{"id":22134,"date":"2023-01-06T03:31:39","date_gmt":"2023-01-07T06:12:43","guid":{"rendered":"https:\/\/www.ab-sm.com\/?p=22134"},"modified":"2023-01-07T14:12:45","modified_gmt":"2023-01-07T06:12:45","slug":"c266159508","status":"publish","type":"post","link":"https:\/\/www.ab-sm.com\/a\/22134","title":{"rendered":"\u82f1\u7279\u5c14\u5148\u8fdb\u5c01\u88c5\u4e4b\u70ed\u538b\u952e\u5408(TCB)\u5de5\u827a\u4ecb\u7ecd"},"content":{"rendered":"
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1.\u524d\u8a00<\/strong><\/span>
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\u5982\u524d\u6587<\/a>\u6240\u8ff0\uff0c\u5c01\u88c5\u8def\u7ebf\u7684\u65b9\u5411\u4e00\u76f4\u5728\u5411\u9ad8\u6027\u80fd\u8f7b\u8584\u5316\u6f14\u8fdb\uff0c\u4e3a\u5c01\u88c5\u884c\u4e1a\u5e26\u6765\u4e86\u5168\u65b0\u7684\u6311\u6218\u548c\u673a\u9047\u3002\u82f1\u7279\u5c14\u516c\u53f8\u9009\u62e9\u4e86\u57fa\u4e8e\u57fa\u677f(Substrate)\u7684TCB(Thermal Compression Bonding \u70ed\u538b\u952e\u5408)\u5de5\u827a\u4ee5\u66ff\u4ee3\u4f20\u7edf\u7684\u56de\u6d41\u710a(Reflow)\u3002\u8be5\u8bbe\u5907\u4e3a\u82f1\u7279\u5c14\u548cASMPT\u516c\u53f8\u8054\u5408\u5f00\u53d1\uff0c\u5e76\u4e8e2014\u5e74\u5bfc\u5165\u91cf\u4ea7\uff0c\u8be5\u8bbe\u5907\u6709\u7740\u6781\u9ad8\u7684\u52a0\u5de5\u7cbe\u5ea6\u53ca\u4e30\u5bcc\u7684\u53ef\u6269\u5c55\u6027\uff0c\u4e0d\u4f46\u53ef\u7528\u4e8e\u57fa\u677f\u7ea7\u5c01\u88c5\uff0c\u8fd8\u53ef\u7528\u4e8e\u6676\u5706\u7ea7\u5c01\u88c5\uff0c\u8fd9\u5c31\u4e3a\u82f1\u7279\u5c14\u5728\u4e4b\u540e\u6570\u5e74\u63a8\u51faEMIB\uff0cFoveros\u7b49\u5148\u8fdb\u5c01\u88c5\u65b9\u5f0f\u6253\u4e0b\u4e86\u624e\u5b9e\u57fa\u7840\u3002<\/section>\n

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\"\u82f1\u7279\u5c14\u5148\u8fdb\u5c01\u88c5\u4e4b\u70ed\u538b\u952e\u5408(TCB)\u5de5\u827a\u4ecb\u7ecd\"<\/section>\n
\u56fe1. \u82f1\u7279\u5c14\u7684Co-EMIB MCP (Multi-Chip-Package)\u5c01\u88c5\u4ea7\u54c1<\/section>\n

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\"\u82f1\u7279\u5c14\u5148\u8fdb\u5c01\u88c5\u4e4b\u70ed\u538b\u952e\u5408(TCB)\u5de5\u827a\u4ecb\u7ecd\"<\/section>\n
\u56fe2 \u82f1\u7279\u5c14\u7684Foveros\u5c01\u88c5(\u82af\u7247\u5806\u53e0\u5de5\u827a)
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\u6211\u4eec\u5c06\u4f1a\u5148\u4ece\u82f1\u7279\u5c14\u4e3a\u4ec0\u4e48\u8981\u5f15\u5165TCB\uff0c\u4ece\u5b83\u524d\u4e00\u4ee3\u7684\u6280\u672f\u56de\u6d41\u710a\u9047\u5230\u4e86\u4ec0\u4e48\u6837\u7684\u6311\u6218\u5f00\u59cb\uff0c\u7136\u540e\u4ecb\u7ecdTCB\u7684\u5de5\u827a\u7ec6\u8282\uff0c\u8bbe\u5907\u7ec6\u8282\u4ee5\u53ca\u91cf\u4ea7\u5e94\u7528\u4e2d\u7684\u4f18\u5316\u3002\u6700\u540e\u518d\u8c08\u8c08\u7b14\u8005\u81ea\u5df1\u7684\u770b\u6cd5\u3002\u5728\u9605\u8bfb\u672c\u6587\u4e4b\u524d\uff0c\u6b22\u8fce\u8bc6\u522b\u4e8c\u7ef4\u7801\u7533\u8bf7\u52a0\u5165\u534a\u5bfc\u4f53\u5c01\u88c5\u4ea7\u4e1a\u94fe\u5fae\u4fe1\u7fa4<\/span><\/strong><\/section>\n

\"\u82f1\u7279\u5c14\u5148\u8fdb\u5c01\u88c5\u4e4b\u70ed\u538b\u952e\u5408(TCB)\u5de5\u827a\u4ecb\u7ecd\"<\/p>\n


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2.\u56de\u6d41\u710a\u5de5\u827a\u53ca\u5176\u6311\u6218\u56de\u987e<\/strong><\/span><\/section>\n

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\u5178\u578b\u7684\u5012\u88c5\u56de\u6d41\u710a\u5982\u56fe3\u6240\u793a\uff1a\u5c06\u82af\u7247\u4e0a\u7684BUMP\u5148\u6d78\u8638\u52a9\u710a\u5242\uff0c\u5e76\u8d34\u5728\u57fa\u677f\u4e0a\u3002\u5728\u8fdb\u5165\u56de\u6d41\u7089\u524d\uff0c\u52a9\u710a\u5242\u7684\u7c98\u6027\u53ef\u5c06\u82af\u7247\u8f6f\u6027\u56fa\u5b9a\uff0c\u4ee5\u9632\u6b62\u5176\u4f4d\u7f6e\u504f\u79fb\uff0c\u4e4b\u540e\u8fdb\u5165\u56de\u6d41\u7089\u3002\u5728\u7279\u5b9a\u7684\u5347\u6e29\u964d\u6e29(\u6e29\u5ea6\u66f2\u7ebf\u5982\u56fe4)\u4e0b\uff0c\u51f8\u70b9\u710a\u7403\u4f1a\u7194\u5316\u4e3a\u6db2\u6001\uff0c\u5728\u6da6\u6e7f\u94dc\u5fae\u67f1\u7684\u8fc7\u7a0b\u4e2d\u57fa\u4e8e\u8868\u9762\u5f20\u529b\u4f7f\u5f97\u82af\u7247\u56de\u6d41\u5bf9\u4f4d\uff0c\u6700\u540e\u5728\u964d\u6e29\u4f5c\u7528\u4e0b\u53d8\u6210\u56fa\u76f8\u8fde\u63a5\u3002<\/section>\n

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\"\u82f1\u7279\u5c14\u5148\u8fdb\u5c01\u88c5\u4e4b\u70ed\u538b\u952e\u5408(TCB)\u5de5\u827a\u4ecb\u7ecd\"<\/section>\n
\u56fe3 \u82af\u7247\u8d34\u88c5\u6d41\u7a0b Flux Film: \u52a9\u710a\u5242\u5c42\uff0cFlux Pot: \u52a9\u710a\u5242\u5bb9\u5668\uff0cFlux Dipping: \u52a9\u710a\u5242\u6d78\u8638\uff0c Position Flip chip on the substrate: \u5c06\u82af\u7247\u5012\u7f6e\u5bf9\u51c6\u57fa\u677f\u4e0a\uff0c Place Flip chip onto substrate: \u5c06\u82af\u7247\u653e\u7f6e\u4e8e\u57fa\u677f\u4e0a\uff0cReflow:\u56de\u6d41\u710a\uff0cFlip chip soldering completed: \u5b8c\u6210\u82af\u7247\u5012\u88c5\u710a<\/section>\n

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\"\u82f1\u7279\u5c14\u5148\u8fdb\u5c01\u88c5\u4e4b\u70ed\u538b\u952e\u5408(TCB)\u5de5\u827a\u4ecb\u7ecd\"<\/section>\n
\u56fe4 \u6807\u51c6\u7684\u56de\u6d41\u710a\u66f2\u7ebf<\/section>\n

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3.TCB \u5de5\u827a\u4ecb\u7ecd<\/strong><\/span><\/section>\n

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\u4f46\u662f\u7531\u4e8e\u8d85\u8584\u4ea7\u54c1\u7684\u5f15\u5165\uff0c\u56de\u6d41\u710a\u7684\u7f3a\u9677\u7387\u5c31\u5f00\u59cb\u589e\u52a0\u5982\u56fe5\u6240\u793a\uff1a\u7fd8\u8d77\uff0c\u975e\u63a5\u89e6\u6027\u65ad\u5f00\uff0c\u5c40\u90e8\u6865\u63a5\u7b49\u3002\u56de\u6d41\u710a\u7684\u53e6\u5916\u4e00\u4e2a\u4e0d\u8db3\u5728\u4e8e\uff0c\u82af\u7247\u7684\u4f4d\u7f6e\u5bb9\u6613\u53d1\u751f\u504f\u79fb\uff0c\u4e00\u662f\u6599\u76d8\/\u8f7d\u5177\u5728\u4f20\u8f93\u8fc7\u7a0b\u4e2d\u53d7\u9707\u52a8\u5f71\u54cd\uff0c\u4e8c\u662f\u56de\u6d41\u8fc7\u7a0b\u4e2d\u82af\u7247\u7684\u81ea\u7531\u504f\u79fb\u3002\u710a\u63a5\u51f8\u70b9\u95f4\u8ddd(Pitch)\u8d8a\u5c0f\uff0c\u82af\u7247\u5c3a\u5bf8\u8d8a\u5927\uff0c\u5219\u504f\u79fb\u5931\u6548\u8d8a\u4e25\u91cd\u3002<\/section>\n

<\/section>\n
\"\u82f1\u7279\u5c14\u5148\u8fdb\u5c01\u88c5\u4e4b\u70ed\u538b\u952e\u5408(TCB)\u5de5\u827a\u4ecb\u7ecd\"<\/section>\n
\u56fe5 \u56de\u6d41\u710a\u6d41\u7a0b\u4e2d\u7684\u5404\u79cd\u7f3a\u9677<\/section>\n

<\/section>\n
\u6b63\u662f\u7531\u4e8e\u4ee5\u4e0a\u56de\u6d41\u710a\u4e2d\u7684\u7f3a\u9677\u7387\u8d8a\u6765\u8d8a\u9ad8\uff0c\u82f1\u7279\u5c14\u5f15\u5165\u4e86TCB\u5de5\u827a\u3002\u5177\u4f53\u6d41\u7a0b\u4e3a\uff1a<\/section>\n

1\uff0c \u57fa\u677f(Substrate)\u5728\u6d82\u8986Flux\u540e\uff0c\u88ab\u771f\u7a7a\u5438\u9644\u56fa\u5b9a\u5728\u5b9a\u5236\u7684\u52a0\u70ed\u677f\u4e0a\u3002<\/p>\n

2\uff0c\u8d34\u7247\u5934(BondHead)\u5438\u8d77\u82af\u7247(Die)\uff0c\u82af\u7247\u5728\u771f\u7a7a\u5438\u9644\u4e0b\u5e73\u6574\u7684\u8d34\u5408\u5438\u5934(Nozzle)\u4e4b\u4e0b\u3002<\/p>\n

3\uff0c\u5149\u5b66\u76f8\u673a\u8f85\u52a9\u5b9a\u4f4d\uff0c\u57fa\u677f\u6240\u5728\u7684\u89e3\u70ed\u677f\u4f4d\u7f6e\u5fae\u79fb\uff0c\u4e0e\u82af\u7247\u5b8c\u6210\u5bf9\u4f4d\u3002<\/p>\n

4\uff0cBondHead\u5411\u4e0b\u8fd0\u52a8\uff0c\u76f4\u5230\u63a5\u89e6\u5230\u57fa\u677f\u7684\u65f6\u5019\u505c\u6b62\u3002<\/p>\n

5\uff0cBondhead\u52a0\u8f7d\u4e00\u4e2a\u538b\u5e94\u529b\uff0c\u540c\u65f6\u82af\u7247\u4f1a\u88ab\u5feb\u901f\u52a0\u70ed\u76f4\u81f3\u9521\u7403\u7194\u5316\u6e29\u5ea6\u3002<\/p>\n

6\uff0c\u5728\u9521\u7403\u7194\u5316\u7684\u4e00\u523b\uff0cBondHead\u4f1a\u5c06\u82af\u7247\u7ee7\u7eed\u5411\u4e0b\u8d70\u5fae\u5c0f\u7684\u8ddd\u79bb\uff0c\u4ee5\u786e\u4fdd\u6240\u6709\u7684\u51f8\u70b9\u80fd\u591f\u8fde\u63a5\u3002<\/p>\n

7\uff0c\u82af\u7247\u5728\u8be5\u9ad8\u5ea6\u4fdd\u6301\u6570\u79d2\uff0c\u786e\u4fdd\u9521\u7403\u5b8c\u5168\u7194\u5316\u6d78\u6da6\u82af\u7247\u548c\u57fa\u677f\u4e0a\u7684\u8fde\u63a5\u70b9\u3002<\/p>\n

8\uff0c\u4e4b\u540e\u5728\u7194\u878d\u72b6\u6001\u4e0b\uff0cBondHead\u5411\u4e0a\u63d0\u5347\u4e00\u5b9a\u7684\u9ad8\u5ea6\uff0c\u4ee5\u5f97\u5230\u9884\u671f\u7684\u710a\u63a5\u9ad8\u5ea6\u3002<\/p>\n

9\uff0c\u6700\u540e\uff0cBondHead\u5feb\u901f\u964d\u6e29\uff0c\u9521\u710a\u53d8\u4e3a\u56fa\u76f8\u3002Bondhead\u91ca\u653e\u771f\u7a7a\uff0c\u56de\u5230\u5f85\u673a\u4f4d\u7f6e\u3002<\/p>\n


<\/section>\n
\u5728\u6574\u4e2a\u8fc7\u7a0b\u4e2d\uff0cTCB\u4f1a\u5b9e\u65f6\u76d1\u6d4bBondHead\u7684\u6e29\u5ea6(Temperature)\uff0c\u5438\u5934\u7684\u5e94\u529b( Bond Force)\u548cZ\u65b9\u5411\u7684\u4f4d\u79fb (Bond Head Z Postion)\uff0c\u5176\u66f2\u7ebf\u5982\u56fe6\u6240\u793a\u3002\u6574\u4e2a\u710a\u63a5\u8fc7\u7a0b\u4e0d\u8d85\u8fc74\u79d2\u3002<\/section>\n

<\/section>\n
\"\u82f1\u7279\u5c14\u5148\u8fdb\u5c01\u88c5\u4e4b\u70ed\u538b\u952e\u5408(TCB)\u5de5\u827a\u4ecb\u7ecd\"<\/section>\n
\u56fe6 TCB \u710a\u63a5\u8fc7\u7a0b\u4e2d\u66f2\u7ebf\u56fe<\/section>\n

<\/section>\n
\u5728TCB\u710a\u63a5\u8fc7\u7a0b\u4e2d\uff0c\u9521\u7403\uff08Solder Ball\uff09\u7531\u56fa\u6001\u8f6c\u53d8\u4e3a\u6db2\u6001\u7684\u4e00\u6b65\u975e\u5e38\u5173\u952e\uff0c\u4f1a\u76f8\u5e94\u89e6\u53d1BondHead\u7531\u5e94\u529b\u63a7\u5236\u8f6c\u4e3a\u4f4d\u7f6e\u63a7\u5236\u3002\u53e6\u5916\u4e00\u4e2a\u6709\u8da3\u7684\u73b0\u8c61\u5c31\u662f\u9521\u7403\u6db2\u5316\u540e\u7684\u8868\u9762\u5f20\u529b\u7684\u5f71\u54cd\uff0c\u5728\u538b\u529b\u66f2\u7ebf\u4e0a\u4f1a\u4ea7\u751f\u8d1f\u503c\u3002\u7531\u4e8e\u8be5\u6548\u5e94\u6bd4\u8f83\u5fae\u5f31\uff0c\u5f88\u5bb9\u6613\u4e0e\u5176\u4ed6\u5931\u6548\u6df7\u6dc6\uff0c\u589e\u52a0\u4e86\u4fe1\u53f7\u8bc6\u522b\u96be\u5ea6\u3002<\/strong><\/section>\n

<\/section>\n
\u4e0b\u4e00\u7bc7\u6211\u4eec\u5c06\u4ecb\u7ecd\uff1aTCB\u70ed\u538b\u952e\u5408\u8bbe\u5907\u8be6\u7ec6\u4ecb\u7ecd\uff0c\u656c\u8bf7\u5173\u6ce8\u516c\u4f17\u53f7\u3002\u6b22\u8fce\u8bbf\u95ee\u827e\u90a6\u534a\u5bfc\u4f53\u7f51\uff1awww.ab-sm.com\u3002
<\/section>\n
<\/mp-common-profile><\/section>\n
\u4f5c\u8005\uff1a\u67e5\u7406<\/em><\/span><\/section>\n
\u672c\u6587\u4e3b\u8981\u53c2\u8003\u6587\u732e\u4e3a\uff1aThermo-compression Bonding for Fine-pitch Copper-pillar Flip-chip Interconnect \u2013 Tool Features as Enablers of Unique Technology<\/em><\/span><\/section>\n

<\/em><\/span><\/section>\n

\u5148\u8fdb\u5c01\u88c5\u8bbe\u5907\u7c7b\u4f3c\u524d\u9053\u6676\u5706\u5236\u9020\u8bbe\u5907\uff0c\u4f9b\u5e94\u5546\u53d7\u76ca\u5148\u8fdb\u5c01\u6d4b\u4ea7\u4e1a\u589e\u957f\u3002\u968f\u7740\u5148\u8fdb\u5c01\u88c5\u7684\u53d1\u5c55\uff0cBumping(\u51f8\u5757)\u3001Flip(\u5012\u88c5) \u3001TSV \u548c RDL(\u91cd\u5e03\u7ebf)\u7b49\u65b0\u7684\u8fde\u63a5\u5f62\u5f0f\u6240\u9700\u8981\u7528\u5230\u7684\u8bbe\u5907\u4e5f\u8d8a\u5148\u8fdb\u3002\u4ee5\u957f\u7403\u51f8\u70b9\u4e3a\u4f8b\uff0c\u4e3b\u8981\u7684\u5de5\u827a\u6d41\u7a0b\u4e3a\u9884\u6e05\u6d17\u3001UBM\u3001\u6dc0\u79ef\u3001\u5149\u523b\u3001\u710a\u6599 \u7535\u9540\u3001\u53bb\u80f6\u3001\u523b\u8680\u3001\u6e05\u6d17\u3001\u68c0\u6d4b\u7b49\uff0c\u56e0\u6b64\u6240\u9700\u8981\u7684\u8bbe\u5907\u5305\u62ec\u6e05\u6d17\u673a\u3001PVD \u8bbe\u5907\u3001\u5149\u523b\u673a\u3001 \u523b\u8680\u673a\u3001\u7535\u9540\u8bbe\u5907\u3001\u6e05\u6d17\u673a\u7b49\uff0c\u6750\u6599\u9700\u8981\u5305\u62ec\u5149\u523b\u80f6\u3001\u663e\u5f71\u5242\u3001\u523b\u8680\u6db2\u3001\u6e05\u6d17\u6db2\u7b49\u3002\u4e3a\u4fc3\u8fdb\u884c\u4e1a\u53d1\u5c55\uff0c\u4e92\u901a\u6709\u65e0\uff0c\u6b22\u8fce\u82af\u7247\u8bbe\u8ba1\u3001\u6676\u5706\u5236\u9020\u3001\u88c5\u5907\u3001\u6750\u6599\u7b49\u4ea7\u4e1a\u94fe\u4e0a\u4e0b\u6e38\u52a0\u5165\u827e\u90a6\u534a\u5bfc\u4f53\u5148\u8fdb\u5c01\u88c5\u4ea7\u4e1a\u94fe\u4ea4\u6d41\u7fa4\u3002<\/p>\n


<\/p>\n

\"\u82f1\u7279\u5c14\u5148\u8fdb\u5c01\u88c5\u4e4b\u70ed\u538b\u952e\u5408(TCB)\u5de5\u827a\u4ecb\u7ecd\"<\/p>\n

\u63a8\u8350\u9605\u8bfb\uff1a
<\/p>\n

\u8dd1\u6b65\u8fdb\u5165Chiplet\u65f6\u4ee3<\/a><\/p>\n

\u5148\u8fdb\u5c01\u88c5TSV\u7845\u901a\u5b54\u6280\u672f\u4ecb\u7ecd<\/a><\/p>\n

\u5148\u8fdb\u5c01\u88c5\u6742\u8c08\u2014\u20142.5D\/3D\u5148\u8fdb\u5c01\u88c5<\/a><\/p>\n

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