{"id":27737,"date":"2016-05-26T09:29:39","date_gmt":"2023-04-15T02:26:40","guid":{"rendered":"https:\/\/www.ab-sm.com\/?p=27737"},"modified":"2023-04-15T10:27:19","modified_gmt":"2023-04-15T02:27:19","slug":"bd9a1c13c6","status":"publish","type":"post","link":"https:\/\/www.ab-sm.com\/a\/27737","title":{"rendered":"\u5927\u529f\u7387IGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76"},"content":{"rendered":"<div class=\"bpp-post-content\">\n<p>\u3000\u3000\u6458\u8981\uff1a\u7edd\u7f18\u6805\u53cc\u6781\u6676\u4f53\u7ba1(IGBT)\u662f\u5b9e\u73b0\u7535\u80fd\u8f6c\u6362\u548c\u63a7\u5236\u7684\u6700\u5148\u8fdb\u7684\u7535\u529b\u7535\u5b50\u5668\u4ef6\uff0c\u5927\u89c4\u6a21\u5e94\u7528\u4e8e\u7535\u52a8\u6c7d\u8f66\u3001\u7535\u529b\u673a\u8f66\u3001\u667a\u80fd\u7535\u7f51\u7b49\u9886\u57df\u3002\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u65e2\u5177\u6709\u9676\u74f7\u7684\u9ad8\u5bfc\u70ed\u6027\u3001\u9ad8\u7535\u7edd\u7f18\u6027\u3001\u9ad8\u673a\u68b0\u5f3a\u5ea6\u3001\u4f4e\u81a8\u80c0\u7b49\u7279\u6027\uff0c\u53c8\u5177\u6709\u65e0\u6c27\u94dc\u7684\u9ad8\u5bfc\u7535\u6027\u548c\u4f18\u5f02\u7684\u710a\u63a5\u6027\u80fd\uff0c\u662fIGBT\u6a21\u5757\u5c01\u88c5\u7684\u5173\u952e\u57fa\u7840\u6750\u6599\u3002\u672c\u6587\u91c7\u7528\u76f4\u63a5\u8986\u94dc\u5de5\u827a(DBC)\u548c\u6d3b\u6027\u91d1\u5c5e\u710a\u63a5\u5de5\u827a(AMB)\u5236\u5907\u4e86\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\uff0c\u5bf9\u6bd4\u4e86\u4e24\u79cd\u5de5\u827a\u7684\u5f02\u540c\u70b9\u548c\u5236\u5907\u7684\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u6027\u80fd\u5dee\u5f02\uff0c\u5e76\u6307\u51fa\u6c2e\u5316\u7845\u9676\u74f7\u8986\u94dc\u677f\u6709\u671b\u5728\u4e0b\u4e00\u4ee3\u529f\u7387\u6a21\u5757\u4e0a\u5e7f\u6cdb\u5e94\u7528\u3002<\/p>\n<p>\u5173\u952e\u8bcd\uff1a\u9676\u74f7\u8986\u94dc\u677f;\u9676\u74f7\u57fa\u677f\u6750\u6599;\u94dc\u91d1\u5c5e\u5316;\u529f\u7387\u6a21\u5757<\/p>\n<p>Research of High Reliability AlN Ceramic Bonding Copper Substrates Used in High Voltage Power Module<\/p>\n<p>(Zhao Dongliang, SINOPACK\uff0cShi Jiazhuang, 050051, China)<\/p>\n<p>Abstract\uff1aIGBT is the most advanced high power devices in the field of power electronics, which could realize electrical power conversion and control. It could be applied in electric vehicles, electric locomotives and intelligent electric grid. Alumina nitride ceramic bonding copper substrate has high thermal conductivity, high electrical insulation, high mechanical strength, low expansion of ceramics, and also has the high conductivity and excellent welding performance of oxygen free copper. It is the indispensable key fundamental materials in the field of power module packaging. In this paper, alumina nitride ceramic bonding copper substrate were fabricated by direct bonding copper process (DBC) and active metal brazing process (AMB).The similarities and differences of two kinds of process and preparation is compared. Silicon nitride ceramic bonding copper substrate is expected to be widely used on the next generation of power module.<\/p>\n<p>Key word\uff1aCeramic bonding copper;IGBT; High Reliability; DBC; AMB<\/p>\n<p>\u4e00\u3001\u5f15\u8a00<\/p>\n<p>IGBT(Insulated Gate Bipolar 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loading=\"lazy\" decoding=\"async\" class=\" aligncenter\" title=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/04\/1a9e6eb24b14c6c6d7b42aaea32b5d1a.png!a\" alt=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" width=\"446\" height=\"496\" \/><\/center>&nbsp;<\/p>\n<p>\u57fa\u4e8e\u4e0a\u8ff0\u57fa\u7840\u7406\u8bba\uff0c\u6211\u4eec\u7cfb\u7edf\u7814\u7a76\u4e86\u6c2e\u5316\u94dd\u9676\u74f7\u8868\u9762\u6c27\u5316\u3001\u65e0\u6c27\u94dc\u6c27\u5316\u4ee5\u53ca\u76f4\u63a5\u8986\u94dc\u7b49\u5de5\u827a\uff0c\u4f18\u5316\u4e86\u5de5\u827a\u53c2\u6570\uff0c\u5236\u5907\u51fa\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u3002\u91c7\u7528X\u5c04\u7ebf\u5bf9\u6837\u54c1\u8fdb\u884c\u5206\u6790\u5982\u56fe3\u6240\u793a\u3002\u53ef\u4ee5\u770b\u51fa\uff0c\u6837\u54c1\u5185\u90e8\u6ca1\u6709\u53d1\u73b0\u660e\u663e\u7a7a\u6d1e\u5b58\u5728\uff0c\u7279\u522b\u662f\u82af\u533a\u65e0\u7a7a\u6d1e\uff0c\u4e0a\u4e0b\u754c\u9762\u7a7a\u6d1e\u542b\u91cf\u5747\u5c0f\u4e8e3%\u3002\u5c06\u6837\u54c1\u5207\u621010mm\u5bbd\u7684\u957f\u6761\u9884\u5236\u5207\u53e3\uff0c\u6d4b\u8bd5\u94dc\u4ece\u9676\u74f7\u8868\u9762\u62c9\u8d77\u7684\u62c9\u529b\uff0c\u7ed3\u679c\u5982\u56fe4\u6240\u793a\uff0c\u6837\u54c1\u7684\u5265\u79bb\u5f3a\u5ea6\u5747\u5927\u4e8e60N\/cm\u3002<\/p>\n<p><center><img loading=\"lazy\" decoding=\"async\" class=\" aligncenter\" title=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/04\/f255050d5b8a17dac0fdafa46005fffd.jpg!a\" alt=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" width=\"432\" height=\"509\" \/><\/center>&nbsp;<\/p>\n<p>\u56fe5\u4e3a\u9676\u74f7\u4e0e\u94dc\u7684\u754c\u9762\u5fae\u89c2\u5f62\u8c8c\u3002\u53ef\u4ee5\u770b\u51fa\uff0c\u9676\u74f7\u4e0e\u94dc\u754c\u9762\u7ed3\u5408\u7d27\u5bc6\uff0c\u800c\u4e14\u7ed3\u6784\u81f4\u5bc6\u3002\u9676\u74f7\u6676\u7c92\u5927\u7ea6\u4e3a1-5\u03bcm\uff0c\u4e0e\u94dc\u4e4b\u95f4\u5b58\u57288-10\u5fae\u7c73\u7684\u8fc7\u6e21\u5c42\u3002\u8be5\u8fc7\u6e21\u5c42\u7ed3\u6784\u81f4\u5bc6\uff0c\u6676\u7c92\u7ea6\u4e3a3-5\u03bcm\uff0c\u4f46\u662f\u6676\u7c92\u95f4\u5b58\u5728\u4e0d\u8fde\u8d2f\u7684\u5fae\u88c2\u7eb9\u3002\u56fe6\u4e3a\u94dc\u62c9\u5f00\u540e\u9676\u74f7\u8868\u9762\u5f62\u8c8c\uff0c\u53ef\u4ee5\u770b\u51fa\uff0c\u9676\u74f7\u8868\u9762\u81f4\u5bc6\uff0c\u6ca1\u6709\u6c14\u5b54\u5b58\u5728\u3002\u8868\u9762\u9897\u7c92\u51f9\u51f8\u4e0d\u5e73\uff0c\u53ef\u80fd\u662f\u62c9\u5f00\u65f6\u88c2\u7eb9\u6cbf\u6676\u754c\u6269\u5c55\uff0c\u90e8\u5206\u9897\u7c92\u5728\u94dc\u4e0a\u90e8\u5206\u9897\u7c92\u5728\u9676\u74f7\u4e0a\u5bfc\u81f4\u3002<\/p>\n<p><center><img loading=\"lazy\" decoding=\"async\" class=\" aligncenter\" title=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/04\/f0835b6bfc18d9dc9eabad576d2ef4e7.jpg!a\" alt=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" width=\"371\" height=\"532\" \/><\/center>&nbsp;<\/p>\n<p>\u4e09 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loading=\"lazy\" decoding=\"async\" class=\" aligncenter\" title=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/04\/d527bf3c5d38e926391856d052c69a22.png!a\" alt=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" width=\"537\" height=\"260\" \/><\/center>&nbsp;<\/p>\n<p>\u6211\u4eec\u901a\u8fc7\u5bf9\u4e0d\u540c\u710a\u6599\u914d\u65b9\u7684\u4f18\u5316\uff0c\u5f00\u53d1\u4e86\u9002\u7528\u4e8e\u6c2e\u5316\u94dd\u9676\u74f7\u6d3b\u6027\u710a\u63a5\u7684\u6c2e\u5316\u94dd\u9676\u74f7\u4e13\u7528\u6d3b\u6027\u710a\u818f\u4f53\u7cfb\uff0c\u8be5\u710a\u818f\u5177\u6709\u5236\u5907\u5de5\u827a\u7b80\u5355\u3001\u5370\u5237\u7279\u6027\u4f18\u826f\u3001\u4e0e\u6c2e\u5316\u94dd\u9676\u74f7\u6da6\u6e7f\u6027\u826f\u597d\u4ee5\u53ca\u710a\u63a5\u540e\u7ed3\u5408\u5f3a\u5ea6\u9ad8\u7684\u7279\u70b9\u3002<\/p>\n<p><center><img loading=\"lazy\" decoding=\"async\" class=\" aligncenter\" title=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/04\/f5813d04469dc8f7ef4e49e6ef0c398b.jpg!a\" alt=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" width=\"305\" height=\"266\" \/><\/center>&nbsp;<\/p>\n<p>\u91c7\u7528\u710a\u818f\u4e1d\u7f51\u5370\u5237\u6280\u672f\u548c\u771f\u7a7a\u710a\u63a5\u6280\u672f\uff0c\u5b9e\u73b0\u4e86\u6c2e\u5316\u94dd\u548c\u94dc\u7684\u826f\u597d\u710a\u63a5\uff0c\u901a\u8fc7\u5bf9\u710a\u63a5\u65b9\u6cd5\u7814\u7a76\u548c\u4f18\u5316\uff0c\u5b9e\u73b0\u4e86\u6c2e\u5316\u94dd\u548c\u94dc\u710a\u63a5\u5f3a\u5ea6\u548c\u710a\u63a5\u754c\u9762\u7684\u826f\u597d\u63a7\u5236\uff0c\u754c\u9762\u7a7a\u6d1e\u7387\u5c0f\u4e8e1%\uff0c\u5e76\u56fa\u5316\u4e86\u710a\u63a5\u5de5\u827a\u66f2\u7ebf\u3002<\/p>\n<p><center><img loading=\"lazy\" decoding=\"async\" class=\" aligncenter\" title=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/04\/52d00a7ecf18c7d5a0e6245bbef1d84a.jpg!a\" alt=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" width=\"534\" height=\"255\" \/><\/center>&nbsp;<\/p>\n<p>AMB\u57fa\u677f\u5728\u538b\u710a\u65f6\u8981\u6c42\u9540\u5c42\u6709\u8f83\u597d\u7684\u710a\u63a5\u6027\uff0c\u5728250\u2103\u4e0b\u6709\u8f83\u597d\u7684\u7ed3\u5408\u529b\uff0c\u56e0\u6b64\u5176\u8868\u9762\u9700\u8981\u8fdb\u884c\u9540\u954d\u5904\u7406\u3002\u800cAMB\u57fa\u677f\u523b\u8680\u51fa\u56fe\u5f62\u540e\uff0c\u8868\u9762\u6709\u5927\u91cf\u5b64\u5c9b\uff0c\u8fdb\u884c\u7535\u9540\u56f0\u96be\u5927\u800c\u4e14\u9540\u5c42\u539a\u5ea6\u4e0d\u5747\u5300\uff0c\u56e0\u6b64\u5316\u5b66\u9540\u954d\u65e0\u7591\u662f\u6700\u597d\u7684\u9009\u62e9\u3002\u4e3a\u4e86\u63d0\u9ad8\u9540\u954d\u5c42\u7684\u5747\u5300\u6027\uff0c\u91c7\u7528\u5316\u5b66\u9540Ni-P\u6280\u672f\u6765\u5b9e\u73b0\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u57fa\u677f\u7684\u8868\u9762\u9540\u954d\uff0c\u901a\u8fc7\u5bf9\u9540\u6db2\u548c\u9540\u8986\u53c2\u6570\u7684\u4f18\u5316\uff0c\u954d\u5c42\u539a\u5ea6\u53ef\u63a7\u5236\u57283-5\u03bcm\uff0c\u5747\u5300\u6027\u53ef\u63a7\u5236\u5728\u00b10.2\u03bcm\u3002\u540c\u65f6\uff0c\u5bf9\u6c2e\u5316\u94dd\u8986\u94dc\u677f\u7684\u53ef\u952e\u5408\u6027\u8fdb\u884c\u7684\u5de5\u827a\u5b9e\u9a8c\uff0c\u5982\u56fe11\u6240\u793a\uff0c\u952e\u5408\u63a8\u529b\u5747\u5927\u4e8e1700g\uff0c\u6ee1\u8db3\u9ad8\u538bIGBT\u6a21\u5757\u7684\u5e94\u7528\u53ef\u9760\u6027\u8981\u6c42\u3002<\/p>\n<p><center><img loading=\"lazy\" decoding=\"async\" class=\" aligncenter\" title=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/04\/7ad017eff1f8918aad6953787099d8d5.jpg!a\" alt=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" width=\"566\" height=\"470\" \/><\/center>&nbsp;<\/p>\n<p>\u6c2e\u5316\u94dd\u8986\u94dc\u57fa\u677f\u6279\u6e29\u5ea6\u51b2\u51fb\u7684\u53ef\u9760\u6027\u662f\u5176\u6027\u80fd\u7684\u5173\u952e\u56e0\u7d20\uff0c\u8981\u6c42\u6c2e\u5316\u94dd\u8986\u94dc\u57fa\u677f\u5728\u82af\u7247\u710a\u63a5\u5b8c\u6210\u540e\uff0c\u8981\u80fd\u627f\u53d7-40\u2103\uff5e+150\u2103,100\u6b21\u7684\u6e29\u5ea6\u5faa\u73af\u3002\u6211\u4eec\u5bf9\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u57fa\u677f\u5f00\u5c55\u4e86\u4e00\u7cfb\u5217\u4f18\u5316\uff0c\u5305\u62ec\u8986\u94dc\u57fa\u677f\u7684\u8bbe\u8ba1\u4f18\u5316\u548c\u8986\u94dc\u57fa\u677f\u7684\u5de5\u827a\u4f18\u5316\uff0c\u6700\u7ec8\u5b8c\u5168\u8fbe\u5230\u4e86\u6e29\u5ea6\u5faa\u73af\u53ef\u9760\u6027\u8981\u6c42\u3002\u6539\u5584\u524d\u540e\u6c2e\u5316\u94dd\u8986\u94dc\u677f\u7ecf\u8fc7\u6e29\u5ea6\u5faa\u73af\u540e\u710a\u63a5\u60c5\u51b5\u5982\u56fe12\u6240\u793a\u3002<\/p>\n<p><center><img loading=\"lazy\" decoding=\"async\" class=\" aligncenter\" title=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/04\/52d00a7ecf18c7d5a0e6245bbef1d84a.jpg!a\" alt=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" width=\"548\" height=\"514\" \/><\/center>&nbsp;<\/p>\n<p>\u901a\u8fc7\u5de5\u827a\u653b\u5173\uff0c\u6211\u53f8\u81ea\u4e3b\u5f00\u53d1\u4e86\u4e24\u7c7b\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u57fa\u677f\uff0c\u5176\u6027\u80fd\u89c1\u88682\u3002\u53ef\u4ee5\u770b\u51fa\uff0cAMB\u5de5\u827a\u76f8\u6bd4\u4e8eDBC\u5de5\u827a\u5177\u6709\u66f4\u9ad8\u7684\u53ef\u9760\u6027\u548c\u66f4\u597d\u7684\u7efc\u5408\u6027\u80fd\uff0c\u800c\u4e14\u6211\u53f8\u751f\u4ea7\u7684\u6c2e\u5316\u94dd\u8986\u94dc\u57fa\u677f\u5df2\u4e0e\u65e5\u672cD\u516c\u53f8\u751f\u4ea7\u7684\u76f8\u5173\u4ea7\u54c1\u6280\u672f\u6307\u6807\u76f8\u5f53\u3002<\/p>\n<p><center><img loading=\"lazy\" decoding=\"async\" class=\" aligncenter\" title=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/04\/c6f250b858137398a457c54f9124ebf4.png!a\" alt=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" width=\"568\" height=\"436\" \/><\/center>&nbsp;<\/p>\n<p><center><img loading=\"lazy\" decoding=\"async\" class=\" aligncenter\" title=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/04\/1264d7acfcd57506368590bc136d31bc.png!a\" alt=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" width=\"567\" height=\"387\" \/><\/center>&nbsp;<\/p>\n<p>\u56db\u3001\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9676\u74f7\u8986\u94dc\u57fa\u677f\u53d1\u5c55\u65b9\u5411<\/p>\n<p>\u4ee5\u78b3\u5316\u7845\u3001\u6c2e\u5316\u9553\u4e3a\u4ee3\u8868\u7684\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u6750\u6599\u7684\u51fa\u73b0\uff0c\u4e3a\u5668\u4ef6\u6027\u80fd\u7684\u8fdb\u4e00\u6b65\u5927\u5e45\u5ea6\u63d0\u9ad8\u63d0\u4f9b\u4e86\u53ef\u80fd\u3002\u9488\u5bf9SiC\u57fa\/GaN\u57fa\u4e09\u4ee3\u534a\u5bfc\u4f53\u5668\u4ef6\u9ad8\u9891\u3001\u9ad8\u6e29\u3001\u5927\u529f\u7387\u7684\u5e94\u7528\u9700\u6c42\uff0c\u4e3a\u5b9e\u73b0\u5927\u529f\u7387\u7535\u529b\u7535\u5b50\u5668\u4ef6\u9ad8\u5bc6\u5ea6\u4e09\u7ef4\u6a21\u5757\u5316\u5c01\u88c5\uff0c\u9700\u8981\u5f00\u53d1\u53ef\u9760\u6027\u66f4\u9ad8\u3001\u8010\u6e29\u6027\u80fd\u66f4\u597d\u3001\u8f7d\u6d41\u80fd\u529b\u66f4\u5f3a\u7684\u9676\u74f7\u8986\u94dc\u57fa\u677f\u3002\u6c2e\u5316\u7845\u9676\u74f7\u5177\u6709\u4f4e\u76842.4\u500d\u4e8e\u6c27\u5316\u94dd\u548c\u6c2e\u5316\u94dd\u7684\u6297\u5f2f\u5f3a\u5ea6\uff0c\u56e0\u6b64\u5177\u6709\u6bd4\u6c2e\u5316\u94dd\u548c\u6c27\u5316\u94dd\u9ad8\u7684\u591a\u7684\u53ef\u9760\u6027\uff0c\u5c24\u5176\u662f\u9ad8\u5f3a\u5ea6\u53ef\u4ee5\u5b9e\u73b0\u5176\u4e0e\u539a\u94dc\u57fa\u677f\u7684\u8986\u63a5\uff0c\u5927\u5e45\u63d0\u9ad8\u57fa\u677f\u7684\u70ed\u6027\u80fd\u3002\u76f8\u5bf9\u4e8e\u6c2e\u5316\u94dd\u548c\u6c27\u5316\u94dd\uff0c\u6c2e\u5316\u7845\u9676\u74f7\u8986\u94dc\u677f\u5728\u7535\u6d41\u627f\u8f7d\u80fd\u529b\u3001\u6563\u70ed\u80fd\u529b\u3001\u529b\u5b66\u6027\u80fd\u3001\u53ef\u9760\u6027\u7b49\u65b9\u9762\u5747\u5177\u6709\u660e\u663e\u4f18\u52bf\u3002\u540c\u65f6\uff0c\u03b2-Si3N4\u9676\u74f7\u5177\u6709\u6f5c\u5728\u7684\u8f83\u9ad8\u70ed\u5bfc\u7387( 200~320W\/m\u2022K)\uff0c\u4f46\u662f\u5176\u5fae\u89c2\u7ed3\u6784\u66f4\u4e3a\u590d\u6742\uff0c\u5bf9\u58f0\u5b50\u7684\u6563\u5c04\u8f83\u5927\uff0c\u6545\u70ed\u5bfc\u7387\u8f83\u4f4e[]\uff0c\u9650\u5236\u4e86\u5176\u4f5c\u4e3a\u529f\u7387\u6a21\u5757\u57fa\u677f\u6750\u6599\u7684\u5e94\u7528\u3002\u56e0\u6b64\uff0c\u76ee\u524d\u66f4\u591a\u7684\u7814\u7a76\u5173\u6ce8\u4e8e\u5982\u4f55\u63d0\u9ad8\u6c2e\u5316\u7845\u9676\u74f7\u7684\u70ed\u5bfc\u7387\u3002\u9ad8\u5bfc\u70ed\u9676\u74f7\u5e94\u5177\u5907\u4ee5\u4e0b\u6761\u4ef6\uff1a(1)\u5e73\u5747\u539f\u5b50\u91cf\u5c0f;(2)\u539f\u5b50\u952e\u5408\u5f3a\u5ea6\u9ad8;(3)\u6676\u4f53\u7ed3\u6784\u8f83\u4e3a\u7b80\u5355;(4)\u6676\u683c\u975e\u8c10\u6027\u632f\u52a8\u4f4e\u3002\u63d0\u9ad8\u6c2e\u5316\u7845\u9676\u74f7\u70ed\u5bfc\u7387\u7684\u65b9\u6cd5\u5305\u62ec\uff1a(1)\u03b2-Si3N4\u76f8\u6676\u79cd\u7684\u5f15\u5165[][][];(2)\u70e7\u7ed3\u52a9\u5242\u7684\u9009\u62e9;(3)\u6210\u578b\u5de5\u827a\u4ee5\u53ca\u70ed\u5904\u7406\u5de5\u827a[][][]\u3002\u56e0\u6b64\uff0c\u5728\u9ad8\u529f\u7387IGBT\u6a21\u5757\u9886\u57df\uff0c\u6c2e\u5316\u7845\u9676\u74f7\u8986\u94dc\u677f\u56e0\u5176\u53ef\u4ee5\u710a\u63a5\u66f4\u539a\u7684\u65e0\u6c27\u94dc\u4ee5\u53ca\u66f4\u9ad8\u7684\u53ef\u9760\u6027\u5728\u672a\u6765\u7535\u52a8\u6c7d\u8f66\u7528\u9ad8\u53ef\u9760\u529f\u7387\u6a21\u5757\u4e2d\u5e94\u7528\u5e7f\u6cdb\u3002\u56fe8\u6839\u636e\u6750\u6599\u53ca\u5de5\u827a\u7279\u6027\u5c55\u793a\u4e86\u9676\u74f7\u8986\u94dc\u677f\u7684\u6280\u672f\u53d1\u5c55\u65b9\u5411\uff0c\u5728\u5927\u529f\u7387\u529f\u7387\u6a21\u5757\u9886\u57df\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u4e3a\u4e3b\u8981\u53d1\u5c55\u65b9\u5411\uff0c\u5728\u9ad8\u53ef\u9760\u529f\u7387\u6a21\u5757\u9886\u57df\u6c2e\u5316\u7845\u9676\u74f7\u8986\u94dc\u677f\u4e3a\u4e3b\u8981\u53d1\u5c55\u65b9\u5411\u3002<\/p>\n<p><center><img loading=\"lazy\" decoding=\"async\" class=\" aligncenter\" title=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" src=\"https:\/\/file.ab-sm.com\/103\/uploads\/2023\/04\/e7d09b2da0a898e6e8d152b53df5f5cd.jpg!a\" alt=\"\u9ad8\u538bIGBT\u6a21\u5757\u7528\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u677f\u7684\u7814\u7a76\" width=\"577\" height=\"513\" \/><\/center>&nbsp;<\/p>\n<p>\u968f\u7740\u6211\u56fd\u6218\u7565\u6027\u65b0\u5174\u4ea7\u4e1a\u7684\u5174\u8d77\uff0c\u7535\u529b\u7535\u5b50\u6280\u672f\u5728\u98ce\u80fd\u3001\u592a\u9633\u80fd\u3001\u70ed\u6cf5\u3001\u6c34\u7535\u3001\u751f\u7269\u8d28\u80fd\u3001\u7eff\u8272\u5efa\u7b51\u3001\u65b0\u80fd\u6e90\u88c5\u5907\u3001\u7535\u52a8\u6c7d\u8f66\u3001\u8f68\u9053\u4ea4\u901a\u7b49\u5148\u8fdb\u5236\u9020\u4e1a\u7b49\u91cd\u8981\u9886\u57df\u90fd\u53d1\u6325\u7740\u91cd\u8981\u7684\u4f5c\u7528\uff0c\u800c\u8fd9\u5176\u4e2d\u7684\u8bb8\u591a\u9886\u57df\u5728\u201c\u5341\u4e09\u4e94\u201d\u89c4\u5212\u4e2d\u90fd\u5177\u5907\u4e07\u4ebf\u4ee5\u4e0a\u7684\u5e02\u573a\u89c4\u6a21\uff0c\u5176\u5fc5\u5c06\u5e26\u6765\u7535\u529b\u7535\u5b50\u6280\u672f\u53ca\u5176\u4ea7\u4e1a\u7684\u9ad8\u901f\u53d1\u5c55\uff0c\u8fce\u6765\u91cd\u5927\u7684\u53d1\u5c55\u673a\u9047\u671f\u3002\u8fd9\u4e9b\u5c06\u5bf9IGBT\u6a21\u5757\u5c01\u88c5\u7684\u5173\u952e\u6750\u6599---\u9676\u74f7\u8986\u94dc\u677f\u5f62\u6210\u4e86\u5de8\u5927\u9700\u6c42\u3002\u56e0\u6b64\uff0c\u9700\u8981\u6293\u4f4f\u673a\u9047\uff0c\u5f00\u53d1\u7cfb\u5217\u5316\u7684\u9676\u74f7\u8986\u94dc\u57fa\u677f\u4ee5\u9002\u5e94\u4e0d\u540c\u9886\u57df\u7684\u9700\u6c42\uff0c\u7279\u522b\u662f\u9700\u8981\u52a0\u5feb\u9ad8\u53ef\u9760\u6c2e\u5316\u94dd\u9676\u74f7\u8986\u94dc\u57fa\u677f\u3001\u6c2e\u5316\u7845\u9676\u74f7\u8986\u94dc\u57fa\u677f\u7684\u7814\u53d1\u53ca\u4ea7\u4e1a\u5316\u8fdb\u5ea6\uff0c\u4e3a\u6211\u56fd\u9ad8\u538bIGBT\u6a21\u5757\u7684\u56fd\u4ea7\u5316\u5960\u5b9a\u57fa\u7840\u3002<\/p>\n<p>[]\u8bb8\u542c\u777f\uff0c \u5e84\u6c49\u9510\uff0c\u674e\u6587\u5170\u7b49.AlN\u9676\u74f7\u57fa\u677f\u8986\u94dc\u6280\u672f\u7684\u7814\u7a76[J].\u65e0\u673a\u6750\u6599\u5b66\u62a5\uff0c2003,18(4):837-842<\/p>\n<p>[]J. Jarrige, T. Joyeux, J.P. Lecompte, et al. Comparison between two processes using oxygen in the Cu\/AlN bonding[J]. Journal of the European Ceramic Society, 2007(27): 855\u2013860<\/p>\n<p>[]Haggerty J S, Light foot A. Opportunities for enhancing the thermal conductivities of SiC and Si3N4 ceramics through improved processing ceram[J]. Eng. Sci. Proc. , 1995, (16) : 475-487.<\/p>\n<p>[]HirosakiN, Okamoto Y, AndoM, et al. Effect of grain growth on the thermal conductivity of silicon nitride[J]. J. Ceram. Soc. Japan, 1996,(104): 49-53.<\/p>\n<p>[]\u5f90\u9e4f\uff0c\u6768\u5efa\uff0c\u4e18\u6cf0. \u8f93\u51fa\u7a97\u6750\u6599\u7684\u7814\u7a76\u8fdb\u5c55[J].\u7845\u9178\u76d0\u901a\u62a5,2007,(26):1158-1164.<\/p>\n<p>[]Okamoto Y, HirosakiN, Ando M, et al. Effect of sintering additive composition on the thermal conductivity of silicon nitride[ J] . J. Mater. Res., 1998, (13):3473-3177.<\/p>\n<p>[]Lee SW, ChaeH B, Park D S, et al. Thermal conductivity of unidirection ally oriented Si3N4w\/Si3N4compo\u4e09\u6781\u7ba1s[J] . J. Mater. Sci., 2000, (35):4487-4493.<\/p>\n<p>[]Yang L, Li J B, Yang X Z, et al. Effect of heattreatment on properties of silicon nitride with rare earth oxide addition[ J] . Chinese Journal of RareMetals, 2004,4(28): 609-612.<\/p>\n<p>[]KitayamaM, Hirao K, ToryamaM, et al. Control of Si3N4crystalmorphology and Its mechanism (Part2):effect of lanthanide additives[J]. J.Ceram. Soc. 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