{"id":43949,"date":"2022-08-22T12:17:48","date_gmt":"2023-12-04T07:44:26","guid":{"rendered":"https:\/\/www.ab-sm.com\/?p=43949"},"modified":"2023-12-04T15:44:32","modified_gmt":"2023-12-04T07:44:32","slug":"759398ce5d","status":"publish","type":"post","link":"https:\/\/www.ab-sm.com\/a\/43949","title":{"rendered":"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8"},"content":{"rendered":"<div class=\"bpp-post-content\">\n<section style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;line-height: 2.25;letter-spacing: 1.5px;font-style: normal;font-weight: 400;text-align: justify;font-size: 16px;\">\n<section style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;line-height: 2.25;letter-spacing: 1.5px;font-style: normal;font-weight: 400;text-align: justify;font-size: 16px;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;line-height: 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105);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;text-align: right;text-indent: 0px;text-transform: none;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;float: none;display: inline !important;\"><strong style=\"margin: 0px;padding: 0px;font-style: normal;font-variant-caps: normal;text-align: justify;text-indent: 0px;text-transform: none;white-space: normal;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;outline: 0px;max-width: 100%;font-size: 15px;caret-color: rgb(59, 59, 59);color: rgb(59, 59, 59);font-family: -apple-system, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;letter-spacing: 0.5440000295639038px;visibility: visible;box-sizing: border-box !important;word-wrap: break-word !important;\"><span style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;font-size: 14px;visibility: visible;box-sizing: border-box !important;word-wrap: break-word !important;overflow-wrap: break-word !important;\"><span style=\"margin: 0px;padding: 0px;caret-color: rgb(51, 51, 51);color: rgb(219, 175, 105);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;text-align: right;text-indent: 0px;text-transform: none;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;float: none;display: inline !important;\"><span style=\"margin: 0px;padding: 0px;caret-color: rgb(51, 51, 51);color: rgb(219, 175, 105);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;text-align: right;text-indent: 0px;text-transform: none;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;float: none;display: inline !important;\"><\/span><\/span><\/span><\/strong><\/span><\/span><\/strong><\/section>\n<section style=\"margin: 0px 8px;padding: 0px;caret-color: rgb(51, 51, 51);color: rgb(51, 51, 51);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 16px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;orphans: auto;text-align: justify;text-indent: 0px;text-transform: none;white-space: normal;widows: auto;word-spacing: 0px;-webkit-text-size-adjust: auto;-webkit-text-stroke-width: 0px;text-decoration: none;box-sizing: border-box;line-height: 2.25;\"><strong style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;font-size: 15px;font-style: normal;font-variant-caps: normal;text-align: justify;text-indent: 0px;text-transform: none;white-space: normal;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;caret-color: rgb(59, 59, 59);color: rgb(59, 59, 59);font-family: -apple-system, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;letter-spacing: 0.5440000295639038px;visibility: visible;box-sizing: border-box !important;word-wrap: break-word !important;\"><span style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;font-size: 14px;visibility: visible;box-sizing: border-box !important;word-wrap: break-word !important;overflow-wrap: break-word !important;\"><span style=\"margin: 0px;padding: 0px;caret-color: rgb(51, 51, 51);color: rgb(219, 175, 105);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;text-align: right;text-indent: 0px;text-transform: none;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;float: none;display: inline !important;\"><strong style=\"margin: 0px;padding: 0px;font-style: normal;font-variant-caps: normal;text-align: justify;text-indent: 0px;text-transform: none;white-space: normal;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;outline: 0px;max-width: 100%;font-size: 15px;caret-color: rgb(59, 59, 59);color: rgb(59, 59, 59);font-family: -apple-system, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;letter-spacing: 0.5440000295639038px;visibility: visible;box-sizing: border-box !important;word-wrap: break-word !important;\"><span style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;font-size: 14px;visibility: visible;box-sizing: border-box !important;word-wrap: break-word !important;overflow-wrap: break-word !important;\"><span style=\"margin: 0px;padding: 0px;caret-color: rgb(51, 51, 51);color: rgb(219, 175, 105);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;text-align: right;text-indent: 0px;text-transform: none;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;float: none;display: inline !important;\"><span style=\"margin: 0px;padding: 0px;caret-color: rgb(51, 51, 51);color: rgb(219, 175, 105);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;text-align: right;text-indent: 0px;text-transform: none;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;float: none;display: inline !important;\">\u25ce\u6587\u7ae0\u6765\u6e90\uff5c\u679c\u58f3\u786c\u79d1\u6280<\/span><\/span><\/span><\/strong><\/span><\/span><\/strong><\/section>\n<section style=\"margin: 0px 8px;padding: 0px;caret-color: rgb(51, 51, 51);color: rgb(51, 51, 51);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 16px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;orphans: auto;text-align: justify;text-indent: 0px;text-transform: none;white-space: normal;widows: auto;word-spacing: 0px;-webkit-text-size-adjust: auto;-webkit-text-stroke-width: 0px;text-decoration: none;box-sizing: border-box;line-height: 2.25;\"><strong style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;font-size: 15px;font-style: normal;font-variant-caps: normal;text-align: justify;text-indent: 0px;text-transform: none;white-space: normal;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;caret-color: rgb(59, 59, 59);color: rgb(59, 59, 59);font-family: -apple-system, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;letter-spacing: 0.5440000295639038px;visibility: visible;box-sizing: border-box !important;word-wrap: break-word !important;\"><span style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;font-size: 14px;visibility: visible;box-sizing: border-box !important;word-wrap: break-word !important;overflow-wrap: break-word !important;\"><span style=\"margin: 0px;padding: 0px;caret-color: rgb(51, 51, 51);color: rgb(219, 175, 105);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;text-align: right;text-indent: 0px;text-transform: none;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;float: none;display: inline !important;\"><strong style=\"margin: 0px;padding: 0px;font-style: normal;font-variant-caps: normal;text-align: justify;text-indent: 0px;text-transform: none;white-space: normal;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;outline: 0px;max-width: 100%;font-size: 15px;caret-color: rgb(59, 59, 59);color: rgb(59, 59, 59);font-family: -apple-system, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;letter-spacing: 0.5440000295639038px;visibility: visible;box-sizing: border-box !important;word-wrap: break-word !important;\"><span style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;font-size: 14px;visibility: visible;box-sizing: border-box !important;word-wrap: break-word !important;overflow-wrap: break-word !important;\"><span style=\"margin: 0px;padding: 0px;caret-color: rgb(51, 51, 51);color: rgb(219, 175, 105);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;text-align: right;text-indent: 0px;text-transform: none;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;float: none;display: inline !important;\"><span style=\"margin: 0px;padding: 0px;caret-color: rgb(51, 51, 51);color: rgb(219, 175, 105);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;text-align: right;text-indent: 0px;text-transform: none;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration: none;float: none;display: inline !important;\">\u25ce\u4f5c\u8005\uff5c\u4ed8\u658c&nbsp;\u7f16\u8f91\uff5c\u674e\u62d3<\/span><\/span><\/span><\/strong><\/span><\/span><\/strong><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;line-height: 2.25;letter-spacing: 1.5px;font-style: normal;font-weight: 400;text-align: justify;font-size: 16px;\"><strong style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;box-sizing: border-box !important;word-wrap: break-word !important;font-size: 15px;font-style: normal;font-variant-caps: normal;orphans: auto;text-align: justify;text-indent: 0px;text-transform: none;white-space: normal;widows: auto;word-spacing: 0px;-webkit-text-size-adjust: auto;-webkit-text-stroke-width: 0px;text-decoration: none;caret-color: rgb(59, 59, 59);color: rgb(59, 59, 59);font-family: -apple-system, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;letter-spacing: 0.5440000295639038px;visibility: visible;\"><span style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;box-sizing: border-box !important;word-wrap: break-word !important;font-size: 14px;visibility: visible;overflow-wrap: break-word !important;\"><span style=\"caret-color: rgb(51, 51, 51);color: rgb(219, 175, 105);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;orphans: auto;text-align: right;text-indent: 0px;text-transform: none;widows: auto;word-spacing: 0px;-webkit-text-size-adjust: auto;-webkit-text-stroke-width: 0px;text-decoration: none;display: inline !important;float: none;\"><strong style=\"margin: 0px;padding: 0px;font-style: normal;font-variant-caps: normal;orphans: auto;text-align: justify;text-indent: 0px;text-transform: none;white-space: normal;widows: auto;word-spacing: 0px;-webkit-text-size-adjust: auto;-webkit-text-stroke-width: 0px;text-decoration: none;outline: 0px;max-width: 100%;font-size: 15px;caret-color: rgb(59, 59, 59);color: rgb(59, 59, 59);font-family: -apple-system, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;letter-spacing: 0.5440000295639038px;visibility: visible;box-sizing: border-box !important;word-wrap: break-word !important;\"><span style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;font-size: 14px;visibility: visible;box-sizing: border-box !important;word-wrap: break-word !important;overflow-wrap: break-word !important;\"><span style=\"caret-color: rgb(51, 51, 51);color: rgb(219, 175, 105);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;orphans: auto;text-align: right;text-indent: 0px;text-transform: none;widows: auto;word-spacing: 0px;-webkit-text-size-adjust: auto;-webkit-text-stroke-width: 0px;text-decoration: none;display: inline !important;float: none;\"><span style=\"caret-color: rgb(51, 51, 51);color: rgb(219, 175, 105);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;orphans: auto;text-align: right;text-indent: 0px;text-transform: none;widows: auto;word-spacing: 0px;-webkit-text-size-adjust: auto;-webkit-text-stroke-width: 0px;text-decoration: none;display: inline !important;float: none;\"><br  \/><\/span><\/span><\/span><\/strong><\/span><\/span><\/strong><\/section>\n<section style=\"margin: 0px 8px;padding: 0px;caret-color: rgb(51, 51, 51);color: rgb(51, 51, 51);font-family: mp-quote, -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 16px;font-style: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 1.5px;orphans: auto;text-indent: 0px;text-transform: none;white-space: normal;widows: auto;word-spacing: 0px;-webkit-text-size-adjust: auto;-webkit-text-stroke-width: 0px;text-decoration: none;text-align: right;box-sizing: border-box;\"><span style=\"margin: 0px;padding: 0px;font-size: 13px;color: rgb(219, 175, 105);box-sizing: border-box;\"><\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><strong style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;box-sizing: border-box !important;word-wrap: break-word !important;font-size: 15px;font-style: normal;font-variant-caps: normal;orphans: auto;text-align: justify;text-indent: 0px;text-transform: none;white-space: normal;widows: auto;word-spacing: 0px;-webkit-text-size-adjust: auto;-webkit-text-stroke-width: 0px;text-decoration: none;caret-color: rgb(59, 59, 59);color: rgb(59, 59, 59);font-family: -apple-system, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;letter-spacing: 0.5440000295639038px;visibility: visible;\"><span style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;box-sizing: border-box !important;word-wrap: break-word !important;font-size: 14px;visibility: visible;overflow-wrap: break-word !important;\"><\/span><\/strong><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u82f9\u679c\u7684iPhone\u5f00\u542f\u4e86\u79fb\u52a8\u4e92\u8054\u7f51\u65f6\u4ee3\uff0c\u800c\u6210\u5c31iPhone\u7684\uff0c\u5219\u662f\u5404\u79cd\u521b\u65b0\u79d1\u6280\u786c\u4ef6\u7684\u5e94\u7528\uff0c\u5176\u4e2d\u5305\u62ecMEMS\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">2007\u5e74\u7684\u521d\u4ee3iPhone\uff0c\u4f7f\u7528\u4e86MEMS\u9ea6\u514b\u98ce\u3001MEMS\u52a0\u901f\u5ea6\u4f20\u611f\u5668\u7b49\u5668\u4ef6\uff0c\u4f7f\u624b\u673a\u9996\u6b21\u5b9e\u73b0\u5404\u79cd\u667a\u80fd\u64cd\u4f5c\uff1b2010\u5e74\u7684iPhone 4\u9996\u6b21\u4f7f\u7528MEMS\u4e09\u8f74\u9640\u87ba\u4eea\uff0c\u8ba9\u6211\u4eec\u53ef\u4ee5\u7ffb\u8f6c\u6216\u79fb\u52a8\u624b\u673a\u63a7\u5236\u7a0b\u5e8f\u8fd0\u884c\uff1b2016\u5e74\u7684\u82f9\u679cTWS\u8033\u673aAirPods\u4e0d\u4ec5\u914d\u5907\u4e86MEMS\u9ea6\u514b\u98ce\uff0c\u5b9e\u73b0\u4e86\u62fe\u97f3\u3001\u964d\u566a\u3001\u8bed\u97f3\u547d\u4ee4\u3001\u81ea\u9002\u5e94\u5747\u8861\uff0c\u8fd8\u914d\u5907\u4e86\u7ea2\u5916\u4f20\u611f\u5668\u548c\u8fd0\u52a8\u52a0\u901f\u8ba1\uff0c\u8ba9\u8033\u673a\u5b66\u4f1a\u76d1\u6d4b\u4eba\u7684\u4f69\u6234\u72b6\u6001\u3002<strong><span style=\"background-color: rgb(255, 206, 0);\">\u90a3\u4e48\uff0c\u5728\u9020\u5c31\u4e86\u82f9\u679c\u8d852\u4e07\u4ebf\u7f8e\u5143\u5e02\u503c\u7684iPhone\u4e2d\uff0c\u56fd\u4ea7MEMS\u6709\u4ec0\u4e48\u673a\u4f1a\uff1f<\/span><\/strong><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u672c\u6587\u662f\u201c\u56fd\u4ea7\u66ff\u4ee3\u201d\u7cfb\u5217\u7684\u7b2c\u5341\u4e8c\u7bc7\uff0c\u5173\u6ce8MEMS\u56fd\u4ea7\u66ff\u4ee3\u3002\u5728\u672c\u6587\u4e2d\uff0c\u4f60\u5c06\u4e86\u89e3\u5230\uff1aMEMS\u5230\u5e95\u662f\u4ec0\u4e48\uff0cMEMS\u7684\u5e02\u573a\u60c5\u51b5\u548c\u56fd\u4ea7\u5316\u5e03\u5c40\uff0c\u56fd\u4ea7MEMS\u53ca\u80cc\u540e\u7684\u601d\u8003\u3002<\/section>\n<section style=\"text-align: right;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 13px;color: rgb(219, 175, 105);box-sizing: border-box;\"><\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u591a\u6570\u4eba\u53ef\u80fd\u5e76\u4e0d\u77e5\u9053\uff0cMEMS\u8fd9\u79cd\u4f4e\u8c03\u7684\u5de5\u4e1a\u54c1\uff0c\u4e0d\u4ec5\u662f\u79d1\u6280\u754c\u516c\u8ba4\u6700\u5177\u53d1\u5c55\u6f5c\u529b\u7684\u7814\u7a76\u9886\u57df\u4e4b\u4e00\uff0c\u66f4\u662f\u8861\u91cf\u5de5\u4e1a\u56fd\u5bb6\u6838\u5fc3\u7ade\u4e89\u529b\u7684\u6307\u6807\u4e4b\u4e00\uff0c\u88ab\u4e1a\u754c\u4eba\u58eb\u89c6\u4e3a\u201c\u4e00\u8f88\u5b50\u90fd\u505a\u4e0d\u5b8c\u7684\u4ea7\u4e1a\u201d\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u4f5c\u4e3a\u65e0\u5904\u4e0d\u5728\u7684\u4e00\u79cd\u9769\u547d\u6027\u5173\u952e\u6280\u672f\uff0cMEMS\u5df2\u6e17\u900f\u5230\u6211\u4eec\u751f\u6d3b\u7684\u65b9\u65b9\u9762\u9762\uff0c\u6db5\u76d6\u51e0\u4e4e\u6240\u6709\u9700\u8981\u5fae\u578b\u5316\u7684\u4ea7\u54c1\u3002\u82f9\u679c\u3001\u534e\u4e3a\u3001\u4e09\u661f\u3001\u5c0f\u7c73\u3001OPPO\u7b49\u5404\u79cd\u6d88\u8d39\u7535\u5b50\u54c1\u724c\u90fd\u79bb\u4e0d\u5f00MEMS\u6280\u672f\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;width: 12.5%;height: auto;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/7c58edebad0953204678e04539ab9226.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"max-width: 100%;box-sizing: border-box;margin-left: 8px;margin-right: 8px;\">\n<section style=\"display: flex;justify-content: center;align-items: center;flex-direction: column;max-width: 100%;box-sizing: border-box;\">\n<section style=\"max-width: 100%;box-sizing: border-box;\" >\n<section style=\"display: flex;padding: 3px 0px;flex-direction: column;justify-content: center;border-bottom: 2px dashed rgb(219, 175, 105);max-width: 100%;box-sizing: border-box;\">\n<section style=\"text-align: unset;background-color: rgb(255, 206, 0);padding-left: 15px;padding-right: 15px;padding-top: 1px;max-width: 100%;font-size: 17px;color: rgb(17, 17, 17);line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\"><strong style=\"box-sizing: border-box;\">\u662f\u673a\u68b0\uff0c\u4e5f\u662f\u5fae\u7535\u5b50<\/strong><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">1959\u5e74\uff0c\u7269\u7406\u5b66\u5bb6\u7406\u67e5\u5fb7\u00b7\u8d39\u66fc\u5728\u52a0\u5dde\u7406\u5de5\u5b66\u9662\u7684\u6f14\u8bb2\u300a\u5fae\u89c2\u4e16\u754c\u6709\u65e0\u57a0\u7684\u7a7a\u95f4\u300b\u4e2d\uff0c\u66fe\u5927\u80c6\u6784\u60f3\u539f\u5b50\u5c3a\u5ea6\u7684\u5de5\u4e1a\u4e16\u754c\uff0c\u4eba\u4eec\u751a\u81f3\u53ef\u4ee5\u541e\u4e0b\u201c\u5916\u79d1\u533b\u751f\u673a\u5668\u4eba\u201d\uff0c\u6e05\u9664\u52a8\u8109\u8840\u6813\u6216\u6d88\u706d\u80bf\u7624\u3002<sup style=\"box-sizing: border-box;\">[1]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u5982\u4eca\uff0c\u8fd9\u79cd\u6784\u60f3\u4e0d\u518d\u662f\u79d1\u5e7b\uff0cMEMS\u5c31\u662f\u4e00\u79cd\u6bd4\u4eba\u7c7b\u5934\u53d1\u7684\u76f4\u5f84\u8fd8\u5c0f\u5f88\u591a\u500d\u7684\u5fae\u578b\u673a\u68b0\uff0c\u5b83\u5c31\u50cf\u7ec6\u80de\u4e00\u6837\uff0c\u6784\u5efa\u4e86\u5fae\u89c2\u7684\u4eba\u5de5\u667a\u6167\u4e16\u754c<sup style=\"box-sizing: border-box;\">[2]<\/sup>\u3002\u6bd4\u5982\u541e\u98dfMEMS\u8bca\u65ad\u836f\u4e38\u68c0\u6d4b\u4f53\u5185\u8eab\u4f53\u6307\u6807\uff0c\u5e76\u901a\u8fc7\u65e0\u7ebf\u4f20\u8f93\u5230\u75c5\u4eba\u4f53\u5916<sup style=\"box-sizing: border-box;\">[3]<\/sup>\uff0c\u518d\u6bd4\u5982\u7528MEMS\u4e3a\u7ec6\u80de\u505a\u624b\u672f<sup style=\"box-sizing: border-box;\">[4]<\/sup>\u3002\u53ef\u4ee5\u8bf4\uff0c\u6211\u4eec\u5728\u5b8f\u89c2\u4e16\u754c\u80fd\u505a\u4ec0\u4e48\uff0cMEMS\u5c31\u80fd\u5e2e\u6211\u4eec\u5728\u5fae\u89c2\u505a\u4ec0\u4e48\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">MEMS\u5168\u79f0\u4e3a\u201c\u5fae\u673a\u7535\u7cfb\u7edf\u201d\uff08Micro-Electro-Mechanical System\uff09\uff0c\u53c8\u79f0\u5fae\u7cfb\u7edf\u6280\u672f\u3001\u5fae\u673a\u68b0\u7b49\u3002\u662f\u7531\u5fae\u4f20\u611f\u5668\u3001\u5fae\u6267\u884c\u5668\u3001\u4fe1\u53f7\u5904\u7406\u548c\u63a7\u5236\u7535\u8def\u3001\u901a\u4fe1\u63a5\u53e3\u548c\u7535\u6e90\u7b49\u90e8\u4ef6\u7ec4\u6210\u7684\u4e00\u4f53\u5316\u7684\u5fae\u578b\u5668\u4ef6\u7cfb\u7edf\u3002\u8be5\u7cfb\u7edf\u53ef\u5728\u5fae\u89c2\u5c3a\u5ea6\u4e0a\u5355\u72ec\u6216\u6279\u91cf\u6267\u884c\u4f20\u611f\u3001\u63a7\u5236\u548c\u9a71\u52a8\u64cd\u4f5c\uff0c\u5e76\u5728\u5b8f\u89c2\u5c3a\u5ea6\u4e0a\u5b9e\u73b0\u5404\u7c7b\u529f\u80fd\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"margin: 10px 8px;text-align: center;opacity: 0.9;box-sizing: border-box;line-height: 1.75em;\">\n<section style=\"display: inline-block;width: 95%;border-width: 1px;border-style: dashed;border-color: rgb(219, 175, 105);padding: 5px 10px;background-color: rgba(0, 0, 0, 0);border-radius: 10px;height: auto;overflow: hidden;box-sizing: border-box;\">\n<section style=\"font-size: 15px;padding: 0px;color: rgb(219, 175, 105);text-align: left;box-sizing: border-box;\" >\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 14px;\">\u968f\u7740\u6280\u672f\u7684\u53d1\u5c55\uff0c\u79d1\u5b66\u5bb6\u53c8\u63d0\u51fa\u4e86\u7eb3\u673a\u7535\u7cfb\u7edfNEMS\uff08Nano-Electro-Mechanical System\uff09\u7684\u6982\u5ff5\u3002\u7531\u4e8e\u4e8c\u8005\u7ed3\u6784\u76f8\u540c\uff0c\u4e14\u5f52\u5c5e\u4e8e\u540c\u4e00\u9886\u57df\uff0c\u4e0b\u6587\u4e2dMEMS\u5747\u4ee3\u6307MEMS\/NEMS\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">MEMS\u662f\u6700\u5148\u8fdb\u7684\u673a\u68b0\u6280\u672f\u4e0e\u6700\u5148\u8fdb\u7684\u5fae\u7535\u5b50\u6280\u672f\u7684\u7ed3\u6676\u3002<strong style=\"box-sizing: border-box;\"><span style=\"background-color: rgb(253, 209, 0);box-sizing: border-box;\">\u5b83\u662f\u4e00\u79cd\u7ed3\u6784\u504f\u5411\u673a\u68b0\uff0c\u5236\u9020\u504f\u5411\u5fae\u7535\u5b50\u7684\u6280\u672f\uff0c<\/span><\/strong>\u517c\u5177\u5fae\u578b\u5316\u3001\u4f4e\u6210\u672c\u3001\u9ad8\u6548\u80fd\u3001\u5927\u6279\u91cf\u751f\u4ea7\u7684\u4f18\u70b9\uff0c\u8fd9\u4e5f\u662f\u5b83\u6700\u6709\u5546\u4e1a\u4ef7\u503c\u7684\u5730\u65b9\uff1a\u4e00\u65b9\u9762\uff0cMEMS\u4f1a\u4f7f\u7528\u8bf8\u591a\u5fae\u89c2\u6a21\u62df\u5143\u4ef6\uff08\u7c7b\u4f3c\u6211\u4eec\u5e38\u770b\u5230\u7684\u5b8f\u89c2\u673a\u68b0\u96f6\u4ef6\uff09\uff0c\u7ec4\u6210\u4f53\u79ef\u6781\u5fae\u5c0f\u7684\u5668\u4ef6\uff0c\u5982\u901a\u9053\u3001\u5b54\u3001\u60ac\u81c2\u3001\u819c\u3001\u8154\u7b49\u7ed3\u6784<sup style=\"box-sizing: border-box;\">[5]<\/sup>\uff1b\u53e6\u4e00\u65b9\u9762\uff0c\u5b83\u80fd\u901a\u8fc7\u5fae\u7eb3\u7c73\u6280\u672f\uff0c\u5728\u82af\u7247\u4e0a\u5236\u9020\u5fae\u578b\u673a\u68b0\u7ed3\u6784\uff0c\u56e0\u6b64\u53ef\u5927\u6279\u91cf\u751f\u4ea7\uff0c\u4e14\u6709\u8f83\u4f4e\u7684\u751f\u4ea7\u6210\u672c\u3002<sup style=\"box-sizing: border-box;\">[6]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"max-width: 100%;box-sizing: border-box;margin-left: 8px;margin-right: 8px;\">\n<section style=\"display: flex;justify-content: center;align-items: center;flex-direction: column;max-width: 100%;box-sizing: border-box;\">\n<section style=\"max-width: 100%;box-sizing: border-box;\" >\n<section style=\"display: flex;padding: 3px 0px;flex-direction: column;justify-content: center;border-bottom: 2px dashed rgb(17, 17, 17);max-width: 100%;box-sizing: border-box;\">\n<section style=\"text-align: unset;background-color: rgb(206, 204, 200);padding-left: 15px;padding-right: 15px;padding-top: 1px;max-width: 100%;color: rgb(17, 17, 17);line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\"><strong style=\"box-sizing: border-box;\">\u5f53\u673a\u68b0\u5b66\u4f1a\u611f\u77e5\u548c\u8fd0\u52a8<\/strong><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">MEMS\u662f\u4e00\u79cd\u80fd\u4e0e\u81ea\u7136\u754c\u4ea4\u6d41\u7684\u5668\u4ef6\uff0c\u611f\u77e5\u5316\u5b66\u3001\u7535\u5b66\u3001\u673a\u68b0\u3001\u70ed\u5b66\u3001\u8f90\u5c04\u3001\u78c1\u573a\u516d\u4e2a\u80fd\u91cf\u57df\u7684\u73af\u5883\u53c2\u6570\uff0c\u518d\u505a\u51fa\u76f8\u5e94\u7684\u53cd\u5e94\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/1dd155ea1925101dd4bdd109cc4d9ea0.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">MEMS\u4f20\u611f\u5668\u5173\u6ce8\u7684\u80fd\u91cf\u57df\uff0c\u5236\u8868\u4e28\u679c\u58f3\u786c\u79d1\u6280<\/span><\/section>\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">\u8d44\u6599\u6765\u6e90\u4e28Nanoscale Research Letters<sup style=\"box-sizing: border-box;\">[7]<\/sup><\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u611f\u77e5\u548c\u8fd0\u52a8\u662fMEMS\u7684\u4e24\u5927\u7279\u8d28\uff0c\u4ee5\u6b64\u5206\u4e3a\u4e24\u7c7b\uff1aMEMS\u4f20\u611f\u5668\u548cMEMS\u6267\u884c\u5668\u3002\u4e8c\u8005\u529f\u80fd\u5747\u662f\u5c06\u4fe1\u53f7\u6216\u529f\u7387\uff0c\u4ece\u4e00\u4e2a\u80fd\u91cf\u57df\u8f6c\u6362\u4e3a\u53e6\u4e00\u4e2a\u80fd\u91cf\u57df\uff0c\u4f20\u611f\u5668\u662f\u5c06\u73af\u5883\u4fe1\u53f7\u8f6c\u6362\u4e3a\u7535\u4fe1\u53f7\uff0c\u6267\u884c\u5668\u662f\u5c06\u7535\u4fe1\u53f7\u8f6c\u6362\u4e3a\u673a\u68b0\u8fd0\u52a8\uff0c\u4e8c\u8005\u76f8\u8f85\u76f8\u6210\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/081febe6e523ba36c0bf26f94657b6cc.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">MEMS\u4f20\u611f\u5668\u548c\u9a71\u52a8\u5668\u4e3b\u8981\u79cd\u7c7b\uff0c\u5236\u8868\u4e28\u679c\u58f3\u786c\u79d1\u6280<\/span><\/section>\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">\u8d44\u6599\u6765\u6e90\u4e28\u548c\u6797\u5fae\u7eb3\u62db\u80a1\u4e66<sup style=\"box-sizing: border-box;\">[8]<\/sup><\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">MEMS\u4f20\u611f\u5668\u88ab\u4eba\u8a89\u4e3a\u201c\u7535\u4e94\u5b98\u201d\u3002\u82e5\u628a\u5904\u7406\u5668\u6bd4\u4f5c\u4eba\u8111\uff0c\u901a\u4fe1\u6bd4\u4f5c\u795e\u7ecf\u7cfb\u7edf\uff0cMEMS\u4f20\u611f\u5668\u5c31\u662f\u4e94\u5b98\u548c\u76ae\u80a4\uff0c\u611f\u77e5\u7269\u7406\u3001\u5316\u5b66\u6216\u751f\u7269\u91cf\u7684\u5b58\u5728\u548c\u5f3a\u5ea6\u3002\u5176\u673a\u7406\u662f\u6c89\u79ef\u5728\u8bbe\u5907\u4f20\u611f\u5c42\u4e0a\u7684\u805a\u5408\u7269\u5438\u6536\u4e86\u7279\u5b9a\u5316\u5b66\u7269\u8d28\uff0c\u4ea7\u751f\u4e86\u5e94\u529b\u3001\u8d28\u91cf\u3001\u7535\u6c14\u6216\u673a\u68b0\u7279\u6027\u53d8\u5316\uff0c\u6700\u7ec8\u7531MEMS\u5229\u7528\u538b\u963b\u5f0f\u3001\u7535\u5bb9\u5f0f\u6216\u5149\u5b66\u5f0f\u7b49\u4f20\u611f\u673a\u5236\u68c0\u6d4b\u8fd9\u4e9b\u53d8\u5316\u3002<span style=\"background-color: rgb(253, 209, 0);box-sizing: border-box;\"><strong style=\"box-sizing: border-box;\">\u9700\u8981\u5f3a\u8c03\u7684\u662f\uff0cMEMS\u4f20\u611f\u5668\u662f\u4f20\u7edf\u4f20\u611f\u5668\u7684\u5347\u7ea7\u7248\uff0c\u5176\u5c3a\u5bf8\u66f4\u5c0f\u3001\u529f\u8017\u66f4\u4f4e\u3001\u6027\u80fd\u66f4\u597d\u3002<\/strong><\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"max-width: 100%;box-sizing: border-box;margin-left: 8px;margin-right: 8px;\">\n<section style=\"display: flex;justify-content: center;align-items: center;flex-direction: column;max-width: 100%;box-sizing: border-box;\">\n<section style=\"max-width: 100%;box-sizing: border-box;\" >\n<section style=\"display: flex;padding: 3px 0px;flex-direction: column;justify-content: center;border-bottom-width: 2px;border-bottom-style: dashed;border-bottom-color: rgb(17, 17, 17);max-width: 100%;box-sizing: border-box;\"><svg viewbox=\"0 0 1 1\" style=\"float:left;line-height:0;width:0;vertical-align:top;\"><\/svg><\/section>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">MEMS\u6267\u884c\u5668\u76f8\u5f53\u4e8e\u4eba\u7684\u56db\u80a2\uff0c\u80fd\u6267\u884c\u5404\u79cd\u5fae\u64cd\u4f5c\u548c\u8fd0\u52a8\uff0c\u5982\u5fae\u9a6c\u8fbe\u3001\u5fae\u5f00\u5173\u3001\u5fae\u63a8\u8fdb\u5668\u3001\u5fae\u6cf5\u548c\u5fae\u9600\u7b49\u3002\u5176\u673a\u7406\u662f\u91c7\u7528\u7535\u70ed\u3001\u7535\u78c1\u3001\u9759\u7535\u6216\u538b\u7535\u56db\u79cd\u9a71\u52a8\u673a\u5236\u4f7f\u5668\u4ef6\u4ea7\u751f\u5fae\u89c2\u7ed3\u6784\u8fd0\u52a8\u3002<sup style=\"box-sizing: border-box;\">[7]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin-bottom: 0em;margin-left: 8px;margin-right: 8px;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"       style=\"float: none;display: inline;\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/1ea11f010ce95ed20b14573885d00178.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;line-height: 2.25;letter-spacing: 1.5px;font-style: normal;font-weight: 400;font-size: 16px;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">MEMS\u9a71\u52a8\u548c\u4f20\u611f\u6280\u672f\u53ca\u7279\u70b9\uff0c\u5236\u8868\u4e28\u679c\u58f3\u786c\u79d1\u6280<\/span><\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">\u8d44\u6599\u6765\u6e90\u4e28Nanoscale Research Letters <sup style=\"box-sizing: border-box;\">[7]<\/sup><\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"max-width: 100%;box-sizing: border-box;margin-left: 8px;margin-right: 8px;\">\n<section style=\"display: flex;justify-content: center;align-items: center;flex-direction: column;max-width: 100%;box-sizing: border-box;\">\n<section style=\"max-width: 100%;box-sizing: border-box;\" >\n<section style=\"display: flex;padding: 3px 0px;flex-direction: column;justify-content: center;border-bottom: 2px dashed rgb(17, 17, 17);max-width: 100%;box-sizing: border-box;\">\n<section style=\"text-align: unset;background-color: rgb(206, 204, 200);padding-left: 15px;padding-right: 15px;padding-top: 1px;max-width: 100%;color: rgb(17, 17, 17);line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\"><strong style=\"box-sizing: border-box;\">\u6bd4\u96c6\u6210\u7535\u8def\u66f4\u96be\u5236\u9020<\/strong><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"max-width: 100%;box-sizing: border-box;margin-left: 8px;margin-right: 8px;\">\n<section style=\"display: flex;justify-content: center;align-items: center;flex-direction: column;max-width: 100%;box-sizing: border-box;\">\n<section style=\"max-width: 100%;box-sizing: border-box;\" >\n<section style=\"display: flex;padding: 3px 0px;flex-direction: column;justify-content: center;border-bottom-width: 2px;border-bottom-style: dashed;border-bottom-color: rgb(17, 17, 17);max-width: 100%;box-sizing: border-box;\"><svg viewbox=\"0 0 1 1\" style=\"float:left;line-height:0;width:0;vertical-align:top;\"><\/svg><\/section>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">MEMS\u5de5\u827a\u6d41\u7a0b\u5305\u62ec\u7814\u53d1\u8bbe\u8ba1\uff08\u82af\u7247\u8bbe\u8ba1\u3001\u5de5\u827a\u6d41\u7a0b\u8bbe\u8ba1\u3001\u673a\u7535\u548c\u7ed3\u6784\u8bbe\u8ba1\u3001\u8bbe\u8ba1\u9a8c\u8bc1\u7b49\uff09\u3001\u6676\u5706\u5236\u9020\uff08\u878d\u5408\u79bb\u5b50\u6269\u6563\u3001\u8584\u819c\u6c89\u79efPVD\/CVD\u3001\u5149\u523b\u3001\u5e72\u6cd5\u523b\u8680\u3001\u6e7f\u6cd5\u8150\u8680\u7b49\uff09\u3001\u5c01\u88c5\u6d4b\u8bd5\uff0c\u770b\u4f3c\u4e0e\u96c6\u6210\u7535\u8def\u76f8\u540c\uff0c\u5b9e\u5219\u6bd4\u96c6\u6210\u7535\u8def\u66f4\u96be\u3002\u4ece\u96c6\u6210\u7535\u8def\u5230MEMS\uff0c\u662f\u5e73\u9762\u5de5\u827a\u5230\u7acb\u4f53\u5de5\u827a\u3001\u7535\u8def\u9759\u6001\u7ed3\u6784\u5230\u673a\u68b0\u53ef\u52a8\u7ed3\u6784\u3001\u534a\u5bfc\u4f53\u5230\u673a\u68b0\/\u5316\u5b66\/\u5149\u5b66\u7b49\u591a\u5b66\u79d1\u4ea4\u53c9\u878d\u5408\u3001\u7535\u5b50\u4ea7\u54c1\u5e94\u7528\u73af\u5883\u5230\u5404\u79cd\u81ea\u7136\u754c\u6216\u4eba\u9020\u73af\u5883\u7684\u53d8\u5316\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/1ea11f010ce95ed20b14573885d00178.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">MEMS\u5de5\u827a\u4e0eIC\u5de5\u827a\u5bf9\u6bd4\uff0c\u5236\u8868\u4e28\u679c\u58f3\u786c\u79d1\u6280<\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">MEMS\u886c\u5e95\u6750\u6599\uff08\u652f\u6491\u6750\u6599\uff09\u7845\u662f\u4e3b\u6d41\uff0c\u4e00\u4e9b\u7279\u6b8a\u5e94\u7528\u4f1a\u4f7f\u7528\u73bb\u7483\u3001\u9ad8\u5206\u5b50\u805a\u5408\u7269\u3001\u91d1\u5c5e\u7b49\uff0c\u4e8c\u6c27\u5316\u949b\uff08TiO<span style=\"font-size: 12px;\">2<\/span>\uff09\u3001\u4e8c\u6c27\u5316\u9521\uff08SnO<span style=\"font-size: 12px;\">2<\/span>\uff09\u548c\u6c27\u5316\u950c\uff08ZnO\uff09\u7b49\u91d1\u5c5e\u6c27\u5316\u7269\u4e5f\u9010\u6e10\u6210\u4e3a\u6709\u5438\u5f15\u529b\u7684\u6750\u6599\u3002<sup style=\"box-sizing: border-box;\">[9]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u52a0\u5de5\u6280\u672f\u4f9d\u636e\u6750\u6599\u5206\u4e3a\u7845\u57fa\u548c\u975e\u7845\u57fa\u4e24\u79cd\u8def\u7ebf\u3002\u7845\u57faMEMS\u52a0\u5de5\u6280\u672f\u4ee5\u96c6\u6210\u7535\u8def\u52a0\u5de5\u6280\u672f\u4e3a\u57fa\u7840\uff0c\u5177\u6709\u6279\u91cf\u5316\u3001\u6210\u672c\u4f4e\u3001\u96c6\u6210\u5ea6\u9ad8\u7b49\u4f18\u52bf\uff1b\u975e\u7845\u57fa\u52a0\u5de5\u6280\u672f\u5305\u62ecLIGA\u3001\u51c6LIGA\uff08\u5373X\u5149\u540c\u6b65\u8f90\u5c04\u5149\u523b\u3001\u7535\u94f8\u6210\u578b\u53ca\u6ce8\u5851\u5de5\u827a\uff09\u548c\u7cbe\u5bc6\u52a0\u5de5\u6280\u672f\uff0c\u975e\u7845\u57fa\u52a0\u5de5\u6280\u672f\u5b9e\u73b0\u7684\u53ef\u52a8\u5fae\u7ed3\u6784\u80fd\u591f\u62e5\u6709\u66f4\u5927\u7eb5\u5411\u5c3a\u5bf8\uff0c\u4f46\u6279\u91cf\u80fd\u529b\u5dee\u3001\u91cd\u590d\u6027\u5dee\u3001\u52a0\u5de5\u6210\u672c\u9ad8\u3002<sup style=\"box-sizing: border-box;\">[10][11]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/c9f74cdf5628cbc15676bc22208c9de9.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">MEMS\u5236\u9020\u5de5\u827a\u4e0d\u5b8c\u5168\u76d8\u70b9\uff0c\u5236\u8868\u4e28\u679c\u58f3\u786c\u79d1\u6280<\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u867d\u7136MEMS\u5904\u5904\u90fd\u597d\uff0c\u4f46\u5bf9\u7814\u53d1\u5546\u6765\u8bf4\uff0c\u60f3\u8bf4\u7231\u5b83\u4e0d\u5bb9\u6613\uff1a\u4e00\u65b9\u9762\uff0c\u5b83\u62e5\u6709\u201c\u4e00\u79cd\u4ea7\u54c1\uff0c\u4e00\u79cd\u5de5\u827a\u201d\u7684\u7279\u70b9\uff0c\u6bcf\u79cd\u5668\u4ef6\u7684\u8bbe\u8ba1\u3001\u5236\u9020\u3001\u5c01\u88c5\u3001\u6d4b\u8bd5\u65b9\u6cd5\u5747\u5b58\u5728\u8f83\u5927\u5dee\u5f02\uff0c\u5e02\u573a\u5f88\u96be\u5f62\u6210\u6807\u51c6\u5316\uff0c\u6210\u719f\u7684\u4ea7\u54c1\u624d\u80fd\u8868\u73b0\u51fa\u4e00\u5b9a\u7684\u96c6\u4e2d\u5ea6<sup style=\"box-sizing: border-box;\">[12]<\/sup>\uff1b\u53e6\u4e00\u65b9\u9762\uff0c\u505aMEMS\u8981\u8010\u5f97\u4f4f\u6027\u5b50\uff0c\u6781\u7aef\u60c5\u51b5\u4e0b\u4e00\u6b3e\u4f20\u611f\u5668\u7684\u7814\u53d1\u97006\u5e74~8\u5e74\uff0c\u52a0\u4e0a\u6d4b\u8bd5\u3001\u5bfc\u5165\u4ea7\u4e1a\u94fe\u7684\u65f6\u95f4\uff0c\u6210\u54c1\u751a\u81f3\u80fd\u82b1\u8d39\u8fd120\u5e74\uff1b\u9664\u6b64\u4e4b\u5916\uff0cMEMS\u4e0e\u96c6\u6210\u7535\u8def\u4ea7\u4e1a\u7684\u901a\u75c5\u5c31\u662f\u4ef7\u683c\u4e0e\u4ea7\u54c1\u91cd\u8981\u6027\u4e0d\u6210\u6b63\u6bd4\u3002<sup style=\"box-sizing: border-box;\">[13]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"max-width: 100%;box-sizing: border-box;margin-left: 8px;margin-right: 8px;\">\n<section style=\"display: flex;justify-content: center;align-items: center;flex-direction: column;max-width: 100%;box-sizing: border-box;\">\n<section style=\"max-width: 100%;box-sizing: border-box;\" >\n<section style=\"display: flex;padding: 3px 0px;flex-direction: column;justify-content: center;border-bottom: 2px dashed rgb(17, 17, 17);max-width: 100%;box-sizing: border-box;\">\n<section style=\"text-align: unset;background-color: rgb(206, 204, 200);padding-left: 15px;padding-right: 15px;padding-top: 1px;max-width: 100%;color: rgb(17, 17, 17);line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\"><strong style=\"box-sizing: border-box;\">\u6709\u5e94\u7528\u624d\u4f1a\u6709\u5e02\u573a<\/strong><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u5176\u5b9e\uff0cMEMS\u8fd8\u662f\u4e2a90\u540e\uff0c\u5b83\u7684\u5546\u7528\u5386\u53f2\u53ea\u6709\u4e09\u5341\u591a\u5e74\uff0c\u4ea7\u4e1a\u521a\u521a\u6b65\u5165\u6210\u719f\u671f\u3002\u4eceMEMS\u7684\u7814\u53d1\u5386\u53f2\u6765\u770b\uff0c\u662f\u4ece\u7ed3\u6784\u7814\u7a76\u9010\u6e10\u5230\u6750\u6599\u7684\u8fc7\u7a0b\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin-bottom: 0em;margin-left: 8px;margin-right: 8px;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"       style=\"\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/1047a0cb862832682a6df36a0d9196b4.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">MEMS\u6280\u672f\u5386\u53f2\u53d1\u5c55\u7279\u5f81\uff0c\u5236\u8868\u4e28\u679c\u58f3\u786c\u79d1\u6280<\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">MEMS\u4f1a\u4f34\u968f\u7535\u5b50\u3001\u673a\u68b0\u3001\u6750\u6599\u3001\u4fe1\u606f\u3001\u7269\u7406\u3001\u5316\u5b66\u3001\u5149\u5b66\u53ca\u751f\u7269\u533b\u5b66\u7b49\u5b66\u79d1\u7684\u6280\u672f\u6210\u957f\uff0c\u540c\u65f6\u5f53MEMS\u4e0e\u4e0d\u540c\u6280\u672f\u7ed3\u5408\u4f1a\u518d\u4ea7\u751f\u65b0\u7684\u5668\u4ef6\u3002\u5728\u6b64\u8fc7\u7a0b\u4e2d\uff0c\u4e00\u4e9b\u5668\u4ef6\u5e94\u7528\u9010\u6e10\u8870\u9000\uff0c\u65b0\u5668\u4ef6\u5e94\u7528\u5f00\u59cb\u8d77\u6b65\uff0c\u5f80\u590d\u5faa\u73af\uff0c\u751f\u751f\u4e0d\u606f\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u7eb5\u89c8\u4e09\u5341\u591a\u5e74\u5386\u53f2\uff0cMEMS\u65b0\u5668\u4ef6\u7684\u9a71\u52a8\u529b\u4e3b\u8981\u6e90\u4e8e\u5e94\u7528\uff0c\u53ea\u6709\u5f53\u65b0\u4ea7\u54c1\u8981\u7528\u5230\u67d0\u4e9b\u5668\u4ef6\uff0c\u624d\u4f1a\u5f15\u53d1\u5927\u89c4\u6a21\u7814\u7a76\u548c\u751f\u4ea7\uff1a<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"margin: 10px 8px;text-align: center;opacity: 0.9;box-sizing: border-box;line-height: 2em;\">\n<section style=\"display: inline-block;width: 95%;border-width: 1px;border-style: dashed;border-color: rgb(219, 175, 105);padding: 5px 10px;background-color: rgba(0, 0, 0, 0);border-radius: 10px;height: auto;overflow: hidden;box-sizing: border-box;\">\n<section style=\"font-size: 15px;padding: 0px;color: rgb(219, 175, 105);text-align: left;box-sizing: border-box;\" >\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 14px;\">1990\u5e74~2000\u5e74\u6c7d\u8f66\u5b89\u5168\u6380\u8d77\u7b2c\u4e00\u6b21\u70ed\u6f6e\uff1b<\/span><\/p>\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 14px;\">2000\u5e74~2010\u5e74\u667a\u80fd\u624b\u673a\u5f15\u53d1\u7b2c\u4e8c\u6b21\u70ed\u6f6e\uff1b<\/span><\/p>\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 14px;\">2010\u5e74~2020\u5e74\u667a\u80fd\u624b\u8868\u3001TWS\u8033\u673a\u3001\u53ef\u7a7f\u6234\u8bbe\u5907\u4e3b\u5bfc\u7b2c\u4e09\u6b21\u70ed\u6f6e\uff1b<\/span><\/p>\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 14px;\">2020\u5e74\u81f3\u4eca\u8f66\u8054\u7f51\u3001\u667a\u80fd\u5bb6\u5c45\u3001\u667a\u80fd\u533b\u7597\u3001\u667a\u80fd\u57ce\u5e02\u4ee5\u53ca\u4e07\u7269\u4e92\u8054\u7b49\u5e94\u7528\u8ba9\u7b2c\u56db\u6b21\u70ed\u6f6e\u84c4\u52bf\u5f85\u53d1\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/1047a0cb862832682a6df36a0d9196b4.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">\u5404MEMS\u5668\u4ef6\u6240\u5904\u5e94\u7528\u9636\u6bb5\uff0c\u56fe\u6e90\u4e28\u300a\u79d1\u6280\u60c5\u62a5\u53c2\u8003\u300b<sup style=\"box-sizing: border-box;\">[14]<\/sup><\/span><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;width: 12.5%;height: auto;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/3be3ed3621b7ef4dfacc904fa10f2f06.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"max-width: 100%;box-sizing: border-box;margin-left: 8px;margin-right: 8px;\">\n<section style=\"display: flex;justify-content: center;align-items: center;flex-direction: column;max-width: 100%;box-sizing: border-box;\">\n<section style=\"max-width: 100%;box-sizing: border-box;\" >\n<section style=\"display: flex;padding: 3px 0px;flex-direction: column;justify-content: center;border-bottom: 2px dashed rgb(219, 175, 105);max-width: 100%;box-sizing: border-box;\">\n<section style=\"text-align: unset;background-color: rgb(255, 206, 0);padding-left: 15px;padding-right: 15px;padding-top: 1px;max-width: 100%;font-size: 17px;color: rgb(17, 17, 17);line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\"><strong style=\"box-sizing: border-box;\">\u524d\u666f\u597d\uff0c\u4f46\u56fd\u5185\u529b\u91cf\u5206\u6563<\/strong><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u7531\u4e8eMEMS\u7684\u751f\u4ea7\u8fc7\u7a0b\u4e0e\u96c6\u6210\u7535\u8def\u7c7b\u4f3c\uff0c\u6240\u4ee5\u4e3b\u8981\u73a9\u5bb6\u57fa\u672c\u4e5f\u662f\u96c6\u6210\u7535\u8def\u4f01\u4e1a\u3002\u76f8\u6bd4\u6295\u8d44\u706b\u70ed\u7684\u96c6\u6210\u7535\u8def\uff0cMEMS\u4ea7\u4e1a\u76f8\u5bf9\u8f83\u5c0f\uff0c\u540c\u65f6\u9ad8\u6280\u672f\u95e8\u69db\u62e6\u4f4f\u4e86\u8bb8\u591a\u521d\u521b\u73a9\u5bb6\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u8fd1\u51e0\u5e74MEMS\u7684\u5e94\u7528\u573a\u666f\u9010\u6b65\u589e\u52a0\uff0c\u9700\u6c42\u91cf\u6301\u7eed\u6500\u5347\uff1a\u4e3b\u6d41\u667a\u80fd\u624b\u673a\u5f00\u59cb\u5c06MEMS\u9ea6\u514b\u98ce\u4f7f\u7528\u91cf\u62c9\u5347\u81f32~4\u9897\uff0c\u7528\u4e8e\u8bed\u97f3\u91c7\u96c6\u3001\u566a\u97f3\u6d88\u9664\u548c\u6539\u5584\u8bed\u97f3\u8bc6\u522b\u7b49\u529f\u80fd\uff1b\u5355\u53eaTWS\u8033\u673a\u4e2d\u81f3\u5c11\u8981\u4f7f\u75282\u9897MEMS\u9ea6\u514b\u98ce\uff0c\u7528\u4e8e\u901a\u8bdd\u3001\u79bb\u7ebf\u5524\u9192\u3001\u97f3\u4e50\u63a7\u5236\u3001\u5e94\u7528\u5f00\u542f\u548c\u964d\u566a\u6a21\u5f0f\u5207\u6362\u7b49\u591a\u79cd\u529f\u80fd\uff1b\u6bcf\u8f86\u6c7d\u8f66\u7684MEMS\u4f20\u611f\u5668\u4f7f\u7528\u6570\u91cf\u62c9\u5347\u81f330\u9897\u751a\u81f3\u4e0a\u767e\u9897\uff0c\u7528\u4e8e\u8f85\u52a9\u81ea\u52a8\u9a7e\u9a76\u3001\u8f66\u8f86\u68c0\u6d4b\u7b49\u529f\u80fd\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u5e94\u7528\u5e26\u52a8\u4e0b\uff0cMEMS\u7684\u5e02\u573a\u524d\u666f\u4e50\u89c2\u3002Yole\u9884\u6d4b\uff0cMEMS\u5168\u7403\u5e02\u573a\u4efd\u989d\u5c06\u75312020\u5e74\u7684121\u4ebf\u7f8e\u5143\u5347\u81f32026\u5e74\u7684182\u4ebf\u7f8e\u5143\uff0c\u5e74\u590d\u5408\u589e\u957f\u73877.17%\u3002\u5176\u4e2d\uff0c\u6d88\u8d39\u9886\u57df\u662fMEMS\u7684\u6700\u5927\u5e94\u7528\u5e02\u573a\uff0c\u7ea6\u5360\u6574\u4f53\u6536\u5165\u768460%\uff0c\u5176\u6b21\u5206\u522b\u4e3a\u6c7d\u8f66\u3001\u5de5\u4e1a\u3001\u533b\u7597\u3001\u822a\u7a7a\u822a\u5929\u548c\u901a\u4fe1\u3002<sup style=\"box-sizing: border-box;\">[15]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/256860e3171d053ba410f710091fbcfc.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">\u4ee5\u7ec8\u7aef\u5e02\u573a\u5206\u7c7b\u7684MEMS\u5e02\u573a\u60c5\u51b5\uff0c\u56fe\u6e90\u4e28Yole<\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u4ece\u5668\u4ef6\u4e0a\u6765\u770b\uff0cMEMS\u4f20\u611f\u5668\u662f\u7edd\u5bf9\u7684\u4e3b\u529b\uff0c\u5168\u7403\u5e02\u573a\u89c4\u6a21\u9884\u8ba1\u4ece2020\u5e74\u768490\u4ebf\u7f8e\u5143\u63d0\u5347\u81f32026\u5e74\u7684128\u4ebf\u7f8e\u5143\uff0c\u5e74\u5747\u590d\u5408\u589e\u957f\u7387\u4e3a6.1%\u3002\u5176\u4e2d\uff0c\u538b\u529b\u4f20\u611f\u5668\u548c\u60ef\u6027\u7ec4\u5408\u4f20\u611f\u5668\u6781\u5177\u6f5c\u529b\uff0c\u81f32026\u5e74\u5168\u7403\u5e02\u573a\u89c4\u6a21\u5c06\u5206\u522b\u8fbe\u523023.6\u4ebf\u7f8e\u5143\u548c21.3\u4ebf\u7f8e\u5143\uff0c\u5176\u6b21\u662f\u58f0\u5b66\u4f20\u611f\u5668\uff08MEMS\u9ea6\u514b\u98ce\uff09\u3001\u52a0\u901f\u5ea6\u4f20\u611f\u5668\u3001\u9640\u87ba\u4eea\u4f20\u611f\u5668\u7b49\u3002MEMS\u5c04\u9891\u5668\u4ef6\u589e\u957f\u52bf\u5934\u731b\u70c8\uff0c\u81f32026\u5e74\u5c06\u670940.5\u4ebf\u7f8e\u5143\u7684\u5168\u7403\u5e02\u573a\u7a7a\u95f4\u3002\u55b7\u58a8\u6253\u5370\u5934\u3001\u5fae\u578b\u6d4b\u8f90\u5c04\u70ed\u4eea\u3001\u5149\u5b66\u4f20\u611f\u5668\u3001\u7845\u57fa\u5fae\u6d41\u63a7\u5668\u4ef6\u7b49\u5c06\u6301\u7eed\u4fdd\u6301\u589e\u957f\u3002<sup style=\"box-sizing: border-box;\">[15]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/b093a46c25b8ba5e2c5b3492f6d8c61a.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">\u4ee5\u5668\u4ef6\u7c7b\u578b\u5206\u7c7b\u7684MEMS\u5e02\u573a\u60c5\u51b5\uff0c\u56fe\u6e90\u4e28\u6b4c\u5c14\u5fae\u7535\u5b50\u62db\u80a1\u4e66<sup style=\"box-sizing: border-box;\">[16]<\/sup><\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u4ece\u9886\u57df\u4e0a\u6765\u770b\uff0c\u6d88\u8d39\u3001\u6c7d\u8f66\u3001\u5de5\u4e1a\u3001\u533b\u7597\u56db\u5927\u9886\u57df\u5747\u6709\u4e00\u5b9a\u5e02\u573a\u524d\u666f\uff0c\u4f46\u589e\u901f\u6709\u6240\u533a\u522b\uff0c\u7269\u8054\u7f51\u3001\u667a\u6167\u533b\u7597\u3001\u667a\u6167\u57ce\u5e02\u662fMEMS\u4e3b\u8981\u9a71\u52a8\u529b\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/e71c48d35b2873743648812901c23c50.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">\u4e0d\u540c\u9886\u57df\u5206\u7c7b\u7684\u5168\u7403MEMS\u5e02\u573a\u60c5\u51b5\uff0c\u5236\u8868\u4e28\u679c\u58f3\u786c\u79d1\u6280<\/span><\/section>\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">\u8d44\u6599\u6765\u6e90\u4e28Yole<\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u76ee\u524dMEMS\u5e02\u573a\u4ee5\u56fd\u5916\u5382\u5546\u4e3a\u4e3b\uff0c\u9876\u7ea7\u7684MEMS\u5382\u5546\u5305\u62ec\u535a\u4e16\u3001\u535a\u901a\u3001Qorvo\u3001\u610f\u6cd5\u534a\u5bfc\u4f53\u3001\u5fb7\u5dde\u4eea\u5668\u3001\u6b4c\u5c14\u5fae\u3001\u60e0\u666e\u3001\u697c\u6c0f\u3001TDK\u3001\u82f1\u98de\u51cc\u7b49\u3002\u56fd\u4ea7MEMS\u4f01\u4e1a\u662f\u8ffd\u8d76\u8005\uff0c\u6b4c\u5c14\u5fae\uff08MEMS\u9ea6\u514b\u98ce\uff09\u3001\u745e\u58f0\u79d1\u6280\uff08MEMS\u9ea6\u514b\u98ce\uff09\u3001\u9ad8\u5fb7\u7ea2\u5916\uff08\u7ea2\u5916\u4f20\u611f\u5668\uff09\u4e09\u5bb6\u4f01\u4e1a\u4e0a\u699c2020\u5e74\u5168\u7403\u5e02\u573a\u9500\u552e\u989d\u6392\u884c\u524d30\u3002<sup style=\"box-sizing: border-box;\">[15]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u6309\u7ec6\u5206\u9886\u57df\u5212\u5206\uff0cMEMS\u58f0\u5b66\u4f20\u611f\u5668\u9886\u57df\u697c\u6c0f\u3001\u745e\u58f0\u79d1\u6280\u3001\u6b4c\u5c14\u5fae\u4e09\u5bb6\u516c\u53f8\u5360\u636e\u5168\u7403\u5e02\u573a\u4efd\u989d\u768475%\uff0cMEMS\u538b\u529b\u4f20\u611f\u5668\u9886\u57df\u535a\u4e16\u3001\u6cf0\u79d1\u7535\u5b50\u548c\u82f1\u98de\u51cc\u4e09\u5bb6\u516c\u53f8\u5360\u636e\u5168\u7403\u5e02\u573a\u4efd\u989d\u768457%\uff0cMEMS\u60ef\u6027\u7ec4\u5408\u4f20\u611f\u5668\u9886\u57df\u535a\u4e16\u3001\u610f\u6cd5\u534a\u5bfc\u4f53\u548cTDK\u4e09\u5bb6\u5382\u5546\u5360\u636e\u5168\u7403\u5e02\u573a\u4efd\u989d\u768476%\u3002<sup style=\"box-sizing: border-box;\">[16]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/6a2b44ace65ae0177d6742c3c562b0e1.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">\u5168\u7403MEMS\u5382\u5546TOP10\uff0c\u56fe\u6e90\u4e28\u6b4c\u5c14\u5fae\u7535\u5b50\u62db\u80a1\u4e66<sup style=\"box-sizing: border-box;\">[16]<\/sup><\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u5728\u56fd\u5185\uff0cMEMS\u5e02\u573a\u6f5c\u529b\u5de8\u5927\u3002\u636e\u8d5b\u8fea\u987e\u95ee\u9884\u6d4b\uff0c\u4ece2020\u5e74\u81f32030\u5e74\uff0c\u56fd\u5185MEMS\u5e02\u573a\u89c4\u6a21\u5c06\u7531736.7\u4ebf\u5143\u4eba\u6c11\u5e01\u63d0\u5347\u81f3\u8d85\u8fc71200\u4ebf\u5143\u4eba\u6c11\u5e01\u3002<sup style=\"box-sizing: border-box;\">[17]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u6211\u56fdMEMS\u8d77\u6b65\u5e76\u4e0d\u6bd4\u56fd\u5916\u665a\u5f88\u591a\uff0c\u4f46\u7531\u4e8e\u5386\u53f2\u539f\u56e0\u5bfc\u81f4\u529b\u91cf\u5206\u6563\u3001\u6761\u5757\u5206\u5272\u3001\u6295\u5165\u4e25\u91cd\u4e0d\u8db3<sup style=\"box-sizing: border-box;\">[13]<\/sup>\uff0c\u76f4\u52302010\u5e74\u524d\u540e\u4ea7\u4e1a\u624d\u5f62\u6210\u96cf\u5f62<sup style=\"box-sizing: border-box;\">[18]<\/sup>\uff0c\u4ec5\u4eceMEMS\u4f20\u611f\u5668\u6765\u8bf4\uff0c\u4f9d\u7136\u5b58\u5728\u8f83\u5927\u7f3a\u53e3\uff0c\u8d85\u8fc790%\u7684\u82af\u7247\u4e0e\u9ad8\u6863\u4f20\u611f\u5668\u82af\u7247\u9700\u8981\u4ece\u56fd\u5916\u8fdb\u53e3\uff0c\u5bfc\u81f4\u4ef7\u683c\u76f4\u7ebf\u4e0a\u5347\uff0c\u4e14\u5728MEMS\u7684\u4ea7\u54c1\u7ed3\u6784\u5e03\u5c40\u4e0a\u4e0d\u8db320%\u3002<sup style=\"box-sizing: border-box;\">[19]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u4e0d\u8fc7\u597d\u5728\u56fd\u5185\u5df2\u5f62\u6210\u8f83\u597d\u7684\u4f01\u4e1a\u8d44\u6e90\u3001\u521b\u65b0\u8d44\u6e90\u548c\u8f7d\u4f53\u5e73\u53f0\uff0c\u5e76\u5df2\u62e5\u6709\u81f3\u5c1137\u6761MEMS\u4ea7\u7ebf<sup style=\"box-sizing: border-box;\">[20]<\/sup>\uff0c\u53d1\u5c55\u540e\u52b2\u8db3\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/6a2b44ace65ae0177d6742c3c562b0e1.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">\u4e2d\u56fdMEMS\u4ea7\u4e1a\u8d44\u6e90\u5206\u5e03\uff0c\u56fe\u6e90\u4e28\u8d5b\u8fea\u987e\u95ee<sup style=\"box-sizing: border-box;\">[17]<\/sup><\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u4ece\u4e8c\u7ea7\u5e02\u573a\u4e0a\u6765\u770b\uff0c\u56fd\u4ea7MEMS\u5df2\u62e5\u6709\u7814\u53d1\u8bbe\u8ba1\u3001\u8bbe\u5907\u6750\u6599\u3001\u6676\u5706\u5236\u9020\u3001\u5c01\u88c5\u6d4b\u8bd5\u3001\u96c6\u6210\u5e94\u7528\u7684\u5b8c\u5907\u4ea7\u4e1a\u94fe\uff0c\u540c\u65f6\u62e5\u6709\u4e30\u5bcc\u79cd\u7c7b\u5668\u4ef6\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/0f03f992c513502c8c0caa4302514374.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">\u4e2d\u56fdMEMS\u4e3b\u8981\u4e0a\u5e02\u4f01\u4e1a\u57fa\u672c\u4fe1\u606f\uff0c\u8d44\u6599\u6765\u6e90 \u4e28\u524d\u77bb\u7ecf\u6d4e\u5b66\u4eba<sup style=\"box-sizing: border-box;\">[21]<\/sup><\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u56fd\u5185MEMS\u6295\u8d44\u548c\u517c\u5e76\u4e5f\u6301\u7eed\u6d3b\u8dc3\uff0c2020\u5e74\u76f8\u5173\u6848\u4f8b\u8fbe116\u4e2a\u3001\u91d1\u989d347\u4ebf<sup style=\"box-sizing: border-box;\">[22]<\/sup>\u3002\u9879\u76ee\u6295\u8d44\u4ee5A\u8f6e\u4e3a\u4e3b\uff0c\u611f\u77e5\u6280\u672f\u79bb\u5e94\u7528\u5c42\u8d8a\u8fd1\uff0c\u8d8a\u80fd\u5438\u5f15\u6295\u8d44\u8005\uff0c\u9879\u76ee\u4f30\u503c\u548c\u6295\u8d44\u91d1\u989d\u8d8a\u5927\u3002\u4ece\u6295\u8d44\u9879\u76ee\u6765\u770b\uff0c\u8d44\u672c\u8f83\u4e3a\u770b\u597d\u751f\u7269\u3001\u673a\u5668\u89c6\u89c9\u3001\u81ea\u52a8\u9a7e\u9a76\u548c\u8bed\u97f3\u4ea4\u4e92\u9886\u57df\u7b49\u5e94\u7528\u3002<sup style=\"box-sizing: border-box;\">[23]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/b7e18e393a81660b4810de79eed2d161.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">2020\u5e74\u56fd\u5185MEMS\u5404\u9886\u57df\u6295\u878d\u8d44\u4e8b\u4ef6\u6570\u91cf\u53ca\u6295\u8d44\u91d1\u989d\u5360\u6bd4\uff0c\u56fe\u6e90\u4e28\u8d5b\u8fea\u987e\u95ee<sup style=\"box-sizing: border-box;\">[23]<\/sup><\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/e21bc18f35c5a238ddf13bfc0759c274.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">2020\u5e74\u56fd\u5185MEMS\u6295\u878d\u8d44\u60c5\u51b5\u53ca\u5206\u5e03\u60c5\u51b5\uff0c\u56fe\u6e90\u4e28\u8d5b\u8fea\u987e\u95ee<sup style=\"box-sizing: border-box;\">[23]<\/sup><\/span><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/14fe6d4ca00ed9884a8887ba7e316ce9.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">\u672a\u4e0a\u5e02MEMS\u4f01\u4e1a\u4e0d\u5b8c\u5168\u7edf\u8ba1\uff0c\u5236\u8868\u4e28\u679c\u58f3\u786c\u79d1\u6280<\/span><\/section>\n<section style=\"text-align: center;white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"font-size: 12px;color: rgb(219, 175, 105);box-sizing: border-box;\">\u53c2\u8003\u8d44\u6599\u4e28\u56fd\u6cf0\u541b\u5b89\u4ea7\u4e1a\u89c2\u5bdf\uff0c\u6709\u5220\u6539<sup style=\"box-sizing: border-box;\">[13]<\/sup><\/span><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;width: 12.5%;height: auto;box-sizing: border-box;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"    style=\"vertical-align: middle;max-width: 100%;width: 100%;box-sizing: border-box;\" width=\"100%\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/14fe6d4ca00ed9884a8887ba7e316ce9.png!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<\/section>\n<section style=\"max-width: 100%;box-sizing: border-box;margin-left: 8px;margin-right: 8px;\">\n<section style=\"display: flex;justify-content: center;align-items: center;flex-direction: column;max-width: 100%;box-sizing: border-box;\">\n<section style=\"max-width: 100%;box-sizing: border-box;\" >\n<section style=\"display: flex;padding: 3px 0px;flex-direction: column;justify-content: center;border-bottom: 2px dashed rgb(219, 175, 105);max-width: 100%;box-sizing: border-box;\">\n<section style=\"text-align: unset;background-color: rgb(255, 206, 0);padding-left: 15px;padding-right: 15px;padding-top: 1px;max-width: 100%;font-size: 17px;color: rgb(17, 17, 17);line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\"><strong style=\"box-sizing: border-box;\">\u8ffd\u8d76\u8005\u8981\u600e\u4e48\u8d70<\/strong><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u4f5c\u4e3a\u8ffd\u8d76\u8005\uff0c\u56fd\u4ea7\u5382\u5546\u8be5\u600e\u4e48\u8d70\uff1f\u679c\u58f3\u786c\u79d1\u6280\u56e2\u961f\u8ba4\u4e3a\u6709\u5982\u4e0b\u56db\u4e2a\u5173\u952e\u70b9\uff1a<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"background-color: rgb(253, 209, 0);box-sizing: border-box;\"><strong style=\"box-sizing: border-box;\">1. \u56fd\u4ea7MEMS\u9700\u8981\u6ce8\u91cd\u4ea7\u4e1a\u96c6\u4e2d\u5316<\/strong><\/span><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u4ece2020\u5e74\u7684MEMS\u4e13\u5229\u6570\u91cf\u6765\u770b\uff0c\u7f8e\u56fd\u5360\u5168\u7403MEMS\u4e13\u5229\u603b\u7533\u8bf7\u91cf\u768432%\uff0c\u5904\u4e8e\u9886\u5148\u72b6\u6001\u3002\u867d\u7136\u4e2d\u56fd\u4e5f\u670913%\uff0c\u4f46\u7533\u8bf7\u4eba\u4ee5\u9ad8\u6821\u548c\u79d1\u7814\u673a\u6784\u4e3a\u4e3b\uff0c\u4ea7\u54c1\u4ea7\u4e1a\u5316\u6709\u4e00\u5b9a\u5dee\u8ddd<sup style=\"box-sizing: border-box;\">[24]<\/sup>\u3002\u53e6\u5916\uff0cMEMS\u4ea7\u4e1a\u672c\u8eab\u5c31\u8f83\u4e3a\u5206\u6563\uff0c\u56fd\u5185\u4e0d\u4ec5\u7f3a\u4e4f\u7cfb\u7edf\u6027\uff0c\u751a\u81f3\u8fc7\u4e8e\u5bc4\u4e88\u5e0c\u671b\u4e8e\u77ed\u671f\u83b7\u5229\u3002<sup style=\"box-sizing: border-box;\">[25]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u56e0\u6b64\uff0c\u56fd\u4ea7MEMS\u5728\u672a\u6765\u8981\u6ce8\u91cd\u4ea7\u4e1a\u5316\u548c\u96c6\u4e2d\u5316\uff0c\u5177\u4f53\u5305\u62ec\uff1a<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<ul class=\"list-paddingleft-1\" style=\"list-style-type: disc;box-sizing: border-box;margin-left: 8px;margin-right: 8px;\">\n<li style=\"box-sizing: border-box;\">\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\">\u4ea7\u7814\u7ed3\u5408\uff1a\u6280\u672f\u662f\u9650\u5236MEMS\u4f01\u4e1a\u53d1\u5c55\u7684\u4e00\u4e2a\u5173\u952e\u70b9\uff0c\u901a\u8fc7\u5b75\u5316\u79d1\u7814\u9662\u6240\u6216\u9ad8\u65b0\u6280\u672f\u4f01\u4e1a\uff0c\u5bf9\u8fd9\u7c7b\u4f01\u4e1a\u63d0\u4f9b\u5fc5\u8981\u653f\u7b56\u3001\u8d44\u91d1\u7684\u652f\u6301\u548cMEMS\u751f\u4ea7\u8bbe\u5907\u7684\u652f\u6301\uff0c\u901a\u8fc7\u8f6f\u4ef6\u3001\u786c\u4ef6\u914d\u5957\u4f7f\u6280\u672f\u5feb\u901f\u8f6c\u5316\u4e3a\u6210\u719f\u4ea7\u54c1\uff1b<\/p>\n<\/li>\n<li style=\"box-sizing: border-box;\">\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\">\u4ea7\u4e1a\u5408\u4f5c\uff1a\u5e02\u573a\u662f\u9650\u5236MEMS\u4f01\u4e1a\u53d1\u5c55\u7684\u53e6\u4e00\u4e2a\u5173\u952e\u70b9\uff0cMEMS\u4ea7\u54c1\u5355\u4ef7\u4f4e\uff0c\u4ece\u7814\u53d1\u5230\u4e0a\u5e02\u5468\u671f\u957f\uff0c\u9700\u5de8\u5927\u89c4\u6a21\u624d\u80fd\u76c8\u5229\uff0c\u5982\u679c\u80fd\u4e0e\u4e0b\u6e38\u5ba2\u6237\u5f62\u6210\u7d27\u5bc6\u7684\u6218\u7565\u5408\u4f5c\uff0c\u65e2\u80fd\u63d0\u4f9b\u7a33\u5b9a\u7684\u5e02\u573a\uff0c\u4e5f\u80fd\u5145\u5206\u4e86\u89e3\u4e0b\u6e38\u5ba2\u6237\u7684\u9700\u6c42\uff1b<\/p>\n<\/li>\n<li style=\"box-sizing: border-box;\">\n<p style=\"margin: 0px;padding: 0px;box-sizing: border-box;\">\u53d1\u5c55\u8def\u5f84\uff1a\u5148\u4e0e\u56fd\u5916\u4f01\u4e1a\u5408\u4f5c\uff0c\u5f15\u5165\u6709\u5e02\u573a\u524d\u666f\u7684MEMS\u4ea7\u54c1\u53ca\u6280\u672f\u6216\u8d2d\u4e70\u56fd\u5916MEMS\u81ea\u884c\u5c01\u6d4b\uff0c\u518d\u81ea\u4e3b\u8bbe\u8ba1\u548c\u5236\u9020\u4f4e\u7aefMEMS\u8fdb\u884c\u56fd\u4ea7\u66ff\u4ee3\uff0c\u79ef\u7d2f\u6280\u672f\u548c\u5e02\u573a\uff0c\u9010\u6b65\u7a81\u7834\u6280\u672f\u8fdb\u5165\u9ad8\u7aef\u5e02\u573a\uff0c\u6700\u540e\u4e0d\u65ad\u541e\u5e76\u4e2d\u5c0f\u578b\u4f01\u4e1a\uff0c\u5e76\u5c06\u8fd9\u79cd\u7ecf\u9a8c\u590d\u5236\u5230\u5176\u4ed6MEMS\u4ea7\u54c1\u4e0a\uff0c\u56fd\u5185\u6b4c\u5c14\u5fae\u3001\u745e\u58f0\u4e24\u5bb6\u4f01\u4e1a\u5747\u662f\u901a\u8fc7\u6b64\u79cd\u6a21\u5f0f\u53d1\u5c55\u58ee\u5927\u3002<sup style=\"box-sizing: border-box;\">[26]<\/sup><\/p>\n<\/li>\n<\/ul>\n<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"background-color: rgb(253, 209, 0);box-sizing: border-box;\"><strong style=\"box-sizing: border-box;\">2. \u6293\u4f4f\u4e0b\u884c\u5468\u671f\u7684\u9ec4\u91d1\u671f<\/strong><\/span><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u73b0\u6709\u5e02\u573a\uff0c\u6d88\u8d39\u7535\u5b50\u4ecd\u4f1a\u662fMEMS\u7684\u4e3b\u6218\u573a\uff0c\u4f46\u663e\u73b0\u5728\u884c\u4e1a\u4e0a\u7684\u8d8b\u52bf\u662f\u6d88\u8d39\u7535\u5b50\u9700\u6c42\u4e0d\u6d4e\uff0c\u6574\u4f53\u884c\u4e1a\u6b63\u8fdb\u5165\u4e0b\u884c\u5468\u671f\uff0c\u8fd9\u4f1a\u5e26\u52a8MEMS\u8fdb\u5165\u6574\u56fa\u671f\u3002\uff08\u5177\u4f53\u53ef\u53c2\u8003\u679c\u58f3\u786c\u79d1\u6280\u6b64\u524d<a target=\"_blank\" href=\"http:\/\/mp.weixin.qq.com\/s?__biz=MzIyNDA1MjExMQ==&amp;mid=2650152268&amp;idx=1&amp;sn=29420968e5dd66c03292c4552fec42f4&amp;chksm=f0166bacc761e2bacf662a004effcb6f14ad16c6cffe47ba8f7455a272989d543fb3422cce9c&amp;scene=21#wechat_redirect\" textvalue=\"\u300a\u534a\u5bfc\u4f53\u8dd1\u6b65\u8fdb\u5165\u5927\u8fc7\u5269\u65f6\u4ee3\u300b\" linktype=\"text\" imgurl=\"\" imgdata=\"null\" tab=\"innerlink\" rel=\"noopener\">\u300a\u534a\u5bfc\u4f53\u8dd1\u6b65\u8fdb\u5165\u5927\u8fc7\u5269\u65f6\u4ee3\u300b<\/a>\u4e00\u6587\uff09\u6b64\u65f6\u5bf9\u5df2\u5165\u5c40MEMS\u5e76\u6709\u6280\u672f\u79ef\u7d2f\u7684\u4f01\u4e1a\u6765\u8bf4\uff0c\u5c06\u662f\u9ec4\u91d1\u6536\u8d2d\u671f\uff0c\u53ef\u6293\u4f4f\u8fd9\u6b21\u673a\u9047\u5229\u7528\u6536\u8d2d\u5feb\u901f\u63d0\u5347\u7ade\u4e89\u80fd\u529b\u3002<sup style=\"box-sizing: border-box;\">[26]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u53e6\u5916\uff0c\u5728\u6d88\u8d39\u7535\u5b50\u666f\u6c14\u5ea6\u4e0b\u964d\u671f\u95f4\uff0c\u6c7d\u8f66\u548c\u533b\u7597\u9886\u57df\u7684\u65b0\u5e02\u573a\u66f4\u503c\u5f97\u88ab\u53d1\u6398\u3002\u6c7d\u8f66\u65b9\u9762\uff0c\u6fc0\u5149\u96f7\u8fbe\u3001\u56fe\u50cf\u8bc6\u522b\u3001\u4e3b\u52a8\u5239\u8f66\u3001\u80ce\u538b\u7b49\u65b0\u4f20\u611f\u5668\u77ed\u671f\u9700\u6c42\u5c06\u4f1a\u6301\u7eed\u589e\u52a0<sup style=\"box-sizing: border-box;\">[27]<\/sup>\uff1b\u533b\u7597\u65b9\u9762\uff0c\u7528\u4e8e\u62a4\u7406\u70b9\u7684\u5fae\u6d41\u63a7MEMS\u3001\u7528\u4e8e\u76d1\u6d4b\u4eba\u4f53\u6e29\u5ea6\u7684\u5fae\u578b\u6d4b\u8f90\u5c04\u70ed\u4eea\u3001\u7528\u4e8e\u533b\u5b66\u6210\u50cf\u7684\u538b\u7535\u5fae\u673a\u68b0\u8d85\u58f0\u6362\u80fd\u5668\uff08PMUT\uff09\u5c06\u4f1a\u662fMEMS\u7684\u65b0\u5929\u5730\u3002<sup style=\"box-sizing: border-box;\">[28]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><strong style=\"box-sizing: border-box;\"><span style=\"background-color: rgb(253, 209, 0);box-sizing: border-box;\">3. \u964d\u672c\u589e\u6548\u7684\u5173\u952e\u662f\u4ee3\u5de5<\/span><\/strong><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u5bf9MEMS\u884c\u4e1a\u6765\u8bf4\uff0c\u4e00\u76f4\u65e0\u6cd5\u89e3\u51b3\u7684\u95ee\u9898\u5c31\u662f\u5e02\u573a\u89c4\u6a21\u5728\u81a8\u80c0\uff0c\u4f46\u5355\u5668\u4ef6\u5374\u8d8a\u6765\u8d8a\u4fbf\u5b9c\u3002\u5bf9\u4e0b\u6e38\u5382\u5546\u800c\u8a00\uff0c\u7528MEMS\u5c31\u662f\u4e3a\u4e86\u4fbf\u5b9c<sup style=\"box-sizing: border-box;\">[29]<\/sup>\u3002MEMS\u5c01\u88c5\u6d4b\u8bd5\u5360\u603b\u6210\u672c30%~70%<sup style=\"box-sizing: border-box;\">[30]<\/sup>\uff0c\u56e0\u6b64\u5bf9\u56fd\u4ea7MEMS\u5382\u5546\u800c\u8a00\uff0c\u60f3\u6323\u94b1\uff0c\u5c31\u8981\u5148\u964d\u4f4e\u5236\u9020\u6210\u672c\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u56fd\u5916\u5927\u591a\u6570MEMS\u4f01\u4e1a\u662fIDM\u6a21\u5f0f\uff08Integrated Device Manufacturer\uff0c\u6307\u4ece\u8bbe\u8ba1\u3001\u5236\u9020\u3001\u5c01\u88c5\u3001\u6d4b\u8bd5\u5230\u9500\u552e\u4e00\u4f53\u5316\u5782\u76f4\u6574\u5408\u578b\u516c\u53f8\uff09\uff0c\u8fd9\u4e9b\u4f01\u4e1a\u90fd\u62e5\u6709\u81ea\u4e3b\u7684\u5236\u9020\u80fd\u529b\u3002\u4f46\u56fd\u5185\u5219\u662f\u4ee5Fabless\u6a21\u5f0f\uff08\u8bbe\u8ba1\u578b\u516c\u53f8\uff09\u4e3a\u4e3b\u5bfc\uff0c\u867d\u7136\u8fd9\u4e9b\u516c\u53f8\u8bbe\u8ba1\u7684\u4ea7\u54c1\u8d8a\u6765\u8d8a\u5f3a\u5927\uff0c\u4f46\u5236\u9020\u80fd\u529b\u4f9d\u8d56\u5916\u90e8\u4ee3\u5de5\u5382\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u66f4\u4e3a\u56f0\u96be\u7684\u662f\uff0c\u56fd\u5185MEMS\u6676\u5706\u751f\u4ea7\u80fd\u529b\u4e0e\u56fd\u9645\u5148\u8fdb\u6c34\u5e73\u5dee\u8ddd\u8f83\u5927\u3002\u636e\u4e2d\u56fd\u7535\u5b50\u6280\u672f\u6807\u51c6\u5316\u7814\u7a76\u9662\u4fe1\u606f\u663e\u793a\uff0c\u56fd\u5185\u4ec5\u534e\u6da6\u4e0a\u534e\u3001\u4e2d\u82af\u56fd\u9645\u3001\u4e0a\u6d77\u5148\u8fdb\u534a\u5bfc\u4f53\u5be5\u5be5\u51e0\u5bb6\u516c\u53f8\u7684\u6676\u5706\u751f\u4ea7\u7ebf\u4e0e\u56fd\u9645\u6c34\u5e73\u76f8\u8fd1\uff0c\u4e14\u751f\u4ea7\u7ecf\u9a8c\u65e0\u6cd5\u8fbe\u5230\u56fd\u5916\u89c4\u6a21\u5316\u751f\u4ea7\u7684\u6807\u51c6\uff0c\u540c\u65f6\u56fd\u5185MEMS\u5c01\u88c5\u6280\u672f\u6ca1\u6709\u7edf\u4e00\u63a5\u53e3\u6807\u51c6\uff0c\u4ea7\u54c1\u5916\u5f62\u5343\u5dee\u4e07\u522b\u3002<sup style=\"box-sizing: border-box;\">[30]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u603b\u800c\u8a00\u4e4b\uff0c\u5f53\u5236\u9020\u4e0d\u518d\u662f\u95ee\u9898\uff0c\u56fd\u4ea7MEMS\u5c31\u4f1a\u8d8a\u6765\u8d8a\u5f3a\u5927\u3002\u53e6\u5916\uff0c\u56fd\u4ea7\u5236\u9020\u5546\u8fd8\u80fd\u901a\u8fc7\u6dfb\u52a0\u66f4\u591a\u9644\u52a0\u670d\u52a1\uff0c\u6765\u62b5\u6d88\u5f71\u54cd\uff0c\u5982\u63d0\u4f9b\u9ad8\u5ea6\u590d\u6742\u7684\u8f6f\u4ef6\u652f\u6301\u6216\u63d0\u4f9b\u652f\u6301AI\u7684\u4f20\u611f\u89e3\u51b3\u65b9\u6848\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><span style=\"background-color: rgb(253, 209, 0);box-sizing: border-box;\"><strong style=\"box-sizing: border-box;\">4. \u6280\u672f\u548c\u5e02\u573a\u8981\u56f4\u7ed5\u5e94\u7528\u8d70<\/strong><\/span><\/section>\n<\/section>\n<section style=\"line-height: 2.25;letter-spacing: 1.5px;box-sizing: border-box;\" >\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">MEMS\u5728\u5e02\u573a\u7684\u4ef7\u503c\u4e00\u5b9a\u662f\u4f53\u73b0\u5728\u5e94\u7528\u4e0a\u7684\uff0c\u53cd\u89c2\u5e94\u7528\u5df2\u7ecf\u5b9e\u73b0\u4e86\u4e09\u6b21\u8fdb\u5316\uff1a2000\u5e74~2010\u5e74\u662f\u79bb\u7ebf\u65f6\u4ee3\uff0c\u4f20\u611f\u548c\u6267\u884c\u7684\u4ef7\u503c\u4ec5\u9650\u4e8e\u72ec\u7acb\u52a8\u4f5c\uff0c\u5982\u5c4f\u5e55\u65cb\u8f6c\u3001\u8ba1\u6b65\u3001\u786c\u4ef6\u6253\u5370\uff1b2010\u5e74~2020\u5e74\u662f\u5728\u7ebf\u65f6\u4ee3\uff0cMEMS\u5f00\u59cb\u4e0e\u4e91\u7aef\u8fde\u63a5\uff0c\u5982\u5730\u7406\u5b9a\u4f4d\u3001\u72b6\u6001\u76d1\u6d4b\u3001\u6c7d\u8f66\u5bfc\u822a\u548c3D\u6253\u5370\uff1b2020\u5e74\u5230\u73b0\u5728\u662f\u751f\u6d3b\u65f6\u4ee3\uff0c\u79bb\u7ebf\u548c\u5728\u7ebf\u5df2\u7ecf\u6ca1\u6709\u5dee\u522b\uff0c\u901a\u8fc7\u5185\u7f6e\u673a\u5668\u5b66\u4e60\u5185\u6838\u3001\u5fae\u578bDSP\u5e76\u5e94\u7528\u4eba\u5de5\u667a\u80fd\u6280\u672f\uff0c\u8ba9\u6570\u5b57\u548c\u771f\u5b9e\u4e4b\u95f4\u65e0\u7f1d\u8854\u63a5\uff0c\u5982\u96f6\u5ef6\u8fdf\u53cd\u9988\u3001\u9884\u6d4b\u6027\u7ef4\u62a4\u3001\u5168\u606f\u56fe\u7b49\u3002<sup style=\"box-sizing: border-box;\">[29]<\/sup><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u56fd\u4ea7MEMS\u7814\u7a76\u754c\u548c\u4ea7\u4e1a\u754c\u9664\u4e86\u8981\u8ffd\u8d76\u65b0\u6750\u6599\uff08\u5982PZT\u3001\u6c2e\u5316\u94dd\u3001\u6c27\u5316\u9492\uff09\u3001\u65b0\u5c01\u88c5\uff08\u59823D\u6676\u5706\u7ea7\u5c01\u88c5\uff09\u6280\u672f\u4ee5\u6c42\u8fdb\u4e00\u6b65\u964d\u672c\u589e\u6548\u5916\uff0c\u8fd8\u5e94\u6ce8\u91cd\u4e0e\u4e0b\u6e38\u5e94\u7528\u7684\u5339\u914d\uff0c\u505a\u5230\u611f\u3001\u77e5\u3001\u8054\u4e00\u4f53\u5316\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\">\u5bf9MEMS\u6765\u8bf4\uff0c\u6700\u91cd\u8981\u7684\u662f\u80fd\u505a\u4ec0\u4e48\u3002\u5f53\u5e94\u7528\u94fa\u5f00\uff0c\u5e02\u573a\u81ea\u7136\u4f1a\u6253\u5f00\u3002<\/section>\n<section style=\"white-space: normal;margin: 0px 8px;padding: 0px;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"text-align: center;margin: 10px 8px;box-sizing: border-box;\">\n<section style=\"max-width: 100%;vertical-align: middle;display: inline-block;line-height: 0;box-sizing: border-box;\"><br  \/><\/section>\n<\/section>\n<section style=\"margin: 10px 8px;text-align: center;opacity: 0.9;box-sizing: border-box;\">\n<section style=\"display: inline-block;width: 90%;border-width: 1px;border-style: dashed;border-color: rgb(219, 175, 105);padding: 5px 10px;background-color: rgba(232, 224, 65, 0);border-radius: 0.7em;height: auto;box-sizing: border-box;\">\n<section style=\"color: rgb(219, 175, 105);text-align: justify;box-sizing: border-box;\" >\n<section style=\"margin-top: 0px;margin-bottom: 0px;padding: 0px;max-width: 100%;font-family: -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 18px;letter-spacing: 0.544px;white-space: normal;background-color: rgb(255, 255, 255);opacity: 1;transform: rotateZ(0deg);-webkit-transform: rotateZ(0deg);-moz-transform: rotateZ(0deg);-o-transform: rotateZ(0deg);overflow-wrap: break-word !important;box-sizing: border-box;\">\n<section style=\"margin: 10px 0px;padding: 0px;max-width: 100%;overflow-wrap: break-word !important;box-sizing: border-box;\">\n<section style=\"margin: -15px 15px;padding: 0px;max-width: 100%;overflow-wrap: break-word !important;box-sizing: border-box;\">\n<section style=\"margin: 0px;padding: 0px;max-width: 100%;letter-spacing: 2px;overflow-wrap: break-word !important;box-sizing: border-box;\">\n<p style=\"padding: 0px;max-width: 100%;clear: both;min-height: 1em;text-align: left;overflow-wrap: break-word !important;margin: 0px;box-sizing: border-box;\"><span style=\"margin: 0px;padding: 0px;max-width: 100%;font-size: 13px;letter-spacing: 1px;overflow-wrap: break-word !important;box-sizing: border-box;\"><span style=\"margin: 0px;padding: 0px;max-width: 100%;vertical-align: inherit;overflow-wrap: break-word !important;box-sizing: border-box;\"><span style=\"margin: 0px;padding: 0px;max-width: 100%;vertical-align: inherit;overflow-wrap: break-word !important;box-sizing: border-box;\">References<\/span><\/span><\/span><span style=\"font-size: 13px;letter-spacing: 1px;box-sizing: border-box;\">\uff1a<\/span><\/p>\n<section style=\"margin: 5px 0px;padding: 0px;max-width: 100%;font-size: 13px;letter-spacing: normal;text-align: left;line-height: 1.75em;overflow-wrap: break-word !important;box-sizing: border-box;\">\n<section style=\"margin: 0px;padding: 0px;max-width: 100%;display: inline-block;width: 416px;height: 240px;vertical-align: top;overflow-y: auto;overflow-wrap: break-word !important;box-sizing: border-box;\">\n<section style=\"margin: 0px;padding: 0px;max-width: 100%;overflow-x: hidden;overflow-wrap: break-word !important;box-sizing: border-box;\">\n<section style=\"margin: 0px;padding: 0px 8px;max-width: 100%;text-align: justify;overflow-wrap: break-word !important;box-sizing: border-box;\">\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[1] Feynman R P. There's plenty of room at the bottom[J]. California Institute of Technology, Engineering and Science magazine, 1960.<br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[2] Wilfinger R J, Bardell P H, Chhabra D S. The resonistor: a frequency selective device utilizing the mechanical resonance of a silicon substrate[J]. IBM Journal of Research and Development, 1968, 12(1): 113-118.<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[3] \u8bb8\u6cf3.MEMS\uff1a\u8d8a\u611f\u77e5\u8d8a\u706b\u70ed[N].\u8ba1\u7b97\u673a\u4e16\u754c,2010-07-26(030)<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[4] \u5929\u6d25\u5927\u5b66\u65b0\u95fb\u7f51\uff1a\u5929\u6d25\u5e7f\u64ad\uff1a\u201c\u4e3a\u7ec6\u80de\u505a\u624b\u672f\u201d\u5929\u5927\u5e94\u7528\u5fae\u673a\u7535\u7cfb\u7edf\u6280\u672f\u7a81\u7834\u9776\u5411\u7ec6\u80de\u836f\u7269\u5bfc\u5165\u4e16\u754c\u96be\u9898.2017.3.10.http:\/\/news.tju.edu.cn\/info\/1005\/21512.htm<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[5] Mouser Electronics\uff1aMEMS: A Brief Overview.https:\/\/www.mouser.com\/applications\/mems-overview\/<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[6] \u9ec4\u675c.MEMS\u9640\u87ba\u4eea\u7684\u529f\u80fd\u539f\u7406\u53ca\u5e02\u573a\u5e94\u7528[J].\u4e2d\u56fd\u96c6\u6210\u7535\u8def,2021,30(12):76-79+85.<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[7] Algamili AS, Khir MHM, Dennis JO, Ahmed AY, Alabsi SS, Ba Hashwan SS, Junaid MM. A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices. Nanoscale Research Letters. 2021 Jan 26;16(1):16. DOI: 10.1186\/s11671-021-03481-7<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[8] \u548c\u6797\u5fae\u7eb3\uff1a\u9996\u6b21\u516c\u5f00\u53d1\u884c\u80a1\u7968\u5e76\u5728\u79d1\u521b\u677f\u4e0a\u5e02\u62db\u80a1\u610f\u5411\u4e66.2021.3.9.http:\/\/www.sse.com.cn\/disclosure\/listedinfo\/bulletin\/star\/c\/688661_20210309_2.pdf<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[9] Kim C, Getz P, Kim M, et al. Room-tempearutre CO 2 sensing based on interdigitated capacitors and resonant cantilevers[C]\/\/2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE, 2017: 1532-1535.doi.org\/10.1109\/transducers.2017.7994351<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[10] \u5b59\u7acb\u5b81,\u5468\u5146\u82f1,\u9f9a\u632f\u90a6.MEMS\u56fd\u5185\u5916\u53d1\u5c55\u72b6\u51b5\u53ca\u6211\u56fdMEMS\u53d1\u5c55\u6218\u7565\u7684\u601d\u8003[J].\u673a\u5668\u4eba\u6280\u672f\u4e0e\u5e94\u7528,2002,(02):2-4.<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[11] \u5f90\u6c38\u9752,\u6768\u62e5\u519b.\u7845MEMS\u5668\u4ef6\u52a0\u5de5\u6280\u672f\u53ca\u5c55\u671b[J].\u5fae\u7eb3\u7535\u5b50\u6280\u672f,2010,47(07):425-431.<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[12] \u51af\u6d77\u7389,\u59da\u7433,\u7fc1\u7956\u6cc9.MEMS\u5e02\u573a\u96c6\u4e2d\u5ea6\u53d8\u5316\u8d8b\u52bf\u53ca\u539f\u56e0\u5206\u6790[J].\u4e2d\u56fd\u96c6\u6210\u7535\u8def,2015,24(07):22-25.<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[13] \u56fd\u6cf0\u541b\u5b89\u4ea7\u4e1a\u89c2\u5bdf\uff1a\u3010\u4ea7\u4e1a\u62a5\u544a\u3011MEMS\u4f20\u611f\u5668\u2014\u2014\u63a2\u77e5\u56fd\u4ea7\u66ff\u4ee3\u7684\u6625\u5929.2021.2.5.https:\/\/mp.weixin.qq.com\/s\/i6PFTad0UDBFB-RCOeXaVg<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[14] \u626c\u5dde\u5e02\u79d1\u5b66\u6280\u672f\u5c40.MEMS\u521b\u65b0\u8d44\u6e90\u5206\u5e03\u53ca\u4ea7\u4e1a\u6276\u6301\u653f\u7b56.\u300a\u79d1\u6280\u60c5\u62a5\u53c2\u8003\u300bMEMS\u4ea7\u4e1a\u4e13\u520a2018\u5e74\u7b2c12\u671f\uff08\u603b\u7b2c198\u671f\uff09.2018.6.12.http:\/\/kjj.yangzhou.gov.cn\/yzkjj\/kjqbck\/201807\/404073b248a749258644e120d16bb1fe\/files\/7cdf58c5127348bdaf4be995c5649253.pdf<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[15] Yole\uff1aMEMS Industry Market and Technology Report.2021.7.https:\/\/s3.i-micronews.com\/uploads\/2021\/07\/YINTR21180-Status-of-the-MEMS-Industry-2021_Sample.pdf<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[16] \u6b4c\u5c14\u5fae\u7535\u5b50\uff1a\u9996\u6b21\u516c\u5f00\u53d1\u884c\u80a1\u7968\u5e76\u5728\u521b\u4e1a\u677f\u4e0a\u5e02\u62db\u80a1\u8bf4\u660e\u4e66.2022.8.15.http:\/\/www.cninfo.com.cn\/new\/disclosure\/detail?stockCode=&amp;announcementId=1214294527&amp;orgId=-&amp;announcementTime=2022-08-15<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[17]&nbsp;<span style=\"color: rgb(219, 175, 105);font-family: -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-ligatures: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: normal;orphans: 2;text-align: justify;text-indent: 0px;text-transform: none;widows: 2;word-spacing: 0px;-webkit-text-stroke-width: 0px;background-color: rgb(255, 255, 255);text-decoration-thickness: initial;text-decoration-style: initial;text-decoration-color: initial;display: inline !important;float: none;\">\u8d5b\u8fea\u987e\u95ee\uff1a<\/span><span style=\"color: rgb(219, 175, 105);font-family: -apple-system-font, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;font-size: 13px;font-style: normal;font-variant-ligatures: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: normal;orphans: 2;text-align: justify;text-indent: 0px;text-transform: none;widows: 2;word-spacing: 0px;-webkit-text-stroke-width: 0px;background-color: rgb(255, 255, 255);text-decoration-thickness: initial;text-decoration-style: initial;text-decoration-color: initial;display: inline !important;float: none;\">2020\u5e74\u4e2d\u56fdMEMS\u5236\u9020\u767d\u76ae\u4e66.2020.10.28.https:\/\/www.nanopolis.cn\/static\/upload\/2021\/\/2\/\/722\/\/2020%E5%B9%B4%E4%B8%AD%E5%9B%BDMEMS%E5%88%B6%E9%80%A0%E7%99%BD%E7%9A%AE%E4%B9%A6.pdf<\/span><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[18] \u4f20\u611f\u5668\u4e13\u5bb6\u7f51\uff1a6\u5e74\u524d\uff1a\u6bd5\u4e1a29\u4eba\u76f8\u5173\u5de5\u4f5c0\uff0c\u4e0d\u5efa\u8bae\u8bfb\uff01\u56fd\u4ea7MEMS\u7684\u53d1\u5c55\u4e0e\u56f0\u5883.2022.7.11.https:\/\/mp.weixin.qq.com\/s\/bYyEG9MxCrft9ungrQLpiw<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[19] 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MEMS \u4f20\u611f\u5668\u5728\u4e2d\u56fd\u7684\u53d1\u5c55\u73b0\u72b6\u5206\u6790[J]. \u51b3\u7b56\u63a2\u7d22 (\u4e2d), 2019, 8.<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[20] \u611f\u77e5\u82af\u89c6\u754c\uff1a\u91cd\u78c5\u53d1\u5e03|\u65b0\u589e16\u6761\uff01\u672c\u571f37\u6761\u4e3b\u6d41MEMS\u4ea7\u7ebf\u5168\u666f\u56fe.2022.1.17.https:\/\/mp.weixin.qq.com\/s\/d28RRNXJqHFgaaVUWThwEQ<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[21] 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\u8d5b\u8fea\u987e\u95ee\uff1a2021\u4e2d\u56fdMEMS\u4ea7\u4e1a\u7814\u7a76\u62a5\u544a.2021.12.27.https:\/\/www.nanopolis.cn\/static\/upload\/2021\/\/11\/\/975\/\/2021%E4%B8%AD%E5%9B%BDMEMS%E4%BA%A7%E4%B8%9A%E7%A0%94%E7%A9%B6%E6%8A%A5%E5%91%8A.pdf<\/p>\n<p>&nbsp;<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[24] \u5f90\u6676,\u674e\u53cc,\u5f20\u5f26,\u5f20\u8587,\u5e84\u5b9d\u68ee,\u8463\u63a5\u83b2.\u4e2d\u56fd\u4f20\u611f\u5668\u6280\u672f\u4e13\u5229\u7edf\u8ba1\u5206\u6790[J].\u7269\u8054\u7f51\u6280\u672f,2020,10(06):84-85+88.<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[25] \u7535\u5b50\u53d1\u70e7\u53cb\u7f51\uff1a\u7f3a\u4e4f\u8010\u5fc3\uff0c\u4ea7\u4e1a\u5206\u6563\uff0c\u56fd\u4ea7MEMS\u51fa\u8def\u5230\u5e95\u5728\u54ea\uff1f.2021.11.01.https:\/\/mp.weixin.qq.com\/s\/QiQ75GvqTYaqGhm_0fYzyw<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[26] \u4e2d\u56fd\u79d1\u5b66\u9662\u4e0a\u6d77\u5fae\u7cfb\u7edf\u4e0e\u4fe1\u606f\u6280\u672f\u7814\u7a76\u6240\u6218\u7565\u7814\u7a76\u6240\uff1a\u4e2d\u56fd MEMS \u4ea7\u4e1a\u53d1\u5c55\u8d8b\u52bf\u5206\u6790\u53ca\u5efa\u8bae.2016.12.6.https:\/\/small.shanghaitech.edu.cn\/103\/uploads\/2018\/10\/Chinese-MEMS-Industry.pdf<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[27] \u7535\u5b50\u5de5\u7a0b\u4e13\u8f91\uff1a\u4ece\u6c7d\u8f66MEMS\uff0c\u770b2021\u6c7d\u8f66\u7535\u5b50\u5e02\u573a\u53d1\u5c55\u524d\u666f.2021.3.2.https:\/\/www.eet-china.com\/news\/202103020928.html<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[28] Semi Engineering\uff1aMEMS: New Materials, Markets And Packaging.2021.7.28.https:\/\/semiengineering.com\/mems-new-materials-markets-and-packaging\/<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[29] i-micronews\uff1aThe MEMS success story: a decade of evolving strategies leading to a bright MEMS future \u2013 An interview with Bosch Sensortec, STMicroelectronics and Yole D\u00e9veloppement.2021.10.28.https:\/\/www.i-micronews.com\/the-mems-success-story-a-decade-of-evolving-strategies-leading-to-a-bright-mems-future-an-interview-with-bosch-sensortec-stmicroelectronics-and-yole-developpement\/<\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\"><br style=\"box-sizing: border-box;\"  \/><\/p>\n<p style=\"white-space: normal;margin: 0px;padding: 0px;box-sizing: border-box;\">[30] \u4e2d\u56fd\u7535\u5b50\u6280\u672f\u6807\u51c6\u5316\u7814\u7a76\u9662\uff1a\u667a\u80fd\u4f20\u611f\u5668\u578b\u8c31\u4f53\u7cfb\u4e0e\u53d1\u5c55\u6218\u7565\u767d\u76ae\u4e662019\u7248.http:\/\/www.cesi.cn\/201908\/5426.html<\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"box-sizing: border-box;font-style: normal;font-weight: 400;text-align: justify;font-size: 16px;margin-bottom: 0px;margin-left: 8px;margin-right: 8px;\"><br  \/><\/section>\n<hr style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;box-sizing: border-box !important;overflow-wrap: break-word !important;font-size: 16px;font-style: normal;font-variant-ligatures: normal;font-variant-caps: normal;font-weight: 400;letter-spacing: 0.544px;orphans: 2;text-align: justify;text-indent: 0px;text-transform: none;white-space: normal;widows: 2;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration-thickness: initial;text-decoration-style: initial;text-decoration-color: initial;color: rgb(62, 62, 62);font-family: -apple-system, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;background-color: rgb(255, 255, 255);border-style: solid;border-width: 1px 0px 0px;border-color: rgba(0, 0, 0, 0.1);transform-origin: 0px 0px;transform: scale(1, 0.5);\"  \/>\n<section style=\"margin: 10px 8px;padding: 0px;outline: 0px;max-width: 100%;box-sizing: border-box;font-style: normal;font-variant-ligatures: normal;font-variant-caps: normal;font-weight: 400;orphans: 2;text-indent: 0px;text-transform: none;white-space: normal;widows: 2;word-spacing: 0px;-webkit-text-stroke-width: 0px;text-decoration-thickness: initial;color: rgb(62, 62, 62);font-family: -apple-system, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;background-color: rgb(255, 255, 255);font-size: 15px;letter-spacing: 1.5px;text-align: center;line-height: 2em;overflow-wrap: break-word !important;\"><img decoding=\"async\" class=\"rich_pages wxw-img aligncenter\"     style=\"margin: 0px;padding: 0px;outline: 0px;max-width: 100%;box-sizing: border-box;word-wrap: break-word !important;vertical-align: middle;height: auto !important;caret-color: rgb(34, 34, 34);color: rgb(34, 34, 34);font-style: normal;font-variant-caps: normal;font-weight: 400;orphans: auto;text-indent: 0px;text-transform: none;white-space: normal;widows: auto;word-spacing: 0px;-webkit-text-size-adjust: auto;-webkit-text-stroke-width: 0px;text-decoration: none;font-size: 15px;font-family: -apple-system, BlinkMacSystemFont, &quot;Helvetica Neue&quot;, &quot;PingFang SC&quot;, &quot;Hiragino Sans GB&quot;, &quot;Microsoft YaHei UI&quot;, &quot;Microsoft YaHei&quot;, Arial, sans-serif;letter-spacing: 1px;text-align: center;visibility: visible !important;width: 677px !important;\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/12\/5d603f0649125a8851a6de5baebb601c.jpeg!a\" alt=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\" title=\"\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8\"  \/><\/section>\n<blockquote class=\"keep-source\">\n<p>\u539f\u6587\u59cb\u53d1\u4e8e\u5fae\u4fe1\u516c\u4f17\u53f7\uff08\u9752\u8bb0\uff09\uff1a<a target=\"_blank\" href=\"http:\/\/mp.weixin.qq.com\/s?src=11&timestamp=1701675774&ver=4935&signature=H81BZlK7YuOhcgR1d-88IFsphxQ*OVcdMk7zNVpICGg-N*ph8cVO5M8NTt5Pl15QaanA0quNIA1xNNM-mxkVe8xdI1kOyfgEU6wh7kLp8NuF067hJK0zCsyamOaw-Ily&new=1\" rel=\"noopener\">\u56fd\u4ea7MEMS\u5d1b\u8d77\uff0c\u9752\u5c9b\u6709\u671b\u8d70\u51fa\u4e00\u5bb6\u4e0a\u5e02\u516c\u53f8<\/a><\/p>\n<\/blockquote>\n<\/div>\n","raw":"","protected":false},"excerpt":{"rendered":"<p>\u9752\u8bb0\u6309\uff1a5\u670830\u65e5\uff0c\u6df1\u4ea4\u6240\u6062\u590d\u6b4c\u5c14\u5fae\u521b\u4e1a\u677fIPO\u7684\u4e0a\u5e02\u5ba1\u6838\u3002 \u6ce8\u518c\u5730\u4f4d\u4e8e\u9752\u5c9b\u7684\u6b4c\u5c14\u5fae\u662f\u4e2d\u56fd\u7535\u58f0\u884c\u4e1a\u9f99\u5934\u4f01\u4e1a\u6b4c\u5c14 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