\u5316\u5408\u79ef\u7535\u4f9d\u6258\u5728\u91d1\u521a\u77f3\u548c\u6c2e\u5316\u94dd\u7b49\u4ea7\u54c1\u7684\u4f18\u52bf\uff0c\u4e0e\u6e05\u534e\u5927\u5b66\u3001\u5317\u4eac\u5927\u5b66\u3001\u897f\u5b89\u7535\u5b50\u79d1\u6280\u5927\u5b66\u3001\u53a6\u95e8\u5927\u5b66\u3001\u65e5\u672c\u5927\u962a\u5927\u5b66\u3001\u97e9\u56fd\u4e9a\u6d32\u5927\u5b66\u3001\u4e2d\u56fd\u79d1\u5b66\u9662\u4e0b\u5c5e\u8bf8\u591a\u7814\u7a76\u6240\u7b49\u56fd\u5185\u5916\u9ad8\u6821\u3001\u79d1\u7814\u673a\u6784\u548c\u6280\u672f\u9886\u5148\u4f01\u4e1a\u7b49\u5f00\u5c55\u4e86\u5e7f\u6cdb\u7684\u5408\u4f5c\u3002\u79d1\u7814\u56e2\u961f\u59cb\u7ec8\u7784\u51c6\u4e16\u754c\u79d1\u6280\u524d\u6cbf\uff0c\u5f15\u9886\u79d1\u6280\u53d1\u5c55\u65b9\u5411\uff0c\u4f5c\u4e3a\u884c\u4e1a\u98ce\u5411\u6807\uff0c\u8ba9\u6211\u4eec\u4e00\u8d77\u805a\u7126\u5173\u4e8e\u91d1\u521a\u77f3\u548c\u6c2e\u5316\u94dd\u7684\u6700\u65b0\u7814\u7a76\u70ed\u70b9\u3002<\/p>\n
\n<\/section>\n 1<\/strong><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n \u91d1\u521a\u77f3\u6676\u5706\u952e\u5408<\/strong><\/p>\n<\/section>\n<\/section>\n \u91d1\u521a\u77f3\u5177\u6709\u5df2\u77e5\u6750\u6599\u4e2d\u6700\u9ad8\u7684\u70ed\u5bfc\u7387\uff082000W\/m\u00b7k\uff09\uff0c\u4ee5\u91d1\u521a\u77f3\u4f5c\u4e3a\u6563\u70ed\u886c\u5e95\u4e0e\u5668\u4ef6\u76f4\u63a5\u952e\u5408\u662f\u51cf\u5c0f\u70ed\u963b\u7684\u7406\u60f3\u9009\u62e9\u3002\u952e\u5408\u6280\u672f\u662f\u901a\u8fc7\u5316\u5b66\u548c\u7269\u7406\u4f5c\u7528\u5c06\u5df2\u955c\u9762\u629b\u5149\u7684\u540c\u8d28\u6216\u5f02\u8d28\u7684\u6676\u7247\u7d27\u5bc6\u7684\u7ed3\u5408\u8d77\u6765\u3002\u76ee\u524d\uff0c\u91d1\u521a\u77f3\u6676\u5706\u952e\u5408\u7814\u7a76\u8f83\u4e3a\u591a\u89c1\u7684\u662f\u91d1\u521a\u77f3\u4e0eGaN\u3001Si\u7b49\u6750\u6599\u952e\u5408\u3002<\/p>\n \n \u76ee\u524d\u91d1\u521a\u77f3\u6676\u5706\u952e\u5408\u7684\u65b9\u6cd5\u6709\u4e09\u79cd\uff1a1.\u901a\u8fc7\u7c98\u9644\u5c42\uff1b2.\u5206\u5b50\u675f\u5916\u5ef6\u751f\u957f\u91d1\u521a\u77f3\uff1b3.\u7b49\u79bb\u5b50\u4f53\u6d3b\u5316\u4f4e\u6e29\u76f4\u63a5\u952e\u5408\u3002\u5176\u4e2d\uff0c\u7b2c3\u79cd\u65b9\u5f0f\u7684\u754c\u9762\u70ed\u963b\u548c\u5185\u5e94\u529b\u90fd\u6781\u5c0f\uff0c\u53ef\u6709\u6548\u6539\u5584\u534a\u5bfc\u4f53\u5668\u4ef6\u7684\u6563\u70ed\u6027\u80fd\uff0c\u800c\u5f15\u8d77\u4e86\u5e7f\u6cdb\u7684\u7814\u7a76\u3002<\/p>\n \n \u7814\u7a76\u8868\u660e\uff0c\u91d1\u521a\u77f3\u7684\u5e73\u6574\u5ea6\u53ca\u7c97\u7cd9\u5ea6\u5f71\u54cd\u7740\u952e\u5408\u7684\u8d28\u91cf\u3002\u5316\u5408\u79ef\u7535\u4e3a\u56fd\u5185\u5916\u591a\u4e2a\u7814\u7a76\u56e2\u961f\u63d0\u4f9b\u591a\u6676\u91d1\u521a\u77f3\u6676\u5706\uff0c\u5e76\u52a9\u529b\u6676\u5706\u952e\u5408\u53d6\u5f97\u6210\u529f\u3002\u503c\u5f97\u4e00\u63d0\u7684\u662f\uff0c\u5316\u5408\u79ef\u7535\u72ec\u521b\u7b49\u79bb\u5b50\u4f53\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u548c\u673a\u68b0\/\u5316\u5b66\u673a\u68b0\u629b\u5149\u5de5\u827a\uff0c\u7ecf\u8fc7\u7814\u78e8\u629b\u5149\u540e\u7684\u91d1\u521a\u77f3\u751f\u957f\u9762\u8868\u9762\u5e73\u6574\u5982\u955c\uff0c\u5149\u6cfd\u5ea6\u6781\u9ad8\uff0c\u8868\u9762\u7c97\u7cd9\u5ea6Ra\uff1c1nm\u3002<\/p>\n<\/section>\n \u2726<\/span>\u00a0\u00a0+<\/span><\/p>\n<\/section>\n<\/section>\n +<\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n \n 2<\/strong><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n \u91d1\u521a\u77f3\u4f5c\u4e3a\u201c\u7ec8\u6781\u70ed\u6c89\u6750\u6599\u201d<\/strong><\/p>\n<\/section>\n<\/section>\n \u5e38\u7528\u7684\u70ed\u6c89\u6750\u6599\u6709\u9676\u74f7\u6c2e\u5316\u94dd\u3001\u590d\u5408\u6750\u6599\u94bc\u94dc\u6216\u8005\u91d1\u5c5e\u94dc\u7b49\uff0c\u5176\u4e2d\u9676\u74f7\u6c2e\u5316\u94dd\u70ed\u5bfc\u7387\u4e3a170-230 W\/m\u00b7k\uff0c\u590d\u5408\u6750\u6599\u94bc\u94dc\u7684\u70ed\u5bfc\u7387\u4e3a160-270W\/m\u00b7k\uff0c\u4e24\u8005\u70ed\u5bfc\u7387\u90fd\u4f4e\uff0c\u96be\u4ee5\u5b9e\u73b0\u826f\u597d\u7684\u6563\u70ed\u6548\u679c\uff0c\u91d1\u5c5e\u94dc\u7684\u70ed\u5bfc\u7387\u4e3a400W\/m\u00b7k\uff0c\u70ed\u81a8\u80c0\u7cfb\u6570\u8f83\u5927\uff0c\u6613\u9020\u6210\u6bd4\u8f83\u4e25\u91cd\u7684\u70ed\u5931\u914d\u95ee\u9898\u3002<\/p>\n \n CVD\u91d1\u521a\u77f3\u5219\u662f\u7edd\u4f73\u7684\u70ed\u6c89\u6750\u6599\uff0c\u5728\u5ba4\u6e29\u4e0b\u91d1\u521a\u77f3\u5177\u6709\u6700\u9ad8\u7684\u70ed\u5bfc\u7387\uff0c\u662f\u94dc\u76845\u500d\uff0c\u53c8\u662f\u826f\u597d\u7684\u7edd\u7f18\u4f53\uff0c\u56e0\u800c\u662f\u5c04\u9891\u5668\u4ef6\u3001\u529f\u7387\u5668\u4ef6\u3001\u7535\u529b\u7535\u5b50\u5668\u4ef6\u3001\u5149\u7535\u5668\u4ef6\u3001\u6fc0\u5149\u5668\u7b49\u7684\u7406\u60f3\u6563\u70ed\u6750\u6599\u3002<\/p>\n \n \u4e3a\u4e86\u66f4\u597d\u6ee1\u8db3\u5ba2\u6237\u9700\u6c42\uff0c\u5316\u5408\u79ef\u7535\u4ece\u4ea7\u54c1\u5236\u9020\u5546\u8f6c\u53d8\u4e3a\u91d1\u521a\u77f3\u6563\u70ed\u65b9\u6848\u63d0\u4f9b\u5546\uff0c\u4e0d\u65ad\u4e30\u5bcc\u548c\u5b8c\u5584\u4ea7\u54c1\u7ebf\uff0c\u5c31\u91d1\u521a\u77f3\u70ed\u6c89\u65b9\u9762\uff0c\u5ef6\u4f38\u91d1\u5c5e\u5316\u670d\u52a1\uff0c\u9762\u5411\u5ba2\u6237\u63d0\u4f9b\u6e85\u5c04\u6c89\u79ef\u91d1\u5c5e\u5c42\uff0c\u4ea6\u6216\u662f\u6e85\u5c04\u6c89\u79ef\u91d1\u5c5e\u56fe\u6848\uff0c\u4ee5\u53ca\u710a\u6599\u5c42\u7b49\uff0c\u4e3a\u91d1\u521a\u77f3\u4e0e\u82af\u7247\u710a\u63a5\u7b49\u540e\u9053\u5de5\u5e8f\u63d0\u4f9b\u4fbf\u5229\u3002<\/p>\n<\/section>\n \n<\/section>\n \n<\/section>\n \n 3<\/strong><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n GaN\u5916\u5ef6\u751f\u957f\u7684\u597d\u5e2e\u624b-AIN\u7f13\u51b2\u5c42<\/strong><\/p>\n<\/section>\n<\/section>\n \u5982\u679c\u60f3\u8981\u6539\u5584GaN\u8584\u819c\u7684\u6676\u4f53\u8d28\u91cf\uff0c\u53ef\u4ee5\u9009\u62e9\u751f\u957f\u826f\u597d\u7684AIN\u8584\u819c\u4f5c\u4e3aGaN\u7684\u7f13\u51b2\u5c42\uff08AIN\u4e0eGaN\u6709\u66f4\u597d\u7684\u6676\u683c\u5339\u914d\u548c\u70ed\u5339\u914d\uff09\u3002\u901a\u8fc7\u5c06AlN\u7684\u6e85\u5c04\u548cPVD\u751f\u957f\u5e94\u7528\u4e8eLED\u7684\u5236\u9020\uff0c\u662f\u672a\u6765\u53d1\u5c55\u5f88\u6709\u6f5c\u529b\u7684\u6280\u672f\u8def\u7ebf\u4e4b\u4e00\u3002\u7ecf\u5e94\u7528\u7aef\u9a8c\u8bc1\uff0c\u5316\u5408\u79ef\u7535\u9ad8\u54c1\u8d28\u84dd\u5b9d\u77f3\u57fa\u6c2e\u5316\u94dd\uff08AlN On Sapphire\uff09\u80fd\u591f\u5927\u5e45\u63d0\u5347UVC LED\u4ea7\u54c1\u826f\u7387\u548c\u7a33\u5b9a\u6027\uff0c\u52a9\u529b\u4ea7\u54c1\u6027\u80fd\u63d0\u5347\u3002<\/p>\n \n \u5316\u5408\u79ef\u7535\u534f\u52a9\u5317\u5927\u7b49\u7814\u7a76\u56e2\u961f\uff0c\u901a\u8fc7\u5f15\u5165PVD\u539f\u4f4d\u751f\u957f\u7684AlN\u5c42\uff0c\u63d0\u9ad8\u7845\u57faGaN-HEMT\u7684MOCVD\u5916\u5ef6\u6548\u7387\u3002\u5728\u6c89\u79ef\u4f4e\u5bc6\u5ea6\u7684\u5927AlN\u6838\u540e\uff0c\u901a\u8fc7\u5ef6\u8fdf\u805a\u7ed3\u7684\u4e09\u7ef4\u751f\u957f\u6a21\u5f0f\u6dfb\u52a0GaN\uff0c\u5b9e\u73b0\u65e0\u88c2\u7eb9\u5916\u5ef6\u5c42\u5236\u5907\u3002\u7814\u7a76\u8868\u660e\uff0c\u91c7\u7528\u9ad8\u8d28\u91cf\u7684AIN\uff0c\u6709\u5229\u4e8e\u5b9e\u73b0\u9ad8\u8d28\u91cf\u3001\u65e0\u88c2\u7eb9\u7684\u539aGaN\u819c\u751f\u957f\uff0c\u540c\u65f6\u52a9\u529b\u964d\u4f4eRF\u635f\u8017\u3002<\/p>\n \n \u9664\u4e86\u84dd\u5b9d\u77f3\u57fa\u6c2e\u5316\u94dd\u548c\u7845\u57fa\u6c2e\u5316\u94dd\uff0c\u5316\u5408\u79ef\u7535\u5728GaN on Diamond \u5916\u5ef6\u751f\u957f\u4e2d\uff0c\u901a\u8fc7\u7279\u6b8a\u5de5\u827a\u751f\u957f\u6c2e\u5316\u94ddAIN\u4f5c\u4e3aGaN\u5916\u5ef6\u5c42\u751f\u957f\u7684\u7f13\u51b2\u5c42\uff0c\u5168\u7403\u9996\u521b\u91d1\u521a\u77f3\u57fa\u6c2e\u5316\u94dd\uff08AlN on Diamond\uff09\uff0c\u5728\u88ab\u6c2e\u5316\u94dd\u8584\u819c\u8986\u76d6\u7684\u91d1\u521a\u77f3\u886c\u5e95\u4e0a\uff0c\u6210\u529f\u751f\u957fAlGaN\/GaN\u5916\u5ef6\u3002<\/p>\n<\/section>\n \n 4<\/strong><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n \u6c2e\u5316\u94dd\u4f5c\u4e3a\u4f18\u79c0\u7684\u538b\u7535\u6750\u6599<\/strong><\/p>\n<\/section>\n<\/section>\n \u6c2e\u5316\u94ddAlN\u5177\u6709\u7684\u4f18\u826f\u7684\u538b\u7535\u6027\u80fd\u3001\u9ad8\u7684\u8868\u9762\u58f0\u6ce2\u4f20\u64ad\u901f\u5ea6\uff08c\u8f74\u65b9\u5411\u7406\u8bba\u4e0a\u53ef\u8fbe6000m\/s\uff09\u548c\u8f83\u9ad8\u7684\u673a\u7535\u8026\u5408\u7cfb\u6570\uff0c\u662fGHz\u7ea7\u58f0\u8868\u9762\u6ce2\u5668\u4ef6\u7684\u4f18\u9009\u538b\u7535\u6750\u6599\u3002<\/p>\n \n \u5316\u5408\u79ef\u7535\u534f\u540c\u8c10\u632f\u5668\u3001\u6ee4\u6ce2\u5668\u3001\u4f20\u611f\u5668\u7b49\u7814\u7a76\u65b9\u5411\u7684\u884c\u4e1a\u9886\u5148\u79d1\u7814\u56e2\u961f\uff0c\u63d0\u4f9b\u9ad8\u8d28\u91cf\u6c2e\u5316\u94dd\u538b\u7535\u6750\u6599\u3002\u5728\u53d1\u6325\u6c2e\u5316\u94dd\u8584\u819c\u4f18\u826f\u7684\u538b\u7535\u6027\u80fd\u7684\u540c\u65f6\uff0c\u5b8c\u7f8e\u517c\u5bb9\u5176\u4ed6\u534a\u5bfc\u4f53\u6750\u6599\u3002<\/p>\n \n<\/section>\n \u5316\u5408\u79ef\u7535\u59cb\u7ec8\u7ad9\u5728\u79d1\u6280\u6700\u524d\u6cbf\uff0c\u7d27\u968f\u56fd\u5185\u5916\u5bbd\u7981\u5e26\u534a\u5bfc\u4f53\u7684\u6280\u672f\u53d1\u5c55\u65b9\u5411\uff0c\u4fdd\u6301\u79d1\u7814\u7684\u524d\u77bb\u6027\u3001\u5148\u8fdb\u6027\u548c\u5b9e\u7528\u6027\uff0c\u4e0e\u4e16\u754c\u9886\u5148\u7684\u79d1\u7814\u56e2\u961f\u4fdd\u6301\u534f\u540c\uff0c\u4ea7\u5b66\u7814\u7528\u878d\u5408\uff0c\u628a\u521b\u65b0\u6210\u679c\u8f6c\u5316\u4e3a\u73b0\u5b9e\u751f\u4ea7\u529b\uff0c\u5927\u529b\u63a8\u52a8\u4e2d\u56fd\u91d1\u521a\u77f3\u548c\u6c2e\u5316\u94dd\u5bbd\u7981\u5e26\u534a\u5bfc\u4f53\u6750\u6599\u7684\u4ea7\u4e1a\u5316\u548c\u89c4\u6a21\u5316\u53d1\u5c55\u3002<\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n