\u7528\u7684\u78e8\u6599\u4e00\u822c\u4e3a <\/span>W0.1-3 <\/span>\u7684\u91d1\u521a\u77f3\u78e8\u6599\uff0c\u52a0\u5de5\u540e\u7684\u8868\u9762\u8d28\u91cf\u8f83\u597d\uff0c\u4f46\u5b58\u5728\u5212\u75d5 \u548c\u8f83\u6d45\u7684\u4e9a\u8868\u9762\u635f\u4f24\u5c42 <\/span>. <\/span>\u7814\u78e8\u4f7f\u7528\u7684\u78e8\u6599\u4e00\u822c\u4e3a <\/span>W0.5-20 <\/span>\u7684\u91d1\u521a\u77f3\u548c\u78b3\u5316\u7845\uff0c\u5b83\u7684\u6750\u6599\u53bb\u9664\u7387\u53ca\u8868 \u9762\u8d28\u91cf\u4ecb\u4e8e\u4e0a\u8ff0<\/span>3<\/span>\u79cd\u52a0\u5de5\u65b9\u6cd5\u4e4b\u95f4<\/span>.\u00a0<\/span><\/p>\n

\"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf\"<\/p>\n

\n

1.2 <\/span>\u7279\u79cd\u80fd\u91cf\u8f85\u52a9\u673a\u68b0\u78e8\u629b\u6280\u672f\u00a0<\/span><\/span><\/strong><\/p>\n

\u4f20\u7edf\u7684\u673a\u68b0\u78e8\u629b\u6280\u672f\u53ef\u4ee5\u5b9e\u73b0\u5bf9\u6750\u6599\u7684\u9ad8\u6548\u53bb\u9664\uff0c\u4f46\u662f\u52a0\u5de5\u540e\u8f83\u5dee\u7684\u8868\u9762\u8d28\u91cf\u662f\u5f53\u524d\u6025\u9700\u4f18\u5316\u7684\u65b9\u5411<\/span>. <\/span>\u4e3a\u4e86\u89e3\u51b3\u8fd9\u4e00\u96be\u9898\uff0c\u56fd\u5185\u5916\u5b66\u8005\u5f15\u5165\u7279\u79cd\u80fd\u91cf \u6765\u8f85\u52a9\u673a\u68b0\u78e8\u629b\u52a0\u5de5\uff0c\u5982\u56fe <\/span>2<\/span>\u6240\u793a <\/span>.<\/span>\u8d85\u58f0\u632f\u52a8\u8f85\u52a9\u78e8\u524a<\/span>\u4e3b\u8981\u901a\u8fc7\u5bf9\u4e3b\u8f74\u6dfb\u52a0\u8d85\u58f0\u632f\u52a8\u7684\u65b9\u5f0f\u8f85\u52a9\u78e8\u524a\uff1b\u6fc0\u5149\u8f85\u52a9\u52a0\u5de5<\/span>\u901a\u8fc7\u6fc0\u5149\u7167\u5c04\u78b3\u5316\u7845\u8868\u9762\uff0c\u8fbe\u5230\u964d\u4f4e\u5176\u8868\u9762\u786c\u5ea6\u7684\u76ee\u7684\uff1b\u7535\u706b\u82b1\u78e8\u524a<\/span>\u901a\u8fc7\u78e8\u7c92\u7684\u95f4\u6b47\u6027\u653e\u7535\u5b9e\u73b0\u5bf9\u6750\u6599\u7684\u53bb\u9664 <\/span>. <\/span>\u7279\u79cd\u80fd\u91cf\u8f85\u52a9\u673a\u68b0\u78e8\u629b\u6280\u672f\u5728\u4fdd\u8bc1\u8f83\u9ad8\u78e8\u629b\u52a0\u5de5\u6548\u7387\u7684\u540c\u65f6\uff0c\u83b7\u5f97\u8868\u9762\u8d28\u91cf\u826f\u597d\u7684\u78b3\u5316\u7845\u886c\u5e95\uff0c\u4e3a\u8d85\u7cbe\u5bc6\u629b\u5149\u52a0\u5de5\u8282\u7ea6\u5de5\u5e8f\u4f59\u91cf<\/span>.<\/span><\/p>\n

\"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf\"<\/p>\n

\n

\u8d85\u58f0\u632f\u52a8\u8f85\u52a9\u78e8\u524a\uff08<\/span>Ultrasonic Vibration Assisted \u00a0Grinding\uff0c<\/span> UVAG\uff09\u662f\u4e00\u79cd\u65b0\u578b\u7684\u7cbe\u5bc6\u52a0\u5de5\u6280\u672f\uff0c\u5177\u6709 \u63d0\u9ad8\u6750\u6599\u53bb\u9664\u7387\u3001\u51cf\u5c0f\u78e8\u524a\u529b\u3001\u63d0\u9ad8\u52a0\u5de5\u7cbe\u5ea6\u548c\u8868\u9762 \u663e\u8457\u4f18\u52bf \u5b8c\u6574\u6027\u7b49\u4f18\u70b9\uff0c\u7279\u522b\u662f\u5728\u786c\u8106\u6750\u6599\u7cbe\u5bc6\u52a0\u5de5\u4e2d\u5177\u6709 <\/span>.\u66f9\u5efa\u56fd\u7b49<\/span>\u7814\u7a76\u4e86\u78b3\u5316\u7845\u7684\u8d85\u58f0\u632f\u52a8\u8f85 \u52a9\u78e8\u524a\uff0c\u4ed6\u4eec\u8ba4\u4e3a\u8d85\u58f0\u632f\u52a8\u4f1a\u5bfc\u81f4\u6750\u6599\u53bb\u9664\u91cf\u589e\u52a0\uff0c \u4e14\u6709\u5229\u4e8e\u5b9e\u73b0\u78b3\u5316\u7845\u886c\u5e95\u7684\u5851\u6027\u53bb\u9664 <\/span>.Li \u7b49<\/span>\u901a\u8fc7 \u8d85\u58f0\u632f\u52a8\u78e8\u524a<\/span>6H-SiC\u8584\u819c\uff0c\u53ef\u83b7\u5f97\u8868\u9762\u7c97\u7cd9\u5ea6\u4f4e\u4e8e <\/span>23 nm \u7684\u8868\u9762 <\/span>. \u632f\u5e45\u7531\u8d85\u58f0\u7535\u6e90\u7684\u8f93\u51fa\u529f\u7387\u8c03\u8282\uff0c\u4f46 \u52a0 \u5de5 \u8fc7 \u7a0b \u4e2d \u7684 \u5b9e \u9645 \u632f \u52a8 \u632f \u5e45 \u4f1a \u53d7 \u5230 \u78e8 \u524a \u529b \u7684 \u5f71 \u54cd<\/span>\u00a0\uff0c\u56e0\u6b64<\/span>Chen\u7b49<\/span>\u63d0\u51fa\u4e00\u79cd\u5728\u78e8\u524a\u8fc7\u7a0b\u4e2d\u5b9e\u65f6\u76d1 \u63a7\u5b9e\u9645\u632f\u52a8\u5e45\u5ea6\u7684\u65b9\u6cd5\uff0c\u8be5\u65b9\u6cd5\u4e0d\u53d7\u5de5\u5177\u65cb\u8f6c\u3001\u51b7\u5374 \u6db2\u7b49\u5916\u754c\u56e0\u7d20\u7684\u5e72\u6270\u548c\u5f71\u54cd<\/span>.\u00a0<\/span><\/p>\n

\u6fc0\u5149\u8f85\u52a9\u52a0\u5de5\uff08<\/span>Laser Assisted Machining\uff0c<\/span> LAM\uff09 \u5177\u6709\u6750\u6599\u635f\u4f24\u5c0f\u3001\u70ed\u5f71\u54cd\u533a\u5c0f\u7b49\u4f18\u70b9<\/span>. \u901a\u8fc7\u6fc0\u5149\u9884\u5904 \u7406\uff0c\u80fd\u964d\u4f4e\u78b3\u5316\u7845\u7684\u786c\u5ea6\uff0c\u4ece\u800c\u63d0\u9ad8\u6750\u6599\u53bb\u9664\u7387\uff0c\u7531 \u4e8e\u52a0\u5de5\u8fc7\u7a0b\u7b80\u5355\u4e14\u6548\u679c\u663e\u8457\uff0c\u52a0\u5de5\u78b3\u5316\u7845\u7b49\u786c\u8106\u6750 \u6599\u6709\u5f88\u597d\u7684\u5e94\u7528\u524d\u666f <\/span>. Chen\u7b49<\/span>\u7528\u6fc0\u5149\u7167\u5c04\u78b3\u5316\u7845\u5207\u5272\u7247\u7684\u8868\u9762\uff0c\u964d\u4f4e\u78b3\u5316\u7845\u7684\u786c\u5ea6\uff0c\u4f7f\u5f97\u78e8\u524a\u52a0\u5de5\u65f6 \u7684\u6750\u6599\u53bb\u9664\u7387\u5f97\u5230\u4e86\u660e\u663e\u7684\u63d0\u9ad8 <\/span>. Luo \u7b49<\/span>\u4f7f\u7528\u6fc0 \u5149\u8f85\u52a9\u52a0\u5de5\u78b3\u5316\u7845\uff0c\u83b7\u5f97\u7684\u8868\u9762\u7c97\u7cd9\u5ea6\u4e0e\u4f20\u7edf\u78e8\u524a\u76f8\u6bd4\u964d\u4f4e\u4e86 <\/span>37%~40%\uff0c\u4e14\u4e9a\u8868\u9762\u635f\u4f24\u5c42\u539a\u5ea6\u4e0b\u964d\u4e86 <\/span>22%~50.6%. Kim\u7b49<\/span>\u901a\u8fc7\u5c06<\/span>CO2\u6fc0\u5149\u6e90\u4e0e\u673a\u68b0\u629b\u5149 \u76f8\u7ed3\u5408\uff0c\u9996\u6b21\u5c1d\u8bd5\u5728\u6d46\u6db2\u73af\u5883\u4e2d\u8fdb\u884c\u6fc0\u5149\u8f85\u52a9\u629b\u5149\uff0c \u63d0\u9ad8\u4e86\u6750\u6599\u53bb\u9664\u7387 <\/span>. Abrego\u7b49<\/span>\u901a\u8fc7\u6fc0\u5149\u8f85\u52a9\u52a0\u5de5 \u53ef\u4ee5\u4f7f\u6750\u6599\u53bb\u9664\u7387\u76f8\u8f83\u4e8e\u4f20\u7edf\u629b\u5149\u63d0\u9ad8 <\/span>43%. \u867d\u7136 \u6fc0\u5149\u8f85\u52a9\u52a0\u5de5\u7684\u6210\u672c\u8f83\u9ad8\uff0c\u4f46\u662f\u53ef\u4ee5\u663e\u8457\u63d0\u9ad8\u52a0\u5de5 \u8d28\u91cf\u53ca\u52a0\u5de5\u6548\u7387\uff0c\u540c\u65f6\u53ef\u4ee5\u5b9e\u73b0\u6df7\u5408\u52a0\u5de5\uff0c\u6781\u5927\u7f29\u77ed \u52a0\u5de5\u65f6\u95f4\u5e76\u4e14\u51cf\u5c11\u52a0\u5de5\u6b65\u9aa4\uff0c\u662f\u4e00\u79cd\u975e\u5e38\u6709\u524d\u666f\u7684\u7cbe\u5bc6\u52a0\u5de5\u6280\u672f<\/span>.\u00a0<\/span><\/p>\n

\u7535\u706b\u82b1\u78e8\u524a\uff08<\/span>Electrical discharge grinding\uff0c<\/span> EDG\uff09 \u662f \u901a\u8fc7\u77f3\u58a8\u8f6e\u5bf9\u5de5\u4ef6\u7684\u95f4\u6b47\u653e\u7535\u5b9e\u73b0\u6750\u6599\u7684\u53bb \u9664<\/span>\u00a0<\/span>. Yan \u7b49<\/span>\u5148\u4f7f\u7528\u91d1\u521a\u77f3\u4f5c\u4e3a\u5de5\u5177\u7535\u6781\u8fdb\u884c\u78b3 \u5316\u7845\u7684\u7535\u706b\u82b1\u52a0\u5de5\uff0c\u7136\u540e\u4f7f\u7528\u91d1\u521a\u77f3\u53bb\u9664\u7535\u706b\u82b1\u52a0 \u5de5\u8fc7\u7a0b\u4e2d\u5f62\u6210\u7684<\/span>2~3 \u00b5m\u539a\u7684\u91cd\u94f8\u5c42\uff0c\u52a0\u5de5\u540e\u7684\u8868\u9762 \u7c97\u7cd9\u5ea6\u4e3a <\/span>1.85 nm. \u7535\u706b\u82b1\u52a0\u5de5\u540e\uff0c\u8868\u9762\u4f1a\u6b8b\u7559\u8f83\u539a \u7684\u518d\u51dd\u56fa\u5c42\u548c\u70ed\u81f4\u5fae\u88c2\u7eb9\uff0c\u4e3a\u4e86\u53bb\u9664\u51dd\u56fa\u5c42\u4ee5\u53ca\u5fae \u88c2\u7eb9\uff0c\u9700\u8981\u5728\u7535\u706b\u82b1\u52a0\u5de5\u540e\u8fdb\u884c\u591a\u6b21\u957f\u65f6\u95f4\u7684\u629b\u5149 \u5904\u7406\uff0c\u6545\u629b\u5149\u7684\u7ecf\u6d4e\u3001\u65f6\u95f4\u6210\u672c\u8f83\u9ad8<\/span>. \u56e0\u6b64\uff0c\u5982\u4f55\u51cf \u5c0f\u751a\u81f3\u6d88\u9664\u7535\u706b\u82b1\u5f15\u8d77\u7684\u51dd\u56fa\u5c42\u53ca\u5fae\u88c2\u7eb9\u662f\u7535\u706b\u82b1 \u78e8\u524a\u4e9f\u5f85\u89e3\u51b3\u7684\u96be\u9898<\/span>.<\/span><\/p>\n

\u00a01.3 <\/span>\u5c0f \u7ed3\u00a0<\/span><\/span><\/strong><\/span><\/p>\n

\u4f20\u7edf\u673a\u68b0\u78e8\u629b\u6280\u672f\u62e5\u6709\u8f83\u9ad8\u7684\u6750\u6599\u53bb\u9664\u7387\uff0c\u4f46 \u8f83\u4f4e\u7684\u52a0\u5de5\u8d28\u91cf\u4f7f\u5f97\u5176\u53ea\u9002\u7528\u4e8e\u5145\u5f53\u8d85\u7cbe\u5bc6\u629b\u5149\u7684 \u524d\u4e00\u9053\u5de5\u5e8f\uff0c\u5feb\u901f\u53bb\u9664\u5207\u5272\u5f15\u5165\u7684\u635f\u4f24\u5c42\uff0c\u63a7\u5236\u8868\u9762 \u8d28\u91cf\uff0c\u4e3a\u8d85\u7cbe\u5bc6\u629b\u5149\u51cf\u5c11\u53bb\u9664\u4f59\u91cf<\/span>. \u540c\u65f6\u7531\u4e8e\u886c\u5e95\u7fd8 \u66f2\u5ea6\u4f1a\u5bf9\u8d85\u7cbe\u5bc6\u629b\u5149\u8fc7\u7a0b\u4ea7\u751f\u8d1f\u9762\u5f71\u54cd\uff0c\u5728\u886c\u5e95\u7fd8 \u66f2\u5ea6\u8f83\u5927\u65f6\uff0c\u53ef\u80fd\u4f1a\u5bfc\u81f4\u886c\u5e95\u8868\u9762\u51fa\u73b0\u51f9\u51f8\u4e0d\u5e73\u7684 \u533a\u57df\uff0c\u5f71\u54cd\u6700\u7ec8\u7684\u52a0\u5de5\u8d28\u91cf\u548c\u7cbe\u5ea6<\/span>. \u6240\u4ee5\u5728\u5feb\u901f\u53bb\u9664 \u7684\u540c\u65f6\uff0c\u8fd8\u8981\u4fdd\u8bc1\u8f83\u4f4e\u7684\u886c\u5e95\u7fd8\u66f2\u5ea6<\/span>. \u867d\u7136\u5f15\u5165\u7279\u79cd \u80fd\u573a\u7684\u65b9\u5f0f\u53ef\u4ee5\u63d0\u9ad8\u673a\u68b0\u78e8\u629b\u52a0\u5de5\u7684\u52a0\u5de5\u8d28\u91cf\uff0c\u4f46 \u540c\u6837\u96be\u4ee5\u83b7\u5f97\u6ee1\u8db3\u8d28\u91cf\u8981\u6c42\u7684\u78b3\u5316\u7845\u886c\u5e95 <\/span>. \u901a\u8fc7\u5bf9 \u7279\u79cd\u80fd\u573a\u52a0\u5de5\u673a\u7406\u7684\u6df1\u5165\u7814\u7a76\uff0c\u5e76\u501f\u52a9\u65b0\u578b\u5728\u7ebf\u68c0 \u6d4b\u6280\u672f\u5bf9\u52a0\u5de5\u8fc7\u7a0b\u8fdb\u884c\u5b9e\u65f6\u76d1\u63a7\uff0c\u53ef\u4ee5\u6709\u6548\u63d0\u9ad8\u673a \u68b0\u78e8\u629b\u6280\u672f\u7684\u52a0\u5de5\u8d28\u91cf <\/span>. \u540c\u65f6\uff0c\u65b0\u7684\u81ea\u52a8\u5316\u3001\u667a\u80fd\u5316 \u8bbe\u5907\u7684\u7814\u53d1\u4e5f\u6709\u52a9\u4e8e\u7279\u79cd\u80fd\u573a\u8f85\u52a9\u673a\u68b0\u78e8\u629b\u6280\u672f\u5411 \u9ad8\u8d28\u91cf\u5316\u7684\u65b9\u5411\u53d1\u5c55<\/span>.\u00a0<\/span><\/p>\n

\"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf\"<\/span><\/p>\n

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2\u00a0<\/span>\u5316\u5b66\u53cd\u5e94\u78e8\u629b\u6280\u672f<\/span><\/strong><\/section>\n
\u00a0<\/span><\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n

\u7531\u4e8e\u9ad8\u8d28\u91cf\u7684\u78b3\u5316\u7845\u886c\u5e95\u9700\u8981\u539f\u5b50\u7ea7\u7684\u8868\u9762\u53ca \u8f83\u9ad8\u7684\u9762\u578b\u7cbe\u5ea6\uff0c\u4f20\u7edf\u7684\u673a\u68b0\u78e8\u629b\u6280\u672f\u96be\u4ee5\u83b7\u5f97\u6ee1 \u8db3\u8981\u6c42\u7684\u78b3\u5316\u7845\u886c\u5e95 <\/span>. \u5316\u5b66\u53cd\u5e94\u78e8\u629b\u6280\u672f\u901a\u8fc7\u5316\u5b66 \u8150\u8680\u6216\u8005\u673a\u68b0\u8bf1\u5bfc\u7684\u65b9\u5f0f\u5148\u4f7f\u886c\u5e95\u8868\u9762\u6750\u6599\u53d8\u8d28\u949d \u5316\uff0c\u518d\u5229\u7528\u78e8\u7c92\u5212\u64e6\u5b9e\u73b0\u6750\u6599\u53bb\u9664\uff0c\u53ef\u4ee5\u83b7\u5f97\u4e9a\u7eb3\u7c73 \u7ea7\u7684\u8868\u9762\u7c97\u7cd9\u5ea6\u4e14\u51cf\u5c0f\u751a\u81f3\u6d88\u9664\u886c\u5e95\u7684\u8868\u9762\u53ca\u4e9a\u8868\u9762\u635f\u4f24 <\/span>. \u6839\u636e\u5316\u5b66\u53cd\u5e94\u4ea7\u751f\u7684\u65b9\u5f0f\u5206\u4e3a\u4ee5\u5316\u5b66\u8150\u8680\u4e3a\u4e3b\u7684\u53cd\u5e94\u78e8\u629b\u6280\u672f\u4ee5\u53ca\u4ee5\u673a\u68b0\u8bf1\u5bfc\u4e3a\u4e3b\u7684\u53cd\u5e94\u78e8\u629b\u6280\u672f <\/span>. \u4ee5\u5316\u5b66\u8150\u8680\u4e3a\u4e3b\u7684\u53cd\u5e94\u78e8\u629b\u6280\u672f\u53ef\u4ee5\u83b7\u5f97 \u8d28\u91cf\u8f83\u9ad8\u7684\u8868\u9762\uff0c\u4f46\u662f\u5176\u6750\u6599\u53bb\u9664\u7387\u8f83\u4f4e\uff1b\u800c\u4ee5\u673a\u68b0 \u8bf1\u5bfc\u4e3a\u4e3b\u7684\u53cd\u5e94\u78e8\u629b\u6280\u672f\u53ef\u4ee5\u5728\u4fdd\u8bc1\u8868\u9762\u8d28\u91cf\u7684\u540c \u65f6\uff0c\u62e5\u6709\u8f83\u9ad8\u7684\u6750\u6599\u53bb\u9664\u7387<\/span>.\u00a0<\/span><\/p>\n

2.1 <\/span>\u4ee5\u5316\u5b66\u8150\u8680\u4e3a\u4e3b\u7684\u53cd\u5e94\u78e8\u629b\u6280\u672f\u00a0<\/span><\/span><\/strong><\/span><\/p>\n

\u4ee5\u5316\u5b66\u8150\u8680\u4e3a\u4e3b\u7684\u53cd\u5e94\u78e8\u629b\u6280\u672f\u7684\u6838\u5fc3\u662f\u901a\u8fc7 \u5316\u5b66\u8bd5\u5242\u6216\u7279\u79cd\u80fd\u573a\u5bf9\u78b3\u5316\u7845\u7684\u8868\u9762\u8fdb\u884c\u6c27\u5316\u8150 \u8680\uff0c\u4ece\u800c\u5f62\u6210\u8f83\u8f6f\u7684\u53d8\u8d28\u5c42\uff0c\u518d\u901a\u8fc7\u78e8\u7c92\u5212\u64e6\u5c06\u53d8\u8d28 \u5c42\u53bb\u9664<\/span>. \u8fd9\u7c7b\u53cd\u5e94\u78e8\u629b\u6280\u672f\u4ee5\u629b\u5149\u52a0\u5de5\u4e3a\u4e3b\uff0c\u5176\u4e2d\u53c8\u7ec6\u5206\u4e3a\u5316\u5b66\u673a\u68b0\u629b\u5149<\/span>\u00a0\u3001\u7535\u5316\u5b66\u673a\u68b0\u629b\u5149<\/span>\u3001\u7b49 \u79bb\u5b50\u4f53\u8f85\u52a9\u629b\u5149<\/span>\u00a0\u3001\u7d2b\u5916\u5149\u8f85\u52a9\u5316\u5b66\u629b\u5149<\/span>\u7b49\u4e0d \u540c\u7c7b\u578b\u7684\u629b\u5149\u65b9\u6cd5<\/span>.\u00a0<\/span><\/p>\n

2.1.1 \u5316\u5b66\u673a\u68b0\u629b\u5149\u6280\u672f\u00a0<\/span><\/span><\/strong><\/p>\n

\u76ee\u524d\u4e1a\u5185\u6700\u4e3b\u6d41\u7684\u5316\u5b66\u8150\u8680\u53cd\u5e94\u629b\u5149\u6280\u672f\u662f\u5316 \u5b66 \u673a \u68b0 \u629b \u5149 \u6280 \u672f\uff08<\/span>Chemical Mechanical Polishing\uff0c <\/span>CMP\uff09\uff0c\u5316\u5b66\u673a\u68b0\u629b\u5149\u6280\u672f\u662f\u4e00\u79cd\u5728\u52a0\u5de5\u8fc7\u7a0b\u4e2d\u5229\u7528 \u5316\u5b66\u8bd5\u5242\u8150\u8680\u548c\u78e8\u7c92\u673a\u68b0\u53bb\u9664\u590d\u5408\u7684\u65b9\u6cd5\u5bf9\u886c\u5e95\u6750 \u6599\u8fdb\u884c\u8d85\u7cbe\u5bc6\u52a0\u5de5\u7684\u53cd\u5e94\u629b\u5149\u6280\u672f\uff0c\u80fd\u591f\u83b7\u5f97\u8d85\u5149 \u6ed1\u751a\u81f3\u65e0\u635f\u4f24\u7684\u886c\u5e95\u8868\u9762 <\/span>. \u4e3a\u4e86\u63d0\u9ad8\u5316\u5b66\u673a\u68b0\u629b\u5149 \u9ad8\u5316\u5b66\u4f5c\u7528\u4e24\u4e2a\u65b9\u9762\u8fdb\u884c\u4e86\u7814\u7a76\uff0c\u5982\u56fe \u7684\u6750\u6599\u53bb\u9664\u7387\uff0c\u7814\u7a76\u8005\u4eec\u5206\u522b\u4ece\u63d0\u9ad8\u673a\u68b0\u4f5c\u7528\u548c\u63d0 <\/span>3\u6240\u793a\uff0c\u901a\u8fc7 \u4f7f\u7528\u8f83\u786c\u7684\u78e8\u6599\u53ef\u4ee5\u6709\u6548\u63d0\u9ad8\u673a\u68b0\u4f5c\u7528\uff1b\u6539\u53d8\u629b\u5149 \u6db2\u7684 <\/span>pH \u503c\u6216\u8005\u52a0\u5165\u6c27\u5316\u5242\u3001\u50ac\u5316\u5242\u53ef\u4ee5\u63d0\u9ad8\u5316\u5b66 \u4f5c\u7528<\/span>.<\/span><\/p>\n

\"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf\"<\/p>\n

\n

1\uff09\u63d0\u9ad8\u673a\u68b0\u4f5c\u7528<\/span>.Su\u7b49<\/span>\u00a0\u4f7f\u7528<\/span>AI2O3\u78e8\u6599\u5bf9\u78b3\u5316 \u7845\u8fdb\u884c\u629b\u5149\uff0c\u80fd\u591f\u5f97\u5230 <\/span>0.36 \u00b5m\/h \u7684\u6750\u6599\u53bb\u9664\u7387\uff0c\u662f \u4f7f\u7528<\/span>SiO2\u78e8\u6599\u7684<\/span>2\u500d\u4ee5\u4e0a<\/span>.Heydemann\u7b49<\/span>\u4f7f\u7528\u91d1\u521a \u77f3\u78e8\u7c92\u5bf9\u78b3\u5316\u7845\u8fdb\u884c\u5316\u5b66\u673a\u68b0\u629b\u5149\uff0c\u53d1\u73b0\u6750\u6599\u53bb\u9664 \u7387\u662f\u53ea\u4f7f\u7528 <\/span>SiO2\u78e8\u6599\u7684 <\/span>10 \u500d\uff1b\u5f53\u5411 <\/span>SiO2\u7814\u78e8\u6db2\u4e2d\u540c\u65f6\u52a0\u5165\u91d1\u521a\u77f3\u78e8\u6599\u548c <\/span>NaClO \u6c27\u5316\u5242\u540e\uff0c\u5176\u6750\u6599\u53bb\u9664 \u7387\u63d0\u9ad8\u4e86<\/span>15\u500d\uff0c\u629b\u5149\u540e\u7684\u8868\u9762\u7c97\u7cd9\u5ea6\u964d\u4f4e\u4e86<\/span>6.28 nm. \u00a0Lee \u7b49<\/span>\u4f7f\u7528\u542b\u6709 <\/span>SiO2\u548c\u91d1\u521a\u77f3\u78e8\u7c92\u7684\u629b\u5149\u6db2\u5bf9\u78b3 \u5316\u7845\u8fdb\u884c\u5316\u5b66\u673a\u68b0\u629b\u5149\uff0c\u83b7\u5f97\u8868\u9762\u7c97\u7cd9\u5ea6\u4e3a <\/span>0.27 nm \u7684\u78b3\u5316\u7845\uff0c\u4e14\u6750\u6599\u53bb\u9664\u7387\u7ea6\u4e3a<\/span>1.8 \u00b5m\/h.\u00a0<\/span><\/p>\n

2\uff09\u63d0\u9ad8\u5316\u5b66\u4f5c\u7528<\/span>. Zhou\u7b49<\/span>\u7814\u7a76\u4e86<\/span>pH\u503c\u5bf9<\/span>CMP \u4e2d\u5316\u5b66\u8150\u8680\u901f\u7387\u7684\u5f71\u54cd\uff0c\u4ed6\u4eec\u53d1\u73b0\u8f83\u9ad8\u7684<\/span>pH\u503c\u53ef\u4ee5 \u9002\u5f53\u52a0\u5feb\u5316\u5b66\u8150\u8680\u901f\u7387\u8fdb\u800c\u63d0\u9ad8\u6750\u6599\u53bb\u9664\u7387\uff0c\u5728 <\/span>55 \u2103\u4e14<\/span>pH\u503c\u4e3a<\/span>11\u7684\u60c5\u51b5\u4e0b\uff0c\u80fd\u591f\u83b7\u5f97<\/span>0.2 \u00b5m\/h\u7684\u6700 \u5927\u6750\u6599\u53bb\u9664\u7387 <\/span>. Aida \u7b49<\/span>\u7814\u7a76\u9178\u78b1\u6027\u7814\u78e8\u6db2\u5bf9\u629b\u5149 \u78b3\u5316\u7845\u7684\u5f71\u54cd\uff0c\u53d1\u73b0\u78b1\u6027\u9002\u5408\u629b\u5149<\/span>Si\u9762\uff0c\u9178\u6027\u9002\u5408\u629b \u5149<\/span>C\u9762<\/span>. Nitta\u7b49<\/span>\u53d1\u73b0\u6dfb\u52a0\u80fa\u4e4b\u540e\u7684\u8fc7\u6c27\u5316\u6c22\u629b\u5149\u6db2 \u7684\u6750\u6599\u53bb\u9664\u7387\u63d0\u9ad8\u4e86<\/span>1.7\u500d\uff0c\u6bd4\u53ea\u4f7f\u7528\u78e8\u7c92\u7684\u629b\u5149\u6db2 \u63d0\u9ad8\u4e86<\/span>8\u500d\u5de6\u53f3<\/span>. \u7531\u4e8e\u5316\u5b66\u8150\u8680\u901f\u7387\u5bf9\u5316\u5b66\u673a\u68b0\u629b\u5149 \u7684\u6750\u6599\u53bb\u9664\u7387\u6709\u91cd\u8981\u5f71\u54cd\uff0c\u6240\u4ee5\u7814\u7a76\u8005\u4eec\u91c7\u53d6\u4e86\u4e00\u7cfb \u5217\u65b9\u6cd5\u6765\u63d0\u9ad8\u5316\u5b66\u8150\u8680\u7684\u901f\u7387\uff0c\u5982\u5f15\u5165\u82ac\u987f\u53cd\u5e94<\/span>\u53ca\u50ac\u5316\u5242\u8f85\u52a9\u523b\u8680\u6280\u672f<\/span>. Kubota \u7b49<\/span>\u8bc1\u5b9e\u4e86\u82ac\u987f\u53cd \u5e94\u63d0\u9ad8\u5316\u5b66\u673a\u68b0\u629b\u5149\u4e2d\u7684\u5316\u5b66\u53cd\u5e94\u901f\u7387\u7684\u53ef\u884c\u6027 <\/span>. \u00a0Lu\u7b49<\/span>\u5728\u78b3\u5316\u7845\u7684<\/span>CMP\u52a0\u5de5\u4e2d\u5f15\u5165\u82ac\u987f\u53cd\u5e94\uff0c\u52a0\u5de5 \u540e\u83b7\u5f97\u8868\u9762\u7c97\u7cd9\u5ea6<\/span>R<\/span>a\u4e3a<\/span>0.187 nm\u7684\u539f\u5b50\u7ea7\u5149\u6ed1\u8868\u9762\uff0c \u6750\u6599\u53bb\u9664\u7387\u4e3a<\/span>0.154 \u00b5m\/h.\u00a0<\/span>Hara<\/span>\u7b49<\/span>\u63d0\u51fa\u4e86\u50ac\u5316\u5242\u8f85\u52a9\u523b\u8680\u6280\u672f\uff08<\/span>Catalyst Referred Etching<\/span>\uff0c<\/span> CARE<\/span>\uff09\u5e76\u4e14\u5bf9 \u78b3\u5316\u7845\u8fdb\u884c\u4e86\u52a0\u5de5\uff0c\u5176\u539f\u7406\u662f\u78b3\u5316\u7845\u88ab\u5f3a\u6c27\u5316\u5242\u6c27\u5316 \u4e3a <\/span>SiO<\/span>2<\/span>\uff0c\u63a5\u7740 <\/span>SiO<\/span>2<\/span>\u4e0e <\/span>HF <\/span>\u53d1\u751f\u53cd\u5e94\u751f\u6210\u6c1f\u7845\u9178\u800c\u88ab\u53bb \u9664\uff0c\u4ece\u800c\u8fbe\u5230\u8d85\u7cbe\u5bc6\u52a0\u5de5\u76ee\u7684\uff0c\u52a0\u5de5\u540e\u7684\u8868\u9762\u5e73\u5766\u65e0 \u5212\u75d5\uff0c\u4e14\u8868\u9762\u7c97\u7cd9\u5ea6\u53ea\u6709 <\/span>0.076 nm<\/span>\uff0c\u6750\u6599\u53bb\u9664\u7387\u4e3a <\/span>0.1~0.2 \u00b5m\/h. Pan <\/span>\u7b49<\/span>\u7814\u7a76\u4e86\u4e0d\u540c\u50ac\u5316\u5242\u7684\u52a0\u5de5\u6548 \u679c\uff0c\u7ed3\u679c\u8868\u660e\u5f53\u50ac\u5316\u5242\u4e3a\u6c22\u6c27\u5316\u94be\u65f6\uff0c\u52a0\u5de5\u540e\u7684\u8868\u9762 \u7c97\u7cd9\u5ea6\u4e3a<\/span>0.174 nm<\/span>\uff0c\u6750\u6599\u53bb\u9664\u7387\u4e3a<\/span>0.105 \u00b5m\/h.\u00a0<\/span><\/p>\n

\u4ece\u78b3\u5316\u7845\u7684\u5316\u5b66\u673a\u68b0\u629b\u5149\u7814\u7a76\u4e2d\u53ef\u4ee5\u770b\u51fa\uff0c\u901a \u8fc7\u63d0\u9ad8\u52a0\u5de5\u4e2d\u7684\u673a\u68b0\u4f5c\u7528\u4ee5\u53ca\u5316\u5b66\u4f5c\u7528\u90fd\u53ef\u4ee5\u63d0\u9ad8 \u52a0\u5de5\u6548\u7387\uff0c\u4e5f\u53d6\u5f97\u4e00\u5b9a\u6548\u679c<\/span>. <\/span>\u5316\u5b66\u673a\u68b0\u629b\u5149\u4e2d\u6700\u4e3b\u8981 \u7684\u4f18\u5316\u65b9\u5411\u662f\u5e73\u8861\u5316\u5b66\u53cd\u5e94\u7684\u901f\u7387\u4ee5\u53ca\u673a\u68b0\u53bb\u9664\u7684 \u901f\u7387<\/span>. <\/span>\u5f53\u5316\u5b66\u53cd\u5e94\u7684\u901f\u7387\u9ad8\u4e8e\u673a\u68b0\u53bb\u9664\u7684\u901f\u7387\u65f6\uff0c\u5c31 \u65e0\u6cd5\u53ca\u65f6\u53bb\u9664\u5316\u5b66\u53cd\u5e94\u751f\u6210\u7684\u8f6f\u8d28 <\/span>SiO<\/span>2<\/span>\u5c42\uff0c\u52a0\u5de5\u540e \u78b3\u5316\u7845\u8868\u9762\u4f1a\u6b8b\u7559\u4e00\u5b9a\u539a\u5ea6\u4e14\u6210\u5206\u4e3a <\/span>SiO<\/span>2<\/span>\u7684\u635f\u4f24 \u5c42\uff1b\u5f53\u673a\u68b0\u53bb\u9664\u7684\u901f\u7387\u9ad8\u4e8e\u5316\u5b66\u53cd\u5e94\u7684\u901f\u7387\u65f6\uff0c\u78b3\u5316 \u7845\u8868\u9762\u8fd8\u6765\u4e0d\u53ca\u5f62\u6210\u8f6f\u8d28 <\/span>SiO<\/span>2<\/span>\u5c42\u5c31\u4e0e\u78e8\u6599\u63a5\u89e6\uff0c\u5bfc \u81f4\u6750\u6599\u53bb\u9664\u7387\u8fc7\u4f4e<\/span>. <\/span>\u56e0\u6b64\uff0c\u5e73\u8861\u5316\u5b66\u53cd\u5e94\u901f\u7387\u548c\u673a\u68b0 \u53bb\u9664\u901f\u7387\u80fd\u591f\u540c\u65f6\u83b7\u5f97\u8f83\u9ad8\u7684\u8868\u9762\u8d28\u91cf\u4ee5\u53ca\u6750\u6599\u53bb\u9664\u7387<\/span>.\u00a0<\/span><\/p>\n

2.1.2 <\/span>\u7279\u79cd\u80fd\u573a\u8f85\u52a9\u5316\u5b66\u673a\u68b0\u629b\u5149\u6280\u672f\u00a0<\/span><\/strong><\/span><\/p>\n

\u5316\u5b66\u673a\u68b0\u629b\u5149\u6280\u672f\u80fd\u591f\u83b7\u5f97\u8f83\u9ad8\u7684\u8868\u9762\u8d28\u91cf\uff0c \u4f46\u662f\u8f83\u4f4e\u7684\u6750\u6599\u53bb\u9664\u7387\u4ee5\u53ca\u5bf9\u73af\u5883\u7684\u4e0d\u53cb\u597d\u662f\u5176\u4e9f \u5f85\u89e3\u51b3\u7684\u96be\u9898 <\/span>. <\/span>\u901a\u8fc7\u6dfb\u52a0\u7279\u79cd\u80fd\u573a\u7684\u65b9\u5f0f\u80fd\u591f\u66ff\u4ee3 \u5316\u5b66\u8bd5\u5242\u5bf9\u78b3\u5316\u7845\u8868\u9762\u8fdb\u884c\u6c27\u5316\u8150\u8680\uff0c\u540c\u65f6\u964d\u4f4e\u5316 \u5b66\u8bd5\u5242\u5bf9\u73af\u5883\u7684\u5f71\u54cd<\/span>. <\/span>\u5982\u56fe<\/span>4<\/span>\u6240\u793a\uff0c\u7535\u5316\u5b66\u673a\u68b0\u629b\u5149 \u6280\u672f\u901a\u8fc7\u9633\u6781\u6c27\u5316\u7684\u65b9\u5f0f\u63d0\u9ad8\u5316\u5b66\u8150\u8680\u901f\u7387\uff1b\u7b49\u79bb \u5b50\u4f53\u8f85\u52a9\u629b\u5149\u6280\u672f\u901a\u8fc7\u7b49\u79bb\u5b50\u4f53\u5bf9\u78b3\u5316\u7845\u8868\u9762\u8fdb\u884c \u6c27\u5316\u6539\u6027\uff1b\u7d2b\u5916\u5149\u8f85\u52a9\u5316\u5b66\u673a\u68b0\u629b\u5149\u6280\u672f\u901a\u8fc7\u7d2b\u5916 \u5149\u53ca\u50ac\u5316\u5242\u5bf9\u78b3\u5316\u7845\u8868\u9762\u8fdb\u884c\u6c27\u5316\u8150\u8680<\/span>.<\/span><\/p>\n

\"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf\"<\/p>\n

\n

\u6709\u7814\u7a76\u8005\u63d0\u51fa\u5728\u5316\u5b66\u673a\u68b0\u629b\u5149\u4e2d\u5f15\u5165\u7535\u573a\uff0c\u5373 \u7535 \u5316 \u5b66 \u673a \u68b0 \u629b \u5149 \u6280 \u672f\uff08<\/span>Electrochemical Mechanical \u00a0Polishing\uff0c<\/span> ECMP\uff09<\/span>. \u8be5\u65b9\u6cd5\u662f\u5229\u7528\u9633\u6781\u6c27\u5316\u7684\u65b9\u5f0f\u63d0 \u9ad8\u5316\u5b66\u8150\u8680\u901f\u7387\uff0c\u80fd\u591f\u6709\u6548\u5730\u63d0\u9ad8\u52a0\u5de5\u6548\u7387\uff0c\u5e76\u83b7\u5f97 \u5149\u6ed1\u8868\u9762 <\/span>. Li\u7b49<\/span>\u7814\u7a76\u4e86\u7535\u6d41\u5bc6\u5ea6\u5bf9\u7535\u5316\u5b66\u673a\u68b0\u629b \u5149\u7684\u5f71\u54cd\uff0c\u4ed6\u4eec\u53d1\u73b0\u5f53\u7535\u6d41\u5bc6\u5ea6\u8d85\u8fc7 <\/span>20 mA\/cm2<\/sup> \u65f6\uff0c \u9633\u6781\u6c27\u5316\u548c\u673a\u68b0\u53bb\u9664\u80fd\u591f\u66f4\u597d\u5730\u9002\u914d\uff0c\u4ece\u800c\u63d0\u9ad8\u52a0 \u5de5\u6548\u7387 <\/span>. Yang \u7b49<\/span>\u63d0\u51fa\u65e0\u629b\u5149\u6db2\u7684\u7535\u5316\u5b66\u673a\u68b0\u629b \u5149\uff0c\u83b7\u5f97\u4e86\u65e0\u5212\u75d5\u7684\u78b3\u5316\u7845\u8868\u9762\uff0c\u4e14\u8868\u9762\u7c97\u7cd9\u5ea6\u4e0b\u964d \u81f3 <\/span>1.352 nm. Chen \u7b49<\/span>\u5bf9\u9633\u6781\u6c27\u5316\u7684\u6761\u4ef6\u8fdb\u884c\u4e86\u8fdb \u4e00\u6b65\u7684\u63a2\u7a76\uff0c\u4ed6\u4eec\u53d1\u73b0\u5f53 <\/span>pH=7 \u65f6\uff0c\u6eb6\u6db2\u4f1a\u6709\u66f4\u597d\u7684 \u6c27\u5316\u6548\u679c<\/span>. Murata\u7b49<\/span>\u63d0\u51fa\u4e00\u79cd\u4f7f\u7528\u805a\u6c28\u916f<\/span>-\u6c27\u5316\u94c8 \u6838\u58f3\u9897\u7c92\u7684\u65e0\u629b\u5149\u57ab\u7684\u7535\u5316\u5b66\u673a\u68b0\u52a0\u5de5\u65b9\u6cd5\uff0c\u867d\u7136 \u629b\u5149\u540e\u8868\u9762\u7684\u5212\u75d5\u6ca1\u6709\u5b8c\u5168\u6d88\u9664\uff0c\u4f46\u662f\u6750\u6599\u53bb\u9664\u7387 \u53ef\u8fbe <\/span>3~4 \u00b5m\/h. Yang\u7b49<\/span>\u00a0\u63d0\u51fa\u4e86\u4e00\u79cd\u4e09\u6b65\u65e0\u629b\u5149\u6db2 \u7684\u7535\u5316\u5b66\u673a\u68b0\u629b\u5149\u5de5\u827a\uff0c\u53ef\u4ee5\u83b7\u5f97\u8868\u9762\u7c97\u7cd9\u5ea6\u4e3a <\/span>0.11 nm \u7684 \u78b3 \u5316 \u7845 \u8868 \u9762 \u4e14 \u6750 \u6599 \u53bb \u9664 \u7387 \u53ef \u4ee5 \u8fbe \u5230<\/span>11 \u00b5m\/h. \u7535\u5316\u5b66\u673a\u68b0\u629b\u5149\u662f\u4e00\u79cd\u5f88\u6709\u6f5c\u529b\u7684\u52a0\u5de5\u65b9 \u5f0f\uff0c\u5229\u7528\u7eff\u8272\u7535\u80fd\u4ee3\u66ff\u4e86\u5316\u5b66\u8bd5\u5242\uff0c\u51cf\u5c11\u4e86\u5bf9\u73af\u5883\u7684 \u6c61\u67d3\uff0c\u540c\u65f6\u52a0\u5de5\u6548\u7387\u4e5f\u6709\u660e\u663e\u7684\u6539\u5584<\/span>. \u7531\u4e8e\u76ee\u524d\u7535\u5316 \u5b66\u673a\u68b0\u629b\u5149\u90fd\u805a\u7126\u5728\u5c0f\u5c3a\u5bf8\u7684\u78b3\u5316\u7845\u52a0\u5de5\u4e0a\uff0c\u968f\u7740 \u88c5\u5907\u53ca\u81ea\u52a8\u5316\u6280\u672f\u7684\u53d1\u5c55\uff0c\u672a\u6765\u78b3\u5316\u7845\u7684\u7535\u5316\u5b66\u673a \u68b0\u629b\u5149\u5c06\u671d\u7740\u5927\u5c3a\u5bf8\u3001\u5168\u5c40\u5e73\u5766\u5316\u3001\u81ea\u52a8\u5316\u7684\u65b9\u5411\u53d1\u5c55<\/span>.<\/span><\/p>\n

Yamamura \u7b49<\/span>\u63d0\u51fa\u4e86\u4e00\u79cd\u5229\u7528\u5e38\u538b\u7b49\u79bb\u5b50\u4f53 \u8f90\u7167\u52a0\u5de5\u6750\u6599\u7684\u65b0\u65b9\u6cd5\uff0c\u5373\u7b49\u79bb\u5b50\u4f53\u8f85\u52a9\u629b\u5149\u6280\u672f \uff08<\/span>Plasma Assisted Polishing\uff0c<\/span> PAP\uff09\uff0c\u5176\u539f\u7406\u662f\u4f7f\u7528\u7b49 \u79bb\u5b50\u4f53\u5bf9\u78b3\u5316\u7845\u886c\u5e95\u8fdb\u884c\u8f90\u7167\uff0c\u901a\u8fc7\u7f9f\u57fa\u81ea\u7531\u57fa\u6765 \u6c27\u5316\u78b3\u5316\u7845\u886c\u5e95\u8868\u9762\uff0c\u5f62\u6210\u8f6f\u8d28 <\/span>SiO2\uff0c\u518d\u901a\u8fc7\u8f6f\u78e8\u6599 \u673a\u68b0\u53bb\u9664 <\/span>SiO2\u53d8\u8d28\u5c42\uff0c\u7b49\u79bb\u5b50\u4f53\u8f90\u5c04\u7684\u8868\u9762\u6c27\u5316\u6539 \u6027\u548c\u673a\u68b0\u53bb\u9664\u76f8\u4e92\u4ea4\u66ff\u8fdb\u884c\uff0c\u4ece\u800c\u8fbe\u5230\u6750\u6599\u53bb\u9664\u7684 \u76ee\u7684<\/span>. Yamamura\u7b49<\/span>\u4f7f\u7528\u6c26\u6c14\u7b49\u79bb\u5b50\u4f53\u5bf9\u78b3\u5316\u7845\u8fdb \u884c\u8f90\u7167\uff0c\u901a\u8fc7\u7eb3\u7c73\u538b\u75d5\u8bd5\u9a8c\u8868\u660e\uff0c\u8f90\u7167\u540e\u78b3\u5316\u7845\u786c\u5ea6 \u4ece <\/span>37.4 GPa\u964d\u4f4e\u81f3 <\/span>4.5 GPa\uff0c\u7136\u540e\u518d\u4f7f\u7528 <\/span>CeO2\u8f6f\u78e8\u6599 \u629b\u5149\uff0c\u83b7\u5f97\u8868\u9762\u7c97\u7cd9\u5ea6\u4e3a<\/span>0.1 nm\u7684\u8d85\u5149\u6ed1\u3001\u65e0\u5212\u75d5\u7684 \u539f\u5b50\u7ea7\u8868\u9762 <\/span>. Deng\u7b49<\/span>\u4f7f\u7528\u6c26\u6c14\u4e0e\u6c34\u84b8\u6c14\u7684\u7b49\u79bb\u5b50 \u4f53\u8f90\u7167\u78b3\u5316\u7845\u886c\u5e95\uff0c\u5b9e\u9a8c\u8bc1\u660e\u5f53\u6c26\u6c14\u4e2d\u6c34\u84b8\u6c14\u6d53\u5ea6 \u5728 <\/span>0.022% \u65f6\uff0c\u7b49\u79bb\u5b50\u4f53\u6c27\u5316\u901f\u7387\u4e3a\u6700\u9ad8\uff0c\u4e14\u5f53\u629b\u5149 \u901f\u7387\u5927\u4e8e\u6c27\u5316\u901f\u7387\u65f6\uff0c\u80fd\u591f\u83b7\u5f97\u9636\u68af\u5bbd\u5ea6\u5747\u5300\u7684\u539f \u5b50\u8868\u9762\u9636\u68af\u7ed3\u6784<\/span>. \u76ee\u524d\uff0c\u4ece\u7b49\u79bb\u5b50\u4f53\u8f85\u52a9\u629b\u5149\u6280\u672f\u7684 \u53d1\u5c55\u6765\u770b\uff0c\u9ad8\u6548\u7387\u3001\u9ad8\u7cbe\u5ea6\u3001\u4f4e\u80fd\u8017\u3001\u667a\u80fd\u5316\u5df2\u6210\u4e3a\u8be5 \u6280\u672f\u7684\u53d1\u5c55\u8d8b\u52bf<\/span>. \u53e6\u5916\uff0c\u5f00\u53d1\u66f4\u5148\u8fdb\u7684\u5728\u7ebf\u68c0\u6d4b\u6280\u672f \u4e5f\u5c06\u6210\u4e3a\u7814\u7a76\u70ed\u70b9\uff0c\u4ee5\u5b9e\u73b0\u5bf9\u52a0\u5de5\u91cf\u7684\u51c6\u786e\u63a7\u5236\uff0c\u8fbe \u5230\u7cbe\u786e\u53bb\u9664\u7684\u76ee\u7684<\/span>.\u00a0<\/span><\/p>\n

\u7814\u7a76\u8005\u4eec\u5c06\u7d2b\u5916\u5149\u50ac\u5316\u53cd\u5e94\u8fd0\u7528\u5230\u78b3\u5316\u7845\u7684\u5316 \u5b66\u673a\u68b0\u629b\u5149\u7684\u8fc7\u7a0b\u4e2d\uff0c\u5f62\u6210\u4e86\u7d2b\u5916\u5149\u8f85\u52a9\u5316\u5b66\u673a\u68b0 \u629b\u5149\u6280\u672f\uff08<\/span>Ultraviolet Assisted CMP\uff0c<\/span> UV-CMP\uff09<\/span>. \u901a\u8fc7 \u7d2b\u5916\u5149\u7167\u5c04\u5149\u50ac\u5316\u5242\u4ea7\u751f\u5149\u50ac\u5316\u53cd\u5e94\uff0c\u751f\u6210\u7f9f\u57fa\u81ea \u7531\u57fa\uff0c\u7f9f\u57fa\u81ea\u7531\u57fa\u5c06\u78b3\u5316\u7845\u8868\u9762\u6c27\u5316\u6210\u8f6f\u8d28<\/span>SiO2\uff0c\u518d \u901a\u8fc7\u78e8\u7c92\u5212\u64e6\u53bb\u9664 <\/span>SiO2\u53d8\u8d28\u5c42 <\/span>. \u7d2b\u5916\u5149\u50ac\u5316\u53cd\u5e94\u548c \u78e8\u7c92\u5212\u64e6\u53bb\u9664\u76f8\u4e92\u4ea4\u66ff\u8fdb\u884c\uff0c\u80fd\u83b7\u5f97\u8d85\u5e73\u5766\u3001\u8d85\u5149 \u6ed1\u3001\u65e0\u635f\u4f24\u7684\u539f\u5b50\u7ea7\u8868\u9762 <\/span>. Ishikawa\u7b49<\/span>\u63a2\u7a76\u7d2b\u5916\u5149 \u8f85\u52a9\u629b\u5149\u7684\u53ef\u884c\u6027\uff0c\u53d1\u73b0\u5728\u5ba4\u6e29\u4e0b <\/span>TiO2\u7684\u5149\u50ac\u5316\u4f5c \u7528\u4f7f\u5f97\u78b3\u5316\u7845\u8868\u9762\u751f\u6210\u4e8c\u6c27\u5316\u7845 <\/span>.Tanaka \u7b49\u4eba<\/span>\u7814\u7a76\u5728\u7d2b\u5916\u5149\u4e0b\u4f7f\u7528\u4e0d\u540c\u50ac\u5316\u5242\u5bf9\u78b3\u5316\u7845\u7684\u629b\u5149\u5f71 \u54cd\uff0c\u7ed3\u679c\u8868\u660e\uff0c\u5f53\u50ac\u5316\u5242\u4e3a<\/span>TiO2\u65f6\uff0c\u80fd\u591f\u83b7\u5f97\u65e0\u635f\u4f24\u3001 \u8d85\u5149\u6ed1\u7684\u539f\u5b50\u7ea7\u8868\u9762\uff0c\u4e14\u6750\u6599\u53bb\u9664\u7387\u4e3a <\/span>0.313 \u00b5m\/h. \u00a0Yan\u7b49<\/span>\u7814\u7a76\u5f71\u54cd\u7d2b\u5916\u5149\u50ac\u5316\u53cd\u5e94\u901f\u7387\u548c\u629b\u5149\u6548\u679c \u5404\u4e2a\u56e0\u7d20\uff0c\u53d1\u73b0<\/span>H2O2\u6d53\u5ea6\u5bf9\u53cd\u5e94\u901f\u7387\u7684\u5f71\u54cd\u6700\u5927\uff0c\u5149 \u7167\u5f3a\u5ea6\u7684\u5f71\u54cd\u6700\u5c0f\uff0c\u5728\u6700\u4f73\u53c2\u6570\u4e0b\u8fdb\u884c\u5149\u50ac\u5316\u8f85\u52a9 \u5316\u5b66\u673a\u68b0\u629b\u5149\uff0c\u6700\u4f73\u7684\u8868\u9762\u7c97\u7cd9\u5ea6\u4e3a <\/span>0.423 nm\uff0c\u6750\u6599 \u53bb\u9664\u7387\u4e3a <\/span>0.107 \u00b5m\/h. \u5bfb\u627e\u65b0\u7684\u50ac\u5316\u6548\u7387\u66f4\u9ad8\u7684\u5149 \u50ac\u5316\u5242\u5c06\u662f\u63d0\u9ad8 <\/span>UV-CMP \u6750\u6599\u53bb\u9664\u7387\u7684\u91cd\u8981\u624b\u6bb5\uff0c \u672a\u6765\u5c06\u8fdb\u4e00\u6b65\u7814\u7a76\u5149\u50ac\u5316\u5242\u4ee5\u53ca\u53cd\u5e94\u7269\u7684\u6700\u4f73\u6469\u5c14 \u6bd4\uff0c\u4ee5\u53ca\u589e\u5f3a\u5149\u50ac\u5316\u6d3b\u6027\u7684\u65b0\u65b9\u6cd5\uff0c\u8fdb\u800c\u63d0\u9ad8\u78e8\u629b\u52a0 \u5de5\u7684\u6548\u7387<\/span>.\u00a0<\/span><\/p>\n

2.2 <\/span>\u4ee5\u673a\u68b0\u8bf1\u5bfc\u4e3a\u4e3b\u7684\u53cd\u5e94\u78e8\u629b\u6280\u672f\u00a0<\/span><\/span><\/strong><\/span><\/p>\n

\u4ee5\u5316\u5b66\u8150\u8680\u4e3a\u4e3b\u7684\u53cd\u5e94\u78e8\u629b\u6280\u672f\u53ef\u4ee5\u83b7\u5f97\u7406\u60f3 \u7684\u78b3\u5316\u7845\u886c\u5e95\uff0c\u4f46\u662f\u8f83\u4f4e\u7684\u6548\u7387\u4ee5\u53ca\u5bf9\u73af\u5883\u7684\u4e0d\u53cb \u597d\u90fd\u662f\u5176\u4e9f\u987b\u89e3\u51b3\u7684\u95ee\u9898 <\/span>. \u56e0\u6b64\u7814\u7a76\u4eba\u5458\u63d0\u51fa\u5728\u52a0 \u5de5\u8fc7\u7a0b\u4e2d\u901a\u8fc7\u673a\u68b0\u529b\u5212\u64e6\u8bf1\u5bfc\u5316\u5b66\u53cd\u5e94\uff0c\u8fbe\u5230\u517c\u987e \u6548\u7387\u4ee5\u53ca\u8868\u9762\u8d28\u91cf\u7684\u76ee\u7684<\/span>.\u00a0<\/span><\/p>\n

2.2.1 \u78e8\u7c92\u5212\u64e6\u8bf1\u5bfc\u78b3\u5316\u7845\u6c34\u53cd\u5e94\u7684\u53cd\u5e94\u78e8\u629b\u6280\u672f<\/span><\/span><\/strong><\/span><\/p>\n

Lu\u7b49<\/span>\u63d0\u51fa\u4e86\u4e00\u79cd\u7528\u4e8e\u8d85\u7cbe\u5bc6\u52a0\u5de5\u7684\u7eff\u8272\u3001\u9ad8 \u6548\u3001\u534a\u56fa\u7ed3\u7684\u78e8\u6599\u5de5\u5177\u2014\u2014<\/span>SG \u629b\u5149\u57ab\uff0c\u5728\u4ec5\u4f7f\u7528\u84b8 \u998f\u6c34\u4f5c\u4e3a\u51b7\u5374\u6db2\u7684\u60c5\u51b5\u4e0b\u5229\u7528\u8be5\u5de5\u5177\u53ef\u4ee5\u83b7\u5f97\u8d85\u5149 \u6ed1\u3001\u65e0\u5212\u75d5\u3001\u51e0\u4e4e\u65e0\u8868\u9762\u635f\u4f24\u7684\u78b3\u5316\u7845\u886c\u5e95\u8868\u9762 <\/span>. \u8fd9 \u4e00\u6280\u672f\u88ab\u79f0\u4f5c\u6eb6\u80f6\u51dd\u80f6\u629b\u5149\u6280\u672f\uff0c\u8fd9\u662f\u4e00\u79cd\u65b0\u578b\u7684 \u7eff\u8272\u9ad8\u6548\u629b\u5149\u6280\u672f\uff0c\u8be5\u6280\u672f\u501f\u52a9\u8f6f\u8d28\u57fa\u4f53\u6240\u62e5\u6709\u7684 \u67d4\u6027\u7279\u70b9\uff0c\u5b9e\u73b0\u4e86\u78e8\u7c92\u7684\u201c\u5bb9\u6ca1\u201d\u6548\u5e94<\/span>. \u201c\u5bb9\u6ca1\u201d\u6548\u5e94\u662f \u6307\u5728\u629b\u5149\u52a0\u5de5\u8fc7\u7a0b\u4e2d\u78e8\u7c92\u63a5\u89e6\u5230\u52a0\u5de5\u8868\u9762\u65f6\uff0c\u7531\u4e8e \u8f6f\u8d28\u57fa\u4f53\u7684\u5b58\u5728\uff0c\u8f83\u4e3a\u7a81\u51fa\u7684\u78e8\u7c92\u53ef\u4ee5\u4ea7\u751f\u56de\u5f39\uff0c\u8fdb \u800c\u4fdd\u8bc1\u8868\u5c42\u78e8\u7c92\u80fd\u591f\u8fd1\u4f3c\u5728\u540c\u4e00\u6c34\u5e73\u9762\u5185\u5bf9\u5de5\u4ef6\u8fdb \u884c\u52a0\u5de5\uff0c\u4ece\u800c\u83b7\u5f97\u5747\u5300\u7684\u6750\u6599\u53bb\u9664\uff0c\u4ee5\u8fbe\u5230\u66f4\u597d\u7684\u629b \u5149\u6548\u679c\uff0c\u662f\u4e00\u79cd\u975e\u5e38\u6709\u6f5c\u529b\u7684\u7eff\u8272\u9ad8\u6548\u629b\u5149\u6280\u672f <\/span>. \u00a0Luo \u7b49<\/span>\u4f7f\u7528\u91d1\u521a\u77f3\u548c\u6c27\u5316\u94dd\u78e8\u6599\u7684\u534a\u56fa\u7ed3\u548c\u56fa\u7ed3 \u629b\u5149\u57ab\u8fdb\u884c\u4e86\u5bf9\u6bd4\u8bd5\u9a8c\uff0c\u53d1\u73b0\u56fa\u7ed3\u78e8\u6599\u629b\u5149\u5de5\u5177\u7684 \u6750\u6599\u53bb\u9664\u5c3a\u5ea6\u4e0d\u5747\u5300\uff0c\u4ece\u51e0\u7eb3\u7c73\u5230\u51e0\u767e\u7eb3\u7c73\u4e0d\u7b49\uff0c\u5f88 \u96be\u4fdd\u6301\u8868\u9762\u7684\u5b8c\u6574\u6027\uff1b\u800c\u4f7f\u7528\u534a\u56fa\u7ed3\u629b\u5149\u57ab\u5374\u80fd\u591f \u83b7\u5f97\u5177\u6709\u4e9a\u7eb3\u7c73\u7ea7\u7684\u5149\u6ed1\u65e0\u5212\u75d5\u8868\u9762\uff0c\u540c\u65f6\u5728\u52a0\u5de5 \u540e\u7684\u8868\u9762\u4e0a\u53d1\u73b0\u4e86\u7eb3\u7c73\u7ea7\u539a\u5ea6\u7684\u975e\u6676\u578b<\/span>SiO2.\u00a0<\/span><\/p>\n

\u4e3a\u4e86\u7814\u7a76\u975e\u6676 <\/span>SiO2\u7684\u4ea7\u751f\u539f\u56e0\uff0c\u7f57\u6c42\u53d1<\/span>\u5bf9\u78b3\u5316\u7845\u7684\u78e8\u7c92\u629b\u5149\u53bb\u9664\u673a\u7406\u8fdb\u884c\u4e86\u7814\u7a76\uff0c\u53d1\u73b0\u5728\u78e8\u7c92 \u4e0e\u886c\u5e95\u8868\u9762\u7684\u673a\u68b0\u6469\u64e6\u4f5c\u7528\u4e0b\uff0c\u78b3\u5316\u7845\u8868\u9762\u751f\u6210\u4e86 \u975e\u6676 <\/span>SiO2. \u901a\u8fc7\u8fdb\u4e00\u6b65\u7814\u7a76\u53d1\u73b0\uff0c\u8be5\u73b0\u8c61\u672c\u8d28\u4e3a\u78e8\u7c92 \u5212 \u64e6 \u8bf1 \u5bfc \u4e86 \u78b3 \u5316 \u7845 \u4e0e \u6c34 \u53d1 \u751f \u4e86 \u5316 \u5b66 \u53cd \u5e94 <\/span>. Cheng \u7b49<\/span>\u5bf9\u78b3\u5316\u7845\u4e0e\u6c34\u7684\u6469\u64e6\u5316\u5b66\u53cd\u5e94\u673a\u7406\u8fdb\u884c\u4e86\u6df1\u5165 \u7814\u7a76<\/span>. \u53d1\u73b0\u5728\u7eb3\u7c73\u5c3a\u5ea6\u4e2d\uff0c\u78b3\u5316\u7845\u886c\u5e95\u8868\u9762\u5728\u91d1\u521a\u77f3 \u538b\u5934\u7684\u53cd\u590d\u673a\u68b0\u4f5c\u7528\u4e0b\u88ab\u8bf1\u5bfc\u6210\u975e\u6676\u5316\u7684\u78b3\u5316\u7845\uff0c \u7136\u540e\u975e\u6676\u5316\u7684\u78b3\u5316\u7845\u518d\u548c\u6c34\u53cd\u5e94\u751f\u6210 <\/span>SiO2\uff1b\u63a7\u5236\u78b3 \u5316\u7845\u4e0e\u6c34\u53cd\u5e94\u7684\u4e3b\u8981\u56e0\u7d20\u662f\u8f7d\u8377\u548c\u63a5\u89e6\u72b6\u6001\uff0c\u5176\u6b21\u662f\u901f\u5ea6\u548c\u6e29\u5ea6 <\/span>. \u8fd9\u4e00\u7814\u7a76\u9610\u8ff0\u4e86\u78b3\u5316\u7845\u4e0e\u6c34\u53cd\u5e94\u7684 \u6761\u4ef6\uff0c\u5bf9\u5176\u8fdb\u884c\u5408\u7406\u7684\u5229\u7528\uff0c\u53ef\u4ee5\u4f7f\u78b3\u5316\u7845\u886c\u5e95\u7684\u52a0 \u5de5\u6548\u7387\u548c\u8868\u9762\u8d28\u91cf\u5f97\u5230\u663e\u8457\u7684\u63d0\u5347<\/span>.\u00a0<\/span><\/p>\n

\u5728\u78b3\u5316\u7845\u886c\u5e95\u7684\u51cf\u8584\u52a0\u5de5\u8fc7\u7a0b\u4e2d\u6709\u6548\u5730\u5e94\u7528\u78b3 \u5316\u7845\u4e0e\u6c34\u7684\u53cd\u5e94\u53ef\u4ee5\u5408\u7406\u907f\u514d\u88c2\u7eb9\u7684\u4ea7\u751f\uff0c\u8fdb\u800c\u63d0 \u9ad8\u78b3\u5316\u7845\u886c\u5e95\u7684\u8868\u9762\u8d28\u91cf<\/span>. \u540c\u65f6\uff0c\u5229\u7528\u534a\u56fa\u7ed3\u78e8\u6599\u78e8 \u524a\u7684\u65b9\u5f0f\u53ef\u4ee5\u6709\u6548\u5730\u89e3\u51b3\u52a0\u5de5\u6548\u7387\u548c\u52a0\u5de5\u8d28\u91cf\u4e0d\u80fd \u517c\u987e\u7684\u95ee\u9898 <\/span>.\u5982\u56fe <\/span>5\u6240\u793a\uff0c\u5728\u78b3\u5316\u7845\u886c\u5e95\u7684\u51cf\u8584\u52a0\u5de5 \u4e2d\u901a\u8fc7\u63a7\u5236\u78e8\u7c92\u7684\u201c\u5bb9\u6ca1\u201d\u6548\u5e94\u4f7f\u5f97\u7a81\u51fa\u9ad8\u5ea6\u5206\u522b\u4e3a <\/span>H<\/span>1~H<\/span>4\u7684\u78e8\u7c92\u4fdd\u6301\u5728\u540c\u4e00\u9ad8\u5ea6<\/span>H<\/span>5\u4e0a\uff0c\u8fdb\u800c\u901a\u8fc7\u78e8\u7c92\u5212 \u64e6\u8bf1\u5bfc\u78b3\u5316\u7845\u8868\u9762\u751f\u6210\u975e\u6676\u78b3\u5316\u7845\uff0c\u7136\u540e\u975e\u6676\u78b3\u5316 \u7845\u4e0e\u6c34\u53d1\u751f\u53cd\u5e94\u751f\u6210\u8f6f\u8d28 <\/span>SiO2\uff0c\u518d\u901a\u8fc7\u78e8\u7c92\u5212\u64e6\u53bb \u9664 <\/span>SiO2\u53d8\u8d28\u5c42\uff0c\u53ef\u4ee5\u6709\u6548\u63d0\u9ad8\u52a0\u5de5\u540e\u78b3\u5316\u7845\u886c\u5e95\u7684 \u8868\u9762\u8d28\u91cf<\/span>.<\/span><\/p>\n

\"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf\"<\/p>\n

\n

2.2.2 \u91d1\u5c5e\u6469\u64e6\u8bf1\u5bfc\u53cd\u5e94\u78e8\u524a\u6280\u672f\u00a0<\/span><\/span><\/strong><\/p>\n

\u7531\u4e8e\u78b3\u5316\u7845\u5177\u6709\u8d85\u9ad8\u7684\u786c\u5ea6\uff0c\u5b83\u7ecf\u5e38\u88ab\u5f53\u4f5c\u78e8 \u6599\u6765\u52a0\u5de5\u91d1\u5c5e\u7b49\u6750\u6599 <\/span>. \u4f46\u662f\u5728\u52a0\u5de5\u9ed1\u8272\u91d1\u5c5e\u65f6\u78b3\u5316 \u7845\u5374\u6709\u7740\u5f02\u5e38\u7684\u8868\u73b0\uff0c\u5b83\u5728\u52a0\u5de5\u8fc7\u7a0b\u4e2d\u7684\u78e8\u635f\u975e\u5e38 \u5927\uff0c\u8fd9\u4e5f\u76f4\u63a5\u5bfc\u81f4\u4e86\u5b83\u4e0d\u9002\u7528\u4e8e\u52a0\u5de5\u9ed1\u8272\u91d1\u5c5e\uff0c\u9488\u5bf9 \u8fd9 \u4e00 \u95ee \u9898 \uff0c\u7814 \u7a76 \u4eba \u5458 \u5bf9 \u5176 \u78e8 \u635f \u539f \u7406 \u8fdb \u884c \u4e86 \u7814 \u7a76 <\/span>. \u00a0Komanduri \u7b49<\/span>\u5bf9\u78b3\u5316\u7845\u5728\u94b4\u57fa\u9ad8\u6e29\u5408\u91d1\u4e0a\u8fdb\u884c\u4e86 \u9ad8\u901f\u3001\u4f4e\u8fdb\u7ed9\u901f\u5ea6\u4e0b\u7684\u6a21\u62df\u78e8\u524a\u78e8\u635f\u8bd5\u9a8c\uff0c\u53d1\u73b0\u78b3\u5316 \u7845\u5728\u9ad8\u6e29\u4e0b\u5206\u89e3\uff0c<\/span>Si \u548c <\/span>C \u539f\u5b50\u6269\u6563\u5230\u91d1\u5c5e\u4e2d\u5f62\u6210\u91d1 \u5c5e\u7845\u5316\u7269\u548c\u4e0d\u7a33\u5b9a\u7684\u91d1\u5c5e\u78b3\u5316\u7269\uff0c\u5728\u51b7\u5374\u8fc7\u7a0b\u4e2d\u9010 \u6e10\u5206\u89e3 <\/span>. Duwell \u7b49<\/span>\u62a5\u9053\u78b3\u5316\u7845\u4e0e\u94c1\u53cd\u5e94\u751f\u6210\u94c1\u7845\u5316\u7269<\/span>. \u524d\u4eba\u7684\u7814\u7a76\u8868\u660e\uff0c\u7eaf\u91d1\u5c5e\u53ef\u4ee5\u4e0e\u78b3\u5316\u7845\u5728\u4e00\u5b9a \u6761\u4ef6\u4e0b\u53d1\u751f\u5316\u5b66\u53cd\u5e94\uff0c\u56e0\u6b64\u5c06\u7eaf\u91d1\u5c5e\u6469\u64e6\u5316\u5b66\u539f\u7406 \u5e94\u7528\u4e8e\u5355\u6676\u78b3\u5316\u7845\u7684\u52a0\u5de5\u5728\u7406\u8bba\u4e0a\u662f\u53ef\u884c\u7684<\/span>.\u00a0<\/span><\/p>\n

\u57fa\u4e8e\u6b64\uff0c<\/span>Wu\u7b49<\/span>\u7814\u7a76\u4e86\u7eaf\u91d1\u5c5e\uff08\u94c1\u548c\u954d\uff09\u5bf9\u5355\u6676 \u78b3\u5316\u7845\u7684\u9ad8\u901f\u6469\u64e6\u53bb\u9664\u884c\u4e3a\uff0c\u7814\u7a76\u8868\u660e\u78b3\u5316\u7845\u886c\u5e95 \u7684<\/span>C\u9762\u83b7\u5f97\u4e86\u8fd1\u4e4e\u65e0\u635f\u4f24\u7684\u8868\u9762\u3001\u4e9a\u8868\u9762\uff0c\u800c\u78b3\u5316\u7845 \u886c\u5e95\u7684<\/span>Si\u9762\u5b58\u5728\u88c2\u7eb9\u3001\u4f4d\u9519\u3001\u5c42\u9519\u548c\u6676\u683c\u7578\u53d8\u7b49\u6676\u4f53 \u7f3a\u9677<\/span>. \u7528\u94c1\u6469\u64e6\u78b3\u5316\u7845\u886c\u5e95\u7684<\/span>C\u9762\uff0c\u5176\u6750\u6599\u53bb\u9664\u7387\u53ef \u8fbe<\/span>330 \u00b5m\/h. \u7528\u7eaf\u954d\u6469\u64e6\u78b3\u5316\u7845\u886c\u5e95\u7684<\/span>Si\u9762\uff0c\u53ef\u83b7\u5f97 <\/span>534 \u00b5m\/h \u7684\u6750\u6599\u53bb\u9664\u7387 <\/span>. \u7845\u5316\u7269\u4ee5\u53ca\u6c27\u5316\u7269\u7684\u5f62\u6210 \u8868\u660e\uff0c\u78b3\u5316\u7845\u7684 <\/span>C \u9762\u548c <\/span>Si \u9762\u53bb\u9664\u5747\u4ee5\u91d1\u5c5e\u6469\u64e6\u8bf1\u5bfc \u5316\u5b66\u4f5c\u7528\u4e3a\u4e3b <\/span>. \u5728\u53cd\u5e94\u53d8\u8d28\u5c42\u7684\u4e0d\u65ad\u751f\u6210\u53ca\u53bb\u9664\u7684 \u5faa\u73af\u8fc7\u7a0b\u4e2d\uff0c\u5b9e\u73b0\u78b3\u5316\u7845\u7684\u9ad8\u901f\u53bb\u9664\uff0c\u7eaf\u91d1\u5c5e\u6469\u64e6\u8bf1 \u5bfc\u78b3\u5316\u7845\u53cd\u5e94\u7684\u6750\u6599\u53bb\u9664\u673a\u7406\u5982\u56fe<\/span>6\u6240\u793a<\/span>.\u00a0<\/span><\/p>\n

\"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf\"<\/p>\n

\n

\u7528\u91d1\u5c5e\u6469\u64e6\u8bf1\u5bfc\u53cd\u5e94\u78e8\u524a\u78b3\u5316\u7845\u7684\u65b9\u6cd5\u5c11\u6709\u4eba \u7814\u7a76\uff0c\u8fd9\u662f\u4e00\u79cd\u5728\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u548c\u78b3\u5316\u7845\u82af\u7247\u51cf \u8584\u52a0\u5de5\u4e2d\u5177\u6709\u5de8\u5927\u6f5c\u529b\u7684\u9ad8\u6548\u52a0\u5de5\u65b9\u6cd5 <\/span>. \u7531\u4e8e\u76ee\u524d \u91d1\u5c5e\u6469\u64e6\u8bf1\u5bfc\u53cd\u5e94\u78e8\u524a\u8fd8\u805a\u7126\u5728\u5c0f\u5c3a\u5bf8\u7684\u78b3\u5316\u7845\u52a0 \u5de5\u4e0a\uff0c\u672a\u6765\u5c06\u671d\u7740\u5927\u5c3a\u5bf8\u3001\u5168\u5c40\u5e73\u5766\u5316\u7684\u65b9\u5411\u53d1\u5c55\uff0c \u540c\u65f6\u63d0\u9ad8\u91d1\u5c5e\u7684\u81ea\u9510\u6027\u4ee5\u53ca\u5bf9\u52a0\u5de5\u8fc7\u7a0b\u7684\u6e29\u5ea6\u63a7\u5236 \u4e5f\u662f\u4fdd\u8bc1\u52a0\u5de5\u8868\u9762\u8d28\u91cf\u7684\u5173\u952e\u56e0\u7d20<\/span>.\u00a0<\/span><\/p>\n

2.3 <\/span>\u5c0f \u7ed3\u00a0<\/span><\/span><\/strong><\/span><\/p>\n

\u968f\u7740\u5404\u79cd\u590d\u6742\u5de5\u51b5\u7684\u6d8c\u73b0\uff0c\u5bf9\u78b3\u5316\u7845\u886c\u5e95\u7684\u9ad8 \u6548\u7387\u3001\u9ad8\u7cbe\u5ea6\u78e8\u629b\u6280\u672f\u63d0\u51fa\u4e86\u66f4\u4e3a\u82db\u523b\u7684\u8981\u6c42<\/span>. \u5316\u5b66 \u673a\u68b0\u629b\u5149\u4f9d\u65e7\u662f\u83b7\u5f97\u8d85\u5149\u6ed1\u3001\u65e0\u635f\u4f24\u78b3\u5316\u7845\u886c\u5e95\u7684 \u4e3b\u8981\u624b\u6bb5 <\/span>. \u867d\u7136\u5404\u79cd\u65b0\u578b\u5316\u5b66\u78e8\u629b\u6280\u672f\u90fd\u80fd\u51cf\u8f7b\u5bf9 \u73af\u5883\u7684\u7834\u574f\uff0c\u83b7\u5f97\u826f\u597d\u7684\u8868\u9762\u8d28\u91cf\uff0c\u4f46\u53d7\u9650\u4e8e\u52a0\u5de5\u8bbe \u5907\u7b49\u539f\u56e0\uff0c\u8fd8\u65e0\u6cd5\u5b9e\u73b0\u9ad8\u6548\u78e8\u629b\u52a0\u5de5 <\/span>. \u968f\u7740\u81ea\u52a8\u5316\u3001 \u667a\u80fd\u5316\u88c5\u5907\u53ca\u8ba1\u7b97\u673a\u8f85\u52a9\u6280\u672f\u548c\u4eba\u5de5\u667a\u80fd\u6280\u672f\u7684\u5feb \u901f\u53d1\u5c55\u548c\u5e94\u7528\uff0c\u672a\u6765\u6709\u671b\u5b9e\u73b0\u78b3\u5316\u7845\u886c\u5e95\u7684\u81ea\u52a8\u5316\u3001\u667a\u80fd\u5316\u8d85\u7cbe\u5bc6\u629b\u5149\u52a0\u5de5<\/span>.\u00a0<\/span><\/section>\n
\"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf\"<\/span><\/section>\n
\n
\n
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\n
\n
3\u00a0<\/span>\u5178\u578b\u78b3\u5316\u7845\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u6548\u679c\u5bf9\u6bd4<\/span><\/strong><\/section>\n
\u00a0<\/span>\u00a0<\/span><\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n
\u5df2\u7ecf\u6709\u5927\u91cf\u7684\u7814\u7a76\u4eba\u5458\u9488\u5bf9\u78b3\u5316\u7845\u886c\u5e95\u7684\u78e8\u629b \u52a0\u5de5\u6280\u672f\u8fdb\u884c\u4e86\u6df1\u5165\u7814\u7a76\uff0c\u4ece\u4f20\u7edf\u673a\u68b0\u78e8\u629b\u6280\u672f\u3001\u7279 \u79cd\u80fd\u91cf\u8f85\u52a9\u673a\u68b0\u78e8\u629b\u6280\u672f\u5230\u5316\u5b66\u8150\u8680\u53cd\u5e94\u78e8\u629b\u6280 \u672f\u3001\u673a\u68b0\u8bf1\u5bfc\u53cd\u5e94\u78e8\u629b\u6280\u672f\uff0c\u7814\u7a76\u4eba\u5458\u901a\u8fc7\u4f7f\u7528\u4e0d\u540c \u7684\u78e8\u7c92\uff0c\u6dfb\u52a0\u4e0d\u540c\u7684\u80fd\u573a\u6216\u5316\u5b66\u8bd5\u5242\u6765\u63d0\u9ad8\u6750\u6599\u53bb \u9664\u7387\u548c\u52a0\u5de5\u8d28\u91cf <\/span>. \u5bf9\u4e8e\u78b3\u5316\u7845\u886c\u5e95\u52a0\u5de5\u7684\u4e3b\u8981\u624b\u6bb5 \u4ecd\u7136\u662f\u4f20\u7edf\u673a\u68b0\u78e8\u629b\u548c\u5316\u5b66\u673a\u68b0\u629b\u5149\u76f8\u7ed3\u5408\uff0c\u4f46\u5176 \u4ed6\u65b0\u578b\u78e8\u629b\u6280\u672f\u4e5f\u5f97\u5230\u540c\u884c\u7684\u5e7f\u6cdb\u5173\u6ce8 <\/span>. \u8868 <\/span>1 \u4e3a\u4e0d \u540c\u52a0\u5de5\u65b9\u5f0f\u7684\u52a0\u5de5\u6548\u679c\u53ca\u4f18\u7f3a\u70b9\uff0c\u4f20\u7edf\u673a\u68b0\u78e8\u629b\u6280 \u672f\u7684\u6838\u5fc3\u53bb\u9664\u673a\u7406\u90fd\u662f\u78e8\u7c92\u5212\u64e6\u53bb\u9664\uff0c\u5176\u6750\u6599\u53bb\u9664 \u7387\u76f8\u5bf9\u8f83\u9ad8\uff0c\u4f46\u662f\u52a0\u5de5\u540e\u7684\u8868\u9762\u8d28\u91cf\u8f83\u5dee\uff0c\u53ea\u9002\u7528\u4e8e \u5145\u5f53\u8d85\u7cbe\u5bc6\u629b\u5149\uff08\u5316\u5b66\u673a\u68b0\u629b\u5149\uff09\u524d\u7684\u4e00\u9053\u5de5\u5e8f\uff0c\u51cf \u5c11\u5de5\u5e8f\u4f59\u91cf <\/span>. \u7eb3\u7c73\u78e8\u524a\u7684\u53bb\u9664\u673a\u7406\u4e5f\u662f\u78e8\u7c92\u5212\u64e6\u53bb \u9664\uff0c\u5b83\u7684\u7efc\u5408\u52a0\u5de5\u6548\u679c\u8f83\u597d\uff0c\u52a0\u5de5\u540e\u80fd\u5f97\u5230\u7eb3\u7c73\u7ea7\u7684 \u8868\u9762\u7c97\u7cd9\u5ea6\uff0c\u4e14\u6750\u6599\u53bb\u9664\u7387\u53ef\u8fbe<\/span>800 \u00b5m\/h\uff0c\u76ee\u524d\u4f20\u7edf \u78e8\u629b\u6280\u672f\u9664\u4e86\u7eb3\u7c73\u78e8\u524a\u7684\u52a0\u5de5\u8bbe\u5907\u5927\u90e8\u5206\u662f\u8fdb\u53e3\u4ea7 \u54c1\uff08\u5982\u65e5\u672c\u4e1c\u4eac\u7cbe\u5bc6\u3001\u65e5\u672c\u5188\u672c\u548c\u65e5\u672c\u8fea\u601d\u79d1\u7b49\uff09\uff0c\u5728 \u5176\u4ed6\u6280\u672f\u65b9\u9762\u56fd\u4ea7\u8bbe\u5907\u4e5f\u5177\u6709\u4e00\u5b9a\u7684\u4f7f\u7528\u7387\uff08\u5982\u534e \u6d77\u6e05\u79d1\u3001\u7279\u65af\u8fea\u7b49\uff09<\/span>. \u7279\u79cd\u80fd\u91cf\u8f85\u52a9\u673a\u68b0\u78e8\u629b\u6280\u672f\u7684 \u6838\u5fc3\u53bb\u9664\u673a\u7406\u6839\u636e\u7279\u79cd\u80fd\u573a\u7684\u4e0d\u540c\u5206\u4e3a\u8d85\u58f0\u632f\u52a8\u3001 \u6fc0\u5149\u8f90\u5c04\u6216\u653e\u7535\uff0c\u5b83\u4eec\u7684\u6750\u6599\u53bb\u9664\u7387\u76f8\u5bf9\u8f83\u5dee\uff0c\u4f46\u662f \u52a0\u5de5\u540e\u7684\u8868\u9762\u8d28\u91cf\u6bd4\u4f20\u7edf\u673a\u68b0\u78e8\u629b\u6280\u672f\u597d\uff0c\u6dfb\u52a0\u7279 \u79cd\u80fd\u91cf\u8f85\u52a9\u673a\u68b0\u78e8\u629b\u540e\u867d\u7136\u52a0\u5de5\u6548\u679c\u6709\u6240\u6539\u5584\uff0c\u4f46 \u662f\u5bf9\u5176\u7814\u7a76\u8fd8\u5c40\u9650\u4e8e\u5c0f\u5c3a\u5bf8\u7684\u52a0\u5de5\uff0c\u4e14\u52a0\u5de5\u8bbe\u5907\u4e5f \u5c40\u9650\u4e8e\u81ea\u5236\u8bbe\u5907\uff0c\u96be\u4ee5\u6ee1\u8db3\u6279\u91cf\u5316\u7684\u7a33\u5b9a\u751f\u4ea7\u9700\u6c42\uff0c \u8fd8\u9700\u8981\u5bf9\u5927\u5c3a\u5bf8\u3001\u8d85\u8584\u5316\u52a0\u5de5\u8fdb\u884c\u66f4\u6df1\u5165\u7814\u7a76<\/span>. \u4ee5\u5316\u5b66\u673a\u68b0\u629b\u5149\u4e3a\u4ee3\u8868\u7684\u5316\u5b66\u53cd\u5e94\u78e8\u629b\u6280\u672f\u662f\u52a0\u5de5\u78b3\u5316 \u7845\u886c\u5e95\u7684\u91cd\u8981\u624b\u6bb5\uff0c\u901a\u8fc7\u5316\u5b66\u8bd5\u5242\u6216\u673a\u68b0\u8bf1\u5bfc\u7684\u65b9 \u5f0f\u5bf9\u78b3\u5316\u7845\u886c\u5e95\u8868\u9762\u8fdb\u884c\u6c27\u5316\u8150\u8680\uff0c\u53ef\u4ee5\u6709\u6548\u964d\u4f4e \u52a0\u5de5\u96be\u5ea6\uff0c\u83b7\u5f97\u4e9a\u7eb3\u7c73\u7ea7\u751a\u81f3\u539f\u5b50\u7ea7\u7684\u8868\u9762\u8d28\u91cf<\/span>.\u4f46 \u662f\u5927\u90e8\u5206\u5316\u5b66\u53cd\u5e94\u78e8\u629b\u6280\u672f\u7684\u52a0\u5de5\u6548\u7387\u8f83\u4f4e\uff0c\u6750\u6599 \u53bb\u9664\u7387\u53ea\u80fd\u8fbe\u5230 <\/span>0.5 \u00b5m\/h \u5de6\u53f3\uff0c\u91d1\u5c5e\u6469\u64e6\u8bf1\u5bfc\u53cd\u5e94 \u78e8\u629b\u7684\u6750\u6599\u53bb\u9664\u7387\u53ef\u4ee5\u8fbe\u5230 <\/span>300~500 \u00b5m\/h\uff0c\u4f46\u662f\u5176 \u52a0\u5de5\u540e\u7684\u8868\u9762\u8d28\u91cf\u8fd8\u6709\u5f85\u63d0\u5347 <\/span>. \u76ee\u524d\u5316\u5b66\u53cd\u5e94\u78e8\u629b \u6280\u672f\u4e2d\u53ea\u6709\u5316\u5b66\u673a\u68b0\u629b\u5149\u6280\u672f\u6709\u91cf\u4ea7\u5316\u7684\u7a33\u5b9a\u8bbe \u5907\uff0c\u4e3b\u8981\u5382\u5bb6\u6709\u7f8e\u56fd\u5e94\u7528\u6750\u6599\u3001\u65e5\u672c\u82f1\u683c\u65af\u4ee5\u53ca\u65e5\u672c \u8fea\u601d\u79d1\u7b49\u56fd\u5916\u5382\u5bb6\uff0c\u4ee5\u534e\u6d77\u6e05\u79d1\u548c\u7279\u65af\u8fea\u4e3a\u9996\u7684\u56fd \u5185\u5382\u5bb6\u4e5f\u83b7\u5f97\u4e86\u534a\u5bfc\u4f53\u886c\u5e95\u52a0\u5de5\u5382\u7684\u8ba4\u53ef <\/span>. \u5bf9\u4e8e\u9664 \u5316\u5b66\u673a\u68b0\u629b\u5149\u5916\u7684\u5176\u4ed6\u5316\u5b66\u53cd\u5e94\u78e8\u629b\u6280\u672f\u7684\u7814\u7a76\uff0c \u8fd8\u53ea\u662f\u4ee5\u5c0f\u5c3a\u5bf8\u4e3a\u4e3b\uff0c\u78e8\u629b\u52a0\u5de5\u6240\u4f7f\u7528\u7684\u81ea\u52a8\u5316\u3001\u5546 \u4e1a\u5316\u8bbe\u5907\u4e5f\u8f83\u5c11\uff0c\u5927\u90e8\u5206\u4ee5\u81ea\u5236\u8bbe\u5907\u4e3a\u4e3b<\/span>.\u00a0<\/span><\/section>\n

\"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf\"<\/p>\n

<\/section>\n
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4\u00a0<\/span>\u5c55 \u671b\u00a0<\/span><\/span><\/strong><\/strong><\/section>\n
\u00a0<\/span>\u00a0<\/span><\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n

\u7531\u4e8e\u78b3\u5316\u7845\u6676\u4f53\u96be\u4ee5\u957f\u6210\u957f\u6761\u72b6\u7684\u6676\u68d2\uff0c\u6240\u4ee5 \u78b3\u5316\u7845\u6676\u4f53\u4e3b\u8981\u671d\u7740\u5927\u5c3a\u5bf8\u7684\u6676\u952d\u65b9\u5411\u7a81\u7834\uff0c\u5927\u5c3a \u5bf8\u3001\u8d85\u8584\u5316\u7684\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u5c06\u662f\u672a\u6765\u7684\u7814\u7a76 \u70ed\u70b9\uff0c\u5982\u56fe <\/span>7\u6240\u793a\uff0c\u5982\u4f55\u517c\u987e\u5927\u5c3a\u5bf8\u78b3\u5316\u7845\u886c\u5e95\u7684\u52a0 \u5de5\u6548\u7387\u548c\u52a0\u5de5\u8d28\u91cf\u5c06\u6210\u4e3a\u5173\u952e<\/span>. \u76ee\u524d\uff0c\u4e3b\u8981\u662f\u901a\u8fc7\u5355 \u9762\u78e8\u524a\u548c\u5316\u5b66\u673a\u68b0\u629b\u5149\u7684\u65b9\u5f0f\u5b9e\u73b0\u5927\u5c3a\u5bf8\u78b3\u5316\u7845\u886c \u5e95\u7684\u78e8\u629b\u52a0\u5de5\uff0c\u4f46\u662f\u8f83\u4f4e\u7684\u826f\u54c1\u7387\u4ee5\u53ca\u52a0\u5de5\u6548\u7387\u662f \u5176\u4e9f\u5f85\u89e3\u51b3\u7684\u96be\u9898 <\/span>. \u901a\u8fc7\u5bf9\u73b0\u6709\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u6280 \u672f\u7684\u603b\u7ed3\u53ca\u5206\u6790\uff0c\u672a\u6765\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684 \u53d1\u5c55\u5c06\u96c6\u4e2d\u5728\u5de5\u827a\u53c2\u6570\u7684\u4f18\u5316\u3001\u65b0\u78e8\u6599\u53ca\u629b\u5149\u6db2\u7684 \u7814\u7a76\u3001\u52a0\u5de5\u8bbe\u5907\u7684\u81ea\u52a8\u5316\u548c\u667a\u80fd\u5316\u53d1\u5c55\u3001\u73af\u4fdd\u52a0\u5de5\u65b9 \u6cd5\u7684\u5f00\u53d1\u3001\u591a\u5c3a\u5ea6\u78e8\u629b\u52a0\u5de5\u4ee5\u53ca\u8de8\u5b66\u79d1\u7814\u7a76\u7b49\u65b9\u9762<\/span>.\u00a0<\/span><\/p>\n

\"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf\"<\/p>\n

\n

1\uff09\u5927\u5c3a\u5bf8\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u5de5\u827a\u4f18\u5316\uff1a\u901a\u8fc7\u8bd5\u9a8c\u4ee5\u53ca\u4eff\u771f\u7b49\u624b\u6bb5\uff0c\u63a2\u8ba8\u5927\u5c3a\u5bf8\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u8fc7 \u7a0b\u4e2d\u5404\u4e2a\u53c2\u6570\u5bf9\u52a0\u5de5\u7ed3\u679c\u7684\u5f71\u54cd\uff0c\u5e76\u5bf9\u5176\u4e2d\u7684\u5173\u952e \u53c2\u6570\u8fdb\u884c\u63a7\u5236\u4ee5\u53ca\u4f18\u5316\uff0c\u4ee5\u671f\u627e\u5230\u6700\u5408\u9002\u7684\u52a0\u5de5\u53c2 \u6570\uff0c\u5b9e\u73b0\u9ad8\u6548\u7387\u3001\u9ad8\u8d28\u91cf\u3001\u4f4e\u6210\u672c\u52a0\u5de5<\/span>.<\/span><\/p>\n

2\uff09\u7814\u7a76\u65b0\u578b\u78e8\u6599\u53ca\u629b\u5149\u6db2\uff1a\u78e8\u6599\u53ca\u629b\u5149\u6db2\u662f\u5f71 \u54cd\u78b3\u5316\u7845\u886c\u5e95\u52a0\u5de5\u6548\u7387\u4ee5\u53ca\u52a0\u5de5\u8d28\u91cf\u7684\u5173\u952e\u56e0\u7d20 <\/span>. \u00a0\u672a\u6765\uff0c\u7814\u7a76\u4eba\u5458\u5c06\u81f4\u529b\u4e8e\u7814\u7a76\u548c\u5bfb\u627e\u65b0\u578b\u7684\u78e8\u6599\u4ee5 \u53ca\u629b\u5149\u6db2\uff0c\u4ee5\u671f\u5b9e\u73b0\u78e8\u6599\u3001\u629b\u5149\u6db2\u4e0e\u78b3\u5316\u7845\u7684\u5feb\u901f\u53cd \u5e94\uff0c\u63d0\u9ad8\u52a0\u5de5\u6548\u7387\uff0c\u5e76\u964d\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6<\/span>.<\/span><\/p>\n

3\uff09\u7814\u53d1\u667a\u80fd\u5316\u53ca\u81ea\u52a8\u5316\u52a0\u5de5\u8bbe\u5907\uff1a\u501f\u52a9\u73b0\u4ee3\u8ba1\u7b97\u673a\u6280\u672f\u548c\u4eba\u5de5\u667a\u80fd\u6280\u672f\uff0c\u5f00\u53d1\u667a\u80fd\u5316\u548c\u81ea\u52a8\u5316\u7684 \u52a0\u5de5\u8bbe\u5907\uff0c\u901a\u8fc7\u5b9e\u65f6\u6570\u636e\u76d1\u6d4b\u548c\u5206\u6790\uff0c\u5b9e\u73b0\u78e8\u629b\u52a0\u5de5 \u8fc7\u7a0b\u4e2d\u53c2\u6570\u7684\u5b9e\u65f6\u63a7\u5236\u548c\u4f18\u5316\uff0c\u63d0\u9ad8\u52a0\u5de5\u6548\u7387\u548c\u52a0 \u5de5\u8d28\u91cf<\/span>.\u00a0<\/span><\/p>\n

4\uff09\u5f00\u53d1\u65b0\u7684\u52a0\u5de5\u65b9\u6cd5\uff1a\u78b3\u5316\u7845\u886c\u5e95\u7684\u78e8\u629b\u52a0\u5de5 \u8fc7\u7a0b\u4e2d\u4f1a\u4ea7\u751f\u5927\u91cf\u5bf9\u73af\u5883\u4e0d\u53cb\u597d\u7684\u5e9f\u6599\u3001\u5e9f\u6c34\uff0c\u63a2\u7d22 \u65b0\u7684\u78e8\u629b\u52a0\u5de5\u6280\u672f\uff0c\u5982\u7b49\u79bb\u5b50\u523b\u8680\u629b\u5149\u6280\u672f\u3001\u6fc0\u5149\u78e8 \u629b\u6280\u672f\u7b49\uff0c\u53ef\u4ee5\u6709\u6548\u51cf\u5c11\u5bf9\u73af\u5883\u7684\u5f71\u54cd\uff0c\u540c\u65f6\u6ee1\u8db3\u4e0d \u540c\u573a\u666f\u7684\u5e94\u7528\u9700\u6c42<\/span>.\u00a0<\/span><\/p>\n

5\uff09\u591a\u5c3a\u5ea6\u78e8\u629b\u6280\u672f\uff1a\u76ee\u524d\u78b3\u5316\u7845\u886c\u5e95\u9700\u7ecf\u8fc7\u7c97 \u78e8\u3001\u7cbe\u78e8\u3001\u629b\u5149\u7b49\u4e00\u7cfb\u5217\u52a0\u5de5\u6b65\u9aa4\u540e\u624d\u80fd\u5f97\u5230\u7406\u60f3\u7684 \u8868\u9762\u8d28\u91cf\uff0c\u70e6\u7410\u7684\u52a0\u5de5\u6b65\u9aa4\u4e25\u91cd\u5f71\u54cd\u4e86\u52a0\u5de5\u6548\u7387\u4ee5 \u53ca\u52a0\u5de5\u8d28\u91cf<\/span>. \u9488\u5bf9\u4e0d\u540c\u5c3a\u5ea6\u7684\u8868\u9762\u7f3a\u9677\uff0c\u79d1\u7814\u4eba\u5458\u5c06 \u7814\u7a76\u591a\u5c3a\u5ea6\u78e8\u629b\u6280\u672f\uff0c\u901a\u8fc7\u6574\u5408\u591a\u79cd\u4e0d\u540c\u78e8\u629b\u6280\u672f\uff0c \u4ee5\u5b9e\u73b0\u4ece\u7c97\u7cd9\u5230\u5149\u6d01\u7684\u78e8\u629b\u4e00\u4f53\u5316\u52a0\u5de5\u8fc7\u7a0b\uff0c\u51cf\u5c11 \u52a0\u5de5\u6b65\u9aa4\u7684\u540c\u65f6\uff0c\u83b7\u5f97\u9ad8\u8d28\u91cf\u7684\u78b3\u5316\u7845\u886c\u5e95<\/span>.\u00a0<\/span><\/p>\n

6\uff09\u8de8\u5b66\u79d1\u7814\u7a76\uff1a\u78b3\u5316\u7845\u886c\u5e95\u7684\u78e8\u629b\u52a0\u5de5\u6280\u672f\u6d89 \u53ca\u591a\u4e2a\u5b66\u79d1\u9886\u57df\uff0c\u5982\u6750\u6599\u79d1\u5b66\u3001\u5316\u5b66\u3001\u529b\u5b66\u7b49<\/span>. \u52a0\u5f3a\u5404 \u5b66\u79d1\u4e4b\u95f4\u7684\u4ea4\u6d41\uff0c\u4fc3\u8fdb\u5b66\u79d1\u4ea4\u53c9\u878d\u5408\uff0c\u63a8\u52a8\u78b3\u5316\u7845\u886c \u5e95\u78e8\u629b\u6280\u672f\u7684\u521b\u65b0\u53d1\u5c55<\/span>.\u00a0<\/span><\/p>\n

\n
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5\u00a0<\/span>\u7ed3 \u8bba<\/span><\/span><\/strong><\/strong>\u00a0<\/span><\/strong><\/strong><\/section>\n
\u00a0<\/span>\u00a0<\/span>\u00a0<\/span><\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n

\u672c\u6587\u9610\u8ff0\u4e86\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e \u53d1\u5c55\u8d8b\u52bf <\/span>. \u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u6280\u672f\u7684\u53d1\u5c55\u53d7\u5230\u9ad8\u6027\u80fd \u5668\u4ef6\u8d28\u91cf\u9700\u6c42\u7684\u7275\u5f15\uff0c\u540c\u65f6\u4e5f\u5e26\u52a8\u4e86\u78b3\u5316\u7845\u5668\u4ef6\u6027 \u80fd\u7684\u63d0\u5347 <\/span>. \u7531\u4e8e\u673a\u68b0\u78e8\u629b\u6280\u672f\u4e3b\u8981\u4f9d\u9760\u786c\u8d28\u78e8\u7c92\u5212\u64e6\u53bb\u9664\uff0c\u6240\u4ee5\u96be\u4ee5\u83b7\u5f97\u6ee1\u8db3\u8868\u9762\u8d28\u91cf\u7684\u78b3\u5316\u7845\u886c\u5e95\uff0c \u56e0\u6b64\u5982\u4f55\u63d0\u9ad8\u673a\u68b0\u78e8\u629b\u6280\u672f\u7684\u52a0\u5de5\u8d28\u91cf\u5c06\u6210\u4e3a\u672a\u6765 \u7684\u7814\u7a76\u70ed\u70b9\u4e4b\u4e00 <\/span>. \u5316\u5b66\u8150\u8680\u548c\u673a\u68b0\u8bf1\u5bfc\u53cd\u5e94\u662f\u5316\u5b66 \u53cd\u5e94\u78e8\u629b\u6280\u672f\u7684\u6838\u5fc3\uff0c\u4e3a\u4e86\u964d\u4f4e\u78b3\u5316\u7845\u78e8\u629b\u52a0\u5de5\u8fc7 \u7a0b\u4e2d\u7684\u65f6\u95f4\u3001\u7ecf\u6d4e\u6210\u672c\uff0c\u5bf9\u5316\u5b66\u8150\u8680\u548c\u673a\u68b0\u8bf1\u5bfc\u53cd\u5e94 \u7684\u901f\u7387\u63d0\u51fa\u4e86\u66f4\u9ad8\u7684\u8981\u6c42\uff0c\u540c\u65f6\u5316\u5b66\u53cd\u5e94\u901f\u7387\u548c\u673a \u68b0\u53bb\u9664\u901f\u7387\u7684\u5e73\u8861\u662f\u8868\u9762\u8d28\u91cf\u7684\u91cd\u8981\u5f71\u54cd\u56e0\u7d20 <\/span>. \u5728 \u672a\u6765\u7684\u7814\u7a76\u4e2d\uff0c\u9700\u8981\u4f18\u5316\u5927\u5c3a\u5bf8\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u4e2d\u7684 \u5de5\u827a\u53c2\u6570\u548c\u78e8\u629b\u5de5\u5177\uff1b\u5f00\u53d1\u65b0\u578b\u8d85\u7cbe\u5bc6\u78e8\u629b\u6280\u672f\uff1b\u7814 \u53d1\u81ea\u52a8\u5316\u3001\u667a\u80fd\u5316\u7684\u52a0\u5de5\u8bbe\u5907\uff1b\u5b9e\u73b0\u78b3\u5316\u7845\u886c\u5e95\u52a0\u5de5 \u7684\u78e8\u629b\u4e00\u4f53\u5316<\/span>.<\/span><\/p>\n<\/section>\n

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\u6765\u6e90\uff1a\u6e56\u5357\u5927\u5b66\u5b66\u62a5\uff08\u81ea\u7136\u79d1\u5b66\u7248\uff09<\/span><\/section>\n
\u4f5c\u8005\uff1a\u7f57\u6c42\u53d1 1\uff0c3\u2020\uff0c\u9648\u6770\u94ed 1\uff0c\u7a0b\u5fd7\u8c6a 1\uff0c\u9646\u9759 1\uff0c2<\/span><\/section>\n

\uff081. \u534e\u4fa8\u5927\u5b66 \u5236\u9020\u5de5\u7a0b\u7814\u7a76\u9662\uff0c\u798f\u5efa \u53a6\u95e8 361021\uff1b<\/span><\/p>\n

2. \u534e\u4fa8\u5927\u5b66 \u8106\u6027\u6750\u6599\u4ea7\u54c1\u667a\u80fd\u5236\u9020\u6280\u672f\u56fd\u5bb6\u5730\u65b9\u8054\u5408\u5de5\u7a0b\u7814\u7a76\u4e2d\u5fc3\uff0c\u798f\u5efa \u53a6\u95e8 361021\uff1b<\/span><\/p>\n

3. \u9ad8\u6027\u80fd\u5de5\u5177\u5168\u56fd\u91cd\u70b9\u5b9e\u9a8c\u5ba4\uff0c\u798f\u5efa \u53a6\u95e8 361021\uff09<\/span><\/p>\n

\u58f0\u660e\uff1a\u6211\u4eec\u5c0a\u91cd\u539f\u521b\uff0c\u4e5f\u6ce8\u91cd\u5206\u4eab\uff1b\u6587\u5b57\u3001\u56fe\u7247\u7248\u6743\u5f52\u539f\u4f5c\u8005\u6240\u6709\u3002\u5982\u6709\u4fb5\u72af\u60a8\u7684\u6743\u76ca\u8bf7\u53ca\u65f6\u8054\u7cfb\uff0c\u6211\u4eec\u5c06\u7b2c\u4e00\u65f6\u95f4\u5220\u9664\uff0c\u8c22\u8c22\uff01<\/span><\/section>\n<\/section>\n<\/blockquote>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n
<\/section>\n
\u4e3a\u4e86\u4fc3\u8fdb\u884c\u4e1a\u4ea4\u6d41\u548c\u53d1\u5c55\uff0c\u827e\u90a6\u65b0\u5efa\u78b3\u5316\u7845\u529f\u7387\u534a\u5bfc\u4f53\u4ea7\u4e1a\u94fe\u5fae\u4fe1\u7fa4\uff0c\u6b22\u8fce\u78b3\u5316\u7845\u524d\u9053\u6750\u6599\u4e0e\u52a0\u5de5\u8bbe\u5907\uff0c\u540e\u9053\u5668\u4ef6\u751f\u4ea7\u548c\u6a21\u5757\u5c01\u88c5\u7684\u884c\u4e1a\u670b\u53cb\u4e00\u8d77\u52a0\u5165\u8ba8\u8bba\u3002<\/section>\n
\"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf\"<\/section>\n
\u957f\u6309\u8bc6\u522b\u4e8c\u7ef4\u7801\u5173\u6ce8\u516c\u4f17\u53f7\uff0c\u70b9\u51fb\u4e0b\u65b9\u83dc\u5355\u680f\u5de6\u4fa7\u201c\u5fae\u4fe1\u7fa4\u201d\uff0c\u7533\u8bf7\u52a0\u5165\u7fa4\u804a<\/section>\n

\u63a8\u8350\u6d3b\u52a8<\/strong><\/span>\uff1a<\/strong><\/p>\n

<\/section>\n
\u78b3\u5316\u7845\u534a\u5bfc\u4f53\u52a0\u5de5\u6280\u672f\u521b\u65b0<\/strong><\/span>\u4ea7\u4e1a\u8bba\u575b\uff08\u82cf\u5dde\u00b77\u67084\u65e5\uff09<\/strong><\/a><\/section>\n
<\/section>\n
\n
\n
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01<\/span><\/p>\n<\/section>\n

\n

\u4f1a\u8bae\u8bae\u9898<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\n
\u5e8f\u53f7<\/span><\/strong><\/section>\n<\/td>\n
\n
\u6682\u5b9a\u8bae\u9898<\/span><\/strong><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u4f01\u4e1a<\/span><\/strong><\/section>\n<\/td>\n<\/tr>\n
\n
1<\/span><\/section>\n<\/td>\n
\n
8\u82f1\u5bf8\u78b3\u5316\u7845\u886c\u5e95\u4ea7\u4e1a\u5316\u8fdb\u5c55<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u78b3\u5316\u7845\u886c\u5e95\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
2<\/span><\/section>\n<\/td>\n
\n
\u5927\u5c3a\u5bf8\u78b3\u5316\u7845\u5355\u6676\u751f\u957f\u6280\u672f\u75db\u70b9\u89e3\u6790<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u78b3\u5316\u7845\u5355\u6676\u5236\u5907\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
3<\/span><\/section>\n<\/td>\n
\n
\u65b0\u4e00\u4ee3\u5207\u7247\u673a\u201c\u7834\u5c40\u201d8\u82f1\u5bf8\u78b3\u5316\u7845<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u5207\u5272\u8bbe\u5907\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
4<\/span><\/section>\n<\/td>\n
\n
\u6fc0\u5149\u6280\u672f\u5728\u78b3\u5316\u7845\u5207\u5272\u53ca\u5212\u7247\u4e0a\u7684\u5e94\u7528<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u6fc0\u5149\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
5<\/span><\/section>\n<\/td>\n
\n
\u6db2\u76f8\u6cd5\u5236\u5907\u78b3\u5316\u7845\u6280\u672f<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u78b3\u5316\u7845\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
6<\/span><\/section>\n<\/td>\n
\n
\u56fd\u4ea7MBE\u8bbe\u5907\u5e94\u7528\u53ca\u53d1\u5c55\u60c5\u51b5<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u78b3\u5316\u7845\u5916\u5ef6\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
7<\/span><\/section>\n<\/td>\n
\n
SiC MOS\u5668\u4ef6\u7ed3\u6784\u8bbe\u8ba1\u89e3\u51b3\u65b9\u6848<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u78b3\u5316\u7845\u5668\u4ef6\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
8<\/span><\/section>\n<\/td>\n
\n
\u8f66\u7528\u78b3\u5316\u7845\u52a0\u5de5\u5de5\u827a\u4e0e\u8981\u70b9\u7814\u7a76<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u78b3\u5316\u7845\u52a0\u5de5\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
9<\/span><\/section>\n<\/td>\n
\n
\u5229\u7528\u78b3\u5316\u94bd\u7684\u78b3\u5316\u7845\u5355\u6676\u751f\u957f\u6280\u672f<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u78b3\u5316\u7845\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
10<\/span><\/section>\n<\/td>\n
\n
\u78b3\u5316\u7845\u886c\u5e95\u7814\u78e8\u629b\u5149\u5de5\u827a\u53ca\u8017\u6750\u6280\u672f<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u7814\u78e8\u629b\u5149\u8bbe\u5907\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
11<\/span><\/section>\n<\/td>\n
\n
\u9002\u7528\u4e8e8\u82f1\u5bf8\u78b3\u5316\u7845\u7684\u5148\u8fdb\u5207\u5272\u5de5\u827a<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u5207\u5272\u8bbe\u5907\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
12<\/span><\/section>\n<\/td>\n
\n
\u5316\u5b66\u673a\u68b0\u629b\u5149\u5728\u78b3\u5316\u7845\u4e0a\u7684\u53cd\u5e94\u673a\u7406<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u629b\u5149\u8bbe\u5907\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
13<\/span><\/section>\n<\/td>\n
\n
\u78b3\u5316\u7845\u886c\u5e95\u53ca\u5916\u5ef6\u7f3a\u9677\u68c0\u6d4b\u6280\u672f<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u68c0\u6d4b\u8bbe\u5907\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
14<\/span><\/section>\n<\/td>\n
\n
8\u82f1\u5bf8\u78b3\u5316\u7845\u5916\u5ef6\u6750\u6599\u751f\u957f\u6838\u5fc3\u5de5\u827a\u4e0e\u5173\u952e\u88c5\u5907<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u78b3\u5316\u7845\u5916\u5ef6\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
15<\/span><\/section>\n<\/td>\n
\n
\u5916\u5ef6\u63ba\u6742\u6280\u672f\u7684\u4f18\u5316\u4e0e\u6539\u8fdb<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u78b3\u5316\u7845\u5916\u5ef6\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
16<\/span><\/section>\n<\/td>\n
\n
8\u82f1\u5bf8\u78b3\u5316\u7845\u7684\u6c27\u5316\u5de5\u827a\u6280\u672f<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u78b3\u5316\u7845\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
17<\/span><\/section>\n<\/td>\n
\n
\u78b3\u5316\u7845\u79bb\u5b50\u6ce8\u5165\u8bbe\u5907\u6280\u672f<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u79bb\u5b50\u6ce8\u5165\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
18<\/span><\/section>\n<\/td>\n
\n
\u9ad8\u7eaf\u5ea6\u78b3\u5316\u7845\u7c89\u672b\u5236\u5907\u78b3\u5316\u7845\u6676\u4f53<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u6fc0\u5149\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
19<\/span><\/section>\n<\/td>\n
\n
\u78b3\u5316\u7845\u5148\u8fdb\u6e05\u6d17\u6280\u672f<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u6e05\u6d17\u8bbe\u5907\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n
\n
20<\/span><\/section>\n<\/td>\n
\n
\u78b3\u5316\u7845\u5173\u952e\u88c5\u5907\u7684\u73b0\u72b6\u53ca\u56fd\u4ea7\u5316\u601d\u8003<\/span><\/section>\n<\/td>\n
\n
\u62df\u9080\u8bf7\u78b3\u5316\u7845\u8bbe\u5907\u4f01\u4e1a\/\u9ad8\u6821\u7814\u7a76\u6240<\/span><\/section>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\u66f4\u591a\u76f8\u5173\u8bae\u9898\u5f81\u96c6\u4e2d\uff0c<\/span>\u6f14\u8bb2\u53ca\u8d5e\u52a9\u8bf7\u8054\u7cfb\u5f20\u5c0f\u59d0\uff1a<\/span>13418617872 \uff08\u540c\u5fae\u4fe1\uff09<\/span><\/section>\n
\"\u78b3\u5316\u7845\u886c\u5e95\u78e8\u629b\u52a0\u5de5\u6280\u672f\u7684\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf\"<\/span><\/section>\n
\n
<\/section>\n
\n
\n
\n
\n

02<\/span><\/p>\n<\/section>\n

\n

\u62df\u9080\u4f01\u4e1a<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n