\u5728\u4e4b\u524d\u7684\u6280\u672f\u6587\u7ae0\u4e2d\uff0c\u4ecb\u7ecd\u4e86\u9a71\u52a8\u82af\u7247\u7684\u6982\u89c8\u548cPN\u7ed3\u9694\u79bb(JI)\u6280\u672f\uff0c\u672c\u6587\u4f1a\u7ee7\u7eed\u4ecb\u7ecd\u82f1\u98de\u51cc\u7684\u7edd\u7f18\u4f53\u4e0a\u7845\uff08SOI\uff09\u9a71\u52a8\u82af\u7247\u6280\u672f\u3002<\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n \n<\/section>\n \u9ad8\u538b\u6805\u6781\u9a71\u52a8IC\u7684\u6280\u672f\u7ecf\u8fc7\u957f\u671f\u7684\u53d1\u5c55\uff0c\u8d70\u5411\u4e86\u7edd\u7f18\u4f53\u4e0a\u7845\uff08silicon-on-insulator\uff0c\u7b80\u79f0SOI\uff09\uff0cSOI\u6307\u5728\u7845\u7684\u7edd\u7f18\u886c\u5e95\u4e0a\u518d\u5f62\u6210\u4e00\u5c42\u8584\u7684\u5355\u6676\u7845\uff0c\u76f8\u5bf9\u4e8e\u4f20\u7edf\u7684\u5bfc\u7535\u578b\u7684\u7845\u886c\u5e95\uff0c\u5b83\u6709\u4e09\u5c42\u7ed3\u6784\uff0c\u7b2c\u4e00\u5c42\u662f\u539a\u7684\u7845\u886c\u5e95\u5c42\uff0c\u7528\u4e8e\u63d0\u4f9b\u673a\u68b0\u652f\u6491\uff0c\u7b2c\u4e8c\u5c42\u662f\u8584\u7684\u4e8c\u6c27\u5316\u7845\u5c42\uff0c\u4e8c\u6c27\u5316\u7845\u662f\u4e00\u79cd\u7edd\u7f18\u4f53\uff0c\u4ece\u800c\u5f62\u6210\u4e00\u5c42\u7edd\u7f18\u7ed3\u6784\uff0c\u7b2c\u4e09\u5c42\u662f\u8584\u7684\u5355\u6676\u7845\u9876\u5c42\uff0c\u5728\u8fd9\u4e00\u5c42\u8fdb\u884c\u7535\u8def\u7684\u523b\u8680\uff0c\u5f62\u6210\u9a71\u52a8IC\u7684\u5de5\u4f5c\u5c42\u3002<\/p>\n<\/section>\n \n<\/section>\n \u56fe\uff11.\u7edd\u7f18\u4f53\u4e0a\u7845SOI\uff08\u5de6\u56fe\uff09\u4e0e\u4f20\u7edf\u4f53\u7845(Bulk CMOS)\uff08\u53f3\u56fe\uff09\u7ed3\u6784\u7684\u6bd4\u8f83<\/em><\/p>\n<\/section>\n \n<\/section>\n SOI\u57281964\u5e74\u7531C.W. Miller\u548cP.H. Robinson\u63d0\u51fa\uff0c\u7ecf\u8fc7\u51e0\u5341\u5e74\u7684\u53d1\u5c55\uff0c\u9010\u6e10\u6210\u719f\u3002\u82f1\u98de\u51cc\u91c7\u7528\u4e86SOI\u7684\u72ec\u7279\u8bbe\u8ba1\u7684\u6805\u6781\u9a71\u52a8IC\uff0c\u4ece\u8bbe\u8ba1\u4e0a\u5e26\u6765\u4e86\u8bf8\u591a\u4f18\u52bf\u3002\u5176\u4e2d\uff0c\u6700\u5927\u7684\u4f18\u52bf\u5728\u4e8e\uff0cSOI\u7684\u4e8c\u6c27\u5316\u7845\u7684\u7edd\u7f18\u5c42\uff0c\u80fd\u591f\u5f7b\u5e95\u6d88\u9664\u4f53\u7845(Bulk CMOS)\u7ed3\u6784\u4e2d\u886c\u5e95\u4e2d\u7684\u5bc4\u751fPN\u7ed3\uff0c\u4ece\u800c\u6d88\u9664\u4e86\u95ed\u9501\u6548\u5e94\uff0c\u63d0\u9ad8\u4e86\u9a71\u52a8\u82af\u7247\u8010\u53d7\u8d1f\u538b\u7684\u80fd\u529b\u3002<\/p>\n<\/section>\n \n<\/section>\n \u56fe2.\u4f20\u7edf\u4f53\u7845(Bulk CMOS)\uff08\u5de6\u56fe\uff09\u4e0e\u7edd\u7f18\u4f53\u4e0a\u7845SOI\uff08\u53f3\u56fe\uff09\u5bc4\u751fPN\u7ed3\u7684\u6bd4\u8f83<\/em><\/p>\n<\/section>\n \n<\/section>\n \u4ece\u6805\u6781\u9a71\u52a8IC\u7684\u8bbe\u8ba1\u7ed3\u6784\u4e0a\uff0c\u5982\u56fe3\u6240\u793a\uff0c\u53ef\u4ee5\u6e05\u695a\u7684\u770b\u5230\u76f8\u5173\u7535\u8def\u7684\u5f71\u54cd\uff0c\u5728\u4f53\u7845(Bulk CMOS)\u7684\u8bbe\u8ba1\u4e2d\uff0c\u5bf9\u4e8e\u9ad8\u8fb9\u7535\u8def\uff0c\u886c\u5e95\u8fde\u63a5COM\u7535\u4f4d\uff0cMOS\u7684\u6e90\u6781SOURCE\u8fde\u63a5VS\u7535\u4f4d\uff0c\u56e0\u4e3a\u886c\u5e95\u4e0eVS\u4e4b\u95f4\u5b58\u5728\u4e00\u4e2a\u5bc4\u751f\u4e8c\u6781\u7ba1\uff0c\u4ece\u800c\u5728\u67d0\u4e9b\u5de5\u51b5\u4e0b\uff0c\u5f53COM\u7684\u7535\u4f4d\u9ad8\u4e8eVS\u7684\u7535\u4f4d\u65f6\uff0c\u5bc4\u751f\u4e8c\u6781\u7ba1\u4f1a\u5bfc\u901a\uff0c\u4ea7\u751f\u65e0\u6cd5\u63a7\u5236\u7684\u7535\u6d41\uff0c\u4ece\u800c\u5bf9\u7535\u8def\u7684\u53ef\u9760\u6027\u4ea7\u751f\u5f71\u54cd\u3002\u5728\u7edd\u7f18\u4f53\u4e0a\u7845SOI\u7684\u9a71\u52a8IC\u4e2d\uff0c\u56e0\u4e3a\u4e8c\u6c27\u5316\u7845\u7edd\u7f18\u5c42\u7684\u5b58\u5728\uff0c\u6d88\u9664\u4e86\u8fde\u63a5COM\u548cVS\u7684\u5bc4\u751f\u4e8c\u6781\u7ba1\uff0c\u4ece\u800c\u6781\u5927\u63d0\u5347\u4e86\u9a71\u52a8IC\u7684\u53ef\u9760\u6027\u3002<\/p>\n<\/section>\n \n<\/section>\n \u56fe3.\u4f20\u7edf\u4f53\u7845(Bulk CMOS)\uff08\u5de6\u56fe\uff09\u4e0e\u7edd\u7f18\u4f53\u4e0a\u7845SOI\uff08\u53f3\u56fe\uff09\u5bc4\u751fPN\u7ed3\u5bf9\u8bbe\u8ba1\u7684\u5f71\u54cd<\/em><\/p>\n<\/section>\n \n<\/section>\n \u9a71\u52a8\u82af\u7247\u7684\u8010\u53d7\u8d1f\u538b\uff08VS\u7684\u7535\u538b\u4f4e\u4e8eCOM\uff09\u7684\u80fd\u529b\uff0c\u5bf9\u4e8e\u7535\u673a\u9a71\u52a8\u5e94\u7528\uff0c\u6216\u8005\u6865\u5f0f\u7535\u8def\u5e26\u611f\u6027\u8d1f\u8f7d\u7684\u5e94\u7528\u60c5\u51b5\uff0c\u90fd\u975e\u5e38\u91cd\u8981\u3002\u5982\u56fe4\u6240\u793a\uff0c\u5f53\u4e0a\u7ba1Q2\u5173\u95ed\u7684\u65f6\u5019\uff0c\u8d1f\u8f7d\u7535\u6d41\u5207\u6362\u5230\u4e0b\u7ba1D1\uff0c\u6b64\u65f6\u7535\u6d41\u4ece\u8d1f\u6bcd\u7ebf\u6d41\u5411\u8d1f\u8f7d\u3002\u8003\u8651\u52a8\u6001\u7684\u60c5\u51b5\uff0c\u5728D1\u4e0a\u7684\u7535\u6d41\u9010\u6b65\u5efa\u7acb\u7684\u8fc7\u7a0b\u4e2d\uff0c\u5728VS~COM\u4e4b\u95f4\uff0c\u4f1a\u4ea7\u751f\u7531Ls1\u548cLd1\u7684\u611f\u751f\u7535\u538b\uff0c\u4ee5\u53caQ1\u7684\u4e8c\u6781\u7ba1\u7684\u5bfc\u901a\u7535\u538b\uff0c\u603b\u7684\u7535\u538b\u7b49\u4e8e\u8fd9\u4e09\u4e2a\u7535\u538b\u7684\u53e0\u52a0\uff0c\u65b9\u5411\u4e0a\u7535\u538b\u5728COM\u4e3a\u6b63\uff0cVS\u4e3a\u8d1f\u3002\u56e0\u4e3a\u8fd9\u7c7b\u5e94\u7528\u4e2d\uff0c\u8d1f\u538b\u73b0\u8c61\u4e0d\u53ef\u907f\u514d\uff0c\u6240\u4ee5\u9a71\u52a8IC\u8010\u53d7\u8fd9\u4e2a\u8d1f\u538b\u7684\u80fd\u529b\u8d8a\u9ad8\u8d8a\u597d\uff0c\u56fe4\u7684\u53f3\u56fe\u53ef\u4ee5\u770b\u51fa\uff0c\u82f1\u98de\u51cc\u7684SOI\u9a71\u52a8IC\uff0c\u6297\u8d1f\u538b\u7684\u80fd\u529b\u53ef\u4ee5\u8fbe\u5230-100V\/300ns\u6216\u8005-60V\/1000ns\uff0c\u8fd9\u79cd\u6297\u8d1f\u538b\u7684\u80fd\u529b\u8fdc\u8fdc\u5927\u4e8eJI\u8bbe\u8ba1\u7684\u9a71\u52a8IC\u3002<\/p>\n<\/section>\n \n<\/section>\n \u56fe4.\u6865\u5f0f\u7535\u8def\u4e2d\u8d1f\u538b\u7684\u4ea7\u751f\uff0c\u53ca\u82f1\u98de\u51cc\u7684SOI\u9a71\u52a8\u7684\u8d1f\u538b\u8010\u53d7\u5de5\u4f5c\u533a<\/em><\/p>\n<\/section>\n \n<\/section>\n \u53e6\u5916\uff0cSOI\u7684\u7ed3\u6784\u4e2d\uff0c\u56e0\u4e3a\u5bc4\u751fPN\u7ed3\u7684\u6d88\u5931\uff0c\u5668\u4ef6\u7684\u5bc4\u751f\u6548\u5e94\u51cf\u5c0f\uff0c\u5668\u4ef6\u7684\u5f00\u5173\u635f\u8017\u4e5f\u53ef\u6781\u5927\u7684\u964d\u4f4e\uff0c\u5e76\u4e14\u7531\u4e8e\u6f0f\u7535\u6d41\u7684\u51cf\u5c0f\uff0c\u9759\u6001\u529f\u8017\u4e5f\u53ef\u4ee5\u5f97\u5230\u964d\u4f4e\uff0c\u4ece\u800c\u4f7f\u5f97\u91c7\u7528SOI\u8bbe\u8ba1\u7684\u9a71\u52a8IC\uff0c\u5de5\u4f5c\u9891\u7387\u80fd\u591f\u66f4\u9ad8\uff0c\u6574\u4f53\u635f\u8017\u66f4\u5c0f\u3002\u56fe5\u5bf9\u6bd4\u4e86300kHz\u7684\u5f00\u5173\u9891\u7387\u4e0b\uff0c2ED2106\uff08SOI\u8bbe\u8ba1\uff09\u4e0eIR2106(Bulk CMOS\u8bbe\u8ba1)\u7684\u6e29\u5347\u5bf9\u6bd4\uff0c\u53ef\u4ee5\u770b\u5230\uff0c2ED2106\u7684\u6700\u9ad8\u6e29\u5ea6\u53ea\u670966\u00b0C\uff0c\u800cIR2106\u7684\u6e29\u5ea6\u9ad8\u8fbe122\u00b0C\u3002<\/p>\n<\/section>\n \n<\/section>\n \u56fe5.\u7edd\u7f18\u4f53\u4e0a\u7845SOI\u4e0e\u4f20\u7edf\u4f53\u7845(Bulk CMOS)\u7684\u9a71\u52a8IC\u7684\u6e29\u5347\u6bd4\u8f83<\/em><\/p>\n<\/section>\n \n<\/section>\n \u518d\u6b21\uff0cSOI\u56e0\u4e3a\u5b58\u5728\u826f\u597d\u7684\u4ecb\u8d28\u9694\u79bb\uff0c\u66f4\u65b9\u4fbf\u8fdb\u884c\u96c6\u6210\u3002\u82f1\u98de\u51cc\u7684SOI\u7684\u9a71\u52a8IC\u96c6\u6210\u4e86\u81ea\u4e3e\u4e8c\u6781\u7ba1\uff0c\u4ece\u800c\u80fd\u591f\u8282\u7701\u6389\u4ee5\u524d\u9700\u8981\u5916\u52a0\u7684\u9ad8\u538b\u81ea\u4e3e\u4e8c\u6781\u7ba1\uff0c\u4ece\u800c\u8282\u7701\u7cfb\u7edf\u6210\u672c\u3002<\/p>\n<\/section>\n \u56fe6.\u7edd\u7f18\u4f53\u4e0a\u7845SOI\u96c6\u6210\u81ea\u4e3e\u4e8c\u6781\u7ba1\u793a\u610f\u56fe<\/em><\/p>\n<\/section>\n \n<\/section>\n \u7efc\u4e0a\u6240\u8ff0\uff0c\u7edd\u7f18\u4f53\u4e0a\u7845SOI\u662f\u6805\u6781\u9a71\u52a8\u5668\u7684\u4e00\u6b21\u6280\u672f\u98de\u8dc3\uff0c\u5177\u6709\u8d1f\u538b\u8010\u53d7\u80fd\u529b\u5f3a\u3001\u635f\u8017\u4f4e\u3001\u96c6\u6210\u81ea\u4e3e\u4e8c\u6781\u7ba1\u7b49\u4e00\u7cfb\u5217\u7684\u4f18\u5f02\u7279\u6027\u3002<\/p>\n<\/section>\n<\/section>\n \n<\/section>\n \u82f1\u98de\u51cc\u5df2\u7ecf\u63a8\u51fa\u4e86\u5927\u91cf\u7684\u7edd\u7f18\u4f53\u4e0a\u7845SOI\u7684\u9a71\u52a8IC\uff0c\u7535\u538b\u8986\u76d6200V\u81f31200V\uff0c\u7ed3\u6784\u6709\u9ad8\u4f4e\u8fb9\u9a71\u52a8\u3001\u534a\u6865\u53ca\u4e09\u76f8\u6865\u3002<\/p>\n<\/section>\n